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    • 1. 发明申请
    • BLADDER PRESSURE MEASUREMENT SYSTEM
    • 叶片压力测量系统
    • US20140066804A1
    • 2014-03-06
    • US14002136
    • 2012-03-14
    • Sebastian WilleDirk TenholteJan Mehner
    • Sebastian WilleDirk TenholteJan Mehner
    • A61B5/00A61B5/20
    • A61B5/6874A61B5/205A61B5/207A61B5/6861A61B5/7221A61B5/7232A61B5/7475A61B2562/162
    • The invention relates to a bladder pressure measurement system and to a measurement method comprising a measurement capsule (1) that can be placed in the bladder of a living creature, in particular of a human being, and comprising a pressure sensor and measurement electronics, by means of which pressure measurement values provided by the pressure sensor can be captured and saved, comprising a probe device having a manually actuated probe, wherein the probe device and the measurement capsule comprise internal chronometers synchronized to each other or at least capable of being synchronized to each other and the measurement capsule (1) is designed to capture and save pressure measurement values together with time information from the chronometer thereof, and the probe device is designed to detect and save a probe actuation together with time information from the chronometer thereof.
    • 本发明涉及一种膀胱压力测量系统和测量方法,该测量方法包括测量胶囊(1),该测量胶囊可以放置在特定人类的生物的膀胱中,并且包括压力传感器和测量电子设备,通过 可以捕获并保存由压力传感器提供的压力测量值的装置,包括具有手动致动的探针的探针装置,其中探针装置和测量胶囊包括彼此同步或至少能够与 彼此和测量胶囊(1)被设计成与来自其计时器的时间信息一起捕获和保存压力测量值,并且探针装置被设计成与来自其计时器的时间信息一起检测和保存探针致动。
    • 2. 发明授权
    • MEMS vacuum sensor based on the friction principle
    • 基于摩擦原理的MEMS真空传感器
    • US08186225B2
    • 2012-05-29
    • US12301874
    • 2007-05-09
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • G01L11/00
    • G01L21/22
    • The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
    • 本发明涉及一种用于压力测量的传感器元件,具有基板(5)和至少一个质量元件(1),其与基板(5)间隔开并且以振荡方式连接到基板(5) )和/或相对于基板(5)固定的支撑体(6),使得在质量元件(1)和基板(5)之间形成间隙,其宽度可以通过 质量元件(1)。 至少一个凹部和/或至少一个衬套(4)位于限定间隙的衬底(5)的表面中,该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件(1)。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器,可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。
    • 3. 发明申请
    • MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
    • 基于摩擦原理的MEMS真空传感器
    • US20100024562A1
    • 2010-02-04
    • US12301874
    • 2007-05-09
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • Steffen KurthDirk TenholteKarla HillerChristian KaufmannThomas GessnerWolfram Doetzel
    • G01L21/22
    • G01L21/22
    • The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
    • 本发明涉及一种用于压力测量的传感器元件,具有基板(5)和至少一个质量元件(1),其与基板(5)间隔开并且以振荡方式连接到基板(5) )和/或相对于基板(5)固定的支撑体(6),使得在质量元件(1)和基板(5)之间形成间隙,其宽度可以通过 质量元件(1)。 至少一个凹部和/或至少一个衬套(4)位于限定间隙的衬底(5)的表面中,该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件(1)。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器,可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。