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1. 发明授权

US07308013B2 Excimer or molecular fluorine laser system with precision timing 有权
标题翻译：准分子或分子氟激光系统具有精确时序
公开(公告)号：US07308013B2
公开(公告)日：2007-12-11
申请号：US10699763
申请日：2003-11-03
申请人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
发明人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/073 , H01S3/09702 , H01S3/09713 , H01S3/2258
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确定时。另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

2. 发明授权

US06987790B2 Excimer or molecular fluorine laser with several discharge chambers 有权
标题翻译：具有多个放电室的准分子或分子氟激光
公开(公告)号：US06987790B2
公开(公告)日：2006-01-17
申请号：US10776137
申请日：2004-02-11
申请人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
发明人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
IPC分类号： H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/225 , H01S3/09713 , H01S3/2366
摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.
摘要翻译：使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。触发电离也可用于同步MOPA配置中双室的时序。在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

3. 发明申请

US20050058172A1 System and method for segmented electrode with temporal voltage shifting 审中-公开
标题翻译：具有时间电压偏移的分段电极的系统和方法
公开(公告)号：US20050058172A1
公开(公告)日：2005-03-17
申请号：US10936084
申请日：2004-09-08
申请人： Rainer Paetzel , Igor Bragin , Andreas Targsdorf , Vadim Berger , Rustem Osmanow
发明人： Rainer Paetzel , Igor Bragin , Andreas Targsdorf , Vadim Berger , Rustem Osmanow
IPC分类号： H01S3/00 , H01S3/038 , H01S3/0971 , H01S3/22
CPC分类号： H01S3/0971 , H01S3/038 , H01S3/09713
摘要： The stability of a gas discharge in an excimer or molecular fluorine laser system can be improved by generating multiple discharge pulses in the resonator chamber, instead of a single discharge pulse. Each of these discharges can be optimized in both energy transfer and efficient coupling to the gas. The timing of each discharge can be controlled using, for example, a common pulser component along with appropriate circuitry to provide energy pulses to each of a plurality of segmented main discharge electrodes. Applying the energy to the segmented electrodes rather than to a standard discharge electrode pair allows for an optimization of the temporal shape of the resulting superimposed laser pulse. The optimized shape and higher stability can allow the laser system to operate at higher repetition rates, while minimizing the damage to system and/or downstream optics.
摘要翻译：可以通过在谐振器腔中产生多个放电脉冲而不是单个放电脉冲来改善准分子或分子氟激光系统中气体放电的稳定性。这些放电中的每一个可以在能量传递和与气体的有效耦合的两者中进行优化。可以使用例如公共脉冲发生器部件以及适当的电路来控制每个放电的定时，以向多个分段的主放电电极中的每一个提供能量脉冲。将能量施加到分段电极而不是标准放电电极对允许优化所得叠加的激光脉冲的时间形状。优化的形状和更高的稳定性可以允许激光系统以更高的重复率操作，同时最小化对系统和/或下游光学器件的损害。

4. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

5. 发明申请

US20120033689A1 HIGH-PRECISION SYNCHRONIZATION OF PULSED GAS-DISCHARGE LASERS 有权
标题翻译：脉冲排放激光器的高精度同步
公开(公告)号：US20120033689A1
公开(公告)日：2012-02-09
申请号：US12852864
申请日：2010-08-09
申请人： Andreas TARGSDORF , Rainer Desor
发明人： Andreas TARGSDORF , Rainer Desor
IPC分类号： H01S3/10
CPC分类号： H01S3/09702 , H01S3/225 , H01S3/2383
摘要： Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.
摘要翻译：两个准分子激光器具有单独的脉冲电路，每个脉冲电路包括存储电容器，其被充电然后通过脉冲变压器放电以产生电脉冲，其被传送到激光器以产生光脉冲。产生电脉冲和产生光脉冲之间的时间取决于电容器的充电电压。电容器在彼此断开时被充电。电容脉冲的产生通过在将电容器充电之后的短时间内将电容器连接在一起来同步，以均衡充电电压。电容器在放电之前彼此断开。

