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1. 发明授权

US4722090A Excimer laser equipment 失效
标题翻译：准分子激光设备
公开(公告)号：US4722090A
公开(公告)日：1988-01-26
申请号：US839145
申请日：1986-03-12
申请人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai
发明人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai
IPC分类号： H01S3/036 , H01S3/134 , H01S3/225 , H01S3/22
CPC分类号： H01S3/134 , H01S3/036 , H01S3/225
摘要： The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.
摘要翻译：本发明涉及作为一种气体激光器的准分子激光设备，特别涉及使用稀有气体和卤素作为激光介质的稀有气体卤化物准分子激光器，并适用于控制激光介质中含有的卤素浓度测量激光介质中用于激光射线的激光介质中的卤素浓度的结果的基础，由此激光器的稳定振荡总是可能的。

2. 发明授权

US4686682A Discharge excitation type short pulse laser device 失效
标题翻译：放电激励型短脉冲激光器
公开(公告)号：US4686682A
公开(公告)日：1987-08-11
申请号：US782568
申请日：1985-10-01
申请人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai , Hajime Nakatani , Hideki Kita
发明人： Kenyu Haruta , Hitoshi Wakata , Yukio Sato , Haruhiko Nagai , Hajime Nakatani , Hideki Kita
IPC分类号： H01S3/036 , H01S3/038 , H01S3/041 , H01S3/0971 , H01S3/225 , H01S3/097
CPC分类号： H01S3/036 , H01S3/0385 , H01S3/041 , H01S3/0971 , H01S3/0384 , H01S3/225
摘要： A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.
摘要翻译：一种放电激励型短脉冲激光器件，其由与激光束轴线的方向对置设置的第一和第二主电极作为其纵向方向构成，辅助电极设置在第二主电极的后表面部分上并与通过电介质构件的第二主电极，用于在第一和第二主电极上施加脉冲电压的脉冲电路，以及用于在辅助电极和第二主电极之间施加电压的电路，形成脉冲的一部分的电路电路或独立于脉冲电路，其中第二主电极由其中具有多个孔的导电材料制成，第二主电极和电介质构件彼此紧密地配置，第二主电极被薄形成以能够在电介质构件的表面上产生爬电放电，从而将电子分配成跨越主电极而产生的用于主放电的种子。

3. 发明授权

US4837773A Discharge excitation type short pulse laser 失效
标题翻译：放电激励型短脉冲激光
公开(公告)号：US4837773A
公开(公告)日：1989-06-06
申请号：US267629
申请日：1988-10-31
申请人： Hitoshi Wakata , Mitsuo Inoue , Yukio Sato , Kenyu Haruta , Haruhiko Nagai
发明人： Hitoshi Wakata , Mitsuo Inoue , Yukio Sato , Kenyu Haruta , Haruhiko Nagai
IPC分类号： H01S3/0971
CPC分类号： H01S3/09716
摘要： A discharge excitation type short pulse laser device is provided with a preliminary ionization circuit, the effeciency of preliminary ionization of which is remarkably improved. The laser device comprises a main discharge circuit including first and second main electrodes which are confronted with each other in a laser medium, main discharge capacitor means for storing energy for main discharge, and a discharge starting high voltage switch; and a preliminary ionization circuit connected to said high voltage switch, said preliminary ionization circuit including a discharging gap for preliminary ionization, a preliminary ionization capacitor and an inductance.
摘要翻译：放电励磁型短脉冲激光装置具有初电离电路，其初步电离效果显着提高。激光装置包括：主放电电路，包括在激光介质中彼此面对的第一和第二主电极，用于存储用于主放电的能量的主放电电容器装置和放电启动高压开关; 以及与所述高电压开关连接的初步电离电路，所述初步电离电路包括用于初步电离的放电间隙，初步电离电容器和电感。

