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1. 发明授权

US07417227B2 Scanning interference electron microscope 失效
标题翻译：扫描干涉电子显微镜
公开(公告)号：US07417227B2
公开(公告)日：2008-08-26
申请号：US11294470
申请日：2005-12-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/28 , G03H5/00 , H01J37/023 , H01J37/244 , H01J2237/1502 , H01J2237/1514 , H01J2237/225 , H01J2237/228 , H01J2237/2447 , H01J2237/24495 , H01J2237/24564 , H01J2237/2487 , H01J2237/2614 , H01J2237/2802 , H01J2237/2803
摘要： The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.
摘要翻译：常规检测技术在检测干涉条纹方面存在以下问题：（1）设置和调整复杂，难以进行; （2）相位图像和振幅图像不能同时显示; （3）电子束的检测效率低。本发明提供了扫描干涉电子显微镜，其提高了电子束干涉条纹的检测效率，并且使得用户能够在样本的微区域中容易地观察电磁信息作为高S / N比的扫描图像最佳条件。

2. 发明申请

US20080087821A1 Electron Beam System and Method of Operating the Same 失效
标题翻译：电子束系统及其操作方法
公开(公告)号：US20080087821A1
公开(公告)日：2008-04-17
申请号：US11873639
申请日：2007-10-17
申请人： Norihisa Mori
发明人： Norihisa Mori
IPC分类号： G21K5/04
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J37/248 , H01J2237/221 , H01J2237/225 , H01J2237/24465 , H01J2237/24475 , H01J2237/24495 , H01J2237/24507 , H01J2237/24535 , H01J2237/24585 , H01J2237/2801
摘要： An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.
摘要翻译：如果在包括加速电压的照射条件下原子序数差异相同时，能够一直显示相同亮度和相同对比度的背散射电子（BSE）图像的电子束系统（例如扫描电子显微镜或电子探针微量分析仪）并且当使用不同的仪器对样本进行成像时，发射电流变化或变化。

3. 发明授权

US5393976A Apparatus for displaying a sample image 失效
标题翻译：用于显示样本图像的装置
公开(公告)号：US5393976A
公开(公告)日：1995-02-28
申请号：US156626
申请日：1993-11-24
申请人： Hirotami Koike
发明人： Hirotami Koike
IPC分类号： H01J37/22 , H01J37/256
CPC分类号： B82Y15/00 , H01J37/224 , H01J37/228 , H01J2237/225 , H01J2237/24495 , H01J2237/2808
摘要： An apparatus for displaying a sample image comprises a scanning illumination system 3 for scanning a sample by an irradiation ray ray being relatively moved, a first detection portion 7 for detecting a first detection signal obtained from a continuous area of the sample by the irradiation ray ray, a second detection portion 9 for detecting a faint second detection signal obtained from a micro-discrete area of the sample by the irradiation ray ray, a signal processing portion 16 for processing the second detection signal such that a pixel size in accordance with the second detection signal is enlarged relative to a pixel size in accordance with the first detection signal, an image signal formation portion 17 for forming a superimposed image signal by superimposing the second detection signal processed by the signal processing portion upon the first detection signal, and an image display portion 19 for displaying an image of the sample in accordance with the superimposed image signal.
摘要翻译：用于显示样本图像的装置包括：扫描照明系统3，用于通过相对移动的照射光线扫描样品;第一检测部分7，用于检测通过照射射线射线从样品的连续区域获得的第一检测信号用于检测通过照射射线射线从样本的微分离区域获得的微弱的第二检测信号的第二检测部分9，用于处理第二检测信号的信号处理部分16，使得根据第二检测信号的像素尺寸检测信号相对于根据第一检测信号的像素尺寸被放大;图像信号形成部分17，用于通过将由信号处理部分处理的第二检测信号叠加在第一检测信号上而形成叠加图像信号;以及图像显示部分19，用于根据叠加的图像信号显示样本的图像。

4. 发明授权

US09714908B2 Sub-pixel analysis and display of fine grained mineral samples 有权
公开(公告)号：US09714908B2
公开(公告)日：2017-07-25
申请号：US14073523
申请日：2013-11-06
申请人： FEI Company
发明人： Michael James Owen , Garth Howell , Ashley Donaldson
IPC分类号： G21K7/00 , G01N23/225
CPC分类号： G01N23/225 , G01N2223/402 , G01N2223/616 , H01J2237/225 , H01J2237/2442
摘要： Method and apparatus for analysis and display of fine grained mineral samples. A portion of the sample is illuminated with a charged particle beam. Emitted radiation is detected, and a sample emission spectrum is generated and fit with a plurality of standard emission spectra of minerals in a candidate mineral composition. A mineral composition whose emission spectrum best fits the sample emission spectrum is selected from a plurality of candidate mineral compositions. An assigned color is received for each mineral in the selected mineral composition, and the assigned colors are blended according to the proportion of each mineral in the selected mineral composition. An image pixel corresponding to the portion of the sample is rendered for display.

