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1. 发明授权

US07645126B2 Vacuum pump and semiconductor manufacturing apparatus 失效
标题翻译：真空泵和半导体制造装置
公开(公告)号：US07645126B2
公开(公告)日：2010-01-12
申请号：US10887234
申请日：2004-07-09
申请人： Shinichi Sekiguchi , Matsutaro Miyamoto
发明人： Shinichi Sekiguchi , Matsutaro Miyamoto
IPC分类号： F04B17/00 , F01D5/14
CPC分类号： F04D29/058 , F04D17/168 , F04D19/046 , F04D23/008 , F04D29/266 , F04D29/30
摘要： To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum.A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
摘要翻译：提供能够在大气压至高真空的压力范围内抽真空的真空泵，能够高速旋转以减小泵送性能并且能够产生完全无油的真空。用于排出气体的真空泵包括：由轴承22可旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部分10具有安装在主轴5上的第一旋转叶片13，固定在第一壳体12中的第一固定叶片14和进气口11; 以及具有安装在主轴5上的第二旋转叶片33的第二排气部分30，固定在第二壳体32中的第二固定叶片34和排气口31.进气口11位于主轴5和第一排气部10，轴承22和第二排气部30沿着主轴5轴向配置。

2. 发明申请

US20050025640A1 Vacuum pump and semiconductor manufacturing apparatus 失效
标题翻译：真空泵和半导体制造装置
公开(公告)号：US20050025640A1
公开(公告)日：2005-02-03
申请号：US10887234
申请日：2004-07-09
申请人： Shinichi Sekiguchi , Matsutaro Miyamoto
发明人： Shinichi Sekiguchi , Matsutaro Miyamoto
IPC分类号： F04D29/056 , F04D17/16 , F04D19/04 , F04D29/058 , F04B17/00
CPC分类号： F04D29/058 , F04D17/168 , F04D19/046 , F04D23/008 , F04D29/266 , F04D29/30
摘要： To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
摘要翻译：提供能够在大气压至高真空的压力范围内抽真空的真空泵，能够高速旋转以减小泵送性能并且能够产生完全无油的真空。用于排出气体的真空泵包括：由轴承22可旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部分10具有安装在主轴5上的第一旋转叶片13，固定在第一壳体12中的第一固定叶片14和进气口11; 以及具有安装在主轴5上的第二旋转叶片33的第二排气部分30，固定在第二壳体32中的第二固定叶片34和排气口31.进气口11位于主轴5和第一排气部10，轴承22和第二排气部30沿着主轴5轴向配置。

3. 发明授权

US07645116B2 Turbo vacuum pump 有权
标题翻译：涡轮真空泵
公开(公告)号：US07645116B2
公开(公告)日：2010-01-12
申请号：US11411896
申请日：2006-04-27
申请人： Hiroyuki Kawasaki , Shinichi Sekiguchi
发明人： Hiroyuki Kawasaki , Shinichi Sekiguchi
IPC分类号： F01D1/10
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008
摘要： A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
摘要翻译：本发明的涡轮式真空泵包括：用于沿轴向抽吸气体的吸入部; 排出部，其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮，以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮，用于通过离心牵引效应进一步排出排出的气体。一个或多个离心式叶轮固定在通过其的旋转轴上。一个或多个涡轮叶轮包括在涡轮叶轮部分中。

4. 发明申请

US20060263205A1 Turbo vacuum pump 有权
标题翻译：涡轮真空泵
公开(公告)号：US20060263205A1
公开(公告)日：2006-11-23
申请号：US11411896
申请日：2006-04-27
申请人： Hiroyuki Kawasaki , Shinichi Sekiguchi
发明人： Hiroyuki Kawasaki , Shinichi Sekiguchi
IPC分类号： F04D13/12
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008
摘要： A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.
摘要翻译：本发明的涡轮式真空泵1具有：沿轴向抽吸气体的吸入部23A; 排出部50，其中旋转叶轮70,24和固定叶轮71,28交替布置; 用于旋转所述旋转叶轮70,24的旋转轴21; 固定在所述旋转轴21的吸附部侧端面15的涡轮叶轮部73; 所述旋转叶轮70,24包括用于沿所述轴向方向排出所述吸入气体的一个或多个涡轮叶轮70和位于所述一个或多个涡轮叶轮70下游的一个或多个离心式叶轮24，用于将所述排出气体进一步排出离心拖曳效应; 并且所述一个或多个离心式叶轮24固定到通过其的所述旋转轴21; 所述一个或多个涡轮叶轮70包括在所述涡轮叶轮部分73中。

