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1. 发明授权

US06975442B2 Resonance scanner 失效
标题翻译：共振扫描仪
公开(公告)号：US06975442B2
公开(公告)日：2005-12-13
申请号：US10474410
申请日：2002-04-12
申请人： Thomas Gessner , Wolfram Doetzel , Christian Kaufmann , Jan Mehner , Ramon Hahn , Steffen Kurt
发明人： Thomas Gessner , Wolfram Doetzel , Christian Kaufmann , Jan Mehner , Ramon Hahn , Steffen Kurt
IPC分类号： B81B3/00 , G02B26/08 , G02B26/10 , H04N1/113
CPC分类号： G02B26/105 , B81B3/004 , B81B2201/047 , G02B26/0841
摘要： A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes 15 or coil 24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator electrodes 15 or coil 24) applying a force only directly to the drive plate (4) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (5), which differs from the eigenfrequency of the drive plate (4).
摘要翻译：一种共振扫描器，其中框架（3），驱动板（4），反射镜（5）和扭转弹簧（6,7）形成致动器部分（1），所述驱动板（4）附接在框架（3）通过两个第一扭转弹簧（6），使得驱动板（4）能够围绕两个扭转弹簧（6）的公共第一扭转轴线（8）摆动，所述反射镜（5）附接在驱动板（4）通过两个第二扭转弹簧（7），使得所述反射镜（5）可围绕两个扭转弹簧（7）的公共第二扭转轴线（9）摆动，并且所述第一扭转轴线（8）和所述第二扭转弹簧扭转轴（9）彼此平行; 其特征在于，只有将致动器部件（1）的框架（3）安装在箱形定子部件（2）的侧壁（10）上，驱动装置（定子电极15或线圈24）定子部分（2）的底部（11）仅在驱动板（4）的几何表面区域和所述底部（11）的区域中具有在所述驱动板（4）的几何表面积的区域中的凹部（13）反射镜（5），该凹部（13）的尺寸至少使得反射镜（5）的最大机械偏转不受底部（11）限制，所述驱动装置（定子电极15或线圈24）施加力仅直接到驱动板（4）并且具有周期性功能的所述力，其周期被调谐到与驱动板（4）的本征频率不同的反射镜（5）的本征频率。

2. 发明授权

US6016217A Micro swivel actuators and a procedure for the production of the same 失效
标题翻译：微型旋转执行机构及其生产程序
公开(公告)号：US6016217A
公开(公告)日：2000-01-18
申请号：US983119
申请日：1998-07-20
申请人： Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
发明人： Wolfram Dotzel , Thomas Gessner , Ramon Hahn , Christian Kaufmann , Heinz-Ulrich Lowe , Joachim Markert , Manfred Rauch , Udo Wollmann
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors.
摘要翻译： PCT No.PCT / DE96 / 01177 Sec。 371日期：1998年7月20日 102（e）1998年7月20日PCT PCT 1996年6月26日PCT公布。公开号WO97 / 02506 日期1997年1月23日本发明涉及微型旋转执行机构及其制造方法。微型旋转执行器基本上由配备有三层的半导体晶片构成，其一方面包含具有集成的弹簧和支撑元件作为机械部件的单个反射镜，另一方面包含作为电气布置的电极，馈线和电触点。微型旋转执行器的制造采用来自表面微机械学领域的程序步骤，因此正在应用经过验证的技术。微型旋转致动器，特别是微机械镜阵列，特别适用于通过激光束的图示再现技术中的应用。利用这些致动器，可以通过转动几个平行的触发的各个反射镜来引导激光束。

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