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1. 发明授权

US09852882B2 Annular cooling fluid passage for magnets 有权
公开(公告)号：US09852882B2
公开(公告)日：2017-12-26
申请号：US14873284
申请日：2015-10-02
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： Scott Barraclough , James S. Buff
IPC分类号： H01J3/14 , H01J37/30 , H01F7/20 , H01J37/147 , H01J37/317 , H05K7/20 , H01F27/10
CPC分类号： H01J37/3007 , H01F7/20 , H01F27/10 , H01J37/1472 , H01J37/1475 , H01J37/3171 , H01J2237/002 , H01J2237/152 , H01J2237/1526 , H01J2237/303 , H01J2237/31701 , H05K7/20
摘要： A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.

2. 发明申请

US20160064180A1 Apparatus of Plural Charged Particle Beams with Multi-axis Magnetic Lenses 有权
标题翻译：多轴磁透镜的多电荷粒子束装置
公开(公告)号：US20160064180A1
公开(公告)日：2016-03-03
申请号：US14833583
申请日：2015-08-24
申请人： Hermes-Microvision, Inc.
发明人： Weiming Ren , Xuerang Hu , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/141 , H01J37/28 , H01J37/147
CPC分类号： H01J37/141 , H01J37/1475 , H01J37/28 , H01J2237/141 , H01J2237/1508 , H01J2237/1526 , H01J2237/28 , H01J2237/2817
摘要： A new apparatus of plural charged particle beams with multi-axis magnetic lenses is provided, which comprises a plurality of sub-columns The apparatus employs two modified multi-axis magnetic lenses, and magnetic sub-lenses thereof therefore function as the objective lenses and the condenser lenses of all the sub-columns respectively. The plurality of sub-columns can perform the same function or different functions required for observing a surface of a specimen, such as high-throughput inspection and high-resolution review of interested features thereon. Accordingly, the apparatus can be used as a yield management tool in semiconductor manufacturing industry.
摘要翻译：提供了具有多轴磁透镜的多个带电粒子束的新装置，其包括多个子列。该装置采用两个改进的多轴磁性透镜，并且其磁性子透镜因此用作物镜，并且所有子列的聚光透镜分别。多个子列可以执行用于观察样本表面所需的相同功能或不同的功能，例如高通量检测和对其感兴趣的特征的高分辨率检查。因此，该装置可以用作半导体制造业的屈服管理工具。

3. 发明申请

US20160027610A1 ANNULAR COOLING FLUID PASSAGE FOR MAGNETS 有权
标题翻译：用于磁铁的环形冷却液通道
公开(公告)号：US20160027610A1
公开(公告)日：2016-01-28
申请号：US14873284
申请日：2015-10-02
申请人： Varian Semiconductor Equipment Associates, Inc.
发明人： Scott Barraclough , James S. Buff
IPC分类号： H01J37/30 , H01J37/147 , H01J37/317 , H01F7/20 , H05K7/20
CPC分类号： H01J37/3007 , H01F7/20 , H01F27/10 , H01J37/1472 , H01J37/1475 , H01J37/3171 , H01J2237/002 , H01J2237/152 , H01J2237/1526 , H01J2237/303 , H01J2237/31701 , H05K7/20
摘要： A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. The first and second magnets each including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, the annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.
摘要翻译：通常描述具有环形冷却剂流体通道的磁体。各种实施例提供一种包括第一磁体和设置在离子束耦合器周围的第二磁体的磁体，其中具有通孔。所述第一和第二磁体各自包括在其中具有空腔的金属芯，设置在所述金属芯周围的一个或多个导电线圈，以及被构造成插入所述空腔中的环形芯体元件，其中环形冷却剂流体通道形成在腔和环形芯元件。此外，环形芯元件可以具有第一直径和具有第二直径的中间部分，第二直径小于第一直径。公开和要求保护其他实施例。

