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1. 发明授权

US11328894B2 Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus 有权
公开(公告)号：US11328894B2
公开(公告)日：2022-05-10
申请号：US16047987
申请日：2018-07-27
申请人： Hermes Microvision, Inc.
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Xinan Luo , Zhongwei Chen
IPC分类号： H01J37/153 , H01J37/147 , H01J37/05 , H01J37/14 , H01J37/244 , H01J37/28
摘要： Systems and methods are provided for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus. Embodiments of the present disclosure provide a dispersion device comprising an electrostatic deflector and a magnetic deflector configured to induce a beam dispersion set to cancel the dispersion generated by the beam separator. The combination of the electrostatic deflector and the magnetic deflector can be used to keep the deflection angle due to the dispersion device unchanged when the induced beam dispersion is changed to compensate for a change in the dispersion generated by the beam separator. In some embodiments, the deflection angle due to the dispersion device can be controlled to be zero and there is no change in primary beam axis due to the dispersion device.

2. 发明申请

US20170025243A1 Apparatus of Plural Charged-Particle Beams 审中-公开
标题翻译：多次充电粒子束装置
公开(公告)号：US20170025243A1
公开(公告)日：2017-01-26
申请号：US15216258
申请日：2016-07-21
申请人： Hermes Microvision, Inc.
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/147 , H01J37/10 , H01J37/06
CPC分类号： H01J37/1474 , H01J37/06 , H01J37/10 , H01J37/1477 , H01J37/1478 , H01J37/28 , H01J2237/024 , H01J2237/0453 , H01J2237/0492 , H01J2237/103 , H01J2237/1205 , H01J2237/1516 , H01J2237/1534 , H01J2237/1536
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit forms plural and parallel images of one single electron source by deflecting plural beamlets of a parallel primary-electron beam therefrom, and one objective lens focuses the plural deflected beamlets onto a sample surface and forms plural probe spots thereon. A movable condenser lens is used to collimate the primary-electron beam and vary the currents of the plural probe spots, a pre-beamlet-forming means weakens the Coulomb effect of the primary-electron beam, and the source-conversion unit minimizes the sizes of the plural probe spots by minimizing and compensating the off-axis aberrations of the objective lens and condenser lens.
摘要翻译：提出了一种用于以高分辨率和高吞吐量观察样品的多光束装置。在该装置中，源极转换单元通过偏转平行的一次电子束的多个子束形成一个单个电子源的多个并行图像，并且一个物镜将多个偏转的子束聚焦在样本表面上并形成多个探针点上。使用可移动聚光透镜来准直一次电子束并改变多个探针点的电流，前束形成装置削弱一次电子束的库仑效应，并且源转换单元使尺寸最小化通过最小化和补偿物镜和聚光透镜的离轴像差来实现多个探测点。

3. 发明申请

US20160064180A1 Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic Lenses 有权
标题翻译：多轴磁透镜的多电荷粒子束装置
公开(公告)号：US20160064180A1
公开(公告)日：2016-03-03
申请号：US14833583
申请日：2015-08-24
申请人： Hermes-Microvision, Inc.
发明人： Weiming Ren , Xuerang Hu , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/141 , H01J37/28 , H01J37/147
CPC分类号： H01J37/141 , H01J37/1475 , H01J37/28 , H01J2237/141 , H01J2237/1508 , H01J2237/1526 , H01J2237/28 , H01J2237/2817
摘要： A new apparatus of plural charged particle beams with multi-axis magnetic lenses is provided, which comprises a plurality of sub-columns The apparatus employs two modified multi-axis magnetic lenses, and magnetic sub-lenses thereof therefore function as the objective lenses and the condenser lenses of all the sub-columns respectively. The plurality of sub-columns can perform the same function or different functions required for observing a surface of a specimen, such as high-throughput inspection and high-resolution review of interested features thereon. Accordingly, the apparatus can be used as a yield management tool in semiconductor manufacturing industry.
摘要翻译：提供了具有多轴磁透镜的多个带电粒子束的新装置，其包括多个子列。该装置采用两个改进的多轴磁性透镜，并且其磁性子透镜因此用作物镜，并且所有子列的聚光透镜分别。多个子列可以执行用于观察样本表面所需的相同功能或不同的功能，例如高通量检测和对其感兴趣的特征的高分辨率检查。因此，该装置可以用作半导体制造业的屈服管理工具。

