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1. 发明授权

US07308013B2 Excimer or molecular fluorine laser system with precision timing 有权
标题翻译：准分子或分子氟激光系统具有精确时序
公开(公告)号：US07308013B2
公开(公告)日：2007-12-11
申请号：US10699763
申请日：2003-11-03
申请人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
发明人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/073 , H01S3/09702 , H01S3/09713 , H01S3/2258
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确定时。另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

2. 发明申请

US20050031004A1 Excimer or molecular fluorine laser system with precision timing 有权
标题翻译：准分子或分子氟激光系统具有精确时序
公开(公告)号：US20050031004A1
公开(公告)日：2005-02-10
申请号：US10699763
申请日：2003-11-03
申请人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
发明人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
IPC分类号： H01S3/00 , H01S3/0971 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/225 , H01S3/073 , H01S3/09702 , H01S3/09713 , H01S3/2258
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确时序。另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

3. 发明申请

US20050058172A1 System and method for segmented electrode with temporal voltage shifting 审中-公开
标题翻译：具有时间电压偏移的分段电极的系统和方法
公开(公告)号：US20050058172A1
公开(公告)日：2005-03-17
申请号：US10936084
申请日：2004-09-08
申请人： Rainer Paetzel , Igor Bragin , Andreas Targsdorf , Vadim Berger , Rustem Osmanow
发明人： Rainer Paetzel , Igor Bragin , Andreas Targsdorf , Vadim Berger , Rustem Osmanow
IPC分类号： H01S3/00 , H01S3/038 , H01S3/0971 , H01S3/22
CPC分类号： H01S3/0971 , H01S3/038 , H01S3/09713
摘要： The stability of a gas discharge in an excimer or molecular fluorine laser system can be improved by generating multiple discharge pulses in the resonator chamber, instead of a single discharge pulse. Each of these discharges can be optimized in both energy transfer and efficient coupling to the gas. The timing of each discharge can be controlled using, for example, a common pulser component along with appropriate circuitry to provide energy pulses to each of a plurality of segmented main discharge electrodes. Applying the energy to the segmented electrodes rather than to a standard discharge electrode pair allows for an optimization of the temporal shape of the resulting superimposed laser pulse. The optimized shape and higher stability can allow the laser system to operate at higher repetition rates, while minimizing the damage to system and/or downstream optics.
摘要翻译：可以通过在谐振器腔中产生多个放电脉冲而不是单个放电脉冲来改善准分子或分子氟激光系统中气体放电的稳定性。这些放电中的每一个可以在能量传递和与气体的有效耦合的两者中进行优化。可以使用例如公共脉冲发生器部件以及适当的电路来控制每个放电的定时，以向多个分段的主放电电极中的每一个提供能量脉冲。将能量施加到分段电极而不是标准放电电极对允许优化所得叠加的激光脉冲的时间形状。优化的形状和更高的稳定性可以允许激光系统以更高的重复率操作，同时最小化对系统和/或下游光学器件的损害。

4. 发明授权

US06987790B2 Excimer or molecular fluorine laser with several discharge chambers 有权
标题翻译：具有多个放电室的准分子或分子氟激光
公开(公告)号：US06987790B2
公开(公告)日：2006-01-17
申请号：US10776137
申请日：2004-02-11
申请人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
发明人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
IPC分类号： H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/225 , H01S3/09713 , H01S3/2366
摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.
摘要翻译：使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。触发电离也可用于同步MOPA配置中双室的时序。在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

5. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

6. 发明授权

US07158553B2 Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
标题翻译：具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统
公开(公告)号：US07158553B2
公开(公告)日：2007-01-02
申请号：US10776404
申请日：2004-02-11
申请人： Sergei V. Govorkov , Alexander O. Wiessner , Rainer Paetzel , Igor Bragin
发明人： Sergei V. Govorkov , Alexander O. Wiessner , Rainer Paetzel , Igor Bragin
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/10 , H01S3/225 , H01S3/2333
摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.
摘要翻译：可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

7. 发明申请

US20080019411A1 Compact sealed-off excimer laser 审中-公开
标题翻译：紧凑型密封准分子激光器
公开(公告)号：US20080019411A1
公开(公告)日：2008-01-24
申请号：US11490386
申请日：2006-07-20
申请人： Norbert Niemoeller , Igor Bragin , Rainer Paetzel , Rustem Osmanow , Juergen Witt
发明人： Norbert Niemoeller , Igor Bragin , Rainer Paetzel , Rustem Osmanow , Juergen Witt
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/0305 , H01S3/036 , H01S3/0385
摘要： An excimer laser is disclosed in which a gas-discharge is formed for exciting an excimer-forming lasing-gas mixture. The gas discharge is formed between an elongated anode electrode and a elongated cathode electrode. The anode is in contact with a dielectric surface and the cathode is supported above the dielectric surface, laterally spaced from and parallel to the anode. The gas-discharge has a surface-discharge or sliding discharge portion extending from the anode over the dielectric surface, and a volume-discharge portion connecting the sliding-discharge portion to the cathode. The volume-discharge excites the lasing-gas mixture. A laser resonator is arranged to generate laser radiation from the excited gas mixture. The sliding-discharge has homogeneous, stable characteristics that are inherited by the volume-discharge. An ion-wind generator provides circulation of the lasing-gas mixture through the volume-discharge.
摘要翻译：公开了一种准分子激光器，其中形成气体放电以激发准分子成型激光气体混合物。气体放电形成在细长的阳极电极和细长的阴极电极之间。阳极与电介质表面接触，并且阴极被支撑在电介质表面的上方，与阳极横向间隔开并平行。气体放电具有从电介质表面上的阳极延伸的表面放电或滑动放电部，以及将滑动放电部连接到阴极的容积放电部。体积放电激发激光气体混合物。激光谐振器布置成从激发的气体混合物产生激光辐射。滑动放电具有由体积放电所遗传的均匀，稳定的特性。离子风发生器通过体积放电提供激光气体混合物的循环。

8. 发明申请

US20050083984A1 Laser system sealing 审中-公开
标题翻译：激光系统密封
公开(公告)号：US20050083984A1
公开(公告)日：2005-04-21
申请号：US10963284
申请日：2004-10-12
申请人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
发明人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
IPC分类号： H01S3/03 , H01S3/036 , H01S3/22 , H01S3/225
CPC分类号： H01S3/036 , H01S3/03 , H01S3/225
摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).
摘要翻译：通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生中间气体体积。可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

9. 发明授权

US06618422B2 Preionization arrangement for a gas laser 失效
标题翻译：气体激光器的预处理装置
公开(公告)号：US06618422B2
公开(公告)日：2003-09-09
申请号：US09863931
申请日：2001-05-22
申请人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
发明人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
IPC分类号： H01S300
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。介电壳体包括具有不同外部曲率半径的两个圆柱形区域。外壳的开口端具有比封闭的另一端更大的曲率半径。内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

10. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

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