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    • 3. 发明授权
    • Sputtering apparatus
    • 溅射装置
    • US5609739A
    • 1997-03-11
    • US362778
    • 1994-12-23
    • Isamu AokuraHitoshi YamanishiYouichi OhnishiTanejiro Ikeda
    • Isamu AokuraHitoshi YamanishiYouichi OhnishiTanejiro Ikeda
    • C23C14/35H01J37/34C23C14/34
    • H01J37/3426H01J37/3408H01J37/3452
    • A sputtering apparatus for performing sputtering operation by using a rectangular target made of ferromagnetic material, the apparatus includes an electrode in which one first permanent magnet is disposed on each side edge of a front surface of the target, polarities of the first magnets confronting each other with the target interposed between the first magnets are opposite to each other, one second permanent magnet is disposed on each side edge of a rear surface of the target, polarities of the second magnets confronting each other with the target interposed between the second magnets are opposite to each other, and the polarity of each second magnet disposed on the rear surface of the target is the same as that of the first magnet disposed on the front surface of the target.
    • 一种用于通过使用由铁磁材料制成的矩形靶进行溅射操作的溅射装置,该装置包括:电极,其中一个第一永磁体设置在靶的前表面的每个侧边缘上,第一磁体彼此面对的极性 夹在第一磁体之间的目标彼此相对,在目标的后表面的每个侧边缘上设置一个第二永磁体,并且夹在第二磁体之间的目标彼此面对的第二磁体的极性相反 并且设置在靶的后表面上的每个第二磁体的极性与设置在靶的前表面上的第一磁体的极性相同。
    • 10. 发明授权
    • Sputtering system
    • 溅射系统
    • US06342139B1
    • 2002-01-29
    • US09495293
    • 2000-02-01
    • Isamu AokuraTomohiro OkumuraNaoki Suzuki
    • Isamu AokuraTomohiro OkumuraNaoki Suzuki
    • C23C1435
    • H01J37/321C23C14/358H01J37/3408
    • A sputtering system includes a vacuum chamber, a sputtering electrode provided in the vacuum chamber, a target supported on the sputtering electrode with a front surface of the target and a substrate disposed in the vacuum chamber so as to be opposed to each other. A high-frequency or DC power source supplies a high-frequency or DC power to the sputtering electrode to generate plasma on the target, and an antenna is provided for generating an electromagnetic wave and is disposed outside the vacuum chamber and near the target. An electromagnetic-wave inlet window for introducing into the vacuum chamber an electromagnetic wave generated from the antenna is provided in a wall of the vacuum chamber.
    • 溅射系统包括真空室,设置在真空室中的溅射电极,具有靶的前表面的溅射电极上支撑的靶和设置在真空室中的基板以彼此相对。 高频或直流电源向溅射电极提供高频或直流电力,以在目标上产生等离子体,并且提供用于产生电磁波的天线,并设置在真空室外部和靶附近。 在真空室的壁上设置有用于将从天线产生的电磁波引入真空室的电磁波入口窗口。