5. 发明授权

US06519273B2 Magnetic bearing and circulation fan apparatus 失效
标题翻译：磁轴承和循环风机
公开(公告)号：US06519273B2
公开(公告)日：2003-02-11
申请号：US09785304
申请日：2001-02-20
申请人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Shunichi Aiyoshizawa , Toshimitsu Barada , Atsushi Ooyama
发明人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Shunichi Aiyoshizawa , Toshimitsu Barada , Atsushi Ooyama
IPC分类号： H01S322
CPC分类号： F16C32/0465 , F16C32/0459 , F16C32/0468 , F16C32/047 , F16C2300/42
摘要： A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering from corrosion. The magnetic bearing has an electromagnet for supporting a levitated body, a displacement sensor for detecting a levitated position of the levitated body, and a controller for supplying signals and excitation currents to the displacement sensor and the electromagnet through cables. An electromagnet target of the magnetic bearing that generates variations in magnetic fields due to rotation of the levitated body, is constructed of a single piece of ferromagnetic material, and is provided with an electrical insulation structure oriented parallel to magnetic fluxes generated by the electromagnet.
摘要翻译：磁性轴承能够可旋转地支撑非接触地设置在填充有腐蚀性气体处理物质的气密密封容器中的悬浮体，同时不污染气体环境并遭受腐蚀。磁性轴承具有用于支撑悬浮体的电磁体，用于检测悬浮体的悬浮位置的位移传感器，以及通过电缆向位移传感器和电磁体提供信号和激励电流的控制器。磁悬浮轴承的电磁铁靶由于悬浮体的旋转产生磁场的变化，由单片铁磁材料构成，并具有与电磁铁产生的磁通平行取向的电绝缘结构。

6. 发明授权

US06464472B1 Circulation fan apparatus and circulation-fan driving motor 有权
标题翻译：循环风机和循环风机驱动电机
公开(公告)号：US06464472B1
公开(公告)日：2002-10-15
申请号：US09622367
申请日：2000-08-16
申请人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa , Takeshi Kawamura
发明人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa , Takeshi Kawamura
IPC分类号： F04B1700
CPC分类号： F04D29/058 , F04D25/06 , F16C32/047 , F16C32/0474 , F16C2300/42 , F16C2360/44
摘要： A circulation fan apparatus including a hermetic vessel 1 containing a corrosive process gas therein, and a circulation fan 2 installed in the hermetic vessel, rotors 2-1, 2-2 of the circulation fan are rotatably supported by bearings, wherein the bearings comprises control-type radial magnetic bearings 4, 5 and at least control-type axial magnetic bearing 6, 7, displacement sensor targets 4-1, 5-1, 6-1, and 7-1 and rotor-side magnetic poles 4-2, 5-2, 6-2, and 7-2 of radial magnetic bearings 4 and 5 and axial magnetic bearings 6 and 7 are fixed to the rotors 2-1 and 2-2 of the circulation fan 2 and are disposed in the hermetic space communicating with the hermetic vessel, and displacement sensors 4-3, 5-3, 6-3, and 7-3 and stator-side magnetic poles 4-4, 5-4, 6-4, and 7-4 opposing the displacement sensor targets and rotor-side magnetic poles are disposed outside of the hermetic vessel with cans 14, 15, 17, and 18 interposed therebetween, whereby even when the circulation fan 2 is rotated at a high speed and under a high load, the process gas is not contaminated, ensuring maintenance-free operation, and furthermore, an installation space can be reduced.
摘要翻译：一种循环风扇装置，包括其中含有腐蚀性工艺气体的密封容器1和安装在密封容器中的循环风扇2，循环风扇的转子2-1,2-2由轴承可旋转地支撑，其中轴承包括控制型径向磁轴承4,5和至少控制型轴向磁轴承6,7位移传感器目标4-1,5-1,6-1和7-1以及转子侧磁极4-2，径向磁轴承4和5以及轴向磁轴承6和7的5-2,6-2和7-2固定在循环风扇2的转子2-1和2-2上，并设置在密封空间与密封容器连通，以及位移传感器4-3,5-3,6-3和7-3以及与位移相反的定子侧磁极4-4,5-4,6-4和7-4 传感器靶和转子侧磁极设置在密封容器的外侧，其间插入有罐14,15,17和18，由此即使循环风扇2是旋转在高速和高负载下，处理气体不被污染，确保免维护操作，此外，可以减少安装空间。

