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1. 发明授权

US5430752A Apparatus for purifying laser gas 失效
标题翻译：激光气体净化装置
公开(公告)号：US5430752A
公开(公告)日：1995-07-04
申请号：US257462
申请日：1994-06-09
申请人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
发明人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
IPC分类号： B01D8/00 , H01S3/03 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).
摘要翻译：一种用于净化激光气体的装置，特别是用于准分子激光器和F2激光器的装置，使用液氮（12）将杂质从激光气体中冷冻，冻结温度通过上述压力表面（14）上方的压力来设定液氮（12）。

2. 发明授权

US5136605A Apparatus for purifying laser gas 失效
标题翻译：用于净化激光气体的装置
公开(公告)号：US5136605A
公开(公告)日：1992-08-04
申请号：US670743
申请日：1991-03-15
申请人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
发明人： Dirk Basting , Gerd Steinfuhrer , Frank Voss
IPC分类号： B01D8/00 , H01S3/03 , H01S3/036 , H01S3/225
CPC分类号： H01S3/036 , H01S3/225
摘要： An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
摘要翻译：一种用于净化激光气体的装置，特别是用于准分子激光器和F2激光器的装置，使用液氮（12）将杂质从激光气体中冷冻，冻结温度通过上述压力表面（14）上方的压力来设定液氮（12）。

3. 发明授权

US5111473A Laser gas purifying apparatus 失效
标题翻译：激光气体净化装置
公开(公告)号：US5111473A
公开(公告)日：1992-05-05
申请号：US644210
申请日：1991-01-22
申请人： Ulrich Rebhan , Gerd Steinfuhrer , Frank Voss , Peter Oesterlin
发明人： Ulrich Rebhan , Gerd Steinfuhrer , Frank Voss , Peter Oesterlin
IPC分类号： H01S3/041 , H01S3/03 , H01S3/036 , H01S3/097
CPC分类号： H01S3/036
摘要： In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.
摘要翻译：在一种用于净化激光气体的装置中，包括用于清洁激光气体的冷却回路，该冷却回路可与激光器分开，并且可独立于激光器通过分流线操作。

4. 发明授权

US5220574A Excimer laser with hydrogen chloride and method for producing hydrogen chloride for an excimer laser 失效
标题翻译：具有氯化物的EXCIMER激光器和用于制造激光器的氢氯化物的方法
公开(公告)号：US5220574A
公开(公告)日：1993-06-15
申请号：US794387
申请日：1991-11-19
申请人： Frank Voss , Dirk Basting , A. Meller
发明人： Frank Voss , Dirk Basting , A. Meller
IPC分类号： H01S3/097 , H01S3/036 , H01S3/225
CPC分类号： H01S3/225 , H01S3/036
摘要： An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.
摘要翻译：具有其中进行气体放电的室（10）的准分子激光器参与氯化氢包括通过水解形成氯化氢的装置。

5. 发明授权

US06690703B1 Molecular fluorine laser system 失效
标题翻译：分子氟激光系统
公开(公告)号：US06690703B1
公开(公告)日：2004-02-10
申请号：US10211971
申请日：2002-08-02
申请人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
发明人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
IPC分类号： H01S3225
CPC分类号： H01S3/225 , H01S3/08 , H01S3/2308 , H01S3/2366
摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.
摘要翻译：分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。

6. 发明授权

US06533266B1 Transportation device for deflecting flat consignments 失效
标题翻译：用于偏转扁平货物的运输装置
公开(公告)号：US06533266B1
公开(公告)日：2003-03-18
申请号：US09700850
申请日：2000-11-17
申请人： Holger Schererz , Frank Voss , Matthias Prasser
发明人： Holger Schererz , Frank Voss , Matthias Prasser
IPC分类号： B65H500
CPC分类号： B65H29/12 , B65H2301/321 , B65H2701/1916
摘要： The invention pertains to a transport device for rerouting flat mail pieces (6) that are transported clamped between an endless lower band (1) and an endless upper band (2), wherein the upper band (2) is realized in a longitudinally elastic fashion and guided back in an outwardly directed loop. According to the invention, an inexpensive and space-saving rerouting with the least possible stress on the mail pieces is realized due to the fact that the driven lower band (1) is guided on a stationary, immovable guide element (3) with a sliding surface that has the shape of a curved segment, and the sliding surface of the curved segment has a lower coefficient of friction than the lower band (1) and the mail pieces (6). The lower band (1) has a low coefficient of friction on its side facing the guide element (3) and has a high coefficient of friction on its side facing the non-driven upper band (2) and the mail pieces (6). The lower band is deflected inward by means of deflection rolls (7) in such a way that it is looped around a driving roll (5) arranged within the guide element (3) with its side that has a high coefficient of friction.
摘要翻译：本发明涉及一种用于重新路由平邮件（6）的输送装置，其被传送夹持在环形下带（1）和环形上带（2）之间，其中上带（2）以纵向弹性方式实现并向外引导回路。根据本发明，由于以下事实实现了在邮件上具有尽可能低的应力的廉价且节省空间的重新路由，即由驱动下带（1）以固定的不可移动的导向元件（3）引导而滑动具有弯曲部分的形状的表面，并且弯曲部分的滑动表面具有比下部带（1）和邮件（6）更低的摩擦系数。下带（1）在其面向引导元件（3）的一侧具有低摩擦系数，并且在面向非驱动上带（2）和邮件（6）的一侧具有高摩擦系数。下带通过偏转辊（7）向内偏转，使得其绕布置在引导元件（3）内的驱动辊（5）环绕，其侧面具有高摩擦系数。

