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1. 发明授权

US08610520B2 Electrostatically actuated micro-mechanical switching device 有权
标题翻译：静电致动微机械开关装置
公开(公告)号：US08610520B2
公开(公告)日：2013-12-17
申请号：US13155002
申请日：2011-06-07
申请人： Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
发明人： Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
IPC分类号： H01H51/22 , H01P1/10
CPC分类号： H01H59/0009 , H01H1/20 , H01H2001/0078 , H01P1/127
摘要： An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.
摘要翻译：一种静电致动的微机械开关装置，其具有形成在基板的主体中的可移动元件，用于通过可移动元件在基板的平面中的水平移动来闭合和释放至少一个欧姆接触。开关装置具有带有固定驱动电极和可动电极的梳状电极的驱动器。可移动推杆与可动电极机械连接，延伸穿过电极，在一侧具有可动接触元件，以及至少一个复位弹簧。信号线有两个部分被间隙中断。微机械开关器件处于分流配置，具有低损耗，在宽频率范围内的高隔离度，低致动电压下的低开关时间和足够的可靠性。信号线的线路阻抗及其变化尽可能小。开关器件处于分流配置，用于闭合和释放接地线与信号线之间的欧姆接触。接触元件具有至少部分地与信号线相对延伸并且分别电信号和机械地连接到信号线的两个部分的可动接触梁。接地线形成有接触杆，其通过信号线的间隙，以形成接触梁和接地线之间的欧姆接触。接触金属化至少在信号线和接地线的接触梁的顶部和侧壁上提供。

2. 发明授权

US08186225B2 MEMS vacuum sensor based on the friction principle 失效
标题翻译：基于摩擦原理的MEMS真空传感器
公开(公告)号：US08186225B2
公开(公告)日：2012-05-29
申请号：US12301874
申请日：2007-05-09
申请人： Steffen Kurth , Dirk Tenholte , Karla Hiller , Christian Kaufmann , Thomas Gessner , Wolfram Doetzel
发明人： Steffen Kurth , Dirk Tenholte , Karla Hiller , Christian Kaufmann , Thomas Gessner , Wolfram Doetzel
IPC分类号： G01L11/00
CPC分类号： G01L21/22
摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
摘要翻译：本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5））和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过质量元件（1）。至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼质量元件（1）。传感器元件特别用于测量真空范围内的压力的压力传感器。通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。要确定的最低压力在10-6毫巴的范围内。

3. 发明申请

US20100024562A1 MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE 失效
标题翻译：基于摩擦原理的MEMS真空传感器
公开(公告)号：US20100024562A1
公开(公告)日：2010-02-04
申请号：US12301874
申请日：2007-05-09
申请人： Steffen Kurth , Dirk Tenholte , Karla Hiller , Christian Kaufmann , Thomas Gessner , Wolfram Doetzel
发明人： Steffen Kurth , Dirk Tenholte , Karla Hiller , Christian Kaufmann , Thomas Gessner , Wolfram Doetzel
IPC分类号： G01L21/22
CPC分类号： G01L21/22
摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
摘要翻译：本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5））和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过质量元件（1）。至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼质量元件（1）。传感器元件特别用于测量真空范围内的压力的压力传感器。通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。要确定的最低压力在10-6毫巴的范围内。

4. 发明授权

US08299630B2 Microstructure with reactive bonding 有权
标题翻译：具有反应性键合的微结构
公开(公告)号：US08299630B2
公开(公告)日：2012-10-30
申请号：US13146759
申请日：2010-01-26
申请人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
发明人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
IPC分类号： H01L23/48 , H01L29/40 , H01L21/44 , H01L21/48
CPC分类号： B81C3/001 , B81C2203/019 , B81C2203/032
摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.
摘要翻译：微结构具有至少一个键合衬底和反应性多层体系。反应性多层体系具有至少一个表面层，该表面层具有彼此间隔开的垂直取向的纳米结构的接合基底。纳米结构之间的区域填充有至少一种相对于纳米结构材料构成反应伴侣的材料。一种用于制造至少一个接合基材和反应性多层体系的方法，包括用于形成反应性多层体系的方法，所述接合基材的至少一个表面层以图案化方式图案化或沉积，形成垂直取向的纳米结构，并且纳米结构之间的区域填充有相对于纳米结构的材料构成反应伴侣的至少一种材料。微系统由两个接合基板和位于接合基板之间的结构形成，该结构具有反应的反应层系统。微系统是涂覆有生物材料的传感器和/或具有由聚合物材料和/或至少一个磁性和/或压电和/或压阻组件组成的元件。