4. 发明授权

US4914662A Laser wavelength stabilization 失效
标题翻译：激光波长稳定
公开(公告)号：US4914662A
公开(公告)日：1990-04-03
申请号：US248900
申请日：1988-09-26
申请人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata , Haruhiko Nagai , Kenyu Haruta
发明人： Hajime Nakatani , Yoshibumi Minowa , Hitoshi Wakata , Haruhiko Nagai , Kenyu Haruta
IPC分类号： H01S3/131
CPC分类号： H01S3/131
摘要： A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.
摘要翻译：通过导出从波长可变激光振荡器发射的激光束的一部分来稳定激光波长，通过波长监测机构对激光束部分进行光谱处理，测量光谱处理的光束部分的空间强度分布，光谱处理具有特定波长并测量其空间强度分布，基于所测量的具有特定波长的光谱处理光的空间强度分布，并根据测量的激光振荡器的波长控制光谱处理光束部分的测量空间强度分布，分析结果。

5. 发明授权

US5107511A Method of stabilizing laser wavelength and laser device with stabilized wavelength 失效
标题翻译：稳定激光波长的方法和具有稳定波长的激光器件
公开(公告)号：US5107511A
公开(公告)日：1992-04-21
申请号：US381723
申请日：1989-08-25
申请人： Hajime Nakatani , Yoshibumi Minowa , Hiromi Kaneko , Hitoshi Wakata , Kenyu Haruta , Haruhiko Nagai , Kenichi Yasuda , Hiroyuki Mukumoto
发明人： Hajime Nakatani , Yoshibumi Minowa , Hiromi Kaneko , Hitoshi Wakata , Kenyu Haruta , Haruhiko Nagai , Kenichi Yasuda , Hiroyuki Mukumoto
IPC分类号： H01S3/137 , H01S3/225
CPC分类号： H01S3/137 , H01S3/225
摘要： A method and apparatus for stabilizing the wavelength in a laser. The apparatus includes a first and second etalon for fine and rough tuning, respectively, of a laser oscillator. The output power and wavelength of the laser beam, for example, can be used to adjust these etalons to provide a constant output power and to counteract the change in etalon characteristics due to heat.

6. 发明授权

US5305338A Switch device for laser 失效
标题翻译：激光开关装置
公开(公告)号：US5305338A
公开(公告)日：1994-04-19
申请号：US757419
申请日：1991-09-10
申请人： Hitoshi Wakata , Akihiro Suzuki , Kenyu Haruta , Haruhiko Nagai , Akihiko Iwata , Shinji Murata , Isamu Tanakura , Tomohiro Sasagawa , Yuito Kimura
发明人： Hitoshi Wakata , Akihiro Suzuki , Kenyu Haruta , Haruhiko Nagai , Akihiko Iwata , Shinji Murata , Isamu Tanakura , Tomohiro Sasagawa , Yuito Kimura
IPC分类号： H01S3/0971 , H01S3/00 , H03K17/08
CPC分类号： H01S3/0971 , H01L2924/0002
摘要： A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.
摘要翻译：用于激光装置的开关装置包括串联并联的开关元件或模块。开关元件或模块通过来自触发电路的触发信号同时导通。用于将触发电路连接到各个开关元件的传输线的长度彼此相等。为开关元件提供保护电路，并且提供用于指示开关元件的短路的指示器。在开关装置中，用于开关元件的导线的数量变小，并且从开关元件产生的热量被有效地辐射。模块容易堆叠，并且牢固地连接到用于控制开关元件的控制单元。使用开关器件的放电激发激光器具有高效率和长寿命，并且是可靠的。

7. 发明授权

US6008914A Laser transfer machining apparatus 失效
标题翻译：激光转印加工设备
公开(公告)号：US6008914A
公开(公告)日：1999-12-28
申请号：US935161
申请日：1997-09-22
申请人： Tomohiro Sasagawa , Kenyu Haruta , Yukio Sato , Hitoshi Wakata, deceased , Mitsuo Inoue , Akihiro Suzuki , Shuichi Fujikawa , Yoshio Saito
发明人： Tomohiro Sasagawa , Kenyu Haruta , Yukio Sato , Hitoshi Wakata, deceased , Mitsuo Inoue , Akihiro Suzuki , Shuichi Fujikawa , Yoshio Saito
IPC分类号： B23K26/06 , B23K26/067 , B23K26/38 , G03H1/08 , G03H1/16 , G02B5/32 , G02B27/44 , G02B27/46
CPC分类号： G03H1/0005 , B23K26/0604 , B23K26/066 , B23K26/067 , B23K26/386 , G03H1/08 , G03H1/16 , G03H2001/0094
摘要： The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.
摘要翻译：激光传递加工装置包括：成形单元，用于使激光束成形，使得激光束具有对应于待加工物体中要加工的期望图案的光束图案;以及与成形单元分开设置的发生单元，用于同时产生多个激光束，每个激光束具有来自由成形单元成形的激光束的光束图案。发生单元适于发射多个激光束，同时将所生成的多个激光束的多个辐射方向限定到待加工物体。激光转印加工装置可以提供高效率的光利用并减少加工所需的时间。此外，激光转印加工装置可以利用具有较低空间相干性的激光器，例如准分子激光器。