4. 发明授权

US08138484B2 Magnetic scanning system with improved efficiency 有权
标题翻译：磁性扫描系统提高了效率
公开(公告)号：US08138484B2
公开(公告)日：2012-03-20
申请号：US12769226
申请日：2010-04-28
申请人： Bo Vanderberg
发明人： Bo Vanderberg
IPC分类号： H01J1/50
CPC分类号： H01J37/1475 , H01J37/3171 , H01J2237/1523 , H01J2237/1526
摘要： Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or more magnetic flux compression elements are disposed proximate to the beam path region and between the first and second magnetic elements. During operation, the first and magnetic elements cooperatively generate an oscillatory time-varying magnetic field in the beam path region to scan an ion beam back and forth in time. The one or more magnetic flux compression elements compress the magnetic flux provided by the first and second magnetic elements, thereby reducing the amount of power required to magnetically scan the beam back and forth (relative to previous implementations). Other scanners, systems, and methods are also disclosed.
摘要翻译：本发明的一些方面通过使用包括其间具有光束路径区域的第一和第二磁性元件的磁束扫描器来促进离子注入。一个或多个磁通量压缩元件设置在光束路径区域附近以及第一和第二磁性元件之间。在操作期间，第一和磁性元件协同地在光束路径区域中产生振荡时变磁场，以及时扫描离子束。一个或多个磁通量压缩元件压缩由第一和第二磁性元件提供的磁通量，从而减少磁力扫描光束所需的功率量（相对于先前的实施方式）。还公开了其他扫描仪，系统和方法。

5. 发明申请

US20110266456A1 Magnetic Scanning System with Improved Efficiency 有权
标题翻译：提高效率的磁扫描系统
公开(公告)号：US20110266456A1
公开(公告)日：2011-11-03
申请号：US12769226
申请日：2010-04-28
申请人： Bo Vanderberg
发明人： Bo Vanderberg
IPC分类号： H01J37/147 , H01J37/317
CPC分类号： H01J37/1475 , H01J37/3171 , H01J2237/1523 , H01J2237/1526
摘要： Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or more magnetic flux compression elements are disposed proximate to the beam path region and between the first and second magnetic elements. During operation, the first and magnetic elements cooperatively generate an oscillatory time-varying magnetic field in the beam path region to scan an ion beam back and forth in time. The one or more magnetic flux compression elements compress the magnetic flux provided by the first and second magnetic elements, thereby reducing the amount of power required to magnetically scan the beam back and forth (relative to previous implementations). Other scanners, systems, and methods are also disclosed.
摘要翻译：本发明的一些方面通过使用包括其间具有光束路径区域的第一和第二磁性元件的磁束扫描器来促进离子注入。一个或多个磁通量压缩元件设置在光束路径区域附近以及第一和第二磁性元件之间。在操作期间，第一和磁性元件协同地在光束路径区域中产生振荡时变磁场，以及时扫描离子束。一个或多个磁通量压缩元件压缩由第一和第二磁性元件提供的磁通量，从而减少磁力扫描光束所需的功率量（相对于先前的实施方式）。还公开了其他扫描仪，系统和方法。

6. 发明授权

US07696488B2 Irradiating device and method for controlling the same 有权
标题翻译：照射装置及其控制方法
公开(公告)号：US07696488B2
公开(公告)日：2010-04-13
申请号：US11778955
申请日：2007-07-17
申请人： Yaohong Liu , Huaping Tang , Xinshui Yan , Jianjun Gao , Feng Gao , Dongsheng Zhang , Xiaotian Liang , De Wei , Jinsheng Liu , Wei Jia , Wei Yin , Dan Zhang , Chong Gu , Qinghui Zhang
发明人： Yaohong Liu , Huaping Tang , Xinshui Yan , Jianjun Gao , Feng Gao , Dongsheng Zhang , Xiaotian Liang , De Wei , Jinsheng Liu , Wei Jia , Wei Yin , Dan Zhang , Chong Gu , Qinghui Zhang
IPC分类号： G01K1/08 , H01J3/14 , H01J3/26 , H01J49/42 , H01J5/18 , H01J35/18 , H01J35/30 , G02B5/00 , G21K1/00 , A61N5/00 , G21G5/00
CPC分类号： G21K5/04 , A61L2/081 , A61L2/087 , A61L2/24 , G21K1/093 , H01J37/1475 , H01J2235/00 , H01J2237/1526 , H01J2237/164 , H01J2237/31
摘要： An irradiating device and a method for controlling it are provided. The device comprises an electron accelerator and a scanning box connected to the electron accelerator, wherein the scanning box is provided with a target, an electron beam exit window positioned at left or right side of the target and a scanning magnet. The device integrates the functions of both the existing irradiating device outputting electron beams and those outputting X-rays. When the scanning magnet is in operation, the irradiating device outputs electron beams; and when the scanning magnet is not in operation, the irradiating device outputs X-rays. Therefore, the device is capable of outputting two radiation sources so as to meet requirements for radiation-processing articles with different sizes.
摘要翻译：提供照射装置及其控制方法。该装置包括电子加速器和连接到电子加速器的扫描盒，其中扫描盒设置有靶，位于靶的左侧或右侧的电子束出射窗和扫描磁体。该装置集成了现有的输出电子束的照射装置和输出X射线的功能。当扫描磁体工作时，照射装置输出电子束; 并且当扫描磁体不工作时，照射装置输出X射线。因此，该装置能够输出两个辐射源，以满足具有不同尺寸的辐射处理制品的要求。

