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11. 发明授权

US08878130B2 Scanning electron microscope and scanning transmission electron microscope 有权
标题翻译：扫描电子显微镜和扫描透射电子显微镜
公开(公告)号：US08878130B2
公开(公告)日：2014-11-04
申请号：US14232526
申请日：2012-07-19
申请人： Hiromi Inada , Kuniyasu Nakamura
发明人： Hiromi Inada , Kuniyasu Nakamura
IPC分类号： H01J37/26 , H01J37/28 , H01J37/244 , H01J37/153 , H01J37/21 , G01N23/22
CPC分类号： H01J37/263 , G01N23/2206 , H01J37/153 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/153 , H01J2237/1532 , H01J2237/21 , H01J2237/221 , H01J2237/225 , H01J2237/226 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2802
摘要： A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.
摘要翻译：根据本发明的扫描透射电子显微镜包括具有小球面像差系数的电子透镜系统，用于实现0.1nm原子尺寸结构的三维观察。根据本发明的扫描透射电子显微镜还包括能够改变照明角度的孔; 能够改变电子束探头的探头尺寸和照明角度的照明电子透镜系统; 二次电子检测器（9）; 透射电子检测器（13）; 前向散射电子束检测器（12）; 聚焦单元（16）; 用于识别图像对比度的图像处理器; 用于计算图像清晰度的图像处理器; 用于图像的三维重建的处理器; 以及用于混合二次电子信号和样本前向散射电子信号的混合器（18）。

12. 发明申请

US20140194314A1 Multi-Color Nanoscale Imaging Based On Nanoparticle Cathodoluminescence 有权
标题翻译：基于纳米粒子阴极发光的多色纳米成像
公开(公告)号：US20140194314A1
公开(公告)日：2014-07-10
申请号：US14125934
申请日：2012-06-13
申请人： Ronald Walsworth , Jeff Lichtman , Narayanan Kasthuri , David Glenn , Huiliang Zhang , Richard Schalek
发明人： Ronald Walsworth , Jeff Lichtman , Narayanan Kasthuri , David Glenn , Huiliang Zhang , Richard Schalek
IPC分类号： G01N23/225 , G01N33/543
CPC分类号： G01N23/2254 , G01N33/54373 , G01N2223/403 , G01N2223/418 , G01N2223/612 , H01J37/22 , H01J37/244 , H01J2237/225 , H01J2237/2808
摘要： Multi-color CL images of nanoparticle samples may be generated, by irradiating with a scanning electron beam a nanoparticle sample that containing a plurality of spectrally distinct optical emitters configured to generate CL light at respective different color channels, then detecting the CL light from the nanoparticles to generate multi-color NP-CL images of the nanoparticle sample. In some embodiments, SE (secondary electron) images of the sample may be acquire, substantially simultaneously with the acquisition of the CL images, so as to generate correlative NP-CL and SE images of the nanoparticle sample. In some embodiments, the nanoparticles may be surface-functionalized so that the nanoparticles selectively bind only to particular structures of interest.
摘要翻译：可以通过用扫描电子束照射纳米颗粒样品来产生纳米颗粒样品的多色CL图像，所述纳米颗粒样品包含被配置为在各个不同颜色通道产生CL光的多个光谱不同的光发射器，然后检测来自纳米颗粒的CL光以产生纳米颗粒样品的多色NP-CL图像。在一些实施例中，样本的SE（二次电子）图像可以在获取CL图像的同时获取，以便产生纳米颗粒样品的相关NP-CL和SE图像。在一些实施方案中，纳米颗粒可以被表面官能化，使得纳米颗粒选择性地仅结合特定的感兴趣结构。

13. 发明授权

US4560872A Method and apparatus for image formation 失效
标题翻译：图像形成方法和装置
公开(公告)号：US4560872A
公开(公告)日：1985-12-24
申请号：US491960
申请日：1983-05-02
申请人： Ariel D. Antonovsky
发明人： Ariel D. Antonovsky
IPC分类号： G01D7/00 , G01D7/08 , G01N23/04 , G01N23/22 , G01N23/225 , G01T1/00 , G01T1/29 , H01J37/22 , H01J37/28 , H04N9/43 , H01J37/256
CPC分类号： H01J37/28 , H01J37/22 , H04N9/43 , H01J2237/225
摘要： A method of forming a color image using image signals generated by a scanning electron microscope. Three different image signals are generated, a first representing a monochromatic image derived from secondary electrons of energies over a broad range of energies, a second representing a monochromatic image derived from secondary electrons having high energies only and a third representing a monochromatic image derived from backscattered electrons. The three so generated image signals are used to construct the color image by assigning respective colors of an additive primary set to the monochromatic images represented by the three signals. The image signals are combined to form the color image by a process which results in additive mixing, in the color image, of the three monochromatic images.
摘要翻译： PCT No.PCT / AU82 / 00147 Sec。 371日期：1983年5月2日 102（e）日期1983年5月2日PCT提交1982年9月1日PCT公布。第WO83 / 00921号公报 1983年3月17日。使用扫描电子显微镜产生的图像信号形成彩色图像的方法。产生三个不同的图像信号，第一个表示在宽范围能量上源自能量的二次电子的单色图像，第二个表示从仅具有高能量的二次电子导出的单色图像，第三个代表源自背散射的单色图像电子。这三个如此生成的图像信号被用于通过将由三个信号表示的单色图像分配相加的主要集合的颜色来构造彩色图像。图像信号被组合以通过导致在彩色图像中的三个单色图像的加和混合的处理来形成彩色图像。

