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1. 发明授权

US5961291A Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump 失效
标题翻译：具有磁悬浮转子的涡轮真空泵和用于以各种角度移动旋转器的控制单元，以从泵的内部刮下沉积物
公开(公告)号：US5961291A
公开(公告)日：1999-10-05
申请号：US921475
申请日：1997-09-02
申请人： Seiji Sakagami , Masahiro Mase , Chiaki Urano , Shinji Koyano , Yuichi Kinoshita , Takashi Nagaoka, deceased
发明人： Seiji Sakagami , Masahiro Mase , Chiaki Urano , Shinji Koyano , Yuichi Kinoshita , Takashi Nagaoka, deceased
IPC分类号： F04D27/00 , F04D19/04 , F04D29/70 , F04B49/02
CPC分类号： F04D19/048 , F04D17/168 , F04D23/008 , F04D29/70
摘要： A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.
摘要翻译：涡轮真空泵具有转子和磁性轴承。磁性轴承保持在具有吸入口和排气口的壳体中，并且可旋转地支撑转子。在转子中形成有外围流动泵级和螺杆泵级，使得排气口处的压力可处于或接近大气压力水平。在启动涡轮真空泵之前，操作磁性轴承以移动转子位置并刮掉沉积在泵内的反应产物。另外，在启动涡轮真空泵之前，泵的定子被加热以降低反应产物的结合力。因此，即使转子已经通过在泵的停止期间形成的沉积的反应产物的凝固而被锁定，泵也可以重新启动。

2. 发明授权

US5389888A Synchrotron radiation beam generator 失效
标题翻译：同步辐射束发生器
公开(公告)号：US5389888A
公开(公告)日：1995-02-14
申请号：US898511
申请日：1992-06-15
申请人： Chiaki Urano , Hiroyuki Suda
发明人： Chiaki Urano , Hiroyuki Suda
IPC分类号： F04D19/04 , F04D29/02 , F04D29/56 , G21K1/04 , H05H7/10 , H05H13/04
CPC分类号： H05H7/10 , G21K1/043 , H05H13/04
摘要： A radiation generator extracts a synchrotron radiation beam from an electron storing ring, through a high-vacuum atmosphere in a beam duct, while preventing loss of the high-level vacuum. A multistage axial-flow arrangement is interposed in the beam duct. Stators and rotors having a plurality of blades are alternately disposed along the axial flow arrangement. The tilt angle of some of the blades of each stator is variable. Loss of the high-level vacuum in the electron storing ring is prevented by tilting the blades having a variable tilt angle so that gas remaining in the rest of the system does not flow upstream to the high-vacuum side of the beam duct at times when the radiation beam is not passing through the beam duct.
摘要翻译：辐射发生器通过射束管道中的高真空气氛从电子存储环提取同步加速器辐射束，同时防止高级真空的损失。多级轴流装置插入梁管中。具有多个叶片的定子和转子沿轴向流动布置交替地设置。每个定子的一些叶片的倾斜角度是可变的。通过倾斜具有可变倾斜角度的叶片来防止电子存储环中的高级真空的损失，使得在系统的其余部分中残留的气体不会在波导管的高真空侧上游流动辐射束不通过光束管道。

3. 发明授权

US4717315A Small size axial-flow molecular pump using a magnetic bearing 失效
标题翻译：使用磁轴承的小尺寸轴流分子泵
公开(公告)号：US4717315A
公开(公告)日：1988-01-05
申请号：US694907
申请日：1985-01-25
申请人： Masaharu Miki , Tadao Ishizawa , Chiaki Urano
发明人： Masaharu Miki , Tadao Ishizawa , Chiaki Urano
IPC分类号： F16C32/04 , F04D19/04 , F04B17/00
CPC分类号： F04D19/048 , F16C32/044 , F16C2300/62
摘要： An axial-flow molecular pump has a first active magnetic bearing for axially supporting and controlling a pump member comprised of a set of permanent magnets on the upper end of the pump member cooperating with a set of permanent magnets fixedly mounted at the upper end of a pump housing, a first electromagnet coacting with the sets of permanent magnets and operative when energized for controlling the axial position of the pump member, and an axial sensor for detecting axial displacement of the pump member and accordingly controlling the energization of the first electromagnet. A second active magnetic bearing for radially supporting and controlling the pump member comprises a second electromagnet operative when energized for controlling the radial position of the pump member, and a radial sensor for detecting radial displacement of the pump member and accordingly controlling the energization of the second electromagnet. Radial vibrations of the pump member during rotation thereof are rapidly suppressed in a very short decay time period due to the two active magnetic bearings which have rapid response characteristics and are able to effect precise and accurate positioning of the pump member.
摘要翻译：轴向流分子泵具有第一主动磁轴承，用于轴向支撑和控制由泵组件上端组成的一组永磁体的泵构件，该泵组件与一固定地安装在泵壳体，与这组永磁体共同作用的第一电磁体，并且当被激励以用于控制泵构件的轴向位置时操作;以及轴向传感器，用于检测泵构件的轴向位移并因此控制第一电磁体的通电。用于径向支撑和控制泵构件的第二主动磁轴承包括用于控制泵构件的径向位置的通电时操作的第二电磁体和用于检测泵构件的径向位移的径向传感器，因此控制第二电磁铁由于具有快速响应特性并且能够实现泵构件的精确和精确定位的两个主动磁轴承，在非常短的衰减时间段内，泵构件在旋转期间的径向振动被迅速地抑制。

4. 发明授权

US4609332A Turbo-molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4609332A
公开(公告)日：1986-09-02
申请号：US553180
申请日：1983-11-18
申请人： Masaharu Miki , Chiaki Urano
发明人： Masaharu Miki , Chiaki Urano
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058 , F16C39/06 , F04B17/00
CPC分类号： F04D29/058 , F04D19/048 , F16C25/045 , F16C32/0485 , F16C2360/45
摘要： A turbo-molecular pump characterized in that three out of five degrees of freedom except the rotation around the rotational axis of a shaft are actively controlled constrainingly by a pair of magnetic radius direction bearings and a pair of magnetic axial bearings, a bell-shaped rotor provided to cover the whole of magnetic bearing and a shaft which is supported by a magnetic bearing passively constraining the remaining two degrees of freedom, and said rotor is rotated at high speed by an inner-rotor type of a driving motor provided between a radius direction bearing and axial bearing.
摘要翻译：一种涡轮分子泵，其特征在于，除了轴的旋转轴线周围的旋转之外，五个自由度中的三个自由度被一对磁性半径方向轴承和一对磁性轴向轴承，钟形转子被设置为覆盖整个磁性轴承和由被动地限制剩余两个自由度的磁性轴承支撑的轴，并且所述转子通过设置在半径方向上的驱动电动机的内转子类型而高速旋转轴承和轴向轴承。

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