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1. 发明授权

US5107511A Method of stabilizing laser wavelength and laser device with stabilized wavelength 失效
标题翻译：稳定激光波长的方法和具有稳定波长的激光器件
公开(公告)号：US5107511A
公开(公告)日：1992-04-21
申请号：US381723
申请日：1989-08-25
申请人： Hajime Nakatani , Yoshibumi Minowa , Hiromi Kaneko , Hitoshi Wakata , Kenyu Haruta , Haruhiko Nagai , Kenichi Yasuda , Hiroyuki Mukumoto
发明人： Hajime Nakatani , Yoshibumi Minowa , Hiromi Kaneko , Hitoshi Wakata , Kenyu Haruta , Haruhiko Nagai , Kenichi Yasuda , Hiroyuki Mukumoto
IPC分类号： H01S3/137 , H01S3/225
CPC分类号： H01S3/137 , H01S3/225
摘要： A method and apparatus for stabilizing the wavelength in a laser. The apparatus includes a first and second etalon for fine and rough tuning, respectively, of a laser oscillator. The output power and wavelength of the laser beam, for example, can be used to adjust these etalons to provide a constant output power and to counteract the change in etalon characteristics due to heat.

2. 发明授权

US4977563A Laser apparatus 失效
标题翻译：激光设备
公开(公告)号：US4977563A
公开(公告)日：1990-12-11
申请号：US362409
申请日：1989-05-23
申请人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata
发明人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata
IPC分类号： H01S3/106 , H01S3/137 , H01S3/225
CPC分类号： H01S3/137 , H01S3/1062 , H01S3/225
摘要： A laser apparatus comprising a Fabry-Perot etalon for selecting a laser oscillation wavelength and a wavelength monitor means for monitoring a laser beam taken out from a laser oscillator whose wavelength is variable, whereby the pressure at the gap in the Fabry-Perot etalon is adjusted on the basis of a signal output from the wavelength monitor means. In order to adjust the pressure at the gap the Fabry-Perot etalon is hermetically sealed in a vessel containing a gas and the gas pressure is controlled on the basis of the output signal.
摘要翻译： PCT No.PCT / JP88 / 00970 Sec。 371日期1989年5月23日 102（e）日期1989年5月23日PCT提交1988年9月22日PCT公布。出版物WO89 / 03132 日期：1989年4月6日。一种激光装置，包括用于选择激光振荡波长的法布里 - 珀罗标准具和用于监测从波长可变的激光振荡器取出的激光束的波长监视装置，基于来自波长监视器装置的信号输出来调节法布里 - 珀罗标准具。为了调节间隙处的压力，法布里 - 珀罗标准具密封在含有气体的容器中，并且基于输出信号控制气体压力。

3. 发明授权

US4914662A Laser wavelength stabilization 失效
标题翻译：激光波长稳定
公开(公告)号：US4914662A
公开(公告)日：1990-04-03
申请号：US248900
申请日：1988-09-26
申请人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata , Haruhiko Nagai , Kenyu Haruta
发明人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata , Haruhiko Nagai , Kenyu Haruta
IPC分类号： H01S3/131
CPC分类号： H01S3/131
摘要： A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.
摘要翻译：通过导出从波长可变激光振荡器发射的激光束的一部分来稳定激光波长，通过波长监测机构对激光束部分进行光谱处理，测量光谱处理的光束部分的空间强度分布，光谱处理具有特定波长并测量其空间强度分布，基于所测量的具有特定波长的光谱处理光的空间强度分布，并根据测量的激光振荡器的波长控制光谱处理光束部分的测量空间强度分布，分析结果。

4. 发明授权

US5243614A Wavelength stabilizer for narrow bandwidth laser 失效
标题翻译：用于窄带宽激光的波长稳定器
公开(公告)号：US5243614A
公开(公告)日：1993-09-07
申请号：US795793
申请日：1991-11-21
申请人： Hitoshi Wakata , Atsushi Sugitatsu , Hajime Nakatani , Yasushi Minamitani
发明人： Hitoshi Wakata , Atsushi Sugitatsu , Hajime Nakatani , Yasushi Minamitani
IPC分类号： G01J1/44 , G01J3/26 , H01S3/137 , H01S3/225
CPC分类号： G01J3/02 , G01J3/0237 , G01J3/26 , H01S3/137 , G01J2001/4493 , G01J2003/265 , H01S3/225
摘要： A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.
摘要翻译：用于狭窄控制激光带宽的波长监视器/稳定器; 监视器/稳定器使用通过测量由波长控制的窄带宽激光束的波束给出的干涉条纹的直径导出的参数Q，F或G，例如准分子激光和由参考光给出的那些。的水银灯。通过将参数控制在预定范围内来进行控制。用于检测干涉条纹的图像感测单元被分割成具有可调节距离的多个图像传感器，以通过跳过中间部分来实现更快速的测量。

