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1. 发明授权

US06744802B1 Laser oscillating apparatus with slotted waveguide 有权
标题翻译：具有开槽波导的激光振荡装置
公开(公告)号：US06744802B1
公开(公告)日：2004-06-01
申请号：US09512074
申请日：2000-02-24
申请人： Tadahiro Ohmi , Nobumasa Suzuki , Hiroshi Ohsawa , Nobuyoshi Tanaka , Toshikuni Shinohara , Masaki Hirayama
发明人： Tadahiro Ohmi , Nobumasa Suzuki , Hiroshi Ohsawa , Nobuyoshi Tanaka , Toshikuni Shinohara , Masaki Hirayama
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , H01S3/0315 , H01S3/0975 , H01S3/225
摘要： In a slot array structure, electromagnetic wave emission which is uniform as a whole over the length of a laser tube is realized to allow uniform laser emission with minimum energy loss. Slots (10) are formed at a predetermined pitch in a long end face (H plane) of each waveguide (1) along a central line (m) in the longitudinal direction of the H plane to be alternately located on the left and right sides of the central line (m) and spaced apart from the central line (m) by a distance (d).
摘要翻译：在时隙阵列结构中，实现了在激光管的长度上整体上均匀的电磁波发射，以允许具有最小能量损失的均匀的激光发射。在每个波导（1）的长边（H平面）上沿着H平面的纵向方向上的中心线（m）以预定间距形成狭槽（10），以交替地位于左侧和右侧的中心线（m）并与中心线（m）间隔开距离（d）。

2. 发明授权

US06473445B1 Gas laser 失效
标题翻译：气体激光
公开(公告)号：US06473445B1
公开(公告)日：2002-10-29
申请号：US09807049
申请日：2001-05-18
申请人： Thomas Zeller
发明人： Thomas Zeller
IPC分类号： H01S3097
CPC分类号： H01S3/038 , H01S3/036
摘要： A gas laser gas has an elongated cavity in which are disposed a first elongated electrode tube having an inner diameter, and a second elongated electrode tube disposed coaxially within the first electrode tube and having an outer diameter smaller than the inner diameter of the first electrode tube and spaced therefrom so as to provide a gas discharge chamber therebetween. The second electrode tube provides a gas exit chamber therewithin, and the first electrode tube is spaced from the wall of the cavity to provide a gas entry chamber thereabout. The electrode tubes permit gas to flow therethrough from the gas entry chamber to the gas exit chamber. The electrodes may be formed from a gas permeable material such as sintered metal, or formed from a non-permeable material with openings therein. The electrodes may have coolant flowing therethrough.
摘要翻译：气体激光气体具有细长空腔，其中设置有具有内径的第一细长电极管和第二细长电极管，其同轴地设置在第一电极管内并且具有小于第一电极管的内径的外径并与其间隔开，以便在它们之间提供气体放电室。第二电极管在其中提供气体出口室，并且第一电极管与腔的壁间隔开以在其周围提供气体入口室。电极管允许气体从气体入口室流过气体出口室。电极可以由诸如烧结金属的透气材料形成，或者由其中具有开口的不可渗透材料形成。电极可以具有流过其中的冷却剂。

3. 发明授权

US06343089B1 Microwave-driven ultraviolet light sources 失效
标题翻译：微波驱动紫外光源
公开(公告)号：US06343089B1
公开(公告)日：2002-01-29
申请号：US09382843
申请日：1999-08-25
申请人： Dennis M. Manos , Jessie Diggs , Joseph D. Ametepe
发明人： Dennis M. Manos , Jessie Diggs , Joseph D. Ametepe
IPC分类号： H01S3097
CPC分类号： H01J65/044
摘要： A microwave-driven ultraviolet (UV) light source is provided. The light source comprises an over-moded microwave cavity having at least one discharge bulb disposed within the microwave cavity. At least one magnetron probe is coupled directly to the microwave cavity.
摘要翻译：提供微波驱动的紫外线（UV）光源。光源包括具有设置在微波腔内的至少一个放电灯泡的过调整的微波空腔。至少一个磁控管探针直接耦合到微波腔。

