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    • 7. 发明授权
    • Multi-axis magnetic lens for focusing a plurality of charged particle beams
    • 用于聚焦多个带电粒子束的多轴磁性透镜
    • US09202658B2
    • 2015-12-01
    • US14572052
    • 2014-12-16
    • Hermes-Microvision, Inc.
    • Zhongwei ChenWeiming RenXuerang HuXuedong Liu
    • H01J1/50H01J3/20
    • H01J3/20H01J37/141H01J37/143H01J2237/1405Y10T29/49075
    • A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
    • 提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。 多轴磁性透镜包括多个磁性复数透镜模块。 一方面,多轴磁性透镜采用环形永磁体单元,以向多个磁性子透镜模块提供基本稳定的磁通量。 另一方面,多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。 本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。 因此,本发明将有益于需要在长时间内执行的应用,同时保持高性能稳定性。
    • 9. 发明申请
    • Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams
    • 用于聚焦多个带电粒子束的多轴磁镜
    • US20150179384A1
    • 2015-06-25
    • US14572052
    • 2014-12-16
    • Hermes-Microvision, Inc.
    • Zhongwei ChenWeiming RenXuerang HuXuedong Liu
    • H01J3/20
    • H01J3/20H01J37/141H01J37/143H01J2237/1405Y10T29/49075
    • A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
    • 提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。 多轴磁性透镜包括多个磁性复数透镜模块。 一方面,多轴磁性透镜采用环形永磁体单元,以向多个磁性子透镜模块提供基本稳定的磁通量。 另一方面,多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。 本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。 因此,本发明将有益于需要在长时间内执行的应用,同时保持高性能稳定性。