7. 发明授权

US06404794B1 Excimer laser apparatus 失效
标题翻译：准分子激光装置
公开(公告)号：US06404794B1
公开(公告)日：2002-06-11
申请号：US09676779
申请日：2000-10-02
申请人： Shinichi Sekiguchi , Masaru Osawa , Satoshi Mori , Tadashi Sato , Toshiharu Nakazawa
发明人： Shinichi Sekiguchi , Masaru Osawa , Satoshi Mori , Tadashi Sato , Toshiharu Nakazawa
IPC分类号： H01S322
CPC分类号： F16C32/0444 , F16C32/047 , F16C32/0493 , F16C32/0497 , F16C2380/26 , H01S3/036 , H01S3/225 , H02K7/09
摘要： An excimer laser apparatus comprises a container sealing a laser gas including a halogen gas therein, a pair of discharge electrodes disposed in the container for inducing an electric discharge capable of oscillating a laser light, and a circulating fan with a shaft for producing a high-speed laser gas stream between a pair of the discharge electrodes. Both ends of the shaft are rotatably supported by rotor-stator mechanisms, or one end of the shaft is rotatably supported by a rotor-stator mechanism, and the other end of the shaft is supported by a magnetic bearing. The rotor-stator mechanism comprises a rotor attached to the shaft of the circulating fan, a stator provided at a position opposed to the rotor, an electric motor winding provided in the stator for applying torque to the rotor, and a position control winding provided in the stator for producing a magnetic force to levitate and support the rotor.
摘要翻译：准分子激光装置包括：密封包含卤素气体的激光气体的容器，设置在容器内的一对放电电极，用于引起能够振荡激光的放电;以及循环风扇，一对放电电极之间的高速激光气流。轴的两端由转子 - 定子机构可旋转地支撑，或者轴的一端由转子 - 定子机构可旋转地支撑，并且轴的另一端由磁轴承支撑。转子 - 定子机构包括附接到循环风扇的轴的转子，设置在与转子相对的位置的定子，设置在定子中的用于向转子施加扭矩的电动机绕组以及设置在转子中的位置控制绕组用于产生用于悬浮和支撑转子的磁力的定子。

8. 发明授权

US06366039B1 Excimer laser device 有权
标题翻译：准分子激光装置
公开(公告)号：US06366039B1
公开(公告)日：2002-04-02
申请号：US09553466
申请日：2000-04-19
申请人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa
发明人： Shinichi Sekiguchi , Hiroyuki Shinozaki , Toshimitsu Barada , Toshiharu Nakazawa
IPC分类号： H01S302
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： An excimer laser device which is capable of keeping the rotational speed of a fan constant and uniformizing a laser gas flow between main discharge electrodes even when the pressure of a laser gas filled in a casing varies. The excimer laser device includes a casing filled with a laser gas; a pair of main discharge electrodes disposed in the casing for producing an electric discharge to discharge-pump the laser gas at a high repetition rate; a fan for producing a high-speed laser gas flow between the main discharge electrodes; bearings, the fan having a rotatable shaft rotatably supported by the bearings; a motor for actuating the fan; a rotational speed detecting device for detecting a rotational speed of the fan; and control device for controlling at least one of a voltage and a frequency to be supplied to the motor based on the rotational speed of the fan detected by the rotational speed detecting device, thereby to control the rotational speed of the fan at a constant level.
摘要翻译：即使在填充在壳体中的激光气体的压力变化的情况下，能够使风扇的旋转速度恒定并使主放电电极之间的激光气流均匀化的准分子激光装置。准分子激光装置包括填充有激光气体的壳体; 一对主放电电极，设置在壳体中，用于产生放电，以高重复率对激光气体进行泵浦; 用于在主放电电极之间产生高速激光气流的风扇; 所述风扇具有由所述轴承可旋转地支撑的可旋转轴; 用于致动风扇的电动机; 用于检测风扇的转速的转速检测装置; 以及控制装置，用于根据由转速检测装置检测到的风扇的转速来控制要提供给电动机的电压和频率中的至少一个，从而将风扇的转速控制在恒定水平。

9. 发明授权

US08066495B2 Turbo vacuum pump and semiconductor manufacturing apparatus having the same 有权
标题翻译：涡轮真空泵和具有相同功能的半导体制造装置
公开(公告)号：US08066495B2
公开(公告)日：2011-11-29
申请号：US12613854
申请日：2009-11-06
申请人： Shinichi Sekiguchi , Hiroaki Ogamino , Hiroyasu Kawashima
发明人： Shinichi Sekiguchi , Hiroaki Ogamino , Hiroyasu Kawashima
IPC分类号： F04B35/04
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译：涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

10. 发明申请

US20100047096A1 TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING THE SAME 有权
标题翻译：涡轮真空泵及其半导体制造设备
公开(公告)号：US20100047096A1
公开(公告)日：2010-02-25
申请号：US12613854
申请日：2009-11-06
申请人： Shinichi Sekiguchi , Hiroaki Ogamino , Hiroyasu Kawashima
发明人： Shinichi Sekiguchi , Hiroaki Ogamino , Hiroyasu Kawashima
IPC分类号： F04D19/04 , F04D29/043 , F04D29/20
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译：涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。

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