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1. 发明授权

US07633064B2 Electric charged particle beam microscopy and electric charged particle beam microscope 失效
标题翻译：电荷粒子束显微镜和带电粒子束显微镜
公开(公告)号：US07633064B2
公开(公告)日：2009-12-15
申请号：US11773840
申请日：2007-07-05
申请人： Ruriko Tsuneta , Masanari Koguchi , Hiromi Inada
发明人： Ruriko Tsuneta , Masanari Koguchi , Hiromi Inada
IPC分类号： H01J37/153
CPC分类号： H01J37/1475 , G06T5/006 , H01J37/153 , H01J37/222 , H01J37/263 , H01J37/28 , H01J2237/1526 , H01J2237/1536 , H01J2237/221 , H01J2237/28 , H01J2237/2802 , H01J2237/2818 , H01J2237/2826 , H01J2237/3045
摘要： An electric charged particle beam microscope measures a geometric distortion at an arbitrary magnification with high precision, and corrects the geometric distortion. A geometric distortion at a first magnification is measured as an absolute distortion based on a standard specimen having a cyclic structure. A microscopic structure specimen is photographed at a geometric distortion measured first magnification and at a geometric distortion unmeasured second magnification. The image at the first magnification is equally transformed to the second magnification to generate a scaled image. The geometric distortion at the second magnification is measured as a relative distortion based on the scaled image. The absolute distortion at the second magnification is obtained on the basis of the absolute distortion at the first magnification and the relative distortion at the second magnification. Subsequently, the second magnification is replaced with the first magnification, and the relative distortion measurement is repeated.
摘要翻译：带电粒子束显微镜可以高精度地测量任意倍率的几何畸变，校正几何失真。基于具有循环结构的标准样品，测量第一倍率下的几何失真作为绝对变形。以几何失真测量的第一放大倍率和几何失真未测量的第二倍率拍摄微观结构样本。将第一放大倍率下的图像等效地变换为第二放大率以生成缩放图像。第二倍率下的几何畸变被测量为基于缩放图像的相对失真。基于第一倍率下的绝对失真和第二倍率下的相对失真，获得第二放大倍率下的绝对失真。随后，用第一倍率代替第二倍率，并重复相对失真测量。

2. 发明授权

US07372051B2 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system 有权
标题翻译：电荷粒子束显微镜，带电粒子束显微镜，临界尺寸测量和临界尺寸测量系统
公开(公告)号：US07372051B2
公开(公告)日：2008-05-13
申请号：US11189897
申请日：2005-07-27
申请人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
发明人： Ruriko Tsuneta , Hiromi Inada , Masanari Koguchi , Takahito Hashimoto
IPC分类号： G21K7/00 , H01J37/26
CPC分类号： H01J37/265 , G01N23/22 , H01J37/222 , H01J37/263 , H01J2237/223 , H01J2237/24592 , H01J2237/2823 , H01J2237/2826
摘要： Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a first image, whose magnification for the specimen is actually measured, is recorded, a second image, whose magnification for the specimen is unknown, is recorded, and the magnification of the second image for the first image is analyzed by using image analysis. Thereby, the magnification of the second image for the specimen is actually measured. Then, magnification is actually measured in the whole range of magnification by repeating the magnification analysis described above by taking the second image as the first image. Actually measuring the magnification of images for the specimen in the whole range of magnification and calibrating the same permits a reduction of magnification errors by a digit.
摘要翻译：在带电粒子束施加装置和关键尺寸测量仪器中，放大误差在所需的放大倍率范围内减小。为了实现这一点，记录实际测量样本的放大倍数的第一图像，记录其样本的放大倍数未知的第二图像，并且通过使用第一图像来分析第一图像的第二图像的放大率图像分析。由此，实际测定第2图像的放大率。然后，通过将第二图像作为第一图像重复上述的倍率分析，实际上在整个放大倍数中进行倍率测量。实际上，在整个放大倍率范围内测量样本的图像的放大倍率，可以通过数字缩小倍数误差。

3. 发明申请

US20060124850A1 Scanning interference electron microscope 失效
标题翻译：扫描干涉电子显微镜
公开(公告)号：US20060124850A1
公开(公告)日：2006-06-15
申请号：US11294470
申请日：2005-12-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , G03H5/00 , H01J37/023 , H01J37/244 , H01J2237/1502 , H01J2237/1514 , H01J2237/225 , H01J2237/228 , H01J2237/2447 , H01J2237/24495 , H01J2237/24564 , H01J2237/2487 , H01J2237/2614 , H01J2237/2802 , H01J2237/2803
摘要： The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.
摘要翻译：常规检测技术在检测干涉条纹方面存在以下问题：（1）设置和调整复杂，难以进行; （2）相位图像和振幅图像不能同时显示; （3）电子束的检测效率低。本发明提供了扫描干涉电子显微镜，其提高了电子束干涉条纹的检测效率，并且使得用户能够在样本的微区域中容易地观察电磁信息作为高S / N比的扫描图像最佳条件。

