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1. 发明授权

US06237050B1 Method for controlling components of semiconductor fabricating equipment arranged in a processing line 失效
标题翻译：用于控制布置在处理线中的半导体制造设备的部件的方法
公开(公告)号：US06237050B1
公开(公告)日：2001-05-22
申请号：US09148631
申请日：1998-09-04
申请人： Sung-geun Kim , Tae-hyung Kim
发明人： Sung-geun Kim , Tae-hyung Kim
IPC分类号： G06F1310
CPC分类号： H01L22/20 , G05B19/4184 , G05B2219/31485 , Y02P90/14
摘要： A method for controlling equipment in a semiconductor fabrication system is provided. A host computer automatically receives actual data indicative of an actual state of a unit of equipment for fabricating semiconductor devices. The computer retrieves from a data base stored data indicative of a stored state of the unit. A state change is computed by comparing the actual data with the stored data and the state change is checked against a predetermined threshold. If the state change exceeds the threshold, the data base is updated by storing the actual data, and operation of the equipment is modified. If the state change does not exceed the threshold, the method returns to receiving actual data.
摘要翻译：提供了一种用于控制半导体制造系统中的设备的方法。主计算机自动接收指示用于制造半导体器件的设备单元的实际状态的实际数据。计算机从数据库检索存储表示该单元的存储状态的数据。通过将实际数据与存储的数据进行比较来计算状态改变，并且相对于预定阈值检查状态改变。如果状态变化超过阈值，则通过存储实际数据来更新数据库，并修改设备的操作。如果状态变化不超过阈值，则该方法返回接收实际数据。

2. 发明授权

US07221987B2 Generating a reliability analysis by identifying casual relationships between events in an event-based manufacturing system 有权
标题翻译：通过识别基于事件的制造系统中的事件之间的因果关系来生成可靠性分析
公开(公告)号：US07221987B2
公开(公告)日：2007-05-22
申请号：US10868137
申请日：2004-06-15
申请人： Thomas Arthur Bett , Tanakon Ungpiyakul , Walter Caswell Reade , Michelle Reneé Irwin , Jeremy Brian Cannady , Babe Bedenbaugh
发明人： Thomas Arthur Bett , Tanakon Ungpiyakul , Walter Caswell Reade , Michelle Reneé Irwin , Jeremy Brian Cannady , Babe Bedenbaugh
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B23/0229 , G05B23/0267 , G05B2219/31485 , Y02P90/86
摘要： Analyzing an event chronology record to permit identification of periods of a production sequence that correspond to a high probability of failure. Systems and methods include receiving an event chronology for a particular machine in the production sequence and for a particular time interval. A reliability analysis system accesses process flow information to determine whether a particular event in the event chronology is related to a subsequent adverse event within a predefined event window.
摘要翻译：分析事件年表记录，以允许识别与高故障概率相对应的生产序列的周期。系统和方法包括在生产顺序和特定时间间隔内接收特定机器的事件年表。可靠性分析系统访问过程流信息以确定事件年表中的特定事件是否与预定事件窗口内的后续不利事件相关。

3. 发明申请

US20050278052A1 Generating a reliability analysis by identifying causal relationships between events in an event-based manufacturing system 有权
标题翻译：通过识别基于事件的制造系统中的事件之间的因果关系来生成可靠性分析
公开(公告)号：US20050278052A1
公开(公告)日：2005-12-15
申请号：US10868137
申请日：2004-06-15
申请人： Thomas Bett , Tanakon Ungpiyakul , Walter Reade , Michelle Irwin , Jeremy Cannady , Babe Bedenbaugh
发明人： Thomas Bett , Tanakon Ungpiyakul , Walter Reade , Michelle Irwin , Jeremy Cannady , Babe Bedenbaugh
IPC分类号： G05B23/02 , G06F19/00 , G06Q10/00
CPC分类号： G06Q10/06 , G05B23/0229 , G05B23/0267 , G05B2219/31485 , Y02P90/86
摘要： Analyzing an event chronology record to permit identification of periods of a production sequence that correspond to a high probability of failure. Systems and methods include receiving an event chronology for a particular machine in the production sequence and for a particular time interval. A reliability analysis system accesses process flow information to determine whether a particular event in the event chronology is related to a subsequent adverse event within a predefined event window.
摘要翻译：分析事件年表记录，以允许识别与高故障概率相对应的生产序列的周期。系统和方法包括在生产顺序和特定时间间隔内接收特定机器的事件年表。可靠性分析系统访问过程流信息以确定事件年表中的特定事件是否与预定事件窗口内的后续不利事件相关。

4. 发明授权

US07203562B2 Process monitoring system for lithography lasers 有权
标题翻译：光刻激光器的过程监控系统
公开(公告)号：US07203562B2
公开(公告)日：2007-04-10
申请号：US10767316
申请日：2004-01-28
申请人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
发明人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
IPC分类号： G06F19/00
CPC分类号： G03F7/70991 , G03F7/70525 , G03F7/70975 , G05B2219/31205 , G05B2219/31485 , G07C3/005 , Y02P90/86
摘要： A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
摘要翻译：用于在集成电路制造工厂监测光刻激光器的系统。每个制造工厂的每个激光器都与终端服务器相关联。对于每个制造工厂，中央控制服务器单元通过局域网与每个激光器通信。来自激光器的信息由中央控制服务器单元收集，并且该信息用于向具有访问授权的有关方提供以网站格式提供的摘要信息。