5. 发明申请

US20110284975A1 MICROSTRUCTURE, METHOD FOR PRODUCING THE SAME, DEVICE FOR BONDING A MICROSTRUCTURE AND MICROSYSTEM 有权
公开(公告)号：US20110284975A1
公开(公告)日：2011-11-24
申请号：US13146759
申请日：2010-01-26
申请人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
发明人： Joerg Braeuer , Thomas Gessner , Lutz Hofmann , Joerg Froemel , Maik Wiemer , Holger Letsch , Mario Baum
IPC分类号： H01L29/06 , H01L29/82 , H01L21/28 , H01L29/84 , B82Y99/00
CPC分类号： B81C3/001 , B81C2203/019 , B81C2203/032
摘要： A microstructure has at least one bonding substrate and a reactive multilayer system. The reactive multilayer system has at least one surface layer of the bonding substrate with vertically oriented nanostructures spaced apart from one another. Regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A method for producing at least one bonding substrate and a reactive multilayer system, includes, for forming the reactive multilayer system, at least one surface layer of the bonding substrate is patterned or deposited in patterned fashion with the formation of vertically oriented nanostructures spaced apart from one another, and regions between the nanostructures are filled with at least one material constituting a reaction partner with respect to the material of the nanostructures. A device for bonding a microstructure, which has at least one bonding substrate and a reactive multilayer system, to a further structure, which has a bonding substrate. The device has a bonding chamber, which can be opened and closed and evacuated and in which the microstructure and the further structure can be introduced and aligned with one another, and also an activation mechanism, which is coupled to the bonding chamber and by means of which the reactive multilayer system of the microstructure, said reactive multilayer system being formed from reactive nanostructures with—situated therebetween—a material constituting a reaction partner with respect to the material of the nanostructures, can be activated mechanically, electrically, electromagnetically, optically and/or thermally in such a way that a self-propagating, exothermic reaction takes place between the nanostructures and the material constituting a reaction partner with respect to the material of the nanostructures. A microsystem is formed from two bonding substrates and a construction lying between the bonding substrates, the construction having a reacted reactive layer system, wherein the reacted reactive layer system is a reacted structure sequence composed of at least one surface layer—provided on the bonding substrate—with vertically oriented nanostructures spaced apart from one another, and regions filled between the nanostructures with at least one material constituting a reaction partner with respect to the material of the nanostructures. The microsystem is a sensor coated with biomaterial and/or has elements composed of polymeric material and/or at least one magnetic and/or piezoelectric and/or piezoresistive component.

