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    • 8. 发明授权
    • Low temperature reflow dielectric-fluorinated BPSG
    • 低温回流电介质氟化BPSG
    • US6057250A
    • 2000-05-02
    • US14431
    • 1998-01-27
    • Markus KirchhoffAshima ChakravartiMatthias IlgKevin A. McKinleySon V. NguyenMichael J. Shapiro
    • Markus KirchhoffAshima ChakravartiMatthias IlgKevin A. McKinleySon V. NguyenMichael J. Shapiro
    • H01L21/31C23C16/40H01L21/316H01L21/225H01L21/469
    • H01L21/02271C23C16/401H01L21/02131H01L21/02211H01L21/31625H01L21/31629
    • An apparatus and method are provided for forming a fluorine doped borophosphosilicate (F-BPSG) glass on a semiconductor device using a low pressure chemical vapor deposition process. The F-BPSG glass exhibits a substantially void-free and particle-free layer on the substrate for structures having gaps as narrow as 0.10 microns and with aspect ratios of 6:1. The reactant gases include sources of boron and phosphorous dopants, oxygen and a mixture of TEOS and FTES. Using a mixture of TEOS and FTES in a low pressure CVD process provides a F-BPSG layer having the above enhanced characteristics. It is a preferred method of the invention to perform the deposition at a temperature of about 750-850.degree. C. and a pressure of 1 to 3 torr to provide for in situ reflow of the F-BPSG during the deposition process. An anneal is also preferred under similar conditions in the same chemical vapor deposition chamber to further planarize the F-BPSG surface. A F-BPSG glass and semiconductor wafers having a layer of fluorine doped BPSG thereon formed by the method and apparatus of the invention are also provided.
    • 提供了一种用于在半导体器件上使用低压化学气相沉积工艺形成氟掺杂硼磷硅酸(F-BPSG)玻璃的装置和方法。 F-BPSG玻璃在基板上表现出基本上无空隙和无颗粒的层,其结构具有窄至0.10微米的间隙,纵横比为6:1。 反应物气体包括硼和磷掺杂剂的源,氧和TEOS和FTES的混合物。 在低压CVD工艺中使用TEOS和FTES的混合物提供具有上述增强特性的F-BPSG层。 本发明的优选方法是在约750-850℃的温度和1至3托的压力下进行沉积,以在沉积过程中提供F-BPSG的原位回流。 在相同的化学气相沉积室中的相似条件下还优选退火以进一步平坦化F-BPSG表面。 还提供了通过本发明的方法和装置形成的具有氟掺杂BPSG层的F-BPSG玻璃和半导体晶片。
    • 9. 发明授权
    • Angle defined trench conductor for a semiconductor device
    • 用于半导体器件的角度定义的沟槽导体
    • US5610441A
    • 1997-03-11
    • US444465
    • 1995-05-19
    • Daniel A. CarlDonald M. KenneyWalter E. MlynkoSon V. Nguyen
    • Daniel A. CarlDonald M. KenneyWalter E. MlynkoSon V. Nguyen
    • H01L21/302H01L21/3065H01L21/763H01L21/8242H01L27/108H01L23/18H01L23/52
    • H01L27/10861H01L21/763Y10S148/05
    • Polysilicon in a trench is etched at an angle to produce a conductor within the trench that has shape characteristics which approximate the shadow of the side wall of the trench closest the beam source. Specifically, when the first side wall is closest to the beam source and the second side wall is furthest from the beam source, the polysilicon on the first side wall is almost as high as the first side wall, while the polysilicon on the more exposed side wall is considerably lower than the first side wall and approximates the shadow of the first side wall on the second side wall relative to the beam. The polysilicon in the trench may be in the shape of a solid angled block approximating the shadow line from the top of side wall to the shadow line on side wall however, it is preferred that the polysilicon take the form of a conformal layer in trench prior to etching such that the polysilicon ultimately has an angled "U" shape which approximates the shadow line. Contact is made to the polysilicon using strap that electrically connects the side wall with the polysilicon. Strap is sized such that it does not extend to the opposite side wall of trench, thereby avoiding short circuits. Having the polysilicon approximate the shadow line of the etch permits narrowing the distance between adjacent straps and in an array without the risk of creating a short.
    • 在沟槽中蚀刻多晶硅以在沟槽内产生导体,该导体具有接近最接近光束源的沟槽侧壁阴影的形状特征。 具体地,当第一侧壁最靠近光束源并且第二侧壁距离光束源最远时,第一侧壁上的多晶硅几乎与第一侧壁一样高,而在较大曝光侧的多晶硅 壁比第一侧壁大得多,并且近似于相对于梁的第二侧壁上的第一侧壁的阴影。 沟槽中的多晶硅可以是接近从侧壁顶部到侧壁上的阴影线的阴影线的实心角形块的形状,然而,优选地,多晶硅在沟槽中具有保形层的形式 以蚀刻,使得多晶硅最终具有近似于阴影线的成角度“U”形。 使用将侧壁与多晶硅电连接的带子与多晶硅接触。 带的尺寸使得其不延伸到沟槽的相对侧壁,从而避免短路。 使多晶硅近似于蚀刻的阴影线允许在相邻带之间和阵列之间的距离变窄,而不会产生短路。