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    • 1. 发明授权
    • Insulated gate field effect transistor with source field shield
extending over multiple region channel
    • 绝缘栅场效应晶体管,源场屏蔽延伸到多个区域通道
    • US4172260A
    • 1979-10-23
    • US853548
    • 1977-11-21
    • Takeaki OkabeIsao YoshidaShikayuki OchiHidefumi ItohMasatomo FurumiToru ToyabeMineo KatsuedaYukio Shirota
    • Takeaki OkabeIsao YoshidaShikayuki OchiHidefumi ItohMasatomo FurumiToru ToyabeMineo KatsuedaYukio Shirota
    • H01L21/331H01L29/06H01L29/40H01L29/41H01L29/73H01L29/78
    • H01L29/404H01L29/7835
    • In an insulated gate field effect transistor having a source region and a drain region of the P-conductivity type which are disposed in surface portions of a semiconductor substrate of the N-conductivity type in a manner to be spaced apart from each other, a gate electrode being disposed through an insulating film on the substrate between the source region and the drain region, an insulated gate field effect transistor wherein said drain region is disposed apart from said gate electrode, two regions of an intermediate region and a high resistance region which are of the P-conductivity type and which successively extend from said drain region towards the side of said gate electrode are disposed in surface portions of the substrate situated between said drain region and said gate electrode, said intermediate region having an impurity concentration lower than that of said drain region, said high resistance region having an impurity concentration lower than that of said intermediate region, and a source electrode extends over and beyond said gate electrode and said high resistance region through said insulating film and terminates over said intermediate region.
    • 在绝缘栅场效应晶体管中,具有P导电类型的源区和漏区,它们以相互间隔开的方式设置在N-导电类型的半导体衬底的表面部分中,栅极 电极通过源极区域和漏极区域之间的衬底上的绝缘膜设置,绝缘栅极场效应晶体管,其中所述漏极区域与所述栅电极隔开,中间区域和高电阻区域的两个区域是 的P导电类型并且从所述漏极区域朝向所述栅电极的侧面依次延伸设置在位于所述漏极区域和所述栅电极之间的衬底的表面部分中,所述中间区域的杂质浓度低于 所述漏极区,所述高电阻区的杂质浓度低于所述中间区的杂质浓度 并且源电极通过所述绝缘膜延伸超过所述栅电极和所述高电阻区域,并且终止于所述中间区域上。
    • 3. 发明申请
    • ORGANIC THIN FILM TRANSISTOR AND SEMICONDUCTOR INTEGRATED CIRCUIT
    • 有机薄膜晶体管和半导体集成电路
    • US20120025196A1
    • 2012-02-02
    • US13263122
    • 2010-01-18
    • Yasuo WadaToru ToyabeKen Tsutsui
    • Yasuo WadaToru ToyabeKen Tsutsui
    • H01L51/10
    • H01L51/002H01L51/0541H01L51/0545H01L51/105
    • An organic thin film transistor includes an organic semiconductor layer, a source electrode and a drain electrode which are separated from each other and are individually in contact with the organic semiconductor layer, a gate insulating film which is in contact with the organic semiconductor layer between the source and drain electrodes, and a gate electrode which is opposed to the organic semiconductor layer and is in contact with the gate insulating film. In the organic thin film transistor, a high-concentration region of the organic semiconductor layer which is located near the source electrode has an impurity concentration set higher than an impurity concentration of a low-concentration region of the organic semiconductor layer, the low-concentration region being located near the gate electrode in the thickness direction of the organic semiconductor layer between the source and drain electrodes.
    • 有机薄膜晶体管包括彼此分离并分别与有机半导体层接触的有机半导体层,源电极和漏电极,在有机半导体层之间与有机半导体层接触的栅极绝缘膜 源极和漏极以及与有机半导体层相对并与栅极绝缘膜接触的栅电极。 在有机薄膜晶体管中,位于源电极附近的有机半导体层的高浓度区域的杂质浓度设定为高于有机半导体层的低浓度区域的杂质浓度,低浓度 区域位于源极和漏极之间的有机半导体层的厚度方向上的栅电极附近。
    • 7. 发明授权
    • Grooved gate transistor having source and drain diffused layers with
specified groove corner shape
    • 沟槽栅极晶体管,具有指定槽角形状的源极和漏极扩散层
    • US5408116A
    • 1995-04-18
    • US105330
    • 1993-08-09
    • Junko TanakaToru ToyabeShin'ichiro KimuraHiromasa NodaSigeo IharaKiyoo ItohYasushi Gotoh
    • Junko TanakaToru ToyabeShin'ichiro KimuraHiromasa NodaSigeo IharaKiyoo ItohYasushi Gotoh
    • H01L29/78B82B1/00H01L27/108H01L29/06H01L29/12H01L29/423
    • H01L29/125B82Y10/00H01L27/10808H01L29/78
    • A finely structured grooved gate transistor of which the threshold voltage does not decrease in spite of the small size and of which the threshold voltage of the transistor can be adjusted by shape. The shape of a groove corner of the transistor as a semiconductor device is contained in a concentric circle having a radius of curvature r.+-.L/5 (L: channel length) and the radius of curvature r, i.e., the geometric parameter has a relationship with the doping concentration as shown in FIG. 1B. Alternatively, the average (a+b)/2 (geometric parameter) of the sum of the two sides opposite the right angle of a right triangle formed of a straight line in contact with the gate bottom in parallel to the substrate surface of a grooved gate transistor, a perpendicular line to the substrate bottom surface from the source and drain ends at a portion formed with a channel and a straight line in contact with the groove corner has a relationship with the doping concentration as shown in FIG. 1B. The threshold voltage is not reduced even when the channel length is decreased by adjusting the groove shape and the doping concentration.
    • 尽管尺寸小,但是其晶体管的阈值电压可以通过形状来调整,其中阈值电压不降低的精细结构的开槽栅极晶体管。 作为半导体器件的晶体管的槽角的形状包含在具有曲率半径r +/- L / 5(L:沟道长度)和曲率半径r的同心圆中,即几何参数具有 与掺杂浓度的关系如图1所示。 1B。 或者,平行于沟槽的基板表面的与栅极底部接触的直线形成的直角三角形的直角相反的两侧的平均(a + b)/ 2(几何参数) 栅极晶体管,在形成有沟道的部分处的源极和漏极端部处的与衬底底表面的垂直线和与沟槽角接触的直线与图1所示的掺杂浓度具有关系。 1B。 即使通过调整沟槽形状和掺杂浓度来减小沟道长度,阈值电压也不会降低。