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11. 发明授权

US5764680A Folded internal beam path for gas stable/unstable resonator laser 失效
标题翻译：用于气体稳定/不稳定谐振器激光器的折叠内部光束路径
公开(公告)号：US5764680A
公开(公告)日：1998-06-09
申请号：US689749
申请日：1996-08-13
申请人： Tom A. Watson
发明人： Tom A. Watson
IPC分类号： H01S3/03 , H01S3/081 , H01S3/181
CPC分类号： H01S3/081 , H01S3/0315 , H01S3/0816 , H01S3/0818
摘要： A gas stable/unstable resonator laser having a folded internal beam path includes a front reflective surface (25) mounted substantially perpendicular to the electrodes (21(1),21(2)), and a rear reflective surface (24) mounted substantially parallel to the front reflective surface. A lower fold reflective surface (26') is mounted substantially adjacent to and at approximately a 45 degree angle with respect to the front reflective surface (25) and an upper fold reflective surface (28') is mounted at approximately a 90 degree angle with respect to the lower fold reflective surface (26'). Light energy (27) is reflected between the front reflective surface and rear reflective surface and subsequently reflects off the lower fold reflective surface (26'). Light energy is then reflected from the lower fold reflective surface (26') to the upper fold reflective surface (28'), passing the light energy substantially perpendicular to the front reflective surface and rear reflective surface. Light energy (32) is then reflected through an output window (29), having a beam aspect ratio of approximately 1 so that the beam may be corrected by a single cylindrical lens.
摘要翻译：具有折叠的内部光束路径的气体稳定/不稳定的谐振器激光器包括基本上垂直于电极（21（1），21（2））安装的前部反射表面（25）和基本上平行地安装的后部反射表面到前反射面。下折叠反射表面（26'）相对于前反射表面（25）大致相邻并且以大约45度的角度安装，并且上折叠反射表面（28'）以大约90度的角度安装相对于下折叠反射表面（26'）。光能（27）在前反射表面和后反射表面之间反射，随后从下折叠反射表面（26'）反射。然后，光能从下折叠反射表面（26'）反射到上折叠反射表面（28'），使光能基本上垂直于前反射表面和后反射表面。光能（32）然后通过输出窗（29）反射，具有大约1的光束纵横比，使得光束可以由单个柱面透镜校正。

12. 发明授权

US07346093B2 DUV light source optical element improvements 有权
标题翻译： DUV光源光学元件改进
公开(公告)号：US07346093B2
公开(公告)日：2008-03-18
申请号：US10808157
申请日：2004-03-23
申请人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
发明人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
IPC分类号： H01S3/08 , H01S3/22
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座从柔性的安装框架开始，挠曲臂将挠性件附接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可以使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

13. 发明授权

US07203562B2 Process monitoring system for lithography lasers 有权
标题翻译：光刻激光器的过程监控系统
公开(公告)号：US07203562B2
公开(公告)日：2007-04-10
申请号：US10767316
申请日：2004-01-28
申请人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
发明人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
IPC分类号： G06F19/00
CPC分类号： G03F7/70991 , G03F7/70525 , G03F7/70975 , G05B2219/31205 , G05B2219/31485 , G07C3/005 , Y02P90/86
摘要： A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
摘要翻译：用于在集成电路制造工厂监测光刻激光器的系统。每个制造工厂的每个激光器都与终端服务器相关联。对于每个制造工厂，中央控制服务器单元通过局域网与每个激光器通信。来自激光器的信息由中央控制服务器单元收集，并且该信息用于向具有访问授权的有关方提供以网站格式提供的摘要信息。

14. 发明授权

US06687562B2 Process monitoring system for lithography lasers 有权
标题翻译：光刻激光器的过程监控系统
公开(公告)号：US06687562B2
公开(公告)日：2004-02-03
申请号：US09733194
申请日：2000-12-08
申请人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
发明人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
IPC分类号： G06F1900
CPC分类号： G03F7/70025 , G03F7/70525 , G03F7/70591 , G05B19/00 , G05B2219/31205 , G05B2219/31485 , G07C3/005 , Y02P90/86
摘要： A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
摘要翻译：用于在集成电路制造工厂监测光刻激光器的系统。每个制造工厂的每个激光器都与终端服务器相关联。对于每个制造工厂，中央控制服务器单元通过局域网与每个激光器通信。来自激光器的信息由中央控制服务器单元收集，并且该信息用于向具有访问授权的有关方提供以网站格式提供的摘要信息。