14. 发明申请

US20180330917A1 Electron Microscope and Control Method 审中-公开
公开(公告)号：US20180330917A1
公开(公告)日：2018-11-15
申请号：US15972744
申请日：2018-05-07
申请人： JEOL Ltd.
发明人： Akira Abe
IPC分类号： H01J37/28 , H01J37/147 , H01J37/22 , H01J37/252 , G01N23/225
CPC分类号： H01J37/28 , G01N23/225 , G06T7/11 , G06T7/136 , G06T2200/24 , G06T2207/10061 , G06T2207/20104 , H01J37/147 , H01J37/222 , H01J37/252 , H01J2237/225 , H01J2237/2803 , H01J2237/2807
摘要： An electron microscope includes: a display control unit which sequentially acquires electron microscope images of a sample and causes a display unit to display the electron microscope images as a live image; an analysis area setting unit which sets an analysis area on the sample based on a designated position on the live image designated by pointing means; and an analysis control unit which performs control for executing elemental analysis of the set analysis area. The analysis area setting unit sets, as the analysis area, an area on the sample which corresponds to a continuous area including the designated position and having brightness comparable to brightness of the designated position.

15. 发明申请

US20170169558A1 3D PROFILING SYSTEM OF SEMICONDUCTOR CHIP AND METHOD FOR OPERATING THE SAME 审中-公开
公开(公告)号：US20170169558A1
公开(公告)日：2017-06-15
申请号：US15291590
申请日：2016-10-12
申请人： Samsung Electronics Co., Ltd.
发明人： Jung Soo KIM , Jin Kwan KIM , Chung Sam JUN , Yu sin YANG , Soo Seok LEE
IPC分类号： G06T7/00 , H01J37/28 , G01Q30/02 , G06T7/50 , G06K9/46
CPC分类号： G06T7/0004 , G01Q30/02 , G06K9/4604 , G06T7/41 , G06T7/50 , G06T7/529 , G06T2207/10028 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/225 , H01J2237/281
摘要： A 3D profiling system of a semiconductor chip is provided and includes a storage unit that receives scanning electron microscope (SEM) images of a plurality of semiconductor devices having respective data with respect to a plurality of different components and gray levels of each SEM image. An extraction unit that performs principal component analysis (PCA) on the gray level of the SEM image and separates principal components from among the plurality of different components is also part of the system. Additionally, a calculation unit receives provision of actually measured values of the plurality of semiconductor devices, and applies a multiple linear regression to the principal components based on the measured values to complete a 3D profile of the semiconductor chip.

16. 发明授权

US09541512B2 Multi-color nanoscale imaging based on nanoparticle cathodoluminescence 有权
标题翻译：基于纳米颗粒阴极发光的多色纳米成像
公开(公告)号：US09541512B2
公开(公告)日：2017-01-10
申请号：US14125934
申请日：2012-06-13
申请人： Ronald Walsworth , Jeff Lichtman , Narayanan Kasthuri , David Glenn , Huiliang Zhang , Richard Schalek
发明人： Ronald Walsworth , Jeff Lichtman , Narayanan Kasthuri , David Glenn , Huiliang Zhang , Richard Schalek
IPC分类号： G01N23/225 , H01J37/22 , H01J37/244 , G01N33/543
CPC分类号： G01N23/2254 , G01N33/54373 , G01N2223/403 , G01N2223/418 , G01N2223/612 , H01J37/22 , H01J37/244 , H01J2237/225 , H01J2237/2808
摘要： Multi-color CL images of nanoparticle samples may be generated, by irradiating with a scanning electron beam a nanoparticle sample that containing a plurality of spectrally distinct optical emitters configured to generate CL light at respective different color channels, then detecting the CL light from the nanoparticles to generate multi-color NP-CL images of the nanoparticle sample. In some embodiments, SE (secondary electron) images of the sample may be acquire, substantially simultaneously with the acquisition of the CL images, so as to generate correlative NP-CL and SE images of the nanoparticle sample. In some embodiments, the nanoparticles may be surface-functionalized so that the nanoparticles selectively bind only to particular structures of interest.
摘要翻译：可以通过用扫描电子束照射纳米颗粒样品来产生纳米颗粒样品的多色CL图像，所述纳米颗粒样品包含被配置为在各个不同颜色通道产生CL光的多个光谱不同的光发射器，然后检测来自纳米颗粒的CL光以产生纳米颗粒样品的多色NP-CL图像。在一些实施例中，样本的SE（二次电子）图像可以在获取CL图像的同时获取，以便产生纳米颗粒样品的相关NP-CL和SE图像。在一些实施方案中，纳米颗粒可以被表面官能化，使得纳米颗粒选择性地仅结合特定的感兴趣结构。

