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    • 51. 发明申请
    • Vacuum pump and semiconductor manufacturing apparatus
    • 真空泵和半导体制造装置
    • US20050025640A1
    • 2005-02-03
    • US10887234
    • 2004-07-09
    • Shinichi SekiguchiMatsutaro Miyamoto
    • Shinichi SekiguchiMatsutaro Miyamoto
    • F04D29/056F04D17/16F04D19/04F04D29/058F04B17/00
    • F04D29/058F04D17/168F04D19/046F04D23/008F04D29/266F04D29/30
    • To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
    • 提供能够在大气压至高真空的压力范围内抽真空的真空泵,能够高速旋转以减小泵送性能并且能够产生完全无油的真空。 用于排出气体的真空泵包括:由轴承22可旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部分10具有安装在主轴5上的第一旋转叶片13,固定在第一壳体12中的第一固定叶片14和进气口11; 以及具有安装在主轴5上的第二旋转叶片33的第二排气部分30,固定在第二壳体32中的第二固定叶片34和排气口31.进气口11位于 主轴5和第一排气部10,轴承22和第二排气部30沿着主轴5轴向配置。
    • 52. 发明授权
    • Magnetic bearing apparatus and rotating machine having such an apparatus
    • 具有这种装置的磁性轴承装置和旋转机械
    • US5491396A
    • 1996-02-13
    • US243904
    • 1994-05-17
    • Naohiko TakahashiMinoru HiroshimaOsami MatsushitaYasuo Fukushima
    • Naohiko TakahashiMinoru HiroshimaOsami MatsushitaYasuo Fukushima
    • F04D29/056F04D29/058F16C32/04F16C39/06G05D13/00
    • F16C32/0451F16C32/0446F16C2360/44
    • A magnetic bearing is provided with a simulating circuit for estimating a displacement of a rotor on the basis of a force which is exerted on the rotor. An output of the simulating circuit is compared with an actual displacement signal. A delay circuit and a subtracter are provided to subtract a run-out, which was estimated one period before the rotation of the rotor, from the displacement signal. A displacement signal from which the run-out component was eliminated is set to a new displacement signal. A signal which is obtained by adding an estimated run-out of one period before, namely, an output of the delay circuit to the run-out which was estimated by comparing the output of the simulating circuit with the new displacement signal is newly inputted to the delay circuit. Due to this, the run-out component is eliminated from the displacement signal of the magnetic bearing, the load on power amplifiers for driving the electromagnets is reduced, there is a surplus for a saturation which is caused in a high frequency band, the reliability of the control system is improved, and deterioration of positional accuracy due to the run-out is prevented.
    • 磁性轴承设置有用于基于施加在转子上的力来估计转子的位移的模拟电路。 模拟电路的输出与实际位移信号进行比较。 提供延迟电路和减法器以减去在转子旋转之前的一个周期内的偏移量与位移信号。 排除组分的位移信号被设定为新的位移信号。 将通过将延迟电路的输出与通过将模拟电路的输出与新的位移信号进行比较而估计的余量相加的估计的输出相加而获得的信号被新输入到 延时电路。 由此,从磁性轴承的位移信号中消除了失效部件,用于驱动电磁体的功率放大器的负载减小,在高频带中产生的饱和度过剩,可靠性 提高了控制系统的性能,防止了由于失控引起的位置精度的劣化。
    • 53. 发明授权
    • Electrically driven, circumferentially supported fan
    • 电驱动,周向支撑的风扇
    • US4962734A
    • 1990-10-16
    • US493510
    • 1990-03-14
    • Iner M. Jorgensen
    • Iner M. Jorgensen
    • F01P5/04F01P7/04F02B1/04F04D25/06F04D27/02F04D29/04F04D29/058F04D29/16H02K7/14
    • F04D29/058F01P5/04F01P7/048F04D25/0606F04D25/066F04D27/004F04D29/164H02K7/14F02B1/04
    • A circumferentially supported fan assembly for drawing cooling air through a radiator of a vehicle is described. The fan includes a fan ring extending circumferentially around the periphery of the fan, the blades of the fan extending from a central region to the fan ring. The entire weight of the fan is borne by a fan support assembly which extends around the periphery of the fan ring, outside the path of air flowing through the fan. The fan is the rotor of an electrically driven motor. A rotor flange of the fan ring extends transverse to the axis of the rotation of the fan, providing a greater torque advantage for the motor. An electrical control circuit selectively controls the speed of the fan to maintain the liquid temperature of the radiator below a selected threshold value. As additional cooling is required, the electronic controller gradually and smoothly increases the power drawn from the engine to turn the fan to increase its speed towards a selected speed. The air permeability of the fan when freewheeling is significantly increased because no central shaft or support structure blocks the airflow through the fan.
    • 描述了一种用于将冷却空气通过车辆散热器的周向支撑的风扇组件。 风扇包括围绕风扇周边周向延伸的风扇环,风扇的叶片从中心区域延伸到风扇环。 风扇的整个重量由风扇支撑组件承担,风扇支撑组件围绕风扇环的周边延伸,在风扇流动的空气流动之外。 风扇是电动马达的转子。 风扇环的转子凸缘横跨风扇的旋转轴线延伸,为电机提供更大的扭矩优势。 电气控制电路选择性地控制风扇的速度以将散热器的液体温度维持在选定的阈值以下。 由于需要额外的冷却,电子控制器逐渐平稳地增加从发动机抽取的功率,以转动风扇以将其速度提高到所选择的速度。 空转时风扇的透气度显着增加,因为中心轴或支撑结构没有阻挡通过风扇的气流。
    • 54. 发明授权
    • Turbomolecular vacuum pump
    • 涡轮分子真空泵
    • US4768921A
    • 1988-09-06
    • US042627
    • 1987-04-23
    • Ueda ShinjiroOsami MatsushitaNaoyuki TamuraYoshiteru Miyatake
    • Ueda ShinjiroOsami MatsushitaNaoyuki TamuraYoshiteru Miyatake
    • F04D19/04F04D29/056F04D29/058F01D1/36
    • F04D19/048
    • A turbomolecular vacuum pump having stator blades disposed in a multistage fashion within a casing in an axial direction thereof, and rotor blades which are located between respectively adjacent stator blades and are mounted on an outer periphery of a rotor situated centrally of the casing. A motor rotor is fixed to a rotating member which is formed of the rotor having the rotor blades fixed to the outer periphery, and a motor stator opposite to the motor rotor is arranged so as to construct a drive mechanism for the rotating member. The rotating member is supported at a lower portion thereof by a pivot-type plane bearing, and a magnetic bearing is arranged in such a manner so as to oppose a lower end of the rotor and a supporting member for the rotating member.
    • 一种涡轮分子真空泵,其具有沿轴向方向在壳体内以多级方式设置的定子叶片,以及位于相邻的定子叶片之间并且安装在位于壳体中心的转子的外周上的转子叶片。 电动机转子固定在由具有固定在外周上的转子叶片的转子形成的旋转部件上,与电机转子相对的电动机定子配置成构成旋转部件的驱动机构。 旋转构件通过枢轴式平面轴承在其下部支撑,并且以与转子的下端相对的方式配置磁性轴承和用于旋转构件的支撑构件。