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1. 发明授权

US08901510B2 Particle beam device having a detector arrangement 有权
标题翻译：具有检测器装置的粒子束装置
公开(公告)号：US08901510B2
公开(公告)日：2014-12-02
申请号：US13430913
申请日：2012-03-27
申请人： Dietmar Dönitz , Christian Wagner
发明人： Dietmar Dönitz , Christian Wagner
IPC分类号： G21K1/08 , H01J37/28
CPC分类号： H01J37/28
摘要： A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an object. A second column with a second beam axis is provided, the second column having a second particle beam generator and a second objective lens for focusing the second particle beam on the object. A detector, having a detection axis, detects interacting particles and/or radiation. The first beam axis and the second beam axis define a first angle, different from 0° and from 180°. The first and second beam axes are situated in a first plane. The detection axis of the detector and the first beam axis are situated in a second plane. The first plane and the second plane define a second angle having an absolute value in the range of 65° to 80°.
摘要翻译：粒子束装置具有具有第一光束轴的第一列，第一列具有第一粒子束发生器和用于将第一粒子束聚焦在物体上的第一物镜。提供具有第二光束轴的第二列，第二列具有第二粒子束发生器和用于将第二粒子束聚焦在物体上的第二物镜。具有检测轴的检测器检测相互作用的颗粒和/或辐射。第一光束轴线和第二光束轴线限定不同于0°和180°的第一角度。第一和第二光束轴位于第一平面中。检测器和第一光束轴的检测轴位于第二平面中。第一平面和第二平面限定了绝对值在65°至80°范围内的第二角度。

2. 发明授权

US08283641B2 Positioning device for a particle beam apparatus 有权
标题翻译：粒子束装置的定位装置
公开(公告)号：US08283641B2
公开(公告)日：2012-10-09
申请号：US12454268
申请日：2009-05-14
申请人： Dietmar Dönitz , Dirk Preixszas , Michael Steigerwald
发明人： Dietmar Dönitz , Dirk Preixszas , Michael Steigerwald
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , B08B7/0035 , B08B7/0042 , H01J2237/022 , H01J2237/2482 , H01J2237/2817
摘要： A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device includes a positionable holder for holding the object. A light source generates a light beam which is guided in the direction of the positionable holder. A detector detects the light beam. An injection area injects particles of a particle beam such that they are guided in the direction of the positionable holder. The light beam passes the injection area. The injection area has an output side for the light beam and the particle beam, which is directed toward the holder. The detector includes a detector element situated in an area between the output side and the holder. The light source includes a light source element situated in an area which extends away from the holder, starting from the output side.
摘要翻译：包括定位装置的定位装置和粒子束装置确保用于在任何工作距离处保持物体的保持器的可靠定位。定位装置包括用于保持物体的可定位保持器。光源产生沿可定位的保持器的方向被引导的光束。检测器检测光束。注射区域注入粒子束的颗粒，使得它们在可定位保持器的方向上被引导。光束通过注射区域。注射区域具有用于光束的输出侧和朝向保持器的粒子束。检测器包括位于输出侧和保持器之间的区域中的检测器元件。光源包括从输出侧开始位于远离保持器延伸的区域中的光源元件。

3. 发明申请

US20120286159A1 PARTICLE BEAM DEVICE HAVING A DETECTOR ARRANGEMENT 有权
标题翻译：具有检测器装置的颗粒光束装置
公开(公告)号：US20120286159A1
公开(公告)日：2012-11-15
申请号：US13430913
申请日：2012-03-27
申请人： Dietmar DÖNITZ , Christian WAGNER
发明人： Dietmar DÖNITZ , Christian WAGNER
IPC分类号： H01J37/26
CPC分类号： H01J37/28
摘要： A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an object. A second column with a second beam axis is provided, the second column having a second particle beam generator and a second objective lens for focusing the second particle beam on the object. A detector, having a detection axis, detects interacting particles and/or radiation. The first beam axis and the second beam axis define a first angle, different from 0° and from 180°. The first and second beam axes are situated in a first plane. The detection axis of the detector and the first beam axis are situated in a second plane. The first plane and the second plane define a second angle having an absolute value in the range of 65° to 80°.
摘要翻译：粒子束装置具有具有第一光束轴的第一列，第一列具有第一粒子束发生器和用于将第一粒子束聚焦在物体上的第一物镜。提供具有第二光束轴的第二列，第二列具有第二粒子束发生器和用于将第二粒子束聚焦在物体上的第二物镜。具有检测轴的检测器检测相互作用的颗粒和/或辐射。第一光束轴线和第二光束轴线限定不同于0°和180°的第一角度。第一和第二光束轴位于第一平面中。检测器和第一光束轴的检测轴位于第二平面中。第一平面和第二平面限定了绝对值在65°至80°范围内的第二角度。

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