5. 发明授权

US4947398A Laser device with wavelength stabilization control and method of operating the same 失效
标题翻译：具有波长稳定控制的激光装置及其操作方法
公开(公告)号：US4947398A
公开(公告)日：1990-08-07
申请号：US372834
申请日：1989-06-29
申请人： Kenichi Yasuda , Hitoshi Wakata , Hajime Nakatani
发明人： Kenichi Yasuda , Hitoshi Wakata , Hajime Nakatani
IPC分类号： H01S3/136 , H01S3/137 , H01S3/225
CPC分类号： H01S3/136 , H01S3/137 , H01S3/225
摘要： Methods of controlling the wavelength and output power of a laser device with two intracavity etalons are disclosed, together with a wavelength monitor capable of detecting sidebands. A method is characterized by the usage of hot/cold parameter K which takes two values 0 and 1 indicating the cold and hot state of the device, respectively. The parameter K, which is reset to 0 at the start, is set to 1 when the laser beam is stabilized; it is reset to 0, whenever the lasing pause exceeds a predetermined time length. Preparatory starting steps are performed or omitted at the start, depending on the value of K. Another method is characterized by the adjustment of the intracavity etalons during the lasing pauses, in accordance with exponential functions with thermal time constants. The sideband detecting wavelength monitor comprises a single etalon whose free spectal region FSRm is selected with respect to that, FSR.sub.2, of the fine tuning intracavity etalon in such a manner that the interference fringes of the sidebands formed by the monitor etalon are distinct from each other and from those of the central wavelength .lambda..sub.0. Namely, when i is the integer which is associated with a sideband wavelength .lambda..sub.S via the equation: .lambda..sub.S =.lambda..sub.0 +i.times.FSR.sub.2, the free spectral regions FSR.sub.2 and FSRm are selected in such a manner that the apparent wavelength differences: R=i.multidot.FSR.sub.2 +j.multidot.FSRm between the central wavelength .lambda..sub.0 and the sideband wavelengths .lambda..sub.S, wherein j is an integer which minimizes the value of R for each i, are different from zero and from each other.
摘要翻译：公开了具有两个腔内标准具的激光装置的波长和输出功率的控制方法，以及能够检测边带的波长监视器。一种方法的特征在于使用热/冷参数K，其分别表示设备的冷热状态的两个值0和1。当激光束稳定时，启动时复位为0的参数K被设置为1; 每当激光暂停超过预定时间长度时，它将重置为0。准备启动步骤在开始时执行或省略，取决于K的值。另一种方法的特征在于根据具有热时间常数的指数函数在激光暂停期间调节腔内标准具。该边带检测波长监视器包括单个标准具，其相对于微调腔内标准具的FSR2选择其自由光谱区域FSRm，使得由监视器标准具形成的边带的干涉条纹彼此不同以及中心波长λ0的那些。即，当i是通过以下等式与边带波长λS相关联的整数时：λS =λ0 + ixFSR2，在这样的一个中选择自由光谱区域FSR2和FSRm 在中心波长λ0与边带波长λS之间的表观波长差：R = ixFSR2 + jxFSRm，其中j是使每个i的R值最小的整数不同于零和彼此。

6. 发明授权

US4686682A Discharge excitation type short pulse laser device 失效
标题翻译：放电激励型短脉冲激光器
公开(公告)号：US4686682A
公开(公告)日：1987-08-11
申请号：US782568
申请日：1985-10-01
申请人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai , Hajime Nakatani , Hideki Kita
发明人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai , Hajime Nakatani , Hideki Kita
IPC分类号： H01S3/036 , H01S3/038 , H01S3/041 , H01S3/0971 , H01S3/225 , H01S3/097
CPC分类号： H01S3/036 , H01S3/0385 , H01S3/041 , H01S3/0971 , H01S3/0384 , H01S3/225
摘要： A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.
摘要翻译：一种放电激励型短脉冲激光器件，其由与激光束轴线的方向对置设置的第一和第二主电极作为其纵向方向构成，辅助电极设置在第二主电极的后表面部分上并与通过电介质构件的第二主电极，用于在第一和第二主电极上施加脉冲电压的脉冲电路，以及用于在辅助电极和第二主电极之间施加电压的电路，形成脉冲的一部分的电路电路或独立于脉冲电路，其中第二主电极由其中具有多个孔的导电材料制成，第二主电极和电介质构件彼此紧密地配置，第二主电极被薄形成以能够在电介质构件的表面上产生爬电放电，从而将电子分配成跨越主电极而产生的用于主放电的种子。

7. 发明授权

US4722090A Excimer laser equipment 失效
标题翻译：准分子激光设备
公开(公告)号：US4722090A
公开(公告)日：1988-01-26
申请号：US839145
申请日：1986-03-12
申请人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai
发明人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai
IPC分类号： H01S3/036 , H01S3/134 , H01S3/225 , H01S3/22
CPC分类号： H01S3/134 , H01S3/036 , H01S3/225
摘要： The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.
摘要翻译：本发明涉及作为一种气体激光器的准分子激光设备，特别涉及使用稀有气体和卤素作为激光介质的稀有气体卤化物准分子激光器，并适用于控制激光介质中含有的卤素浓度测量激光介质中用于激光射线的激光介质中的卤素浓度的结果的基础，由此激光器的稳定振荡总是可能的。

