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1. 发明申请

US20120145895A1 Method of Processing of an Object 有权
标题翻译：对象的处理方法
公开(公告)号：US20120145895A1
公开(公告)日：2012-06-14
申请号：US13164122
申请日：2011-06-20
申请人： Josef BIBERGER , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
发明人： Josef BIBERGER , Ralph Pulwey , Jaroslaw Paluszynski , Dietmar Doenitz , Hans Mathèe , Michael Steigerwald
IPC分类号： H01J37/28 , H01J37/30
CPC分类号： H01J37/3056 , G01B15/04 , H01J37/30 , H01J37/3005 , H01J37/3007 , H01J37/304 , H01J37/3174 , H01J2237/2611 , H01J2237/30455 , H01J2237/30494 , H01J2237/31722 , H01J2237/31749
摘要： A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
摘要翻译：一种处理物体的方法包括：扫描物体表面上的粒子束，并检测由于扫描而从物体出射的电子; 基于检测到的电子，确定物体表面与物体表面上的多个位置中的每一个的预定表面之间的高度差; 基于所确定的高度差来确定所述物体表面上的所述多个位置中的每一个的处理强度; 并且基于所确定的处理强度将粒子束引导到多个位置，以便从多个位置处去除材料或在物体上沉积材料。

2. 发明申请

US20120074320A1 PARTICLE BEAM DEVICE HAVING A SAMPLE HOLDER 有权
标题翻译：具有样品座的颗粒束装置
公开(公告)号：US20120074320A1
公开(公告)日：2012-03-29
申请号：US13239535
申请日：2011-09-22
申请人： Josef BIBERGER , Ralph Pulwey
发明人： Josef BIBERGER , Ralph Pulwey
IPC分类号： H01J37/26 , H01J37/20
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/201 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20285 , H01J2237/20292
摘要： A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.
摘要翻译：公开了一种具有样品保持器的粒子束装置和样品容器装置。样品保持器沿着至少第一轴线和至少第二轴线以可移动的方式布置。此外，样品保持器围绕第一旋转轴线和约第二旋转轴线可旋转地布置。第一样品保持装置以关于第三旋转轴线的可旋转方式相对于样品保持器布置，其中第三旋转轴线和第二旋转轴线至少部分地相对于彼此横向偏移地布置。此外，提供一种控制装置，其中第一样品保持装置可以使用控制装置绕第三旋转轴线旋转到分析位置和/或处理位置。

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