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1. 发明授权

US07075963B2 Tunable laser with stabilized grating 失效
公开(公告)号：US07075963B2
公开(公告)日：2006-07-11
申请号：US09771366
申请日：2001-01-25
申请人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
发明人： Dirk Basting , Wolfgang Zschocke , Thomas Schröeder , Juergen Kleinschmidt , Matthias Kramer , Uwe Stamm
IPC分类号： H01S3/22
CPC分类号： H01S3/08009 , H01S3/08004 , H01S3/1055 , H01S3/106 , H01S3/1062 , H01S3/225
摘要： A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the enclosure is adjusted for tuning the wavelength. Preferably, the pressure is controlled by controlling the flow of an inert gas through the enclosure. A pump may be used, or an overpressure flow may be used. Alternatively, a prism of the beam expander or an etalon may be rotatable for tuning the wavelength.

2. 发明授权

US06717973B2 Wavelength and bandwidth monitor for excimer or molecular fluorine laser 失效
标题翻译：准分子或分子氟激光的波长和带宽监测
公开(公告)号：US06717973B2
公开(公告)日：2004-04-06
申请号：US09883097
申请日：2001-06-13
申请人： Dirk Basting , Sergei Govorkov , Juergen Kleinschmidt , Peter Lokai , Uwe Stamm
发明人： Dirk Basting , Sergei Govorkov , Juergen Kleinschmidt , Peter Lokai , Uwe Stamm
IPC分类号： H01S320
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/0315 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/08059 , H01S3/1062 , H01S3/134 , H01S3/137 , H01S3/2258
摘要： A F2-laser includes a discharge chamber filled with a gas mixture including molecular fluorine for generating a spectral emission in a wavelength range between 157 nm and 158 nm including a primary line and a secondary line, multiple electrodes coupled with a power supply circuit for producing a pulsed discharge to energize the molecular fluorine, a resonator including the discharge chamber and an interferometric device for generating a laser beam having a bandwidth of less than 1 pm, and a wavelength monitor coupled in a feedback loop with a processor for monitoring a spectral distribution of the laser beam. The processor controls an interferometric spectrum of the interferometric device based on the monitored spectral distribution such that sidebands within the spectral distribution are substantially minimized.
摘要翻译： F2激光器包括填充有包括分子氟的气体混合物的放电室，用于在包括初级线和次级线的157nm和158nm之间的波长范围内产生光谱发射，多个电极与用于生产的电源电路用于激发分子氟的脉冲放电，包括放电室的谐振器和用于产生具有小于1ms的带宽的激光束的干涉仪，以及耦合在反馈环路中的波长监测器，用于监测光谱分布的激光束。处理器基于监测的光谱分布来控制干涉测量装置的干涉光谱，使得光谱分布内的边带基本上最小化。

3. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

4. 发明授权

US07266137B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US07266137B2
公开(公告)日：2007-09-04
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注入的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

5. 发明授权

US06965624B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US06965624B2
公开(公告)日：2005-11-15
申请号：US10338779
申请日：2003-01-06
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： G02B5/18 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/08 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225 , H01S3/00 , H01S3/09 , H01S3/097 , H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
摘要翻译：提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。分子氟以初始分压提供，并在激光放电室内耗尽。每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％在激光室内。可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