5. 发明申请

US20150046097A1 METHOD AND DATA ANALYSIS SYSTEM FOR SEMI-AUTOMATED PARTICLE ANALYSIS USING A CHARGED PARTICLE BEAM 审中-公开
标题翻译：使用充电颗粒束的半自动粒子分析的方法和数据分析系统
公开(公告)号：US20150046097A1
公开(公告)日：2015-02-12
申请号：US14455811
申请日：2014-08-08
申请人： Carl Zeiss Microscopy Ltd.
发明人： Champ Gohil , Richard Moralee
IPC分类号： G01N23/225 , G06T7/00 , G06F3/0484
CPC分类号： G01N23/225 , G06F3/04845 , G06T7/0004 , G06T7/11 , G06T2200/24 , G06T2207/10061 , G06T2207/20104 , G06T2207/20112 , H01J37/28 , H01J2237/225 , H01J2237/2806 , H01J2237/2807
摘要： A data analysis system is disclosed for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data includes an image showing a structure. A graphical representation of the structure is displayed on the display by the graphical user interface. Separation data is generated representing at least one path of a separation cut, which separates pixels of the structure from each other. The separation cut is visually marked by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. Separate analysis data are generated for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.
摘要翻译：公开了一种用于根据由带电粒子显微镜产生的物体的微观数据产生分析数据的数据分析系统。微观数据包括显示结构的图像。结构的图形表示由图形用户界面显示在显示屏上。产生分离数据，代表分离切片的至少一个路径，其将结构的像素彼此分离。取决于分离数据，通过不同地标记表示的不同区域部分，通过分离切割彼此分离的结构的不同像素，通过图形用户界面来视觉地标记分割。根据微观数据和取决于分离数据，对对象的至少两个部分中的每一个生成分离分析数据。

6. 发明申请

US20140138542A1 SCANNING ELECTRON MICROSCOPE AND SCANNING TRANSMISSION ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜和扫描传输电子显微镜
公开(公告)号：US20140138542A1
公开(公告)日：2014-05-22
申请号：US14232526
申请日：2012-07-19
申请人： Hiromi Inada , Kuniyasu Nakamura
发明人： Hiromi Inada , Kuniyasu Nakamura
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , G01N23/2206 , H01J37/153 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0455 , H01J2237/0492 , H01J2237/153 , H01J2237/1532 , H01J2237/21 , H01J2237/221 , H01J2237/225 , H01J2237/226 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2802
摘要： A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (9); a transmission electron detector (13); a forward scattered electron beam detector (12); a focusing unit (16); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer (18) for mixing a secondary electron signal and a specimen forward scattered electron signal.
摘要翻译：根据本发明的扫描透射电子显微镜包括具有小球面像差系数的电子透镜系统，用于实现0.1nm原子尺寸结构的三维观察。根据本发明的扫描透射电子显微镜还包括能够改变照明角度的孔; 能够改变电子束探头的探头尺寸和照明角度的照明电子透镜系统; 二次电子检测器（9）; 透射电子检测器（13）; 前向散射电子束检测器（12）; 聚焦单元（16）; 用于识别图像对比度的图像处理器; 用于计算图像清晰度的图像处理器; 用于图像的三维重建的处理器; 以及用于混合二次电子信号和样本前向散射电子信号的混合器（18）。

7. 发明授权

US08426812B2 Microscope system, method for operating a charged-particle microscope 有权
标题翻译：显微镜系统，操作带电粒子显微镜的方法
公开(公告)号：US08426812B2
公开(公告)日：2013-04-23
申请号：US13287927
申请日：2011-11-02
申请人： Stewart Bean , Roger Rowland , Simon Hees
发明人： Stewart Bean , Roger Rowland , Simon Hees
IPC分类号： H01J37/26 , G01N23/00
CPC分类号： H01J37/222 , G02B21/367 , H01J37/244 , H01J37/26 , H01J2237/047 , H01J2237/22 , H01J2237/221 , H01J2237/225 , H01J2237/2482 , H01J2237/28
摘要： A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting; reading a third image of a third region using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.
摘要翻译：一种操作带电粒子显微镜的方法，所述方法包括：在第一设置中记录物体的第一区域的第一图像; 在第二设置中使用带电粒子显微镜记录物体的第二区域的第二图像; 使用所述带电粒子显微镜读取第三区域的第三图像，其中所述第一和第二区域至少部分地包含在所述第三区域内; 至少部分地在显示的第三图像内显示第一图像的表示，其中第一图像的表示包括指示第一设置的第一指示符; 至少部分地在所显示的第三图像内显示第二图像的表示，其中第二图像的表示包括指示第二设置的第二指示符，并且其中所显示的第二指示符与所显示的第一指示符不同。