4. 发明授权

US06584132B2 Spinodal copper alloy electrodes 有权
标题翻译： Spinodal铜合金电极
公开(公告)号：US06584132B2
公开(公告)日：2003-06-24
申请号：US09776044
申请日：2001-02-01
申请人： Richard G. Morton
发明人： Richard G. Morton
IPC分类号： H01S3097
CPC分类号： H01S3/038 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： Electrodes comprised of spinodal copper alloys. Applicant's tests have shown erosion rates of these alloys under certain environmental conditions are a factor of 5 or more lower than erosion rates of similar prior art copper alloys. In one application, the erosion of spinodal electrodes was at least an order of magnitude lower than the prior art material. A preferred application of these electrodes are as electrodes in excimer lasers which utilize a circulating laser gas containing fluorine. A preferred spinodal copper alloy is a copper-tin-nickel alloy known as spinodal bronze. These alloys are prepared using spinodal decomposition. This material forms atomic layers several atoms thick. The spinodal decomposition process permits atoms of one kind to concentrate to an extent while maintaining a relatively uniform crystal structure. A specific alloy of spinodal bronze commercially available which has been tested by Applicant with amazing results is comprised primarily of about 80 percent copper, about 7 percent tin and about 12.5 percent nickel.
摘要翻译：电极由旋节铜合金组成。申请人的测试表明，在某些环境条件下，这些合金的侵蚀速率比同类现有技术铜合金的侵蚀速率低5或更高。在一个应用中，旋节线电极的侵蚀比现有技术材料低至少一个数量级。这些电极的优选应用是利用包含氟的循环激光气体的准分子激光器中的电极。优选的节状铜合金是被称为亚稳态青铜的铜 - 锡 - 镍合金。这些合金是使用旋节分解制备的。这种材料形成几个原子厚的原子层。旋节分解过程允许一种原子浓缩到一定程度，同时保持相对均匀的晶体结构。已经由申请人测试的具有惊人效果的可商购的旋转石青铜的特定合金主要包括约80％的铜，约7％的锡和约12.5％的镍。

5. 发明授权

US06198762B1 Supersonic and subsonic laser with RF discharge excitation 失效
标题翻译：超音速和亚音速激光与射频放电激发
公开(公告)号：US06198762B1
公开(公告)日：2001-03-06
申请号：US09043438
申请日：1998-03-18
申请人： Alexander V. Krasnov
发明人： Alexander V. Krasnov
IPC分类号： H01S3097
CPC分类号： H01S3/0975 , H01S3/041 , H01S3/08095 , H01S3/0953 , H01S3/2232
摘要： Disclosed is a gas laser utilizing radio frequency discharge excitation in the area of sonic or supersonic/subsonic transfer gas flow. The laser uses various types of gases and mixtures of gases as the active medium and provides for RF or UV pre-ionization of the gaseous medium before using radio frequency discharge excitation. The gas is supplied into a receiver, and has downstream therefrom a supersonic nozzle for acceleration of the active gaseous flow to high subsonic or supersonic speeds in order to provide intensive dynamic cooling of the active gas medium. The gas is excited using radio frequency discharge excitation in the critical area of the supersonic nozzle or downstream therefrom. The radio frequency discharge and excitation can also occur within the optical resonator region which is located within the supersonic area of the nozzle. The present invention provides compact, efficient and super-powerful continuous, quasi-continuous and pulse laser systems with wavelengths from 2.03 mkm to 10.6 mkm with a high quality output beam. The present laser advice may be utilized in scientific, commercial, aerospace and free space applications.
摘要翻译：公开了一种在声波或超音速/亚音速转印气体流动区域中利用射频放电激发的气体激光器。激光使用各种类型的气体和气体混合物作为活性介质，并且在使用射频放电激发之前提供气态介质的RF或UV预电离。气体被供应到接收器中，并且在其下游具有用于将活性气体流加速到高亚音速或超音速速度的超音速喷嘴，以便提供活性气体介质的强烈的动态冷却。在超音速喷嘴或其下游的临界区域中使用射频放电激发来激发气体。射频放电和激发也可以发生在位于喷嘴的超音速区域内的光学谐振器区域内。本发明提供了紧凑，高效和超强的连续，准连续和脉冲激光系统，其波长为2.03m 到10.6 mkm高质量的输出光束。目前的激光咨询可以用于科学，商业，航空和自由空间应用。

