专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20170324211A1 DIELECTRIC ELECTRODE ASSEMBLY AND METHOD OF MANUFACTURE THEREOF 审中-公开
公开(公告)号：US20170324211A1
公开(公告)日：2017-11-09
申请号：US15147852
申请日：2016-05-05
申请人： Access Laser
发明人： Michael W. Murray
IPC分类号： H01S3/097
CPC分类号： H01S3/09702 , H01S3/03 , H01S3/0385 , H01S3/0407 , H01S3/041 , H01S3/073 , H01S3/2232
摘要： A dielectric electrode assembly, and a method of manufacture thereof, including: a dielectric tube having a cylindrical cross-section and a relative dielectric constant, ε2, the dielectric tube filled with a gas having a relative dielectric constant, ε1; a structural dielectric having a relative dielectric constant, ε3 surrounding the dielectric tube; metal electrodes on opposite sides of the structural dielectric, the metal electrodes having a flat cross-sectional geometry; and the structural dielectric made from a material selected such that the relative dielectric constants of the structural dielectric, the dielectric tube, and the gas are interrelated and a uniform electric field is generated within the dielectric tube when power is applied to the metal electrodes.

2. 发明授权

US08792529B2 Gas laser oscillation device and gas laser processing machine 有权
标题翻译：气体激光振荡装置和气体激光加工机
公开(公告)号：US08792529B2
公开(公告)日：2014-07-29
申请号：US13147218
申请日：2010-02-16
申请人： Hiroyuki Hayashikawa , Hitoshi Hongu , Nobuo Shinno
发明人： Hiroyuki Hayashikawa , Hitoshi Hongu , Nobuo Shinno
IPC分类号： H01S3/22 , F04D25/06 , H01S3/036 , H01S3/07
CPC分类号： H01S3/036 , F04D25/0606 , F04D25/062 , F04D29/056 , F04D29/626 , H01S3/073
摘要： A gas laser oscillator includes a discharge section for exciting laser gas, a blowing section for transmitting the laser gas, and a laser gas flowing path for forming a circulation route of the laser gas between the discharge section and the blowing section. The blowing section is formed of a rotary part to be rotated by a shaft driver and a non-rotary part not to be rotated. The rotary part includes a rotary shaft to which an impeller is mounted at an end, the shaft driver for rotating the rotary shaft, an upper bearing and a lower bearing coupled to the rotary shaft. The rotary part is detachable from the non-rotary part.
摘要翻译：气体激光振荡器包括用于激发激光气体的放电部分，用于透射激光气体的吹送部分和用于形成激光气体在排出部分和吹风部分之间的循环路线的激光气体流动路径。吹风部由旋转部形成，由旋转驱动器和不旋转的非旋转部旋转。旋转部件包括旋转轴，叶轮安装在其一端，用于旋转旋转轴的轴驱动器，联接到旋转轴的上轴承和下轴承。旋转部分可从非旋转部分拆卸。

3. 发明授权

US07664155B2 Gas laser oscillating unit 有权
标题翻译：气体激光振荡单元
公开(公告)号：US07664155B2
公开(公告)日：2010-02-16
申请号：US11771725
申请日：2007-06-29
申请人： Akira Egawa , Takafumi Murakami , Akihiko Nishio
发明人： Akira Egawa , Takafumi Murakami , Akihiko Nishio
IPC分类号： H01S3/03 , H01S3/223
CPC分类号： H01S3/036 , H01S3/073 , H01S3/2232 , H01S3/2237
摘要： A gas laser oscillating unit having a gas junction part where gas flow may be stable, whereby a stable laser beam output and/or a laser beam that does not fluctuate very much may be achieved. The laser gas, flowing through first and second excitation parts, is introduced into the first and second tapered gas flow passages. After that, the two gas flows are mixed at or near the center point of a gas junction part and the mixed gas flows in a next flow passage. Then, one of the gas flows from the first excitation part is biased toward the −X direction by a first biasing member arranged in the first gas flow passage, and the other gas flow from the second excitation part is biased toward the +X direction by a second biasing member arranged in the second gas flow passage.
摘要翻译：一种具有气体接合部分的气体激光振荡单元，其中气体流动可以是稳定的，由此可以实现不太大波动的稳定的激光束输出和/或激光束。流过第一和第二激励部分的激光气体被引入到第一和第二锥形气体流动通道中。之后，两个气流在气体接合部的中心点处或其附近混合，混合气体在下一个流路中流动。然后，通过设置在第一气体流路中的第一偏置构件将来自第一激励部的气体中的一个流向-X方向偏置，另外从第二激励部流出的气体向+ X方向偏移布置在第二气体流动通道中的第二偏压构件。