7. 发明申请

US20080121822A1 ION IMPLANTATION APPARATUS 有权
标题翻译：离子植入装置
公开(公告)号：US20080121822A1
公开(公告)日：2008-05-29
申请号：US11945831
申请日：2007-11-27
申请人： Hideki Fujita
发明人： Hideki Fujita
IPC分类号： G21K5/10
CPC分类号： H01J37/3171 , H01J37/1475 , H01J37/153 , H01J2237/055 , H01J2237/057 , H01J2237/1526 , H01J2237/1538 , H01J2237/24542 , H01J2237/31701
摘要： An ion implantation apparatus is provided with first and second magnets arranged so as to face each other in a Y direction across a path for a ribbon-shaped ion beam. The first and second magnets cross a traveling direction of the ribbon-shaped ion beam. Each of the first and second magnets has a pair of magnetic poles on an inlet side and on an outlet side of the ion beam. The polarities thereof are opposite between the first magnet and the second magnet.
摘要翻译：离子注入装置设置有第一和第二磁体，其布置成在Y方向上跨越带状离子束的路径彼此面对。第一和第二磁体与带状离子束的行进方向交叉。第一和第二磁体中的每一个在离子束的入口侧和出口侧具有一对磁极。其极性在第一磁体和第二磁体之间相反。

8. 发明申请

US20080067406A1 IRRADIATING DEVICE AND METHOD FOR CONTROLLING THE SAME 有权
标题翻译：辐射装置及其控制方法
公开(公告)号：US20080067406A1
公开(公告)日：2008-03-20
申请号：US11778955
申请日：2007-07-17
申请人： Yaohong Liu , Huaping Tang , Xinshui Yan , Jianjun Gao , Feng Gao , Dongsheng Zhang , Xiaotian Liang , De Wei , Jinsheng Liu , Wei Jia , Wei Yin , Dan Zhang , Chong Gu , Qinghui Zhang
发明人： Yaohong Liu , Huaping Tang , Xinshui Yan , Jianjun Gao , Feng Gao , Dongsheng Zhang , Xiaotian Liang , De Wei , Jinsheng Liu , Wei Jia , Wei Yin , Dan Zhang , Chong Gu , Qinghui Zhang
IPC分类号： G01K1/08
CPC分类号： G21K5/04 , A61L2/081 , A61L2/087 , A61L2/24 , G21K1/093 , H01J37/1475 , H01J2235/00 , H01J2237/1526 , H01J2237/164 , H01J2237/31
摘要： An irradiating device and a method for controlling it are provided. The device comprises an electron accelerator and a scanning box connected to the electron accelerator, wherein the scanning box is provided with a target, an electron beam exit window positioned at left or right side of the target and a scanning magnet. The device integrates the functions of both the existing irradiating device outputting electron beams and those outputting X-rays. When the scanning magnet is in operation, the irradiating device outputs electron beams; and when the scanning magnet is not in operation, the irradiating device outputs X-rays. Therefore, the device is capable of outputting two radiation sources so as to meet requirements for radiation-processing articles with different sizes.
摘要翻译：提供照射装置及其控制方法。该装置包括电子加速器和连接到电子加速器的扫描盒，其中扫描盒设置有靶，位于靶的左侧或右侧的电子束出射窗和扫描磁体。该装置集成了现有的输出电子束的照射装置和输出X射线的功能。当扫描磁体工作时，照射装置输出电子束; 并且当扫描磁体不工作时，照射装置输出X射线。因此，该装置能够输出两个辐射源，以满足具有不同尺寸的辐射处理制品的要求。