5. 发明授权

US06687562B2 Process monitoring system for lithography lasers 有权
标题翻译：光刻激光器的过程监控系统
公开(公告)号：US06687562B2
公开(公告)日：2004-02-03
申请号：US09733194
申请日：2000-12-08
申请人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
发明人： Parthiv S. Patel , Joseph E. Conway , Muljadi Tantra , Jeffrey W. Moen , Jason R. Carlesi , Roger L. Green , Tom A. Watson , Christopher G. Rowan
IPC分类号： G06F1900
CPC分类号： G03F7/70025 , G03F7/70525 , G03F7/70591 , G05B19/00 , G05B2219/31205 , G05B2219/31485 , G07C3/005 , Y02P90/86
摘要： A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.
摘要翻译：用于在集成电路制造工厂监测光刻激光器的系统。每个制造工厂的每个激光器都与终端服务器相关联。对于每个制造工厂，中央控制服务器单元通过局域网与每个激光器通信。来自激光器的信息由中央控制服务器单元收集，并且该信息用于向具有访问授权的有关方提供以网站格式提供的摘要信息。

6. 发明授权

US06499001B1 Engineering database feedback system 有权
公开(公告)号：US06499001B1
公开(公告)日：2002-12-24
申请号：US09596909
申请日：2000-06-20
申请人： Theodore O. Meyer
发明人： Theodore O. Meyer
IPC分类号： G06F1900
CPC分类号： G05B19/41865 , G05B2219/31331 , G05B2219/31485 , G05B2219/45031 , Y02P90/20
摘要： A computerized engineering database feedback system provides special processing instructions for processing materials in a production process, and provides historical information related to the materials processed according to the special processing instructions. The system includes a request entry device through which requesting personnel may input special processing information indicating a way to process the materials differently from a normal way of processing of the materials. An instruction processing device receives the special processing information and generates the special-processing instructions based thereon. A process station device receives the special-processing instructions, and presents the special-processing instructions to material-processing personnel. The process station device also provides for inputting material information from the material-processing personnel, where the material information indicates one or more characteristics of the material processed according to the special-processing instructions. The system also includes a relational database in which the special processing information and the material information are compiled and related. An information retrieval device accesses the relational database, searches the relational database for material information related to special processing information, or searches the relational database for special processing information related to material information. Using the system, an engineer who wishes to have a lot of material processed in a special way for an engineering experiment may provide process operators with special-processing instructions. The system also allows the process operators to input information and test data related to the material that is processed according to the special instructions. Further, the system makes the results of the engineering experiment readily available to the company community in the relational database. By accessing the database, company engineers may view the results of previously-conducted experiments, and may thereby avoid wasting company resources by unnecessarily repeating the same experiments.

7. 发明授权

US5712782A Method of optimizing utilization of a group of agricultural machine 失效
标题翻译：优化一组农机利用率的方法
公开(公告)号：US5712782A
公开(公告)日：1998-01-27
申请号：US631968
申请日：1996-04-15
申请人： Horst Weigelt , H. H. Wippersteg , Stefan Boettinger , Thilo Steckel
发明人： Horst Weigelt , H. H. Wippersteg , Stefan Boettinger , Thilo Steckel
IPC分类号： A01B79/00 , A01C7/00 , A01D41/127 , G05B19/418 , G05D1/00
CPC分类号： A01B79/005 , A01C7/00 , A01D41/127 , G05B19/4183 , A01D2033/005 , G05B2219/31136 , G05B2219/31485 , G05B2219/33192 , G05B2219/45017
摘要： In the process for optimizing operation of a group of agricultural machines a controlling processor, which exchanges data telemetrically with on-board processors of agricultural machines and devices, optimizes the internally optimized control cycles of the individual on-board processors and transmits controlling data to the on-board processors, which it has determined from collective scanning of operating data transmitted to it from the entire group of agricultural machines. Overloading of available data transmission capacity and excessively large memory capacity requirements are avoided by a special categorizing of data and an advantageous selection of memory locations for the resulting data.
摘要翻译：在一组农业机械的优化操作的过程中，与农业机器和设备的车载处理器遥测数据的控制处理器优化了各个车载处理器的内部优化的控制周期，并将控制数据发送到车载处理器，它从集体扫描从整个农业机器传输到其中的操作数据确定。通过对数据的特殊分类和对所得到的数据的存储器位置的有利选择来避免可用的数据传输容量和过大的存储容量要求的过载。