4. 发明申请

US20090267005A1 Drive laser delivery systems for euv light source 有权
标题翻译：驱动用于euv光源的激光输送系统
公开(公告)号：US20090267005A1
公开(公告)日：2009-10-29
申请号：US12322669
申请日：2009-02-04
申请人： Alexander N. Bykanov , Igor V. Fomenkov , Oleh Khodykin , Alexander I. Ershov
发明人： Alexander N. Bykanov , Igor V. Fomenkov , Oleh Khodykin , Alexander I. Ershov
IPC分类号： G01J3/10
CPC分类号： H05G2/003 , G03F7/70033 , H01S3/0064 , H01S3/073 , H01S3/0805 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10092 , H01S3/105 , H01S3/1066 , H01S3/115 , H01S3/121 , H01S3/127 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/2383 , H05G2/008
摘要： An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for optic cleaning while the window is exposed to a lower gaseous etchant pressure to avoid window coating deterioration. In another aspect, an EUV light source may comprise a target material positionable along a beam path to participate in a first interaction with light on the beam path; an optical amplifier; and at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.
摘要翻译：公开了一种LPP EUV光源，其具有位于等离子体室中的光学器件，用于反射在其中产生的EUV光和激光输入窗口。对于该方面，EUV光源可以被配置为将窗口暴露于更低的气体蚀刻剂压力以将窗口暴露于气体蚀刻剂压力以进行光学清洁，以避免窗口涂层变质。在另一方面，EUV光源可以包括沿着光束路径定位以参与与光束路径上的光的第一相互作用的目标材料; 光放大器; 以及至少一个光导向光子从第一相互作用散射到光放大器中以在光束路径上产生激光束，用于随后与目标材料的相互作用以产生EUV发光等离子体。

5. 发明申请

US20070195839A1 Laser system 有权
标题翻译：激光系统
公开(公告)号：US20070195839A1
公开(公告)日：2007-08-23
申请号：US11214043
申请日：2005-08-30
申请人： Nathan Monty , Kenneth Lind
发明人： Nathan Monty , Kenneth Lind
IPC分类号： H01S3/00
CPC分类号： H01S3/0315 , H01S3/036 , H01S3/0385 , H01S3/0388 , H01S3/073 , H01S3/076 , H01S3/0804 , H01S3/0971 , H01S3/0975 , H01S3/2232
摘要： A laser discharge, where the laser discharge can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier fabrication of sidewall(s), decreasing manufacturing costs.
摘要翻译：激光放电，其中激光放电可以通过电极和至少一个侧壁以允许比先前提供的更紧凑的结构的方式形成。电极中的突起允许更容易的激光启动，并且截面侧壁允许更容易地制造侧壁，降低制造成本。