9. 发明申请

US20050040137A1 Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors 审中-公开
标题翻译：用于带电粒子束光学系统的低像差偏转器以及用于制造这种偏转器的方法
公开(公告)号：US20050040137A1
公开(公告)日：2005-02-24
申请号：US10934016
申请日：2004-09-02
申请人： Katsushi Nakano
发明人： Katsushi Nakano
IPC分类号： G03F7/20 , H01B13/00 , H01F7/06 , H01F7/20 , H01J3/14 , H01J37/147 , H01J37/305 , H01L21/027
CPC分类号： B82Y10/00 , B82Y40/00 , H01F5/003 , H01F7/20 , H01F7/202 , H01F2041/0711 , H01J37/147 , H01J37/1475 , H01J37/3174 , H01J2237/103 , H01J2237/1405 , H01J2237/1526 , H01J2237/1534 , Y10T29/4902
摘要： Deflectors are disclosed that are suitable for use in various charged-particle-beam (CPB) optical systems as used, for example, in CPB microlithography systems. The deflectors produce a strong magnetic beam-deflecting field when energized with a relatively small electrical current. The beam-deflecting field thus produced is stable with respect to temperature changes, is little affected by eddy currents, and exhibits low aberration caused by manufacturing tolerances of the coil and core. In an exemplary method for manufacturing such a deflector, a magnetic-tape laminate is used as the core. Also, high-precision positioning of the coil and the magnetic-tape laminate is performed using photolithography and electrocasting. Positioning of the magnetic-tape laminate can be performed using a resist pattern formed by photolithography.
摘要翻译：公开了适用于例如在CPB微光刻系统中使用的各种带电粒子束（CPB）光学系统的偏转器。当相对较小的电流通电时，偏转器产生强磁场偏转场。由此产生的光束偏转场相对于温度变化是稳定的，几乎不受涡流的影响，并且表现出由线圈和芯的制造公差引起的低像差。在制造这种偏转器的示例性方法中，使用磁带层压体作为核心。此外，使用光刻和电铸来进行线圈和磁带层压体的高精度定位。可以使用通过光刻形成的抗蚀剂图案来进行磁带层压体的定位。

10. 发明公开

US20240371600A1 METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE 审中-公开
公开(公告)号：US20240371600A1
公开(公告)日：2024-11-07
申请号：US18142253
申请日：2023-05-02
申请人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
发明人： John Breuer , Dominik Ehberger
IPC分类号： H01J37/28 , H01J37/10 , H01J37/147 , H01J37/244
CPC分类号： H01J37/28 , H01J37/10 , H01J37/1471 , H01J37/244 , H01J2237/1506 , H01J2237/1516 , H01J2237/1526 , H01J2237/20228 , H01J2237/20235 , H01J2237/223 , H01J2237/282
摘要： A method of determining an energy spectrum or energy width of a charged particle beam (11) focused by a focusing lens (120) toward a sample plane (pS) in a charged particle beam imaging device is described. The method includes (a) introducing an energy-dependent deflection of the charged particle beam (11) that leads to a spot broadening along a dispersion axis in the sample plane (pS), and taking an image of a sample (10) arranged in the sample plane using the charged particle beam; (b) retrieving a beam profile of the charged particle beam from the image; and (c) determining the energy spectrum or energy width from the beam profile. Further embodiments described herein relate to a charged particle beam imaging device configured to determine the energy spectrum or energy width of a charged particle beam, particularly according to any of the methods described herein.

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