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1. 发明授权

US08816303B2 Method of processing of an object 有权
标题翻译：处理对象的方法
公开(公告)号：US08816303B2
公开(公告)日：2014-08-26
申请号：US13164122
申请日：2011-06-20
申请人： Josef Biberger , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
发明人： Josef Biberger , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
IPC分类号： H01J37/30 , H01J37/305 , H01J37/317 , H01J37/304
CPC分类号： H01J37/3056 , G01B15/04 , H01J37/30 , H01J37/3005 , H01J37/3007 , H01J37/304 , H01J37/3174 , H01J2237/2611 , H01J2237/30455 , H01J2237/30494 , H01J2237/31722 , H01J2237/31749
摘要： A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
摘要翻译：一种处理物体的方法包括：扫描物体表面上的粒子束，并检测由于扫描而从物体出射的电子; 基于检测到的电子，确定物体表面与物体表面上的多个位置中的每一个的预定表面之间的高度差; 基于所确定的高度差来确定所述物体表面上的所述多个位置中的每一个的处理强度; 并且基于所确定的处理强度将粒子束引导到多个位置，以便从多个位置处去除材料或在物体上沉积材料。

2. 发明申请

US20120145895A1 Method of Processing of an Object 有权
标题翻译：对象的处理方法
公开(公告)号：US20120145895A1
公开(公告)日：2012-06-14
申请号：US13164122
申请日：2011-06-20
申请人： Josef BIBERGER , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
发明人： Josef BIBERGER , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
IPC分类号： H01J37/28 , H01J37/30
CPC分类号： H01J37/3056 , G01B15/04 , H01J37/30 , H01J37/3005 , H01J37/3007 , H01J37/304 , H01J37/3174 , H01J2237/2611 , H01J2237/30455 , H01J2237/30494 , H01J2237/31722 , H01J2237/31749
摘要： A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
摘要翻译：一种处理物体的方法包括：扫描物体表面上的粒子束，并检测由于扫描而从物体出射的电子; 基于检测到的电子，确定物体表面与物体表面上的多个位置中的每一个的预定表面之间的高度差; 基于所确定的高度差来确定所述物体表面上的所述多个位置中的每一个的处理强度; 并且基于所确定的处理强度将粒子束引导到多个位置，以便从多个位置处去除材料或在物体上沉积材料。

3. 发明授权

US08063364B2 Particle optical device with magnet assembly 有权
标题翻译：带磁体组件的粒子光学装置
公开(公告)号：US08063364B2
公开(公告)日：2011-11-22
申请号：US12644760
申请日：2009-12-22
申请人： Dirk Preikszas , Michael Steigerwald , Daniel Tobias , Andreas Eisele , Momme Mommsen , Dietmar Doenitz , Christian Hendrich
发明人： Dirk Preikszas , Michael Steigerwald , Daniel Tobias , Andreas Eisele , Momme Mommsen , Dietmar Doenitz , Christian Hendrich
IPC分类号： H01J49/42 , H01J1/50 , G01N23/22
CPC分类号： H01J37/05 , H01J37/147 , H01J37/1475 , H01J2237/1523 , H01J2237/26
摘要： A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in operation passes through the pole plates, wherein trenches are provided in the pole plates, in which trenches coil wires are arranged. The trenches, when viewed in a cross section transverse to an extension direction of the trenches, have a smaller width in a region of a surface of the pole plates, than in a region arranged at a distance from the surface.
摘要翻译：粒子光学装置具有用于产生至少一个带电粒子束的粒子源和具有两个彼此间隔开的两个极板的磁体布置，使得运行中的至少一个带电粒子束通过极板，其中沟槽设置在极板中，沟槽线圈布置在其中。当在与沟槽的延伸方向横切的横截面中观察时，沟槽在极板的表面的区域中的宽度比在距表面一定距离的区域中具有较小的宽度。

4. 发明申请

US20050006582A1 Electron microscopy system, electron microscopy method and focusing system for charged particles 有权
公开(公告)号：US20050006582A1
公开(公告)日：2005-01-13
申请号：US10825240
申请日：2004-04-16
申请人： Michael Steigerwald , Erik Essers
发明人： Michael Steigerwald , Erik Essers
IPC分类号： G01Q30/02 , H01J37/05 , H01J37/12 , H01J37/153 , H01J37/28 , G01N23/00
CPC分类号： H01J37/28 , H01J37/05 , H01J37/12 , H01J37/153
摘要： An electron microscopy system and an electron microscopy method for detection of time dependencies of secondary electrons generated by primary electrons is provided, in which the primary electron pulses are directed onto a sample surface and electrons emanating from the sample surface are detected, time resolved. To this end the system comprises in particular a cavity resonator. A cavity resonator can also be used to reduce aberrations of focusing lenses.