6. 发明授权

US06198761B1 Coaxial laser pulser with solid dielectrics 失效
标题翻译：具有固体电介质的同轴激光脉冲发生器
公开(公告)号：US06198761B1
公开(公告)日：2001-03-06
申请号：US09390146
申请日：1999-09-03
申请人： Hubertus von Bergmann , Spencer Merz
发明人： Hubertus von Bergmann , Spencer Merz
IPC分类号： H01S3097
CPC分类号： H01F27/263 , H01F27/22 , H01F27/324 , H01F30/02 , H01F38/00 , H01S3/097 , H01S3/225 , H03K17/80
摘要： A pulser with solid dielectrics including a pulse compressor and pulse transformer apparatus, which is able to produce short bursts of electrical energy at high voltage utilizing a coaxial structure. Both the transformer and the compressor utilize ferromagnetic cores having an inner and an outer diameter, and isolating members of similar geometry. The cores and ceramic members are held in place using conducting plates and bus bars. The overall structure of the compressor and the transformer is built around a central axis.
摘要翻译：具有固体电介质的脉冲发生器，包括脉冲压缩器和脉冲变压器装置，其能够利用同轴结构在高电压下产生短脉冲电能。变压器和压缩机均使用具有内径和外径的铁磁芯，以及具有类似几何形状的隔离构件。芯和陶瓷构件使用导电板和母线固定在适当的位置。压缩机和变压器的整体结构围绕中心轴构成。

7. 发明授权

US06195379B1 Laser assembly system and method 有权
标题翻译：激光装配系统及方法
公开(公告)号：US06195379B1
公开(公告)日：2001-02-27
申请号：US09472735
申请日：1999-12-27
申请人： Benjamin K. Jones , Jeffery A. Broderick , Jason W. Bethel , Eugene F. Yelden , Erik R. Stockinger
发明人： Benjamin K. Jones , Jeffery A. Broderick , Jason W. Bethel , Eugene F. Yelden , Erik R. Stockinger
IPC分类号： H01S3097
CPC分类号： H01S3/0315
摘要： A laser assembly system and method uses an electrode assembly and flexible housing to reduce manufacturing costs and complexity. The flexible housing also helps to insure uniform contact with the housing and electrically insulating material between the housing and electrodes. The uniform contact in turn assists in maintaining a uniform electric field in the discharge area of the laser, which affects laser performance, and assists in maintaining efficient cooling of the electrodes and the lasing medium. The electrode assembly is pre-assembled before insertion into the laser housing, which reduces adverse effects of anomalies of housing construction and helps to reduce the complexity and cost of manufacturing of the laser. The electrode assembly includes first and second electrodes that are separated by spacers made out of an electrically insulating material such as ceramic. The first and second electrodes are rigidly linked together in the electrode assembly by linkages such as including bolts and ceramic bushings. In an unflexed position, top and bottom walls of the housing are slightly bowed toward the center of the housing. The thickness and bow of the top and bottom walls of the housing allow for substantial resilient flexing of the housing under an applied outward force to the top and bottom walls of the housing. The outward flexing of the top and bottom walls of the housing accommodates insertion of the electrode assembly into the housing. After the electrode assembly is inserted into the housing, the applied force to the top and bottom walls of the housing is removed, which allows the top and bottom walls of the housing to supply a clamping force onto the outer surfaces of the electrode assembly due to the bow and resiliency of the top and bottom walls of the housing.
摘要翻译：激光组装系统和方法使用电极组件和柔性壳体来降低制造成本和复杂性。柔性壳体还有助于确保与壳体的均匀接触并且在壳体和电极之间电绝缘材料。均匀接触又有助于在激光器的放电区域保持均匀的电场，这影响激光器的性能，并有助于维持电极和激光介质的有效冷却。电极组件在插入激光器壳体之前被预先组装，这减少了壳体结构异常的不利影响，有助于降低激光器制造的复杂性和成本。电极组件包括由电绝缘材料（例如陶瓷）制成的间隔隔开的第一和第二电极。第一和第二电极通过诸如包括螺栓和陶瓷衬套的连接件在电极组件中刚性连接在一起。在非弯曲的位置，壳体的顶壁和底壁朝向壳体的中心稍微弯曲。壳体的顶壁和底壁的厚度和弓形件允许壳体在施加的向外的力下在壳体的顶壁和底壁上实质上弹性地弯曲。外壳的顶壁和底壁的向外弯曲可容纳电极组件插入外壳中。在将电极组件插入到壳体中之后，移除对壳体的顶壁和底壁施加的力，这允许壳体的顶壁和底壁向电极组件的外表面提供夹紧力，这是由于外壳的顶壁和底壁的弓和弹性。