6. 发明授权

US07173954B2 Gas laser oscillation device 有权
标题翻译：气体激光振荡装置
公开(公告)号：US07173954B2
公开(公告)日：2007-02-06
申请号：US10730264
申请日：2003-12-09
申请人： Akira Egawa , Michinori Maeda
发明人： Akira Egawa , Michinori Maeda
IPC分类号： H01S3/22 , H01S3/00
CPC分类号： H01S3/036 , H01S3/0385 , H01S3/073 , H01S3/08086
摘要： A plurality of discharge sections are formed in an optical resonance space and are provided with electrodes that are mutually different in for example shape, size and construction. Laser medium gas flows through a circulatory passage passing through a fan and heat exchangers. Mutually different modes can be obtained when discharge is produced independently in the discharge sections. When discharge is produced in both of the discharge sections, the various intermediate modes can be obtained, in accordance with the distribution of power supplied from power sources for discharge excitation that are independently operated. If the number of discharge sections is three or more, it is possible to control the distribution of the discharge power that is supplied to the discharge sections in regard to at least two discharge sections of these discharge sections, and the shape and dimensions of the discharge sections or shape, dimensions and construction of the electrodes are selected such that “different modes are excited when independently discharged”.
摘要翻译：多个放电部分形成在光学共振空间中并且设置有例如形状，尺寸和结构相互不同的电极。激光介质气体流过通过风扇和热交换器的循环通道。在放电部中独立地进行放电时，可以获得相互不同的模式。当在两个放电部分中产生放电时，可以根据独立操作的用于放电激励的电源的功率分布获得各种中间模式。如果排出部分的数量为三个以上，则可以控制对这些排出部的至少两个排出部分供给到排出部的排出力的分布，并且排出部的形状和尺寸选择电极的部分或形状，尺寸和结构，使得“独立放电时激发不同的模式”。

7. 发明申请

US20060280213A1 Laser oscillator 审中-公开
标题翻译：激光振荡器
公开(公告)号：US20060280213A1
公开(公告)日：2006-12-14
申请号：US11443276
申请日：2006-05-31
申请人： Akira Egawa , Minoru Ando , Eiji Kobayashi , Takeshi Watanabe
发明人： Akira Egawa , Minoru Ando , Eiji Kobayashi , Takeshi Watanabe
IPC分类号： H01S3/00 , H01S3/22 , H01S3/223
CPC分类号： H01S3/073 , H01S3/036 , H01S3/09702 , H01S3/0971 , H01S3/10038 , H01S3/104
摘要： Provided is a laser oscillator (2) including: a first electrode pair (7a); a second electrode pair (7b); a discharge power supply (4) that induces pulse discharge in the first and second electrode pairs (7a, 7b); and at least one of a discharge phase control unit (53) which extends control so that a first discharge phase (X1) to be attained in the first electrode pair (7a) and a second discharge phase (X2) to be attained in the second electrode pair (7b) will be different from each other during the pulse discharge induced by the discharge power supply (4), a duty cycle control unit (53) which extends control so that a first duty cycle (Y1) to be attained in the first electrode pair (7a) and a second duty cycle (Y2) to be attained in the second electrode pair (7b) will be different from each other during the pulse discharge, a pulse frequency control unit (53) which extends control so that a first pulse frequency (Z1) to be attained in the first electrode pair (7a) and a second pulse frequency (Z2) to be attained in the second electrode pair (7b) will be different from each other during the pulse discharge. Consequently, while discharges in the discharge electrodes are stabilized, laser output can be quickly controlled.
摘要翻译：提供了一种激光振荡器（2），包括：第一电极对（7a）; 第二电极对（7b）; 在第一和第二电极对（7a，7b）中引起脉冲放电的放电电源（4）; 以及放电相位控制单元（53）中的至少一个，其延伸控制使得要在第一电极对（7a）中达到的第一放电阶段（X 1）和第二放电阶段（X 2）达到在由放电电源（4）引起的脉冲放电期间，第二电极对（7b）中的第二电极对（7b）将彼此不同，占空比控制单元（53）的延伸控制使得第一占空比（Y 1）在第一电极对（7a）中达到的第二电极对（7b）中的第二占空比（Y 2）将在脉冲放电期间彼此不同，脉冲频率控制单元 53），其延伸控制使得在第一电极对（7a）中要获得的第一脉冲频率（Z 1）和在第二电极对（7b）中达到的第二脉冲频率（Z 2）将是在脉冲放电期间彼此不同。因此，在放电电极放电稳定的同时，能够快速地控制激光输出。