8. 发明授权

US5177762A Saturable reactor 失效
标题翻译：可食用反应剂
公开(公告)号：US5177762A
公开(公告)日：1993-01-05
申请号：US660850
申请日：1991-02-26
申请人： Yukio Sato , Mitsuo Inoue , Kenyu Haruta , Akihiro Suzuki , Hitoshi Wakata
发明人： Yukio Sato , Mitsuo Inoue , Kenyu Haruta , Akihiro Suzuki , Hitoshi Wakata
IPC分类号： H01F29/14 , H01F17/06 , H01F27/08 , H01S3/04 , H01S3/097 , H01S3/0971
CPC分类号： H01S3/0971 , H01F17/062 , H01F27/08 , H01F2029/143
摘要： A saturable reactor comprising a magnetic core (1) having an annular or an elongated race-track configuration, an electrical insulator (6) disposed around the magnetic core and a conductor winding (3) wound around the insulator (6). A coolant duct (7) is provided in the insulator to extend radially transversely across the magnetic core and having a radially separated inlet and outlet (8,9). A saturable reactor may comprises an annular magnetic core (51), a conductor winding including a first conductor (55) surrounded by the magnetic core (51) and a second conductor (56) disposed around the magnetic core and connected to the first conductor (55) through a load. A control winding (54) extends through the first and second conductors (55,56), and at least one of the first and second conductors (55,56) has a notch or a through hole (57,59) for insulatingly receiving the control winding (54) therein. Also disclosed is a laser oscillator comprising a gas-filled laser chamber (81) in which a main electrode pair (82,83) is disposed in an opposing relationship to define a laser-excited discharge region therebetween. At least some of the components of an oscillation circuit for generating a laser oscillation are disposed within a first circuit component chamber (95) disposed adjacent to the laser chamber (81) and filled with an electrically insulating gas, and some other components are disposed within a second circuit component chamber (96) disposed adjacent to the first circuit component chamber (95) and filled with an electrically insulating oil.
摘要翻译：一种可饱和电抗器，其包括具有环形或细长的轨道结构的磁芯（1），围绕所述磁芯设置的电绝缘体（6）和缠绕在所述绝缘体（6）上的导体绕组（3）。冷却剂管道（7）设置在绝缘体中以径向横向横穿磁芯并且具有径向分离的入口和出口（8,9）。可饱和电抗器可以包括环形磁芯（51），包括由磁芯（51）包围的第一导体（55）的导体绕组和设置在磁芯周围并连接到第一导体的第二导体（56） 55）通过负载。控制绕组（54）延伸穿过第一和第二导体（55,56），并且第一和第二导体（55,56）中的至少一个具有凹口或通孔（57,59），用于绝缘地接收控制绕组（54）。还公开了一种激光振荡器，其包括气体填充激光室（81），其中主电极对（82,83）以相对的关系设置，以在其间限定激光激发放电区域。用于产生激光振荡的振荡电路中的至少一些部件被配置在与激光室（81）相邻设置并填充有电绝缘气体的第一电路部件室（95）内，并且一些其它部件设置在邻近第一电路部件室（95）设置并填充有电绝缘油的第二电路部件室（96）。

