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1. 发明授权

US4609332A Turbo-molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4609332A
公开(公告)日：1986-09-02
申请号：US553180
申请日：1983-11-18
申请人： Masaharu Miki , Chiaki Urano
发明人： Masaharu Miki , Chiaki Urano
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058 , F16C39/06 , F04B17/00
CPC分类号： F04D29/058 , F04D19/048 , F16C25/045 , F16C32/0485 , F16C2360/45
摘要： A turbo-molecular pump characterized in that three out of five degrees of freedom except the rotation around the rotational axis of a shaft are actively controlled constrainingly by a pair of magnetic radius direction bearings and a pair of magnetic axial bearings, a bell-shaped rotor provided to cover the whole of magnetic bearing and a shaft which is supported by a magnetic bearing passively constraining the remaining two degrees of freedom, and said rotor is rotated at high speed by an inner-rotor type of a driving motor provided between a radius direction bearing and axial bearing.
摘要翻译：一种涡轮分子泵，其特征在于，除了轴的旋转轴线周围的旋转之外，五个自由度中的三个自由度被一对磁性半径方向轴承和一对磁性轴向轴承，钟形转子被设置为覆盖整个磁性轴承和由被动地限制剩余两个自由度的磁性轴承支撑的轴，并且所述转子通过设置在半径方向上的驱动电动机的内转子类型而高速旋转轴承和轴向轴承。

2. 发明授权

US4826393A Turbo-molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4826393A
公开(公告)日：1989-05-02
申请号：US83692
申请日：1987-08-07
申请人： Masaharu Miki
发明人： Masaharu Miki
IPC分类号： F04D19/04 , F01D1/36
CPC分类号： F04D19/046
摘要： A turbo-molecular pump comprises three distinct stages corresponding to three distinct gas flow regions. The first stage comprises a plurality of stages of alternately arranged rotor blades and stator blades, and operates in a molecular flow region wherein the gas pressure is less than 10.sup.-3 torr. The second stage comprises a first helical groove formed either on the circumference of the rotor or on the circumference of the stator. The second stage is disposed downstream of the first stage and operates in a transition flow region wherein the gas pressure is from 10.sup.-3 to 1 torr. The third stage comprises second and third helical grooves formed respectively on the circumference of the rotor and stator. The third stage is disposed downstream of the second stage and operates in a viscous flow region wherein the gas pressure is greater than 1 torr. An adequate pump compression ratio can be obtained from the ultra-high vacuum region to the low vacuum region so as to significantly widen the pump operation region.

3. 发明授权

US4717315A Small size axial-flow molecular pump using a magnetic bearing 失效
标题翻译：使用磁轴承的小尺寸轴流分子泵
公开(公告)号：US4717315A
公开(公告)日：1988-01-05
申请号：US694907
申请日：1985-01-25
申请人： Masaharu Miki , Tadao Ishizawa , Chiaki Urano
发明人： Masaharu Miki , Tadao Ishizawa , Chiaki Urano
IPC分类号： F16C32/04 , F04D19/04 , F04B17/00
CPC分类号： F04D19/048 , F16C32/044 , F16C2300/62
摘要： An axial-flow molecular pump has a first active magnetic bearing for axially supporting and controlling a pump member comprised of a set of permanent magnets on the upper end of the pump member cooperating with a set of permanent magnets fixedly mounted at the upper end of a pump housing, a first electromagnet coacting with the sets of permanent magnets and operative when energized for controlling the axial position of the pump member, and an axial sensor for detecting axial displacement of the pump member and accordingly controlling the energization of the first electromagnet. A second active magnetic bearing for radially supporting and controlling the pump member comprises a second electromagnet operative when energized for controlling the radial position of the pump member, and a radial sensor for detecting radial displacement of the pump member and accordingly controlling the energization of the second electromagnet. Radial vibrations of the pump member during rotation thereof are rapidly suppressed in a very short decay time period due to the two active magnetic bearings which have rapid response characteristics and are able to effect precise and accurate positioning of the pump member.
摘要翻译：轴向流分子泵具有第一主动磁轴承，用于轴向支撑和控制由泵组件上端组成的一组永磁体的泵构件，该泵组件与一固定地安装在泵壳体，与这组永磁体共同作用的第一电磁体，并且当被激励以用于控制泵构件的轴向位置时操作;以及轴向传感器，用于检测泵构件的轴向位移并因此控制第一电磁体的通电。用于径向支撑和控制泵构件的第二主动磁轴承包括用于控制泵构件的径向位置的通电时操作的第二电磁体和用于检测泵构件的径向位移的径向传感器，因此控制第二电磁铁由于具有快速响应特性并且能够实现泵构件的精确和精确定位的两个主动磁轴承，在非常短的衰减时间段内，泵构件在旋转期间的径向振动被迅速地抑制。

