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1. 发明授权

US06614828B1 Wavelength selector for laser with adjustable angular dispersion 有权
公开(公告)号：US06614828B1
公开(公告)日：2003-09-02
申请号：US09920008
申请日：2001-07-31
申请人： Dirk Basting , Sergei V. Govorkov
发明人： Dirk Basting , Sergei V. Govorkov
IPC分类号： H01S310
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/106 , H01S3/1305 , H01S3/137 , H01S5/0687 , H01S5/141
摘要： A tunable laser is provided having a gain medium and a resonator for generating a laser beam, and an angular dispersion element. The laser further includes a beam expander with adjustable magnification for adjusting an angular dispersion provided by the dispersion element. The adjustable beam expander preferably includes one or two rotatable prisms. When two prisms are used, the prisms are preferably synchronously rotatable according to a preset ratio such that any changes in refraction angle due to the rotation of the first prism are automatically compensated by the rotation of the second prism. A single prism may serve both as a dispersion element and as a beam expansion element. A processor preferably monitors the linewidth and wavelength of the output beam and adjusts an orientation of the prism or prisms of the expansion unit, and the tilt of either a reflection grating or a highly reflective mirror of the resonator in a feedback loop.

2. 发明授权

US6154470A Molecular fluorine (F.sub.2) laser with narrow spectral linewidth 失效
标题翻译：具有窄光谱线宽的分子氟（F2）激光
公开(公告)号：US6154470A
公开(公告)日：2000-11-28
申请号：US317527
申请日：1999-05-24
申请人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
发明人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
IPC分类号： H01S3/223 , H01S3/03 , H01S3/08 , H01S3/098 , H01S3/106 , H01S3/137 , H01S3/225
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/08036 , H01S3/1062 , H01S3/2258
摘要： A molecular fluorine (F.sub.2) laser is provided wherein the gas mixture comprises molecular fluorine for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that the output beam only includes one of these lines. The etalon may also serve to outcouple the beam and/or narrow the selected line. Alternatively, a prism provides the line selection and the etalon narrows the selected line. The etalon may be a resonator reflector which also selects a line, while another element outcouples the beam. The etalon plates, preferably uncoated, comprise a material that is transparent at 157 nm, such as CaF.sub.2, MgF.sub.2, LiF.sub.2, BaF.sub.2, SrF.sub.2, quartz and fluorine doped quartz. The etalon plates are separated by spacers comprising a material having a low thermal expansion constant, such as invar, zerodur.RTM., ultra low expansion glass, and quartz. A gas such as helium or a solid such as CaF.sub.2 that does not absorb radiation 157 nm fills the gap between the etalon plates, or the gap is evacuated. The gas mixture preferably further includes neon as a buffer gas. Another etalon may be used for line narrowing. One or more of a highly reflective mirror, a high finesse etalon or a prism with a highly reflective back surface may serve as a highly reflective resonator reflector. Any of one or more etalons, a prism, a brewster plate and a highly or partially reflective mirror may seal the laser discharge chamber.
摘要翻译：提供分子氟（F2）激光器，其中气体混合物包含用于产生包括在157nm附近的两个或三个紧密间隔的线的光谱发射的分子氟。标准具提供线选择，使得输出光束仅包括这些线之一。标准具还可用于将光束外耦合和/或使所选择的线变窄。或者，棱镜提供线选择并且标准具缩小所选行。标准具可以是也选择一条线的谐振器反射器，而另一个元件将光束耦合。优选未涂覆的标准具板包括在157nm下透明的材料，例如CaF 2，MgF 2，LiF 2，BaF 2，SrF 2，石英和氟掺杂的石英。标准具板由包括具有低热膨胀常数的材料的间隔物分离，例如invar，zerodur TM，超低膨胀玻璃和石英。诸如氦气或诸如CaF 2的不吸收辐射的固体的气体157nm填充了标准具板之间的间隙，或间隙被排空。气体混合物优选还包括作为缓冲气体的氖。另一种标准具可用于线窄。高反射镜，高精度标准具或具有高反射背面的棱镜中的一个或多个可以用作高反射谐振器反射器。一个或多个标准具，棱镜，布鲁斯特板和高度或部分反射镜中的任何一个可以密封激光放电室。