4. 发明授权

US09105440B2 Apparatus of plural charged particle beams with multi-axis magnetic lens 有权
标题翻译：具有多轴磁性透镜的多个带电粒子束的装置
公开(公告)号：US09105440B2
公开(公告)日：2015-08-11
申请号：US14468674
申请日：2014-08-26
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J37/141 , H01J37/145 , H01J37/28
CPC分类号： H01J37/141 , H01J37/145 , H01J37/28 , H01J2237/141 , H01J2237/1415 , H01J2237/15 , H01J2237/281 , H01J2237/2817
摘要： An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.
摘要翻译：提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制和图像分辨率。在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。

5. 发明授权

US09922799B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US09922799B2
公开(公告)日：2018-03-20
申请号：US15213781
申请日：2016-07-19
申请人： Hermes Microvision, Inc.
发明人： Shuai Li , Weiming Ren , Xuedong Liu , Juying Dou , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244
CPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244 , H01J2237/0453 , H01J2237/0492 , H01J2237/04924 , H01J2237/04926 , H01J2237/04928 , H01J2237/1205 , H01J2237/1501 , H01J2237/1502 , H01J2237/2446 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.

6. 发明申请

US20170025241A1 Apparatus of Plural Charged-Particle Beams 有权
标题翻译：多次充电粒子束装置
公开(公告)号：US20170025241A1
公开(公告)日：2017-01-26
申请号：US15213781
申请日：2016-07-19
申请人： Hermes Microvision, Inc.
发明人： Shuai Li , Weiming Ren , Xuedong Liu , Juying Dou , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/14 , H01J37/20 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244 , H01J2237/0453 , H01J2237/0492 , H01J2237/04924 , H01J2237/04926 , H01J2237/04928 , H01J2237/1205 , H01J2237/1501 , H01J2237/1502 , H01J2237/2446 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.
摘要翻译：提出了一种用于以高分辨率和高吞吐量和灵活变化的观察条件观察样品的多光束装置。该装置使用可移动准直透镜来灵活地改变多个探针点的电流而不影响其间隔，新的源转换单元形成单个电子源的多个图像并补偿多个探针点的离轴像差以及用于减小由于一次电子束引起的强烈的库仑效应的前束形成装置。

7. 发明授权

US09202658B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁性透镜
公开(公告)号：US09202658B2
公开(公告)日：2015-12-01
申请号：US14572052
申请日：2014-12-16
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J1/50 , H01J3/20
CPC分类号： H01J3/20 , H01J37/141 , H01J37/143 , H01J2237/1405 , Y10T29/49075
摘要： A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
摘要翻译：提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。多轴磁性透镜包括多个磁性复数透镜模块。一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。

8. 发明申请

US20170154756A1 Apparatus of Plural Charged-Particle Beams 审中-公开
公开(公告)号：US20170154756A1
公开(公告)日：2017-06-01
申请号：US15365145
申请日：2016-11-30
申请人： Hermes Microvision Inc.
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/28 , H01J37/14 , H01J37/153 , H01J37/244 , H01J37/20
CPC分类号： H01J37/28 , H01J37/14 , H01J37/141 , H01J37/153 , H01J37/20 , H01J37/244 , H01J37/292 , H01J2237/0453 , H01J2237/1532 , H01J2237/24465 , H01J2237/24592 , H01J2237/2806 , H01J2237/2817
摘要： A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.

9. 发明申请

US20150179384A1 Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁镜
公开(公告)号：US20150179384A1
公开(公告)日：2015-06-25
申请号：US14572052
申请日：2014-12-16
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J3/20
CPC分类号： H01J3/20 , H01J37/141 , H01J37/143 , H01J2237/1405 , Y10T29/49075
摘要： A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
摘要翻译：提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。多轴磁性透镜包括多个磁性复数透镜模块。一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。

10. 发明申请

US20190035595A1 SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS 审中-公开
公开(公告)号：US20190035595A1
公开(公告)日：2019-01-31
申请号：US16047987
申请日：2018-07-27
申请人： Hermes Microvision, Inc.
发明人： Weiming REN , Xuedong Liu , Xuerang Hu , Xinan Luo , Zhongwei Chen
IPC分类号： H01J37/153 , H01J37/244 , H01J37/28 , H01J37/147 , H01J37/14
摘要： Systems and methods are provided for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus. Embodiments of the present disclosure provide a dispersion device comprising an electrostatic deflector and a magnetic deflector configured to induce a beam dispersion set to cancel the dispersion generated by the beam separator. The combination of the electrostatic deflector and the magnetic deflector can be used to keep the deflection angle due to the dispersion device unchanged when the induced beam dispersion is changed to compensate for a change in the dispersion generated by the beam separator. In some embodiments, the deflection angle due to the dispersion device can be controlled to be zero and there is no change in primary beam axis due to the dispersion device.

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