6. 发明授权

US08652341B2 Method and apparatus for structuring components made of a material composed of silicon oxide 失效
标题翻译：用于构成由氧化硅构成的材料制成的部件的方法和装置
公开(公告)号：US08652341B2
公开(公告)日：2014-02-18
申请号：US12433128
申请日：2009-04-30
申请人： Thomas Gessner , Andreas Bertz , Reinhard Schubert , Thomas Werner , Wolfgang Hentsch , Reinhard Fendler , Lutz Koehler
发明人： Thomas Gessner , Andreas Bertz , Reinhard Schubert , Thomas Werner , Wolfgang Hentsch , Reinhard Fendler , Lutz Koehler
IPC分类号： C23F1/00 , C23F1/08
CPC分类号： C03C15/00 , C03C23/006 , C03C2204/08
摘要： A method and an apparatus for forming a structure on a component made of a material composed of silicon oxide, especially of silicate glass, glass ceramic or quartz, wherein in accordance with the process at least a first surface of the component a partial removal of the material by plasma etching takes place and during the plasma etching at least at the surface to be etched a substrate temperature is established which is substantially greater than 90° C. but less than the softening temperature of the material. The apparatus is equipped for this purpose with a heater for generating the substrate temperature.
摘要翻译：一种用于在由氧化硅，特别是硅酸盐玻璃，玻璃陶瓷或石英组成的材料制成的部件上形成结构的方法和装置，其中根据该方法至少部件的第一表面部分去除通过等离子体蚀刻发生材料，并且在等离子体蚀刻期间，至少在要蚀刻的表面处建立基板温度，其基本上大于90℃但小于材料的软化温度。该装置为此用于产生衬底温度的加热器。

7. 发明申请

US20090236311A1 Method and Apparatus for Structuring Components Made of a Material Composed of Silicon Oxide 失效
标题翻译：用于由氧化硅组成的材料构成部件的方法和装置
公开(公告)号：US20090236311A1
公开(公告)日：2009-09-24
申请号：US12433128
申请日：2009-04-30
申请人： Thomas Gessner , Andreas Bertz , Reinhard Schubert , Thomas Werner , Wolfgang Hentsch , Reinhard Fendler , Lutz Koehler
发明人： Thomas Gessner , Andreas Bertz , Reinhard Schubert , Thomas Werner , Wolfgang Hentsch , Reinhard Fendler , Lutz Koehler
IPC分类号： C23F1/00 , C23F1/08
CPC分类号： C03C15/00 , C03C23/006 , C03C2204/08
摘要： A method and an apparatus for forming a structure on a component made of a material composed of silicon oxide, especially of silicate glass, glass ceramic or quartz, wherein in accordance with the process at least a first surface of the component a partial removal of the material by plasma etching takes place and during the plasma etching at least at the surface to be etched a substrate temperature is established which is substantially greater than 90° C. but less than the softening temperature of the material. The apparatus is equipped for this purpose with a heater for generating the substrate temperature.
摘要翻译：一种用于在由氧化硅，特别是硅酸盐玻璃，玻璃陶瓷或石英组成的材料制成的部件上形成结构的方法和装置，其中根据该方法至少部件的第一表面部分去除通过等离子体蚀刻发生材料，并且在等离子体蚀刻期间，至少在要蚀刻的表面处建立基板温度，其基本上大于90℃但小于材料的软化温度。该装置为此用于产生衬底温度的加热器。

8. 发明授权

US06969628B2 Microstructure and method for the production thereof 失效
标题翻译：微结构及其制造方法
公开(公告)号：US06969628B2
公开(公告)日：2005-11-29
申请号：US10296771
申请日：2001-06-13
申请人： Andreas Bertz , Thomas Gessner , Matthias Küchler , Roman Knöfler
发明人： Andreas Bertz , Thomas Gessner , Matthias Küchler , Roman Knöfler
IPC分类号： B81B3/00 , B81C1/00 , H01L21/00
CPC分类号： B81B3/0086 , B81B2203/033 , B81C2201/016
摘要： The invention relates to a microstructure in a preferably electrically conductive substrate (1), more specifically made of doped single crystal silicon, with at least one functional unit (2.1, 2.2) and to a method of fabricating the same. In accordance with the invention, the functional unit (2.1, 2.2) is mechanically and electrically separated from the substrate (1) on all sides by means of isolation gaps (5, 5a) and is connected, on at least one site, to a first structure (4a) of an electrically conductive layer (S) that is electrically isolated from the substrate (1) by way of an isolation layer (3) and that secures the unit into position relative to the substrate (1). For this purpose, the functional unit (2.1, 2.2) is released from the substrate (1) in such a manner that the isolation gaps (5, 5a) are provided on all sides relative to the substrate (1). The electrically conductive layer (S) is applied in such a manner that it is connected through contact fingers (4a) for example to the functional unit (2.1, 2.2) which it secures into position. The method in accordance with the invention permits to substantially facilitate the manufacturing process and to produce a microstructure with but small parasitic capacitances.
摘要翻译：本发明涉及在具有至少一个功能单元（2.1,2.2）的优选导电衬底（1）中，更具体地由掺杂单晶硅制成的微观结构及其制造方法。根据本发明，通过隔离间隙（5,5a），功能单元（2.1,2.2）在所有侧面上与基板（1）机械地和电气地分开，并且在至少一个位置连接到通过隔离层（3）与衬底（1）电绝缘的导电层（S）的第一结构（4a），并且将单元固定在相对于衬底（1）的位置。为此，功能单元（2.1,2.2）以这样的方式从基板（1）释放，使得隔离间隙（5,5a）相对于基板（1）设置在所有侧面上。导电层（S）以这样的方式被施加，使得它通过接触指状物（4a）例如连接到功能单元（2.1,2.2）上，其被固定到位。根据本发明的方法允许基本上方便制造过程并产生具有小的寄生电容的微结构。