3. 发明授权

US5559816A Narrow-band laser apparatus 失效
标题翻译：窄带激光装置
公开(公告)号：US5559816A
公开(公告)日：1996-09-24
申请号：US453609
申请日：1995-05-30
申请人： Dirk Basting , Jurgen Kleinschmidt
发明人： Dirk Basting , Jurgen Kleinschmidt
IPC分类号： G03F7/20 , H01S3/08 , H01S3/098 , H01S3/106 , H01S3/225 , H01S3/10
CPC分类号： H01S3/08036 , G03F7/70025 , G03F7/70566 , G03F7/70575 , H01S3/1066 , H01S3/08009 , H01S3/225
摘要： A narrow-band laser apparatus comprises an optical resonator including first and second reflectors for reflecting radiation, a laser medium for amplifying radiation in said resonator and an etalon for selecting a given wavelength component from said radiation. A polarizing beam splitter is provided for linearly polarizing said radiation and also for acting as an output coupler. In order to obtain very narrow bandwidth radiation of high intensity, a Faraday rotator is provided for rotating the plane of polarization while maintaining the linear polarization thereby allowing a second wavelength selection element (such as a grating) to be efficiently employed to further narrow the output of the laser.
摘要翻译：窄带激光装置包括光谐振器，其包括用于反射辐射的第一和第二反射器，用于放大所述谐振器中的辐射的激光介质和用于从所述辐射中选择给定波长分量的标准具。提供偏振分束器用于使所述辐射线性偏振并且还用作输出耦合器。为了获得高强度的非常窄的带宽辐射，提供了用于旋转极化平面的法拉第旋转器，同时保持线性偏振，从而允许有效地使用第二波长选择元件（例如光栅）来进一步缩小输出的激光。

4. 发明授权

US07308013B2 Excimer or molecular fluorine laser system with precision timing 有权
标题翻译：准分子或分子氟激光系统具有精确时序
公开(公告)号：US07308013B2
公开(公告)日：2007-12-11
申请号：US10699763
申请日：2003-11-03
申请人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
发明人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/073 , H01S3/09702 , H01S3/09713 , H01S3/2258
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确定时。另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

5. 发明授权

US6005880A Precision variable delay using saturable inductors 失效
标题翻译：使用可饱和电感的精密可变延迟
公开(公告)号：US6005880A
公开(公告)日：1999-12-21
申请号：US822451
申请日：1997-03-21
申请人： Dirk Basting , Hubertus Von Bergmann
发明人： Dirk Basting , Hubertus Von Bergmann
IPC分类号： H01S3/097 , H01S3/00
CPC分类号： H01S3/097
摘要： An apparatus and method for providing accurate sub-nanosecond timing control between the voltage outputs of branches of an excitation circuit which are driven by a common switch. This invention allows for the introduction of variable timing delays between the branches of the circuit, and eliminates relative timing jitter. Using saturable inductors with variable bias in the high-voltage excitation circuit, this invention provides a continuously tuneable delay on the subnanosecond time scale between two or more excitation circuit branches.
摘要翻译：一种用于在由公共开关驱动的激励电路的分支的电压输出之间提供准确的亚纳秒定时控制的装置和方法。本发明允许在电路的分支之间引入可变的定时延迟，并且消除相对定时抖动。在高电压激励电路中使用具有可变偏置的饱和电感器，本发明在两个或更多个励磁电路分支之间的亚纳秒时间尺度上提供连续可调延迟。