4. 发明授权

US4655678A Combined turbo-molecular pump 失效
标题翻译：组合式涡轮分子泵
公开(公告)号：US4655678A
公开(公告)日：1987-04-07
申请号：US704384
申请日：1985-02-22
申请人： Masaharu Miki
发明人： Masaharu Miki
IPC分类号： F04D19/04
CPC分类号： F04D19/046 , F04D17/168
摘要： A turbo-molecular pump has a housing containing a plurality of stationary plates which are alternately arranged with respect to a plurality of rotary plates connected to a rotationally driven rotor. Spiral flow grooves all having the same winding direction are formed on opposite sides of the stationary plates, and gas drawn through an inlet port of the housing flows downwardly through a plurality of axial passages formed in the stationary plates and then radially inwardly into the spiral flow grooves wherein the gas is compressed. Axial grooves in the rotor transport the compressed gas from the spiral flow grooves to a helical groove at the lower part of the housing which further compresses the gas and discharges the same through an outlet port.
摘要翻译：涡轮分子泵具有容纳多个静止板的壳体，所述固定板相对于连接到旋转驱动的转子的多个旋转板交替布置。所有具有相同卷绕方向的螺旋流动槽形成在固定板的相对侧上，并且通过壳体的入口抽出的气体向下流过形成在固定板中的多个轴向通道，然后径向向内流入螺旋流凹槽，其中气体被压缩。转子中的轴向沟槽将压缩气体从螺旋流动沟槽输送到外壳下部的螺旋槽，该沟槽进一步压缩气体并通过出口将其排出。

5. 发明授权

US4878813A Vacuum pump 失效
公开(公告)号：US4878813A
公开(公告)日：1989-11-07
申请号：US165719
申请日：1988-03-09
申请人： Masaharu Miki
发明人： Masaharu Miki
IPC分类号： F04D19/04 , F04D25/02
CPC分类号： F04D19/04 , F04D25/026 , F04D27/0261 , F04D29/054
摘要： A vacuum pump producing ultra high vacua has a housing containing a first set of rotor blades provided around a first rotor for producing ultra high vacua and a second set of rotor blades provided around a second rotor for producing low to high vacua wherein the first rotor and the second rotor are magnetically suspended during pump operation. The first rotor is disconnected from the second rotor during pump operation in a low to high vacuum range, and it is connected with the second rotor as the pump operation shifts from a high vacuum range to an ultra high vacuum range. Because of this feature, the pump operation ranging from a low vacuum range up to an ultra high vacuum range can be performed by a single pump.

6. 发明授权

US08763985B2 Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve 失效
标题翻译：板旋转装置，排气路径开度改变装置，排气装置，转移装置，束装置和闸阀
公开(公告)号：US08763985B2
公开(公告)日：2014-07-01
申请号：US12596686
申请日：2008-04-22
申请人： Masaharu Miki , Yoshihiro Enomoto
发明人： Masaharu Miki , Yoshihiro Enomoto
IPC分类号： F16K25/00 , F16K31/02
CPC分类号： F16K31/0675 , F16K3/06 , F16K31/042 , F16K31/0682
摘要： To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is turnably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.
摘要翻译：提供将移动体存储在壳体中的机构。闸阀具有用于改变滑板的径向和轴向位置的滑板和移动机构。轴是旋转轴，其轴向位移由轴向驱动机构控制，其旋转角度由径向驱动机构控制，并且由轴支撑弹簧可转动地支撑在壳体中，所述轴支撑弹簧由磁性轴承和锥形螺旋弹簧。通过控制电磁铁中的平衡重的吸引力，轴可以沿径向移动。此外，通过控制电磁铁中的电磁铁的吸引力，轴可以沿轴向移动。

7. 发明申请

US20100044607A1 PLATE ROTATING DEVICE, EXHAUST PATH OPENING DEGREE CHANGING DEVICE, EXHAUSTED DEVICE, TRANSFER DEVICE, BEAM DEVICE, AND GATE VALVE 失效
标题翻译：板旋转装置，排气路径开放度变化装置，排气装置，传送装置，光束装置和门阀
公开(公告)号：US20100044607A1
公开(公告)日：2010-02-25
申请号：US12596686
申请日：2008-04-22
申请人： Masaharu Miki , Yoshihiro Enomoto
发明人： Masaharu Miki , Yoshihiro Enomoto
IPC分类号： F16K31/06 , G02B26/02 , H02K33/12 , H02P8/00 , H02K7/09 , H02K37/04 , F16K3/06
CPC分类号： F16K31/0675 , F16K3/06 , F16K31/042 , F16K31/0682
摘要： To provide a mechanism in which a moving body can be stored in a housing. A gate valve has a slide plate and a moving mechanism for changing the positions in the radial and axial directions of the slide plate. A shaft is a rotating shaft the axial displacement of which is controlled by an axial driving mechanism and the angle of rotation of which is controlled by a radial driving mechanism, and is tumably supported in the housing by a shaft supporting spring consisting of a magnetic bearing and a conical coil spring. By controlling the attraction force of a balance weight in an electromagnet, the shaft can be moved in the radial direction. Also, by controlling the attraction force of an electromagnet target in the electromagnet, the shaft can be moved in the axial direction.
摘要翻译：提供将移动体存储在壳体中的机构。闸阀具有用于改变滑板的径向和轴向位置的滑板和移动机构。轴是旋转轴，其轴向位移由轴向驱动机构控制，其旋转角度由径向驱动机构控制，并且通过由支承弹簧组成的轴支撑弹簧可旋转地支撑在壳体中，和锥形螺旋弹簧。通过控制电磁铁中的平衡重的吸引力，轴可以沿径向移动。此外，通过控制电磁铁中的电磁铁的吸引力，轴可以沿轴向移动。

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