9. 发明授权

US5181217A Laser oscillator circuit 失效
标题翻译：激光振荡器电路
公开(公告)号：US5181217A
公开(公告)日：1993-01-19
申请号：US727432
申请日：1991-07-09
申请人： Yukio Sato , Akihiro Suzuki , Mitsuo Inoue , Kenyu Haruta , Haruhiko Nagai
发明人： Yukio Sato , Akihiro Suzuki , Mitsuo Inoue , Kenyu Haruta , Haruhiko Nagai
IPC分类号： H01S3/0971
CPC分类号： H01S3/0971
摘要： A discharge pumping circuit of spiker/sustainer type for the Excimer laser oscillator, wherein spiker unit is isolated from the sustainer unit by a switching device such as a magnetic isolator is disclosed. In the pumping circuit, the switching device shifts from its OFF state to its ON state, during the process of charging a spiker capacitor, before its terminal voltage reaches a voltage which initiates the discharge, and a sharp-rise pulse voltage is applied by a transfer of electric charge from said sustainer capacitor to said spiker capacitor, to initiate the discharge for the pumping. In another discharge-pumping circuit which also has a means for preionizing the laser gas, the timing for the preionization is set to start after the initiation of charging the sustainer capacitor and before the initiation of charging the spiker capacitor in a polarity opposite to that of the sustainer capacitor, and is controlled for maintaining the discharge initiating voltage constant for the repetition frequency. In another discharge-pumping circuit, a power source for charging the sustainer capacitor is structured to include a magnetic pulse compression circuit to reduce the stress on a high voltage switch such as a thyratron in the circuit to realize an excellent performance, a long service life and a high reliability.
摘要翻译：公开了一种用于准分子激光振荡器的尖头/持续器类型的放电泵浦电路，其中尖头单元通过诸如磁隔离器的开关装置与维持器单元隔离。在泵浦电路中，在尖端电容器的充电过程中，在其端电压达到开始放电的电压之前，开关器件从其OFF状态转换到ON状态，并且尖锐的脉冲电压由将电荷从所述持续电容器转移到所述尖头电容器，以启动用于泵送的放电。在还具有用于预激化激光气体的装置的另一个放电 - 泵浦电路中，预先去离子化的定时被设置为在对维持电容器充电开始之后并且在尖晶石电容器开始充电之前开始，其极性与并且被控制为使重放频率的放电起始电压保持恒定。在另一个放电泵浦电路中，用于对持续电容器充电的电源被构造成包括磁脉冲压缩电路，以减小电路中诸如闸流管之类的高压开关上的应力，以实现优异的性能，长的使用寿命并具有高可靠性。

10. 发明授权

US6110291A Thin film forming apparatus using laser 失效
公开(公告)号：US6110291A
公开(公告)日：2000-08-29
申请号：US689313
申请日：1996-08-07
申请人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Mutsumi Tsuda , Yoshio Saito , Keisuke Nanba , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Tomohiro Sasagawa , Kenichi Kuroda , Toshiyuki Oishi , Yukihiko Wada , Akihiko Furukawa , Yasuji Matsui , Akimasa Yuki , Takaaki Kawahara , Hideki Yabe , Taisuke Furukawa , Kouji Kise , Noboru Mikami , Tsuyoshi Horikawa , Tetsuo Makita , Kazuo Kuramoto , Naohiko Fujino , Hiroshi Kuroki , Tetsuo Ogama , Junji Tanimura
发明人： Kenyu Haruta , Koichi Ono , Hitoshi Wakata , Mutsumi Tsuda , Yoshio Saito , Keisuke Nanba , Kazuyoshi Kojima , Tetsuya Takami , Akihiro Suzuki , Tomohiro Sasagawa , Kenichi Kuroda , Toshiyuki Oishi , Yukihiko Wada , Akihiko Furukawa , Yasuji Matsui , Akimasa Yuki , Takaaki Kawahara , Hideki Yabe , Taisuke Furukawa , Kouji Kise , Noboru Mikami , Tsuyoshi Horikawa , Tetsuo Makita , Kazuo Kuramoto , Naohiko Fujino , Hiroshi Kuroki , Tetsuo Ogama , Junji Tanimura
IPC分类号： C23C14/02 , C23C14/08 , C23C14/22 , C23C14/28 , C23C14/34 , C23C14/54 , C23C14/56 , C23C14/00
CPC分类号： C23C14/087 , C23C14/022 , C23C14/22 , C23C14/28 , C23C14/3471 , C23C14/54 , C23C14/541 , C23C14/547 , C23C14/564 , Y10S505/732
摘要： A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

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