6. 发明授权

US06226307B1 Magnetic switch controlled power supply isolator and thyristor commutating circuit 失效
标题翻译：磁开关控制电源隔离器和晶闸管整流电路
公开(公告)号：US06226307B1
公开(公告)日：2001-05-01
申请号：US09432348
申请日：1999-11-02
申请人： Rainer Desor , Andreas Targsdorf , Spencer Merz , Hubertus Von Bergmann
发明人： Rainer Desor , Andreas Targsdorf , Spencer Merz , Hubertus Von Bergmann
IPC分类号： H01S300
CPC分类号： H03K3/57 , H03K17/80
摘要： An isolation means used in conjunction with supplying energy to a laser, which isolates a power supply from the pulser circuit, and commutates a switch which activates the discharge of energy to the laser.
摘要翻译：用于与激光器供应能量的隔离装置，其将来自脉冲发生器电路的电源隔离，并且将激活能量释放的开关换向激光器。

7. 发明授权

US08411721B2 High-precision synchronization of pulsed gas-discharge lasers 有权
标题翻译：脉冲气体放电激光器的高精度同步
公开(公告)号：US08411721B2
公开(公告)日：2013-04-02
申请号：US13540456
申请日：2012-07-02
申请人： Andreas Targsdorf , Rainer Desor
发明人： Andreas Targsdorf , Rainer Desor
IPC分类号： H01S3/00 , H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/09702 , H01S3/225 , H01S3/2383
摘要： Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.
摘要翻译：两个准分子激光器具有单独的脉冲电路，每个脉冲电路包括存储电容器，其被充电然后通过脉冲变压器放电以产生电脉冲，其被传送到激光器以产生光脉冲。产生电脉冲和产生光脉冲之间的时间取决于电容器的充电电压。电容器在彼此断开时被充电。电容脉冲的产生通过在将电容器充电之后的短时间内将电容器连接在一起来同步，以均衡充电电压。电容器在放电之前彼此断开。

8. 发明申请

US20120269223A1 HIGH-PRECISION SYNCHRONIZATION OF PULSED GAS-DISCHARGE LASERS 有权
公开(公告)号：US20120269223A1
公开(公告)日：2012-10-25
申请号：US13540456
申请日：2012-07-02
申请人： Andreas Targsdorf , Rainer Desor
发明人： Andreas Targsdorf , Rainer Desor
IPC分类号： H01S3/22
CPC分类号： H01S3/09702 , H01S3/225 , H01S3/2383
摘要： Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.

9. 发明授权

US08238400B2 High-precision synchronization of pulsed gas-discharge lasers 有权
标题翻译：脉冲气体放电激光器的高精度同步
公开(公告)号：US08238400B2
公开(公告)日：2012-08-07
申请号：US12852864
申请日：2010-08-09
申请人： Andreas Targsdorf , Rainer Desor
发明人： Andreas Targsdorf , Rainer Desor
IPC分类号： H01S3/00 , H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/09702 , H01S3/225 , H01S3/2383
摘要： Two excimer lasers have individual pulsing circuits each including a storage capacitor which is charged and then discharged through a pulse transformer to generate an electrical pulse, which is delivered to the laser to generate a light pulse. The time between generation of the electrical pulse and creation of the light pulse is dependent on the charged voltage of the capacitor. The capacitors are charged while disconnected from each other. The generation of the electrical pulses is synchronized by connecting the capacitors together for a brief period after the capacitors are charged to equalize the charging voltages. The capacitors are disconnected from each other before they are discharged.
摘要翻译：两个准分子激光器具有单独的脉冲电路，每个脉冲电路包括存储电容器，其被充电然后通过脉冲变压器放电以产生电脉冲，其被传送到激光器以产生光脉冲。产生电脉冲和产生光脉冲之间的时间取决于电容器的充电电压。电容器在彼此断开时被充电。电容脉冲的产生通过在将电容器充电之后的短时间内将电容器连接在一起来同步，以均衡充电电压。电容器在放电之前彼此断开。

10. 发明申请

US20050031004A1 Excimer or molecular fluorine laser system with precision timing 有权
标题翻译：准分子或分子氟激光系统具有精确时序
公开(公告)号：US20050031004A1
公开(公告)日：2005-02-10
申请号：US10699763
申请日：2003-11-03
申请人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
发明人： Dirk Basting , Sergei Govorkov , Rainer Paetzel , Igor Bragin , Andreas Targsdorf
IPC分类号： H01S3/00 , H01S3/0971 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/225 , H01S3/073 , H01S3/09702 , H01S3/09713 , H01S3/2258
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确时序。另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

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