9. 发明授权

US06849912B2 Vertical transistor comprising a mobile gate and a method for the production thereof 失效
标题翻译：包括移动门的垂直晶体管及其制造方法
公开(公告)号：US06849912B2
公开(公告)日：2005-02-01
申请号：US10311759
申请日：2001-04-26
申请人： Andreas Bertz , Steffen Heinz , Thomas Gessner
发明人： Andreas Bertz , Steffen Heinz , Thomas Gessner
IPC分类号： B81B3/00 , G01L9/00 , G01P15/08 , G01P15/12 , H01L21/336 , H01L29/78 , H01L29/84 , H01L29/82
CPC分类号： H01L29/84 , G01L9/0098 , G01P15/0802 , G01P15/124
摘要： What is proposed is a vertical field effect transistor produced from a semiconductor wafer, comprising a residual transistor composed of a source zone, a channel zone and a drain zone, as well as a movable gate structure disposed by means of at least one flexible suspension in front of said channel zone and spaced therefrom, which is characterized by the provision that the movable gate structure consists of the material of said semiconductor wafer. The suspensions of the movable structure preferably present a high ratio of their height to their width, such that the movable gate may preferably move in the wafer plane.
摘要翻译：提出的是由半导体晶片制造的垂直场效应晶体管，其包括由源极区，沟道区和漏极区组成的残余晶体管，以及通过至少一个柔性悬浮体设置的可移动栅极结构所述通道区域的前部并与其间隔开，其特征在于，所述可移动栅极结构由所述半导体晶片的材料构成。可移动结构的悬架优选地将其高度与其宽度的高比率呈现，使得可移动门优选地在晶片平面中移动。

10. 发明授权

US6016217A Micro swivel actuators and a procedure for the production of the same 失效
标题翻译：微型旋转执行机构及其生产程序
公开(公告)号：US6016217A
公开(公告)日：2000-01-18
申请号：US983119
申请日：1998-07-20
申请人： Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
发明人： Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors.
摘要翻译： PCT No.PCT / DE96 / 01177 Sec。 371日期：1998年7月20日 102（e）1998年7月20日PCT PCT 1996年6月26日PCT公布。公开号WO97 / 02506 日期1997年1月23日本发明涉及微型旋转执行机构及其制造方法。微型旋转执行器基本上由配备有三层的半导体晶片构成，其一方面包含具有集成的弹簧和支撑元件作为机械部件的单个反射镜，另一方面包含作为电气布置的电极，馈线和电触点。微型旋转执行器的制造采用来自表面微机械学领域的程序步骤，因此正在应用经过验证的技术。微型旋转致动器，特别是微机械镜阵列，特别适用于通过激光束的图示再现技术中的应用。利用这些致动器，可以通过转动几个平行的触发的各个反射镜来引导激光束。

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