6. 发明授权

US6154470A Molecular fluorine (F.sub.2) laser with narrow spectral linewidth 失效
标题翻译：具有窄光谱线宽的分子氟（F2）激光
公开(公告)号：US6154470A
公开(公告)日：2000-11-28
申请号：US317527
申请日：1999-05-24
申请人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
发明人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
IPC分类号： H01S3/223 , H01S3/03 , H01S3/08 , H01S3/098 , H01S3/106 , H01S3/137 , H01S3/225
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/08036 , H01S3/1062 , H01S3/2258
摘要： A molecular fluorine (F.sub.2) laser is provided wherein the gas mixture comprises molecular fluorine for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that the output beam only includes one of these lines. The etalon may also serve to outcouple the beam and/or narrow the selected line. Alternatively, a prism provides the line selection and the etalon narrows the selected line. The etalon may be a resonator reflector which also selects a line, while another element outcouples the beam. The etalon plates, preferably uncoated, comprise a material that is transparent at 157 nm, such as CaF.sub.2, MgF.sub.2, LiF.sub.2, BaF.sub.2, SrF.sub.2, quartz and fluorine doped quartz. The etalon plates are separated by spacers comprising a material having a low thermal expansion constant, such as invar, zerodur.RTM., ultra low expansion glass, and quartz. A gas such as helium or a solid such as CaF.sub.2 that does not absorb radiation 157 nm fills the gap between the etalon plates, or the gap is evacuated. The gas mixture preferably further includes neon as a buffer gas. Another etalon may be used for line narrowing. One or more of a highly reflective mirror, a high finesse etalon or a prism with a highly reflective back surface may serve as a highly reflective resonator reflector. Any of one or more etalons, a prism, a brewster plate and a highly or partially reflective mirror may seal the laser discharge chamber.
摘要翻译：提供分子氟（F2）激光器，其中气体混合物包含用于产生包括在157nm附近的两个或三个紧密间隔的线的光谱发射的分子氟。标准具提供线选择，使得输出光束仅包括这些线之一。标准具还可用于将光束外耦合和/或使所选择的线变窄。或者，棱镜提供线选择并且标准具缩小所选行。标准具可以是也选择一条线的谐振器反射器，而另一个元件将光束耦合。优选未涂覆的标准具板包括在157nm下透明的材料，例如CaF 2，MgF 2，LiF 2，BaF 2，SrF 2，石英和氟掺杂的石英。标准具板由包括具有低热膨胀常数的材料的间隔物分离，例如invar，zerodur TM，超低膨胀玻璃和石英。诸如氦气或诸如CaF 2的不吸收辐射的固体的气体157nm填充了标准具板之间的间隙，或间隙被排空。气体混合物优选还包括作为缓冲气体的氖。另一种标准具可用于线窄。高反射镜，高精度标准具或具有高反射背面的棱镜中的一个或多个可以用作高反射谐振器反射器。一个或多个标准具，棱镜，布鲁斯特板和高度或部分反射镜中的任何一个可以密封激光放电室。

7. 发明授权

US5838701A Q-switched solid-state laser 失效
标题翻译： Q开关固态激光器
公开(公告)号：US5838701A
公开(公告)日：1998-11-17
申请号：US803119
申请日：1997-02-20
申请人： Nils Deutsch , Thomas Schroder , Uwe Stamm , Wolfgang Zschocke
发明人： Nils Deutsch , Thomas Schroder , Uwe Stamm , Wolfgang Zschocke
IPC分类号： H01S3/08 , H01S3/11 , H01S3/23
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/11
摘要： A Q-switched solid-state laser has a narrow-band laser diode (18) whose narrow-band output radiation serves as seed radiation for exciting a solid (14), with the result that only a single wavelength-stable longitudinal mode oscillates in the resonator (10, 12) of the solid-state laser and corresponding radiation (16) is emitted.
摘要翻译： Q开关固体激光器具有窄带激光二极管（18），其窄带输出辐射用作激发固体（14）的种子辐射，结果是仅一个波长稳定的纵向模式在发射固体激光器的谐振器（10,12）和相应的辐射（16）。

8. 发明授权

US06618422B2 Preionization arrangement for a gas laser 失效
标题翻译：气体激光器的预处理装置
公开(公告)号：US06618422B2
公开(公告)日：2003-09-09
申请号：US09863931
申请日：2001-05-22
申请人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
发明人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
IPC分类号： H01S300
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。介电壳体包括具有不同外部曲率半径的两个圆柱形区域。外壳的开口端具有比封闭的另一端更大的曲率半径。内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