8. 发明申请

US20060114959A1 Gas laser oscillator 审中-公开
标题翻译：气体激光振荡器
公开(公告)号：US20060114959A1
公开(公告)日：2006-06-01
申请号：US11285284
申请日：2005-11-23
申请人： Akira Egawa , Minoru Ando , Atsushi Mori
发明人： Akira Egawa , Minoru Ando , Atsushi Mori
IPC分类号： H01S3/03
CPC分类号： H01S3/09705 , H01S3/036 , H01S3/073
摘要： A gas laser oscillator (10) provided with voltage detecting means (4a to 4d) for detecting the voltage of each of a plurality of discharge tube segments (6a to 6d) of a discharge tube before start of discharge and a discharge tube segment start judging means (1) for judging if each of the plurality of discharge tube segments (6a to 6d) has started based on the voltage of the discharge tube segments (6a to 6d) detected by the voltage detecting means (4a to 4d), wherein the discharge tube segment start judging means (1) allows all of the plurality of discharge tube segments (6a to 6d) to start only when the voltages of all of the discharge tube segments (6a to 6d) of the plurality of discharge tube segments are smaller than a predetermined voltage (Vb) is provided. Due to this, it is possible to judge an abnormality in the laser gas before the start of discharge without any work on the part of the operator and thereby prevent the discharge tube from being damaged.
摘要翻译：一种气体激光振荡器（10），其设置有用于检测在放电开始和放电之前放电管的多个放电管段（6a至6d）中的每一个的电压的电压检测装置（4a至4d）管段开始判断装置（1），用于基于由电压检测装置检测的放电管段（6a至6d）的电压来判断多个放电管段（6a至6d）中的每一个是否已经开始（4a至4d），其中放电管段开始判断装置（1）允许所有多个放电管段（6a至6d）中的所有放电管段（6a至6d）的所有放电管段一个至6d）的多个放电管段都小于预定电压（Vb）。由此，可以在开始放电之前判断激光气体在操作者的任何工作中的异常，从而防止放电管的损坏。

9. 发明申请

US20050063442A1 Gas laser oscillator 有权
标题翻译：气体激光振荡器
公开(公告)号：US20050063442A1
公开(公告)日：2005-03-24
申请号：US10500725
申请日：2003-09-11
申请人： Hiroyuki Hayashikawa , Hitoshi Hongu
发明人： Hiroyuki Hayashikawa , Hitoshi Hongu
IPC分类号： H01S3/036 , H01S3/07 , H01S3/22
CPC分类号： H01S3/036 , H01S3/073
摘要： A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can increase the laser output substantially by suppressing and uniformizing laser gas pulsation in a discharge tube.
摘要翻译：提供了实现激光输出实质性增加的气体激光振荡器。该气体激光振荡器包括在激光气体通路的位置处的可渗透筛板，并且可以通过抑制和均匀化放电管中的激光气体脉动来增加激光输出。

10. 发明申请

US20040125847A1 Gas laser oscillation device 有权
标题翻译：气体激光振荡装置
公开(公告)号：US20040125847A1
公开(公告)日：2004-07-01
申请号：US10730264
申请日：2003-12-09
申请人： FANUC LTD.
发明人： Akira Egawa , Michinori Maeda
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： H01S3/036 , H01S3/0385 , H01S3/073 , H01S3/08086
摘要： A plurality of discharge sections are formed in an optical resonance space and are provided with electrodes that are mutually different in for example shape, size and construction. Laser medium gas flows through a circulatory passage passing through a fan and heat exchangers. Mutually different modes can be obtained when discharge is produced independently in the discharge sections. When discharge is produced in both of the discharge sections, the various intermediate modes can be obtained, in accordance with the distribution of power supplied from power sources for discharge excitation that are independently operated. If the number of discharge sections is three or more, it is possible to control the distribution of the discharge power that is supplied to the discharge sections in regard to at least two discharge sections of these discharge sections, and the shape and dimensions of the discharge sections or shape, dimensions and construction of the electrodes are selected such that nulldifferent modes are excited when independently dischargednull.
摘要翻译：多个放电部分形成在光学共振空间中并且设置有例如形状，尺寸和结构相互不同的电极。激光介质气体流过通过风扇和热交换器的循环通道。在放电部中独立地进行放电时，可以获得相互不同的模式。当在两个放电部分中产生放电时，可以根据独立操作的用于放电激励的电源的功率分布获得各种中间模式。如果排出部分的数量为三个以上，则可以控制对这些排出部的至少两个排出部分供给到排出部的排出力的分布，并且排出部的形状和尺寸选择电极的部分或形状，尺寸和结构，使得“独立放电时激发不同的模式”。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式