4. 发明授权

US07518111B1 Magnetic electron microscope 有权
标题翻译：磁电子显微镜
公开(公告)号：US07518111B1
公开(公告)日：2009-04-14
申请号：US11543787
申请日：2006-10-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： H01J37/27 , G01N23/04
CPC分类号： G01N23/04 , G03H5/00 , H01J37/26 , H01J2237/1514 , H01J2237/221 , H01J2237/2614
摘要： Below 50-nm-diameter extremely narrow electrically-conductive fiber is used instead of the electron beam biprism used in the conventional interference electron microscope method. A phenomenon is utilized where a focus-shifted shadow of this fiber is shifted from a straight line by a distance which is proportional to a differentiation of phase change amount of an electron beam due to a sample with respect to a direction perpendicular to the fiber. The phase change amount is quantified by calibrating this shift amount through its comparison with a shift amount caused by another sample in terms of which the corresponding phase change amount has been quantitatively evaluated in advance. The differentiation amount of the quantified phase change in the electron beam due to the sample is visualized, or eventually, is integrated thereby being transformed into absolute phase change amount to be visualized.
摘要翻译：使用低于50nm直径的非常窄的导电纤维来代替在常规干涉电子显微镜方法中使用的电子束双棱镜。使用这种现象，其中该光纤的聚焦移动阴影从直线移位一定距离，该距离与由于样品相对于垂直于光纤的方向的样品的电子束的相变量的微分成正比。通过与通过与预先对相应的相变量进行定量评价的另一个样品引起的移位量进行比较来校准该偏移量来量化相位变化量。由于样品而导致的电子束的量化相变的微分量被可视化，或最终被积分，从而被转换为绝对相变量以被可视化。

5. 发明授权

US07417227B2 Scanning interference electron microscope 失效
标题翻译：扫描干涉电子显微镜
公开(公告)号：US07417227B2
公开(公告)日：2008-08-26
申请号：US11294470
申请日：2005-12-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/28 , G03H5/00 , H01J37/023 , H01J37/244 , H01J2237/1502 , H01J2237/1514 , H01J2237/225 , H01J2237/228 , H01J2237/2447 , H01J2237/24495 , H01J2237/24564 , H01J2237/2487 , H01J2237/2614 , H01J2237/2802 , H01J2237/2803
摘要： The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.
摘要翻译：常规检测技术在检测干涉条纹方面存在以下问题：（1）设置和调整复杂，难以进行; （2）相位图像和振幅图像不能同时显示; （3）电子束的检测效率低。本发明提供了扫描干涉电子显微镜，其提高了电子束干涉条纹的检测效率，并且使得用户能够在样本的微区域中容易地观察电磁信息作为高S / N比的扫描图像最佳条件。

6. 发明授权

US07372029B2 Scanning transmission electron microscope and scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07372029B2
公开(公告)日：2008-05-13
申请号：US11806120
申请日：2007-05-30
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
摘要翻译：扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元通过扫描一次电子束。

7. 发明授权

US08334519B2 Multi-part specimen holder with conductive patterns 有权
标题翻译：具有导电图案的多部件样品架
公开(公告)号：US08334519B2
公开(公告)日：2012-12-18
申请号：US11745769
申请日：2007-05-08
申请人： Shiano Ono , Masanari Koguchi , Ruriko Tsuneta
发明人： Shiano Ono , Masanari Koguchi , Ruriko Tsuneta
IPC分类号： G01F23/00 , G21K5/08 , G21K5/10
CPC分类号： H01J37/28 , G01R31/307 , H01J37/04 , H01J37/20 , H01J37/3056 , H01J2237/2008 , H01J2237/24564 , H01J2237/2594 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： In a specimen analyzing apparatus such as a transmission electron microscope for analyzing the structure, composition and electron state of an observing specimen in operation by applying external voltage to the specimen to be observed, a specimen support (mesh) including a mesh electrode connectable to external voltage applying portions of the specimen and a specimen holder including a specimen holder electrode connectable to the mesh electrode and current inlet terminals as well are provided. Voltage is applied externally of the specimen analyzing apparatus to the external voltage applying portions of the specimen through the medium of the specimen holder electrode and mesh electrode.
摘要翻译：在透射电子显微镜等的试样分析装置中，通过对待观察的试样施加外部电压来分析观察试样的结构，组成和电子状态，包括可连接到外部的网状电极的试样支架（网状物）提供了试样的电压施加部分和包括可连接到网状电极和电流引入端子的样本保持器电极的试样保持器。通过样本保持器电极和网状电极的介质，将样本分析装置外部的电压施加到试样的外部电压施加部。

8. 发明授权

US07227144B2 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US07227144B2
公开(公告)日：2007-06-05
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

9. 发明申请

US20060151701A1 Scanning transmission electron microscope and scanning transmission electron microscopy 有权
标题翻译：扫描透射电子显微镜和扫描透射电子显微镜
公开(公告)号：US20060151701A1
公开(公告)日：2006-07-13
申请号：US11328173
申请日：2006-01-10
申请人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
发明人： Ruriko Tsuneta , Masanari Koguchi , Takahito Hashimoto , Kuniyasu Nakamura
IPC分类号： G21K7/00
CPC分类号： H01J37/1474 , H01J37/2955 , H01J2237/1501 , H01J2237/221 , H01J2237/2802
摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM (2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.
摘要翻译：扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。首先，对扫描线圈的控制被数字化。此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。

10. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

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