8. 发明申请

US20120221586A1 INSPECTION SYSTEM, MANAGEMENT SERVER, INSPECTION APPARATUS AND METHOD FOR MANAGING INSPECTION DATA 审中-公开
标题翻译：检查系统，管理服务器，检查装置和管理检验数据的方法
公开(公告)号：US20120221586A1
公开(公告)日：2012-08-30
申请号：US13280552
申请日：2011-10-25
申请人： Akihiro Kawata , Tsuyoshi Sato , Takuya Hisaizumi
发明人： Akihiro Kawata , Tsuyoshi Sato , Takuya Hisaizumi
IPC分类号： G06F17/30
CPC分类号： G05B19/41875 , G05B23/0221 , G05B2219/31323 , G05B2219/31485 , G05B2219/32197 , Y02P90/04 , Y02P90/18 , Y02P90/22 , Y02P90/24
摘要： An inspection system is provided that can efficiently perform the management of data obtained from a plurality of apparatuses. An inspection system includes inspection apparatuses to inspect products that are produced in a factory, and a management server that is connected via a communication line to the inspection apparatuses. The inspection apparatus includes an apparatus-side inspection result DB (database) 14a. The apparatus-side inspection result DB stores the inspection result data, which is data representing the result of inspecting a substrate with the inspection apparatus 11a. The apparatus-side inspection result DB is a key-value database that is constituted by keys and values.
摘要翻译：提供一种可以有效地执行从多个装置获得的数据的管理的检查系统。检查系统包括检查在工厂生产的产品的检查装置和经由通信线路连接到检查装置的管理服务器。检查装置包括装置侧检查结果DB（数据库）14a。设备侧检查结果DB存储检查结果数据，该检查结果数据是表示用检查装置11a检查基板的结果的数据。设备侧检查结果DB是由键和值构成的键值数据库。

9. 发明授权

US07840607B2 Data mart generation and use in association with an operations intelligence platform 有权
标题翻译：数据集市的生成和使用与操作智能平台相关联
公开(公告)号：US07840607B2
公开(公告)日：2010-11-23
申请号：US11195439
申请日：2005-08-02
申请人： Timothy James Henigman , Jesse G. DeMesa
发明人： Timothy James Henigman , Jesse G. DeMesa
IPC分类号： G06F17/30 , G06F7/00
CPC分类号： G06F17/30595 , G05B2219/31323 , G05B2219/31485 , G05B2219/32404 , G06F17/30607 , Y02P90/24 , Y10S707/955 , Y10S707/957
摘要： Some embodiments include determination and storage of a plurality of relational database tables based on class model representing tag-based data and non-tag-based data and on a plurality of objects instantiated based on the class model. Also included are reception of a selection of one object of the objects as a dimension of a logical model, reception of a first indication of a first plurality of members of the selected object to be associated with dimension data of the logical model, reception of a second indication of a second plurality of members of the selected object to be associated with fact data of the logical model, to create a dimension table associated with the selected object and including columns corresponding to the first plurality of members, and creation of a fact table including a foreign key column corresponding to the dimension table and including a column corresponding to each of the second plurality of members.
摘要翻译：一些实施例包括基于表示基于标签的数据和非标签的数据的类模型以及基于类模型实例化的多个对象的多个关系数据库表的确定和存储。还包括接收对象的一个对象的选择作为逻辑模型的维度，接收与逻辑模型的维度数据相关联的所选对象的第一多个成员的第一指示，接收一个所选择的对象的第二多个成员的第二指示与逻辑模型的事实数据相关联，以创建与所选对象相关联的维度表，并且包括与第一多个成员相对应的列，以及创建事实表包括对应于所述维度表的外键列，并且包括与所述第二多个成员中的每一个对应的列。

10. 发明申请

US20070220344A1 GENERATING A RELIABILITY ANALYSIS BY IDENTIFYING CAUSAL RELATIONSHIPS BETWEEN EVENTS IN AN EVENT-BASED MANUFACTURING SYSTEM 审中-公开
标题翻译：通过识别基于事件的制造系统中的事件之间的原因关系来产生可靠性分析
公开(公告)号：US20070220344A1
公开(公告)日：2007-09-20
申请号：US11752077
申请日：2007-05-22
申请人： Thomas Bett , Tanakon Ungpiyakul , Walter Reade , Michelle Irwin , Jeremy Cannady , Babe Bedenbaugh
发明人： Thomas Bett , Tanakon Ungpiyakul , Walter Reade , Michelle Irwin , Jeremy Cannady , Babe Bedenbaugh
IPC分类号： G06F11/00
CPC分类号： G06Q10/06 , G05B23/0229 , G05B23/0267 , G05B2219/31485 , Y02P90/86
摘要： Analyzing an event chronology record to permit identification of periods of a production sequence that correspond to a high probability of failure. Systems and methods include receiving an event chronology for a particular machine in the production sequence and for a particular time interval. A reliability analysis system accesses process flow information to determine whether a particular event in the event chronology is related to a subsequent adverse event within a predefined event window.
摘要翻译：分析事件年表记录，以允许识别与高故障概率相对应的生产序列的周期。系统和方法包括在生产顺序和特定时间间隔内接收特定机器的事件年表。可靠性分析系统访问过程流信息以确定事件年表中的特定事件是否与预定事件窗口内的后续不利事件相关。

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