6. 发明授权

US5430752A Apparatus for purifying laser gas 失效
标题翻译：激光气体净化装置
公开(公告)号：US5430752A
公开(公告)日：1995-07-04
申请号：US257462
申请日：1994-06-09
申请人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
发明人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
IPC分类号： B01D8/00 , H01S3/03 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).
摘要翻译：一种用于净化激光气体的装置，特别是用于准分子激光器和F2激光器的装置，使用液氮（12）将杂质从激光气体中冷冻，冻结温度通过上述压力表面（14）上方的压力来设定液氮（12）。

7. 发明授权

US06717973B2 Wavelength and bandwidth monitor for excimer or molecular fluorine laser 失效
标题翻译：准分子或分子氟激光的波长和带宽监测
公开(公告)号：US06717973B2
公开(公告)日：2004-04-06
申请号：US09883097
申请日：2001-06-13
申请人： Dirk Basting , Sergei Govorkov , Juergen Kleinschmidt , Peter Lokai , Uwe Stamm
发明人： Dirk Basting , Sergei Govorkov , Juergen Kleinschmidt , Peter Lokai , Uwe Stamm
IPC分类号： H01S320
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/0315 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/08059 , H01S3/1062 , H01S3/134 , H01S3/137 , H01S3/2258
摘要： A F2-laser includes a discharge chamber filled with a gas mixture including molecular fluorine for generating a spectral emission in a wavelength range between 157 nm and 158 nm including a primary line and a secondary line, multiple electrodes coupled with a power supply circuit for producing a pulsed discharge to energize the molecular fluorine, a resonator including the discharge chamber and an interferometric device for generating a laser beam having a bandwidth of less than 1 pm, and a wavelength monitor coupled in a feedback loop with a processor for monitoring a spectral distribution of the laser beam. The processor controls an interferometric spectrum of the interferometric device based on the monitored spectral distribution such that sidebands within the spectral distribution are substantially minimized.
摘要翻译： F2激光器包括填充有包括分子氟的气体混合物的放电室，用于在包括初级线和次级线的157nm和158nm之间的波长范围内产生光谱发射，多个电极与用于生产的电源电路用于激发分子氟的脉冲放电，包括放电室的谐振器和用于产生具有小于1ms的带宽的激光束的干涉仪，以及耦合在反馈环路中的波长监测器，用于监测光谱分布的激光束。处理器基于监测的光谱分布来控制干涉测量装置的干涉光谱，使得光谱分布内的边带基本上最小化。

8. 发明授权

US06650679B1 Preionization arrangement for gas laser 失效
标题翻译：气体激光器的预处理装置
公开(公告)号：US06650679B1
公开(公告)日：2003-11-18
申请号：US09247887
申请日：1999-02-10
申请人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
发明人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。介电壳体包括具有不同外部曲率半径的两个圆柱形区域。外壳的开口端具有比封闭的另一端更大的曲率半径。内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

9. 发明授权

US5136605A Apparatus for purifying laser gas 失效
标题翻译：用于净化激光气体的装置
公开(公告)号：US5136605A
公开(公告)日：1992-08-04
申请号：US670743
申请日：1991-03-15
申请人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
发明人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
IPC分类号： B01D8/00 , H01S3/03 , H01S3/036 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
摘要翻译：一种用于净化激光气体的装置，特别是用于准分子激光器和F2激光器的装置，使用液氮（12）将杂质从激光气体中冷冻，冻结温度通过上述压力表面（14）上方的压力来设定液氮（12）。

10. 发明授权

US07075963B2 Tunable laser with stabilized grating 失效
公开(公告)号：US07075963B2
公开(公告)日：2006-07-11
申请号：US09771366
申请日：2001-01-25
申请人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
发明人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
IPC分类号： H01S3/22
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/1055 , H01S3/106 , H01S3/1062 , H01S3/225
摘要： A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the enclosure is adjusted for tuning the wavelength. Preferably, the pressure is controlled by controlling the flow of an inert gas through the enclosure. A pump may be used, or an overpressure flow may be used. Alternatively, a prism of the beam expander or an etalon may be rotatable for tuning the wavelength.

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