15. 发明授权

US06644324B1 Laser discharge chamber passivation by plasma 有权
标题翻译：激光放电室通过等离子体钝化
公开(公告)号：US06644324B1
公开(公告)日：2003-11-11
申请号：US09518970
申请日：2000-03-06
申请人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
发明人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
IPC分类号： B08B704
CPC分类号： B82Y10/00 , B08B7/0035 , B08B7/0042 , G03F7/70025 , H01J37/32862 , H01S3/036 , H01S3/225
摘要： Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.
摘要翻译：提供了用等离子体清洗和钝化激光放电室的方法和装置。在一个实施例中，通过对含氧气体施加射频信号，在激光放电室外部的等离子体源中形成氧基等离子体。氧基等离子体被吸入激光放电室，在其中与污染物反应并清洗内表面。在清洁之后，在等离子体源中形成氟基等离子体并被吸入激光放电室以钝化内表面。在另一个实施例中，不使用基于氧的等离子体的清洁，因为用氟基等离子体进行一些清洁水平。在另一个实施例中，通过向激光放电室电极施加射频信号，在激光放电室中形成氧基等离子体和基于氟的等离子体。激光放电室的等离子体清洁和钝化比传统的热清洗和钝化工艺更安全，更有效，更有效。

16. 发明授权

US6163559A Beam expander for ultraviolet lasers 失效
标题翻译：用于紫外线激光器的光束扩展器
公开(公告)号：US6163559A
公开(公告)日：2000-12-19
申请号：US102241
申请日：1998-06-22
申请人： Tom A. Watson
发明人： Tom A. Watson
IPC分类号： G02B5/18 , G02B17/06 , G02B26/06 , G02B26/08 , G02B27/00 , G03F7/20 , H01S3/08 , H01S3/225 , H01S3/098 , H01S3/22
CPC分类号： G03F7/70575 , G02B5/1828 , G02B19/0023 , G02B19/0033 , G02B19/0095 , G02B26/06 , G02B26/0825 , G02B27/0081 , H01S3/08009 , H01S3/225
摘要： A line narrowed ultraviolet laser having a line narrowing system which includes a grating and an all reflective beam expander. In a preferred embodiment, the beam expander consists of a relatively small circular cylindrical mirror and relatively larger elliptical cylindrical mirror and the grating is an eschelle grating mounted in a Littrow configuration.
摘要翻译：具有包括光栅和全反射光束扩展器的线窄系统的线变窄的紫外激光器。在优选实施例中，光束扩展器由相对小的圆柱形反射镜和相对较大的椭圆柱形反射镜组成，并且光栅是安装在Littrow配置中的光阑光栅。