8. 发明授权

US06563115B1 High-density recording scanning microscope 失效
标题翻译：高密度记录扫描显微镜
公开(公告)号：US06563115B1
公开(公告)日：2003-05-13
申请号：US09673170
申请日：2000-12-18
申请人： Katsuto Goto , Takashi Shimaya , Yutaka Hirano , Hiroyuki Teshima
发明人： Katsuto Goto , Takashi Shimaya , Yutaka Hirano , Hiroyuki Teshima
IPC分类号： G01N2300
CPC分类号： H01J37/28 , G01N23/2251 , H01J2237/221 , H01J2237/225
摘要： A high-density recording scanning microscope in which a beam of charged particles finely focused scans the surface of a sample at a high density of, at least, 8,000 scannings, a signal thus detected is converted into a digital signal, and the digital signal is used for directly printing an image of high definition, high gradation and wide view. The signal of a scanning image at a very high density of, at least, 8,000 pixels×8,000 pixels in a scanning electron microscope, is converted into a digital signal, for example, a color image, and the image is directly printed, thereby to realize the observation of a very clear image of high definition, high gradation and wide view having hitherto been nonexistent.
摘要翻译：一种高密度记录扫描显微镜，其中精细聚焦的带电粒子束以至少8,000次扫描的高密度扫描样品的表面，将被检测的信号转换为数字信号，数字信号为用于直接打印高分辨率，高等级和宽视野的图像。在扫描电子显微镜中，至少具有8,000像素×8,000像素的非常高密度的扫描图像的信号被转换为数字信号，例如彩色图像，直接打印图像，从而实现了迄今为止不存在的高清晰度，高等级和宽视野的非常清晰的图像的观察。

9. 发明申请

US20150371816A1 Sample Observation Device 审中-公开
标题翻译：样品观察装置
公开(公告)号：US20150371816A1
公开(公告)日：2015-12-24
申请号：US14763363
申请日：2014-01-17
申请人： Hitachi High- Technologies Corporation
发明人： Ayumi DOI , Tomohiro FUNAKOSHI , Takuma YAMAMOTO , Tomohiro TAMORI , Tsunehiro SAKAI
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/263 , H01J37/241 , H01J37/28 , H01J2237/225 , H01J2237/281
摘要： A sample observation device of the invention includes: a charged particle optical column for irradiating a sample with charged particle beams at a first acceleration voltage, the sample having a target part to be observed which is a concave part; an image acquisition part for acquiring an image including the target part to be observed on the basis of signals obtained by irradiation with the charged particle beams; a memory part for memorizing in advance, at each of a plurality of acceleration voltages, information indicating a relationship between a brightness ratio of a concave part to a periphery part of the concave part in a standard sample and a value indicating a structure of the concave part in the standard sample; and an operation part for obtaining a brightness ratio of the concave part to a periphery part of the concave part in the image. The operation part judges appropriateness/inappropriateness of the first acceleration voltage with the use of the information indicating the relationship and the brightness ratio in the image.
摘要翻译：本发明的样品观察装置包括：带电粒子光学柱，用于以第一加速电压照射带有带电粒子束的样品，所述样品具有作为凹部的观察对象部分; 图像获取部分，用于基于通过照射带电粒子束获得的信号来获取包括要观察的目标部分的图像; 存储器部分，用于在多个加速电压中的每一个处预先存储指示在标准样品中凹部与凹部的周边部分的亮度比与凹部的结构的值之间的关系的信息标准样品的一部分; 以及用于获得图像中的凹部与凹部的周边部的亮度比的操作部。操作部通过使用表示图像的关系和亮度比的信息来判断第一加速电压的适当性/不适当性。

10. 发明申请

US20150115155A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE SYSTEM, IMAGE PROCESSING METHOD, AND IMAGE PROCESSING APPARATUS 有权
标题翻译：扫描传输电子显微镜系统，图像处理方法和图像处理装置
公开(公告)号：US20150115155A1
公开(公告)日：2015-04-30
申请号：US14483522
申请日：2014-09-11
申请人： FUJITSU LIMITED
发明人： Takashi Yamazaki , Yasutoshi Kotaka
IPC分类号： H01J37/22 , H01J37/28
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/225 , H01J2237/24495 , H01J2237/2802
摘要： A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum.
摘要翻译：扫描透射电子显微镜系统包括：环状暗场检测器; 电子能量损失光谱仪，被配置为从环状暗场检测器获取第一电子束的电子能量损失光谱谱; 以及图像处理装置，被配置为基于来自所述环形暗场检测器的输出信号生成第一STEM图像，并且基于所述电子能量损失光谱谱的积分值生成第二STEM图像。

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