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    • 4. 发明授权
    • Antistatic mechanism of an electrostatic actuator
    • 静电致动器的抗静电机构
    • US07161273B2
    • 2007-01-09
    • US10287355
    • 2002-11-04
    • Akira AkibaKeisuke UnoMasao JojimaTomonori SekiKoji Sano
    • Akira AkibaKeisuke UnoMasao JojimaTomonori SekiKoji Sano
    • H02N1/00
    • H01H59/0009H01H2001/0084H01H2059/0018H01H2059/0072
    • A fixed voltage and a movable electrode are placed face to face with each other, and an insulating film is formed on the surface of the fixed electrode. The insulating film is made of a nitride film (SiN) as a main material, with oxide films (SiO2) being formed on the front and rear surfaces of the nitride film. Moreover, a plurality of protrusions are formed on an area facing the movable electrode of the upper face of the insulating film. The charge quantity in the insulating film is mainly determined by a film thickness of the oxide film, and the nitride film is used for maintaining a sufficient film thickness required for the voltage proof characteristic. Thereby, it is possible to suppress variations in operational voltage characteristics such as on-voltage and off-voltage in an electrostatic actuator so as to prevent phenomena in which the electrostatic actuator fails to turn on even when a rated voltage is applied to the electrostatic actuator and in which the electrostatic actuator fails to turn off even when the driving voltage is turned off.
    • 固定电压和可动电极彼此面对地放置,并且在固定电极的表面上形成绝缘膜。 绝缘膜由氮化物膜(SiN)作为主要材料制成,在氮化膜的正面和背面形成有氧化物膜(SiO 2/2)。 此外,在与绝缘膜的上表面的可动电极相对的区域上形成多个突起。 绝缘膜中的电荷量主要由氧化膜的膜厚确定,并且氮化膜用于保持耐电压特性所需的足够的膜厚度。 由此,可以抑制静电致动器中的导通电压和截止电压等工作电压特性的变化,从而防止静电致动器即使向静电致动器施加额定电压也不能接通的现象 并且即使当驱动电压关闭时静电致动器也不能关闭。