会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Magnetic bearing control device and turbo-molecular pump device
    • 磁轴承控制装置和涡轮分子泵装置
    • US06398524B1
    • 2002-06-04
    • US09555648
    • 2000-06-02
    • Akiko TairaHiroyuki ChinoToshiharu NakazawaMatsutaro Miyamoto
    • Akiko TairaHiroyuki ChinoToshiharu NakazawaMatsutaro Miyamoto
    • F04B1700
    • F16C32/0446F04D19/048F16C2360/45
    • The present invention is to provide a magnetic bearing controller capable of reliably controlling the position of a floating member at a target position, even when the length of the cable connecting the magnetic bearing and the controller is changed. The magnetic bearing controller comprises: an electromagnet for supporting a floating member in a floating state; sensors (Z1, Z2) for sensing the floating position of the floating member; and a controller for supplying sensor signals and an exciting currents via cables to the sensors and electromagnets, respectively, in order to support the floating member at a predetermined floating position based on signals received from the sensors, wherein the controller comprises. a signal source (11) for supplying an AC signal to the sensors (Z1, Z2); a pair of sensor drive circuits (12) for supplying differential signals via cables (C) connected to both ends of the serially connected sensor elements (Z1, Z2); whereby the cables are disposed with balanced condition and capacitance generated by the length of the cable is canceled. The main pump section and controller of a turbo-molecular pump apparatus can be integrally formed.
    • 本发明是提供一种能够可靠地控制浮动构件在目标位置的位置的磁轴承控制器,即使当连接磁轴承和控制器的电缆的长度改变时,磁轴承控制器包括:电磁体 用于支持浮动状态的浮动元件; 传感器(Z1,Z2),用于感测浮动部件的浮动位置; 以及控制器,用于分别通过电缆将传感器信号和激励电流提供给传感器和电磁体,以便基于从传感器接收的信号将浮动构件支撑在预定的浮动位置,其中控制器包括。 用于向传感器(Z1,Z2)提供AC信号的信号源(11); 一对传感器驱动电路,用于通过连接到串联的传感器元件(Z1,Z2)两端的电缆(C)提供差分信号; 由此电缆以平衡的状态设置,并且由电缆的长度产生的电容被取消。 涡轮分子泵装置的主泵部分和控制器可以一体形成。
    • 3. 发明授权
    • Turbomolecular pump
    • 涡轮分子泵
    • US06220831B1
    • 2001-04-24
    • US09133331
    • 1998-08-13
    • Atsushi ShiokawaMatsutaro MiyamotoHiroshi SobukawaToshiharu Nakazawa
    • Atsushi ShiokawaMatsutaro MiyamotoHiroshi SobukawaToshiharu Nakazawa
    • F04B1704
    • F04D17/168F04D19/04
    • A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
    • 一种涡轮分子泵,包括转子和定子,其容纳在壳体中并在其间形成排气通道,以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体,所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构,其经由阀体支撑构件驱动所述阀体,所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中,用于在通孔内非接触地支撑阀体支撑构件,由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。
    • 10. 发明授权
    • Bearing unit
    • 轴承单元
    • US5679992A
    • 1997-10-21
    • US729031
    • 1996-10-09
    • Matsutaro MiyamotoShun-ichi AiyoshizawaToshiharu Nakazawa
    • Matsutaro MiyamotoShun-ichi AiyoshizawaToshiharu Nakazawa
    • F16F15/08F04D19/04F16C32/04F16C39/06F16F15/03F16F15/04H02K7/08H02K7/09
    • F16C27/00F04D19/048F16C32/0425F16C32/0478F16C39/063F16C2360/45
    • A magnetic bearing unit is disclosed which comprises a rotor supported in a radial direction by magnetic effects generated by permanent magnets arranged within a passive radial magnetic bearing and supported in an axial direction by an actively-controlled axial magnetic bearing. The unit also comprises a movable member arranged between the stator and rotor, and the passive magnetic member is arranged between the movable member and the rotor. At least first and second pairs of axially opposing faces are provided on the stator and the movable member respectively. A biasing means is in functional association with the movable member for forcing the movable member to shorten a spacing between the first pair of opposing faces. The first pair of opposing faces is formed with a recess having a curved cross sectional shape on each of the opposing faces, and a plurality of balls having a radius not more than a radius of the recess are disposed in the recess. The second pair of opposing faces are bridged with a damping member made of an elastic material. The resulting bearing unit in such a compressive state can be used in any orientation without causing any operational problems such as those encountered when the conventional magnetic bearing is used in a horizontal orientation. The unit is easy to control and produces stable smooth operation in radial and axial directions at all times.
    • 公开了一种磁轴承单元,其包括通过由被动径向磁轴承中布置的永磁体产生的并且通过主动控制的轴向磁轴承沿轴向支撑的磁力作用沿径向方向支撑的转子。 该单元还包括设置在定子和转子之间的可动构件,并且被动磁构件设置在可动构件和转子之间。 至少第一和第二对轴向相对的面分别设置在定子和可动件上。 偏压装置与可动件功能相关联,用于迫使可动件缩短第一对相对面之间的间距。 第一对相对面形成有在每个相对面上具有弯曲横截面形状的凹部,并且具有半径不大于凹部半径的多个球设置在凹部中。 第二对相对面与由弹性材料制成的阻尼构件桥接。 所得到的轴承单元处于这种压缩状态,可以以任何方向使用,而不会引起任何操作问题,例如当常规磁性轴承以水平方向使用时所遇到的问题。 该单元易于控制,始终在径向和轴向方向均匀平稳运行。