17. 发明授权

US5719896A Low cost corona pre-ionizer for a laser 失效
标题翻译：用于激光器的低成本电晕预电除去器
公开(公告)号：US5719896A
公开(公告)日：1998-02-17
申请号：US625500
申请日：1996-03-29
申请人： Tom A. Watson
发明人： Tom A. Watson
IPC分类号： H01S3/03 , H01S3/038 , H01S3/0977 , H01S3/097
CPC分类号： H01S3/0385 , H01S3/0388 , H01S3/0384
摘要： An anode and an a cathode in a gas laser, such as an excimer laser, are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gasses in the laser to react chemically and produce coherent radiation. First and second tubes made from a dielectric material are designed in contradiction to conventional designs by utilizing a constant, larger tube diameter with thicker tube walls. These first and second tubes extend through the laser in a second direction transverse (preferably perpendicular) to the first direction. The anode, the cathode and the tubes extend through the laser in a direction transverse to the first and second directions. The use of a thicker walled, large tube of constant diameter allows the use of a commercial grade polycrystalline aluminum oxide ceramic, rather than ultra pure ceramics. Bushings having anti-tracking grooves incorporated therein are truly integral with the tube, in that they are directly machined at each end of the tube, making the tubes easier and less costly to manufacture. The tube's larger diameter provides a greater surface area for the generation of photons, thereby creating a greater pre-ionizing effect than conventional designs.
摘要翻译：诸如准分子激光器的气体激光器中的阳极和阴极在第一方向上间隔开。这些构件之间的电压差产生放电，其使激光器中的气体电离化学反应并产生相干辐射。由介电材料制成的第一和第二管被设计成与常规设计相矛盾，通过使用具有较厚管壁的恒定的较大的管直径。这些第一和第二管沿着与第一方向横向（优选垂直）的第二方向延伸穿过激光器。阳极，阴极和管沿横向于第一和第二方向的方向延伸穿过激光器。使用较厚的恒定直径的较大的管，允许使用商业级多晶氧化铝陶瓷，而不是超纯陶瓷。其中结合有防跟踪槽的衬套与管是真正一体的，因为它们在管的每个端部直接加工，使得管更容易并且制造成本更低。管的较大直径为产生光子提供更大的表面积，从而产生比常规设计更大的预电离效应。

18. 发明授权

US06914927B2 Laser discharge chamber passivation by plasma 失效
标题翻译：激光放电室通过等离子体钝化
公开(公告)号：US06914927B2
公开(公告)日：2005-07-05
申请号：US10649186
申请日：2003-08-26
申请人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
发明人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
IPC分类号： H01L21/027 , B08B7/00 , G03F7/20 , H01S3/03 , H01S3/036 , H01S3/225 , H01S3/22 , H01S3/09 , H01S3/091
CPC分类号： B82Y10/00 , B08B7/0035 , B08B7/0042 , G03F7/70025 , H01J37/32862 , H01S3/036 , H01S3/225
摘要： Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.
摘要翻译：提供了用等离子体清洗和钝化激光放电室的方法和装置。在一个实施例中，通过对含氧气体施加射频信号，在激光放电室外部的等离子体源中形成氧基等离子体。氧基等离子体被吸入激光放电室，在其中与污染物反应并清洗内表面。在清洁之后，在等离子体源中形成氟基等离子体并被吸入激光放电室以钝化内表面。在另一个实施例中，不使用基于氧的等离子体的清洁，因为用氟基等离子体进行一些清洁水平。在另一个实施例中，通过向激光放电室电极施加射频信号，在激光放电室中形成氧基等离子体和基于氟的等离子体。激光放电室的等离子体清洁和钝化比传统的热清洗和钝化工艺更安全，更有效，更有效。

19. 发明授权

US06690706B2 High rep-rate laser with improved electrodes 有权
公开(公告)号：US06690706B2
公开(公告)日：2004-02-10
申请号：US10104502
申请日：2002-03-22
申请人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
发明人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

20. 发明授权

US06408260B1 Laser lithography quality alarm system 失效
标题翻译：激光光刻质量报警系统
公开(公告)号：US06408260B1
公开(公告)日：2002-06-18
申请号：US09505233
申请日：2000-02-16
申请人： Michael P. C. Watts , Tom A. Watson
发明人： Michael P. C. Watts , Tom A. Watson
IPC分类号： G06F1500
CPC分类号： G03F7/70025 , G03F7/70525 , G03F7/70591 , G05B19/00 , G05B2219/31205 , G05B2219/31485 , G07C3/005 , Y02P90/86
摘要： An electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these “runs” of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.
摘要翻译：具有相关可编程控制器的放电激光器（1）将允许操作者基于历史数据（2）指定光束质量参数将监视这些参数，并且（3）将向操作者提供通知信号，以便当光束质量足以用于集成电路制造。控制器被编程为当一个或多个质量参数表现出特定的非随机行为时指示失控状态，例如偏离超过4个标准偏差的三个质量测量中的两个和/或四个质量测量中的三分之一偏离更多的三个标准偏差。在优选实施例中，该程序旨在通过查找这些“数量”数据的错误来检测质量差，并且每两个月平均不超过一次产生系统失控的虚假指示。

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