7. 发明授权

US06466598B2 F2-laser with line selection 失效
公开(公告)号：US06466598B2
公开(公告)日：2002-10-15
申请号：US09925040
申请日：2001-08-07
申请人： Jürgen Kleinschmidt , Peter Heist , Frank Voss , Andreas Görtler
发明人： Jürgen Kleinschmidt , Peter Heist , Frank Voss , Andreas Görtler
IPC分类号： H01S322
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/08009 , H01S3/1062
摘要： An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

8. 发明授权

US06227375B1 Device for monitoring the transport process of flat despatches 有权
标题翻译：用于监测平面发货的运输过程的装置
公开(公告)号：US06227375B1
公开(公告)日：2001-05-08
申请号：US09180421
申请日：1999-02-19
申请人： Dieter Powollik , Frank Voss
发明人： Dieter Powollik , Frank Voss
IPC分类号： G01N1900
CPC分类号： G06K19/077 , B07C3/00 , G07B2017/00669 , G07B2017/00677 , G07B2017/00693
摘要： The invention relates to a device for monitoring the transport process of flat despatches with a sensor, a store and an evaluation device, in which the device, takes the form of a flat despatch having a number of different regions, especially rigid and flexible regions. According to the invention, the regions are formed in such a way that the device has comparable machine compatibility and solidity to ordinary despatches. The regions consist of component, stamping and franking (1), belt-running (2, 3), buffer and intake (4) and bend and fold regions (6).
摘要翻译：本发明涉及一种用于利用传感器，商店和评估装置监测平面发货的运输过程的装置，其中该装置采取具有多个不同区域，特别是刚性和柔性区域的平坦发货的形式。根据本发明，这些区域以这样一种方式形成，使得该装置具有可比较的机器兼容性和对于普通发送的坚固性。区域包括部件，冲压和压印（1），皮带运行（2,3），缓冲和进气（4）以及弯折区域（6）。

9. 发明授权

US09108224B2 Sorting installation and sorting method for jointly sorting different kinds of articles 有权
标题翻译：分类安装和分拣方法联合分类不同类型的物品
公开(公告)号：US09108224B2
公开(公告)日：2015-08-18
申请号：US14347720
申请日：2012-09-13
申请人： Holger Schererz , Rolf-Peter Skrdlant , Frank Voss
发明人： Holger Schererz , Rolf-Peter Skrdlant , Frank Voss
IPC分类号： G06F7/00 , B07C3/00 , B07C1/10 , B07C1/14
CPC分类号： B07C3/00 , B07C1/10 , B07C1/14
摘要： A sorting installation and a sorting method jointly sort two kinds of flat mail items. For each article to be sorted, a value that a prescribed sorting feature assumes for the article is measured. The article is transported by a first transport device to a separating filter. An article of the first article kind is redirected in a first outward-transfer device. On the basis of the ascertained sorting feature value, one sorting output from a first set of sorting outputs is selected. The article is transferred outward to the selected sorting output from the first sorting output set. An article of the second article kind is redirected to a second transport device and transported to a second outward-transfer device. On the basis of the ascertained sorting feature value, one sorting output from a second set of sorting outputs is selected.
摘要翻译：分类安装和分类方法联合分类两种平邮。对于要排序的每个物品，测量规定的排序功能为该物品所假定的值。物品通过第一输送装置输送到分离过滤器。第一个文章类型的文章被重定向到第一个外向传送设备中。基于确定的排序特征值，选择来自第一组排序输出的一个排序输出。文章从第一个排序输出集合向外传输到所选择的排序输出。第二物品类型的物品被重定向到第二输送装置并被运送到第二向外传送装置。基于确定的排序特征值，选择来自第二组排序输出的一个排序输出。

10. 发明申请

US20140236345A1 SORTING INSTALLATION AND SORTING METHOD FOR JOINTLY SORTING DIFFERENT KINDS OF ARTICLES 有权
标题翻译：分类安装和分类方法，用于连续分类不同类型的文章
公开(公告)号：US20140236345A1
公开(公告)日：2014-08-21
申请号：US14347720
申请日：2012-09-13
申请人： Holger Schererz , Rolf-Peter Skrdlant , Frank Voss
发明人： Holger Schererz , Rolf-Peter Skrdlant , Frank Voss
IPC分类号： B07C3/00
CPC分类号： B07C3/00 , B07C1/10 , B07C1/14
摘要： A sorting installation and a sorting method jointly sort two kinds of flat mail items. For each article to be sorted, a value that a prescribed sorting feature assumes for the article is measured. The article is transported by a first transport device to a separating filter. An article of the first article kind is redirected in a first outward-transfer device. On the basis of the ascertained sorting feature value, one sorting output from a first set of sorting outputs is selected. The article is transferred outward to the selected sorting output from the first sorting output set. An article of the second article kind is redirected to a second transport device and transported to a second outward-transfer device. On the basis of the ascertained sorting feature value, one sorting output from a second set of sorting outputs is selected.
摘要翻译：分类安装和分类方法联合分类两种平邮。对于要排序的每个物品，测量规定的排序功能为该物品所假定的值。物品通过第一输送装置输送到分离过滤器。第一个文章类型的文章被重定向到第一个外向传送设备中。基于确定的排序特征值，选择来自第一组排序输出的一个排序输出。文章从第一个排序输出集合向外传输到所选择的排序输出。第二物品类型的物品被重定向到第二输送装置并被运送到第二向外传送装置。基于确定的排序特征值，选择来自第二组排序输出的一个排序输出。

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