5. 发明授权

US08283641B2 Positioning device for a particle beam apparatus 有权
标题翻译：粒子束装置的定位装置
公开(公告)号：US08283641B2
公开(公告)日：2012-10-09
申请号：US12454268
申请日：2009-05-14
申请人： Dietmar Dönitz , Dirk Preixszas , Michael Steigerwald
发明人： Dietmar Dönitz , Dirk Preixszas , Michael Steigerwald
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , B08B7/0035 , B08B7/0042 , H01J2237/022 , H01J2237/2482 , H01J2237/2817
摘要： A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device includes a positionable holder for holding the object. A light source generates a light beam which is guided in the direction of the positionable holder. A detector detects the light beam. An injection area injects particles of a particle beam such that they are guided in the direction of the positionable holder. The light beam passes the injection area. The injection area has an output side for the light beam and the particle beam, which is directed toward the holder. The detector includes a detector element situated in an area between the output side and the holder. The light source includes a light source element situated in an area which extends away from the holder, starting from the output side.
摘要翻译：包括定位装置的定位装置和粒子束装置确保用于在任何工作距离处保持物体的保持器的可靠定位。定位装置包括用于保持物体的可定位保持器。光源产生沿可定位的保持器的方向被引导的光束。检测器检测光束。注射区域注入粒子束的颗粒，使得它们在可定位保持器的方向上被引导。光束通过注射区域。注射区域具有用于光束的输出侧和朝向保持器的粒子束。检测器包括位于输出侧和保持器之间的区域中的检测器元件。光源包括从输出侧开始位于远离保持器延伸的区域中的光源元件。

6. 发明授权

US07518122B2 Ion sources, systems and methods 有权
标题翻译：离子源，系统和方法
公开(公告)号：US07518122B2
公开(公告)日：2009-04-14
申请号：US11600646
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
IPC分类号： H01J49/10 , H01J27/26 , H01J27/02
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
摘要翻译：公开了离子源，系统和方法。

7. 发明申请

US20070187621A1 Ion sources, systems and methods 有权
公开(公告)号：US20070187621A1
公开(公告)日：2007-08-16
申请号：US11600646
申请日：2006-11-15
申请人： Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
发明人： Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.

8. 发明授权

US06828565B2 Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source 有权
标题翻译：电子束源，使用这种光束源的电子光学装置和操作电子束源的方法。
公开(公告)号：US06828565B2
公开(公告)日：2004-12-07
申请号：US10670556
申请日：2003-09-26
申请人： Michael Steigerwald
发明人： Michael Steigerwald
IPC分类号： H01J2700
CPC分类号： H01J37/075 , H01J37/073 , H01J37/243 , H01J2237/06316 , H01J2237/065
摘要： An electron beam source comprises a source surface illuminated with a photon beam of adjustable intensity. The photon beam assists emission of electrons from the source surface due to a photo effect. An electric extraction field further assists in electron emission. Further, a heater is provided for further assisting in electron emission by a thermionic effect. An electron beam current is measured, and the intensity of the photon beam is adjusted based on the measured electron beam current.
摘要翻译：电子束源包括用可调强度的光子束照射的源表面。由于光照效应，光子束有助于来自源表面的电子的发射。电提取场进一步有助于电子发射。此外，提供加热器以进一步辅助电子发射通过热离子效应。测量电子束电流，并且基于测量的电子束电流来调整光子束的强度。

9. 发明申请

US20070120071A1 Electron-beam device and detector system 有权
标题翻译：电子束装置和检测器系统
公开(公告)号：US20070120071A1
公开(公告)日：2007-05-31
申请号：US11594691
申请日：2006-11-08
申请人： Michael Steigerwald , Dirk Preikszas , Volker Drexel
发明人： Michael Steigerwald , Dirk Preikszas , Volker Drexel
IPC分类号： G21G5/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/0458 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
摘要： An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.
摘要翻译：一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。此外，描述了用于检测电子的检测器系统。利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。同时，使用检测器系统可以检测尽可能多的电子。为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。

10. 发明授权

US06855938B2 Objective lens for an electron microscopy system and electron microscopy system 有权
标题翻译：用于电子显微镜系统和电子显微镜系统的物镜
公开(公告)号：US06855938B2
公开(公告)日：2005-02-15
申请号：US10619475
申请日：2003-07-16
申请人： Dirk Preikszas , Michael Steigerwald , Peter Hoffrogge , Peter Gnauck
发明人： Dirk Preikszas , Michael Steigerwald , Peter Hoffrogge , Peter Gnauck
IPC分类号： H01J37/141 , H01J37/145 , H01J37/28 , H01J37/317
CPC分类号： H01J37/145 , H01J2237/2817 , H01J2237/31745 , H01J2237/31749
摘要： An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.
摘要翻译：提供了一种用于电子显微镜系统的具有磁性和静电聚焦的物镜，其至少部分为圆锥形的外部形状允许相对于电子束以大角度范围定向要成像的物体，所述物镜同时展现，光学参数好。这可以通过镜头元件的特定几何形状来实现。此外，提出了一种用于同时成像和处理物体的检查，除了具有上述物镜的电子显微镜系统之外，还包括离子束处理系统和物体支撑。

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