17. 发明申请

US20150122992A1 Sub-pixel Analysis and Display of Fine Grained Mineral Samples 有权
标题翻译：细粒度矿物样品的亚像素分析与显示
公开(公告)号：US20150122992A1
公开(公告)日：2015-05-07
申请号：US14073523
申请日：2013-11-06
申请人： FEI Company
发明人： Michael James Owen , Garth Howell , Ashley Donaldson
IPC分类号： H01J37/22
CPC分类号： G01N23/225 , G01N2223/402 , G01N2223/616 , H01J2237/225 , H01J2237/2442
摘要： Method and apparatus for analysis and display of fine grained mineral samples. A portion of the sample is illuminated with a charged particle beam. Emitted radiation is detected, and a sample emission spectrum is generated and fit with a plurality of standard emission spectra of minerals in a candidate mineral composition. A mineral composition whose emission spectrum best fits the sample emission spectrum is selected from a plurality of candidate mineral compositions. An assigned color is received for each mineral in the selected mineral composition, and the assigned colors are blended according to the proportion of each mineral in the selected mineral composition. An image pixel corresponding to the portion of the sample is rendered for display.
摘要翻译：分析和显示细粒矿物样品的方法和装置。用带电粒子束照射样品的一部分。检测到发射的辐射，并且生成样品发射光谱并与候选矿物组合物中的矿物质的多个标准发射光谱拟合。从多种候选矿物组合物中选择最适合样品发射光谱的发射光谱的矿物组合物。对所选择的矿物组合物中的每种矿物接收分配的颜色，并且根据所选择的矿物组合物中的每种矿物的比例来调配所分配的颜色。渲染与样本部分对应的图像像素进行显示。

18. 发明申请

US20060124850A1 Scanning interference electron microscope 失效
标题翻译：扫描干涉电子显微镜
公开(公告)号：US20060124850A1
公开(公告)日：2006-06-15
申请号：US11294470
申请日：2005-12-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , G03H5/00 , H01J37/023 , H01J37/244 , H01J2237/1502 , H01J2237/1514 , H01J2237/225 , H01J2237/228 , H01J2237/2447 , H01J2237/24495 , H01J2237/24564 , H01J2237/2487 , H01J2237/2614 , H01J2237/2802 , H01J2237/2803
摘要： The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.
摘要翻译：常规检测技术在检测干涉条纹方面存在以下问题：（1）设置和调整复杂，难以进行; （2）相位图像和振幅图像不能同时显示; （3）电子束的检测效率低。本发明提供了扫描干涉电子显微镜，其提高了电子束干涉条纹的检测效率，并且使得用户能够在样本的微区域中容易地观察电磁信息作为高S / N比的扫描图像最佳条件。

19. 发明授权

US3628014A Scanning electron microscope with color display means 失效
标题翻译：扫描电子显微镜与彩色显示方式
公开(公告)号：US3628014A
公开(公告)日：1971-12-14
申请号：US3628014D
申请日：1969-12-22
申请人： BOEING CO
发明人： GRUBIC LEE R JR
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/22 , H01J37/266 , H01J37/28 , H01J2237/225
摘要： A scanning electron microscope and system wherein small surface potential differences are rendered visible as color shifts on a color CRT (cathode-ray tube) display device. A plurality of different surface potentials are detected respectively by scintillation detectors which are coupled to photomultipliers and then amplifiers. The amplifier output signals representative of several different means surface potentials at scanned points of the specimen are coupled respectively to the three signal control grids of a color CRT in the case of a three scintillating detector-three channel system and the color combinations of the primary colors displayed are indicative of surface potentials in between the mean potentials thus making small differences of the specimen surface potential readily discernible to the eye as small color shifts.

20. 发明授权

US09093250B2 Scanning transmission electron microscope system, image processing method, and image processing apparatus 有权
标题翻译：扫描透射电子显微镜系统，图像处理方法和图像处理装置
公开(公告)号：US09093250B2
公开(公告)日：2015-07-28
申请号：US14483522
申请日：2014-09-11
申请人： FUJITSU LIMITED
发明人： Takashi Yamazaki , Yasutoshi Kotaka
IPC分类号： H01J37/28 , H01J37/244 , G01N23/04 , G01N13/12 , H01J37/22
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/225 , H01J2237/24495 , H01J2237/2802
摘要： A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum.
摘要翻译：扫描透射电子显微镜系统包括：环状暗场检测器; 电子能量损失光谱仪，被配置为从环状暗场检测器获取第一电子束的电子能量损失光谱谱; 以及图像处理装置，被配置为基于来自所述环形暗场检测器的输出信号生成第一STEM图像，并且基于所述电子能量损失光谱谱的积分值生成第二STEM图像。

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