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    • 6. 发明授权
    • Method of manufacturing a display substrate
    • 制造显示基板的方法
    • US08608971B2
    • 2013-12-17
    • US12862580
    • 2010-08-24
    • Hong-Kee ChinSang-Gab KimMin-Seok Oh
    • Hong-Kee ChinSang-Gab KimMin-Seok Oh
    • B29D11/00C30B33/00
    • H01L27/1288G02F1/136204H01L27/1244
    • A method of manufacturing a display substrate includes forming a first metallic pattern including gate and storage conductors and a gate electrode of a switching device on a base substrate, forming a gate insulation layer, forming a second metallic pattern and a channel portion including a source line, source and drain electrodes of the switching device, forming a passivation layer and a photoresist film on the second metallic pattern, patterning the photoresist film to form a first pattern portion corresponding to the gate and source conductors and the switching device, and a second pattern portion formed on the storage line, etching the passivation layer and the gate insulation layer, and forming a pixel electrode using the first pattern portion. Therefore, excessive etching of the stepped portion may be prevented, so that a short-circuit defect between a metallic pattern and a pixel electrode may be prevented
    • 一种制造显示基板的方法包括在基底基板上形成包括栅极和存储导体的第一金属图案和开关器件的栅电极,形成栅极绝缘层,形成第二金属图案和包括源极线的沟道部分 开关器件的源极和漏极,在第二金属图案上形成钝化层和光致抗蚀剂膜,图案化光致抗蚀剂膜以形成对应于栅极和源极导体和开关器件的第一图案部分,以及第二图案 形成在存储线上的部分,蚀刻钝化层和栅极绝缘层,以及使用第一图案部分形成像素电极。 因此,可以防止阶梯部分的过度蚀刻,从而可以防止金属图案和像素电极之间的短路缺陷