8. 发明授权

US5130998A Laser device with oscillation wavelength control 失效
标题翻译：具有振荡波长控制的激光器件
公开(公告)号：US5130998A
公开(公告)日：1992-07-14
申请号：US658475
申请日：1991-02-20
申请人： Hitoshi Wakata , Atsushi Sugitatsu
发明人： Hitoshi Wakata , Atsushi Sugitatsu
IPC分类号： H01S3/137 , H01S3/225
CPC分类号： H01S3/137 , H01S3/225
摘要： Laser devices including a rough and a fine adjustment etalons are controlled for wavelength stabilization. Further, a power monitoring mechanism may be provided for measuring the output power of the laser beam, and the rough adjustment etalon is selectively controlled in response to the power monitoring mechanism or to the calculation means. Alternatively, a separate light source oscillating at a wavelength different from the oscillation wavelength of the laser resonator emits light which is split into two parts by a beam splitter. The beams of light emitted from the light source and reflected by the rough adjustment etalon are received by a pair of photosensors, and the rough adjustment etalon is controlled so as to minimize the differential output of the two photosensors.
摘要翻译：控制包括粗略和精细调整标准具的激光装置用于波长稳定。此外，可以提供用于测量激光束的输出功率的功率监视机构，并且响应于功率监视机构或计算装置选择性地控制粗略的校准标准具。或者，以与激光谐振器的振荡波长不同的波长振荡的单独的光源发射由分束器分成两部分的光。从光源发射并被粗略校准标准具反射的光束由一对光电传感器接收，并且粗调校准标准具被控制以使两个光电传感器的差分输出最小化。

9. 发明授权

US6110291A Thin film forming apparatus using laser 失效
公开(公告)号：US6110291A
公开(公告)日：2000-08-29
申请号：US689313
申请日：1996-08-07
申请人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Mutsumi Tsuda , Yoshio Saito , Keisuke Nanba , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Tomohiro Sasagawa , Kenichi Kuroda , Toshiyuki Oishi , Yukihiko Wada , Akihiko Furukawa , Yasuji Matsui , Akimasa Yuki , Takaaki Kawahara , Hideki Yabe , Taisuke Furukawa , Kouji Kise , Noboru Mikami , Tsuyoshi Horikawa , Tetsuo Makita , Kazuo Kuramoto , Naohiko Fujino , Hiroshi Kuroki , Tetsuo Ogama , Junji Tanimura
发明人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Mutsumi Tsuda , Yoshio Saito , Keisuke Nanba , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Tomohiro Sasagawa , Kenichi Kuroda , Toshiyuki Oishi , Yukihiko Wada , Akihiko Furukawa , Yasuji Matsui , Akimasa Yuki , Takaaki Kawahara , Hideki Yabe , Taisuke Furukawa , Kouji Kise , Noboru Mikami , Tsuyoshi Horikawa , Tetsuo Makita , Kazuo Kuramoto , Naohiko Fujino , Hiroshi Kuroki , Tetsuo Ogama , Junji Tanimura
IPC分类号： C23C14/02 , C23C14/08 , C23C14/22 , C23C14/28 , C23C14/34 , C23C14/54 , C23C14/56 , C23C14/00
CPC分类号： C23C14/087 , C23C14/022 , C23C14/22 , C23C14/28 , C23C14/3471 , C23C14/54 , C23C14/541 , C23C14/547 , C23C14/564 , Y10S505/732
摘要： A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

10. 发明授权

US6033741A Thin film forming apparatus using laser 失效
标题翻译：使用激光的薄膜成形装置
公开(公告)号：US6033741A
公开(公告)日：2000-03-07
申请号：US693719
申请日：1996-08-07
申请人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Yoshio Saito , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Yukihiko Wada
发明人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Yoshio Saito , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Yukihiko Wada
IPC分类号： C23C14/02 , C23C14/08 , C23C14/22 , C23C14/28 , C23C14/34 , C23C14/54 , C23C14/56 , C23C14/00
CPC分类号： C23C14/087 , C23C14/022 , C23C14/22 , C23C14/28 , C23C14/3471 , C23C14/54 , C23C14/541 , C23C14/547 , C23C14/564 , Y10S505/732
摘要： A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.
摘要翻译：使用激光的薄膜形成装置包括：室（1），放置在其中的靶（5），用于将目标物（5）发射激光的激光源（10）和基板保持器（3）。当用激光束（16）照射靶（5）时，产生羽流（15），并且包含在羽流（15）中的材料沉积在由基板保持器（3）保持的基板（2）的表面上。从激光光源（10）发射的激光束的横截面通过遮蔽板（4804）时成形为期望的形状，使得靶（5）的表面被均匀地照射光强分布。因此，产生具有均匀的活性粒子密度分布的羽流（15），因此可以在不损害基板的情况下，在宽的区域上形成具有均匀膜质量的高质量的薄膜。

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