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    • 8. 发明申请
    • SEMICONDUCTOR MEMORY DEVICES
    • 半导体存储器件
    • US20110095377A1
    • 2011-04-28
    • US12984860
    • 2011-01-05
    • Jong-Sun SelJung-Dal ChoiChoong-Ho LeeJu-Hyuck ChungHee-Soo KangDong-uk Choi
    • Jong-Sun SelJung-Dal ChoiChoong-Ho LeeJu-Hyuck ChungHee-Soo KangDong-uk Choi
    • H01L27/088
    • H01L23/485H01L21/76804H01L21/76816H01L27/11519H01L27/11521H01L27/11524H01L2924/0002H01L2924/00
    • In some embodiments, a semiconductor memory device includes a substrate that includes a cell array region and a peripheral circuit region. The semiconductor memory device further includes a device isolation pattern on the substrate. The device isolation pattern defines a first active region and a second active region within the cell array region and a third active region in the peripheral circuit region. The semiconductor memory device further includes a first common source region, a plurality of first source/drain regions, and a first drain region in the first active region. The semiconductor memory device further includes a second common source region, a plurality of second source/drain regions, and a second drain region in the second active region. The semiconductor memory device further includes a third source/drain region in the third active region. The semiconductor memory device further includes a common source line contacting the first and second common source regions.
    • 在一些实施例中,半导体存储器件包括包括单元阵列区域和外围电路区域的衬底。 半导体存储器件还包括在衬底上的器件隔离图案。 器件隔离图案限定了单元阵列区域内的第一有源区和第二有源区以及外围电路区中的第三有源区。 半导体存储器件还包括第一有源区中的第一公共源极区,多个第一源极/漏极区和第一漏极区。 半导体存储器件还包括第二公共源极区域,多个第二源极/漏极区域和第二有源区域中的第二漏极区域。 半导体存储器件还包括第三有源区中的第三源/漏区。 半导体存储器件还包括与第一和第二公共源极区域接触的公共源极线。