9. 发明授权

US06426966B1 Molecular fluorine (F2) laser with narrow spectral linewidth 失效
标题翻译：具有窄光谱线宽的分子氟（F2）激光
公开(公告)号：US06426966B1
公开(公告)日：2002-07-30
申请号：US09657396
申请日：2000-09-08
申请人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
发明人： Dirk Basting , Sergei V. Govorkov , Uwe Stamm
IPC分类号： H01S3098
CPC分类号： H01S3/225 , H01S3/08004 , H01S3/08036 , H01S3/1062 , H01S3/2258
摘要： A molecular fluorine (F2) laser is provided wherein the gas mixture comprises molecular fluorine for generating a spectral emission including two or three closely spaced lines around 157 nm. An etalon provides line selection such that the output beam only includes one of these lines. The etalon may also serve to outcouple the beam and/or narrow the selected line. Alternatively, a prism provides the line selection and the etalon narrows the selected line. The etalon may be a resonator reflector which also selects a line, while another element outcouples the beam. The etalon plates comprise a material that is substantially transparent at 157 nm, such as CaF2, MgF2, LiF2, BaF2, LiF, SrF2, quartz and fluorine doped quartz. The etalon plates are separated by spacers comprising a material having a low thermal expansion constant, such as invar, zerodur®, ultra low expansion glass, and quartz. A beam expander is preferably provided before the etalon for expanding the beam before the beam is incident on the etalon. The beam expander is preferably configured to reduce the divergence of the beam.
摘要翻译：提供分子氟（F2）激光器，其中气体混合物包含用于产生包括在157nm附近的两个或三个紧密间隔的线的光谱发射的分子氟。标准具提供线选择，使得输出光束仅包括这些线之一。标准具还可用于将光束外耦合和/或使所选择的线变窄。或者，棱镜提供线选择并且标准具缩小所选行。标准具可以是也选择一条线的谐振器反射器，而另一个元件将光束耦合。标准普通板包括在157nm处基本上透明的材料，例如CaF 2，MgF 2，LiF 2，BaF 2，LiF，SrF 2，石英和氟掺杂的石英。标准具板由包括具有低热膨胀常数的材料的间隔物分离，例如invar，zerodur，超低膨胀玻璃和石英。优选地，在光束入射到标准具之前，在用于扩展光束的标准具之前提供光束扩展器。光束扩展器优选地被配置为减小光束的发散度。

10. 发明授权

US6014206A Stabilization of angular and lateral laser beam position 有权
标题翻译：角度和横向激光束位置的稳定性
公开(公告)号：US6014206A
公开(公告)日：2000-01-11
申请号：US162424
申请日：1998-09-28
申请人： Dirk Basting , Uwe Stamm , Klaus Mann , Jens Ohlenbusch
发明人： Dirk Basting , Uwe Stamm , Klaus Mann , Jens Ohlenbusch
IPC分类号： H01S3/139 , G01B11/26
CPC分类号： G01B11/26
摘要： The present invention is an apparatus and method for stabilization of laser output beam characteristics by automatically adjusting the angular and the lateral positions of the output beam. A component of the output beam is detected at a far field location and also at a near field location along an optical path of the component. Both the angular and the lateral positions of the output beam are determined, as well as characteristics of the output beam, after the component is detected at both the near and the far field locations. Both the angular position and the lateral position of the output beam are automatically adjusted to optimize the output beam. The adjustment of both the angular position and the lateral position are made possible by using a beam steering device preferably including two mirrors.
摘要翻译：本发明是通过自动调节输出光束的角度和横向位置来稳定激光输出光束特性的装置和方法。输出光束的分量在远场位置以及沿着部件的光路的近场位置被检测。在近场和远场位置都检测到组件之后，确定输出光束的角度和横向位置以及输出光束的特性。自动调整输出光束的角位置和横向位置以优化输出光束。通过使用优选地包括两个反射镜的光束转向装置，可以使得角位置和横向位置的调整成为可能。

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