8. 发明授权

US06810061B2 Discharge electrode and discharge electrode manufacturing method 有权
标题翻译：放电电极和放电电极的制造方法
公开(公告)号：US06810061B2
公开(公告)日：2004-10-26
申请号：US10225286
申请日：2002-08-22
申请人： Tsukasa Hori , Akira Sumitani , Takayuki Yabu , Teiichirou Chiba , Hakaru Mizoguchi , Osamu Wakabayashi , Junichi Fujimoto
发明人： Tsukasa Hori , Akira Sumitani , Takayuki Yabu , Teiichirou Chiba , Hakaru Mizoguchi , Osamu Wakabayashi , Junichi Fujimoto
IPC分类号： H01S3097
CPC分类号： H01S3/038 , H01S3/0388 , H01S3/225
摘要： A film is formed on the discharge parts of the main discharge electrodes. In order to prevent erosion of the discharge parts by the halogen gas contained in the laser gas, a substance that tends not to react with the halogen gas, i.e., a halogen-resistant substance, is used for this film. Furthermore, in order to prevent deformation of the discharge parts by the bombardment and heat of the main discharge, a substance that has a higher hardness than the metal of the main discharge electrodes or a substance that has a higher melting point than the metal of the main discharge electrodes is used for this film. As a result, deterioration of the electrodes can be inhibited, so that a stable laser output can be obtained, and the replacement interval of the electrodes can be extended.
摘要翻译：在主放电电极的放电部分上形成膜。为了防止由激光气体中所含的卤素气体引起的排出部件的侵蚀，使用与卤素气体即不耐卤素物质倾向不反应的物质。此外，为了防止放电部件由于主放电的轰击和热而发生变形，所以具有比主放电电极的金属更高的硬度的物质或具有比金属的熔点高的物质主放电电极用于该膜。结果，可以抑制电极的劣化，从而可以获得稳定的激光输出，并且可以延长电极的替换间隔。

9. 发明授权

US06690706B2 High rep-rate laser with improved electrodes 有权
公开(公告)号：US06690706B2
公开(公告)日：2004-02-10
申请号：US10104502
申请日：2002-03-22
申请人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
发明人： Richard G. Morton , Timothy S. Dyer , Thomas D. Steiger , Richard C. Ujazdowski , Tom A. Watson , Bryan Moosman , Alex P. Ivaschenko
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

10. 发明授权

US06654403B2 Flow shaping electrode with erosion pad for gas discharge laser 有权
标题翻译：流动成型电极，带气体放电激光器的冲蚀垫
公开(公告)号：US06654403B2
公开(公告)日：2003-11-25
申请号：US09748317
申请日：2000-12-22
申请人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton
发明人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/0979 , H01S3/223 , H01S3/225
摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure a gradual increasing flow cross section between the discharge region and the circulating tangential fan blade. In a preferred embodiment, electrode lifetime is increased by annealing the erosion rod after it is are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.
摘要翻译：具有激光室的准分子激光器，其包含含有氟的循环激光气体和一组长寿命的电极结构。电极结构中的至少一个具有冲蚀焊盘和横截面形状，其设计成与其他腔室结构一起提供在放电区域和循环切向风扇叶片之间逐渐增加的流动横截面。在优选的实施方案中，通过在侵蚀棒被加工之后对其进行退火来增加电极寿命。该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。加工后的退火也可以减少整个电极材料的应力。在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。

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