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1. 发明公开

KR1020160142899A 방전램프, 광원장치, 노광장치 및 노광장치의 제조방법 有权
公开(公告)号：KR1020160142899A
公开(公告)日：2016-12-13
申请号：KR1020167034073
申请日：2007-08-30
申请人： 가부시키가이샤 니콘
发明人： 시라스히로시 , 아오키야스오 , 고야마모투 , 기쿠치다카유키
IPC分类号： H01J61/30 , H01J5/48 , H01J61/52 , G03F7/20 , H01J61/82 , F21V19/00 , H01J5/56
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822 , H01J61/30 , G03F7/70833 , H01J5/48
摘要： 부착기구에대한방전램프의장착등을용이하게단시간에실시할수 있는광원장치이다. 발광부를형성하는유리관(25)과이것에연결된베이스부(26)를가지는방전램프(1)와, 베이스부(26)를통하여방전램프(1)를유지하는부착장치(31)를구비한광원장치로서, 베이스부(26)는부착장치(31)의위치결정판(5O)과맞닿는플랜지부(26a)와, 플랜지부(26a)를위치결정판(5O)으로가압하는가압력이밀어붙여지는고정부(26h)를가지며, 부착장치(31)는압축코일스프링(44A)에의해서고정부(26h)를밀어붙이는고정용암(55A)을가진다.

2. 发明授权

KR101407533B1 노광용 조명장치 有权
标题翻译：暴露的灯具房
公开(公告)号：KR101407533B1
公开(公告)日：2014-06-16
申请号：KR1020130157447
申请日：2013-12-17
申请人： (주)와이티에스
发明人： 임순식 , 오경환
IPC分类号： G03F7/20 , H01L21/027
CPC分类号： G03F7/70016 , G03F7/2004
摘要： The present invention relates to a lighting device for exposure which includes a lamp, a reflector which is installed to cover the top of the lamp, an exposure unit which is installed in the lower part of the lamp, a case which contains the reflector and the exposure unit, a lamp position adjustment unit which is installed in the case, and an illuminance adjustment unit which is installed in the case. The lighting device for exposure can reduce the replacement time of the lamp and increase the position accuracy of the lamp.
摘要翻译：本发明涉及一种用于曝光的照明装置，其包括灯，安装成覆盖灯顶部的反射器，安装在灯的下部的曝光单元，包含反射器的壳体和曝光单元，安装在壳体中的灯位置调整单元和安装在壳体中的照度调节单元。用于曝光的照明装置可以减少灯的更换时间并增加灯的位置精度。

3. 发明公开

KR1020090006166A 방사선 생성 디바이스, 리소그래피 장치, 디바이스 제조 방법 및 그에 의해 제조되는 디바이스 失效
标题翻译：辐射发生器件，光刻设备，器件制造方法及其制造的器件
公开(公告)号：KR1020090006166A
公开(公告)日：2009-01-14
申请号：KR1020087027018
申请日：2007-04-27
申请人： 에이에스엠엘 네델란즈 비.브이.
发明人： 이바노프,블라디미르비탈에비치 , 바니네,바딤예프겐예비치 , 크리브트선,블라디미르미하일로비치
IPC分类号： H01L21/027
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , H05G2/005 , G03F7/70016
摘要： An apparatus for producing radiation by an electrically operated discharge has a first electrode (generated by nozzle 21a), a second electrode, and a capacitor bank (24). The electrodes are configured at a distance from each other which allows plasma ignition. The capacitor bank is electrically connected at a first terminal (A) to the first electrode and at a second terminal (B) to the second electrode, and configured to store a discharge energy. The electrodes and the capacitor bank form an electric circuit. At least the first electrode is formed by an electrically conducting fluid supplied via a first feeding line (45). The apparatus further has a charger (51) and a first high inductance unit (50). The charger is connected to at least one of the terminals. The first high inductance unit is provided upstream the first terminal in the first feeding line for electrically decoupling the electric circuit.
摘要翻译：通过电动放电产生辐射的装置具有第一电极（由喷嘴21a产生），第二电极和电容器组（24）。电极被配置成彼此间隔开，这允许等离子体点火。电容器组在第一端子（A）处电连接到第一电极，并且在第二端子（B）处电连接到第二电极，并且被配置为存储放电能量。电极和电容器组形成电路。至少第一电极由经由第一馈电线（45）供应的导电流体形成。该装置还具有充电器（51）和第一高感应单元（50）。充电器连接到至少一个端子。第一高电感单元设置在第一馈电线路中的第一端子的上游，用于电隔离电路。

4. 发明授权

KR100609111B1 램프용 보호 커버, 램프 및 보호 커버 포함 세트,리소그래피 장치에서의 소스 설치 방법, 디바이스 제조방법및 그에 의해 제조된 디바이스 失效
标题翻译：用于灯罩的保护罩，包括灯和保护罩，在平面设备中安装源的方法，装置制造方法和制造的装置
公开(公告)号：KR100609111B1
公开(公告)日：2006-08-08
申请号：KR1020050047490
申请日：2005-06-03
申请人： 에이에스엠엘 네델란즈 비.브이.
发明人： 살덴,코엔라드슈테판실베스터
IPC分类号： H01L21/027
CPC分类号： G03F7/70983 , G03F7/70016 , G03F7/70975
摘要： 본 발명에 따른 램프용 보호 커버는 유연성이 있고 인장강도를 갖는 재료로 만들어져, 상기 방전 램프가 보호 커버에 의해 커버링 되어 있을 경우, 상기 보호 커버가 상기 방전 램프가 깨어지는 경우에도 상기 방전 램프로부터 생성된 파편들이 침투하지 못하도록 한다. 상기 보호 커버는 상기 방전 램프를 소스에 설치하는데 사용되고 상기 램프의 설치후에 상기 램프로부터 제거된다.

5. 实用新型

KR200382506Y1 인쇄회로기판 노광기 失效
标题翻译：印刷电路板曝光设备
公开(公告)号：KR200382506Y1
公开(公告)日：2005-04-20
申请号：KR2020050002651
申请日：2005-01-28
申请人： 첸 후아-쿠오 , 첸 후아-밍
发明人： 첸후아-쿠오 , 첸후아-밍
IPC分类号： G03F7/20
CPC分类号： G03F7/2004 , G03F7/70016
摘要： 본 고안에서 제공하는 노광기는 광원발생 조립부에 약간의 자외선 형광튜브를 포설하며, 각 자외선 형광튜브의 튜브는 서로 평행을 이룸과 아울러 인쇄회로기판과도 서로 평행하도록 하여 전체적으로 인쇄회로기판에 대해 고른 평행 투사광원을 발생시킴으로써 최적의 노광 효과를 얻고자 하는 것이며, 특히 각 튜브 마다 소비전력이 40W~150W 사이인 자외선 형광튜브로 360~440 에너지 파장의 자외선을 발생시키므로 인쇄회로기판의 노광 가공 작업에 가장 적합할 뿐만 아니라 전체 광원 발생기에 형성되는 작업온도가 비교적 낮고, 각 자외선 형광튜브의 사용수명도 비교적 길기 때문에 노광기의 제조, 유지보수 원가를 대폭 절감할 수 있다.

6. 发明授权

KR100426580B1 방전램프 失效
公开(公告)号：KR100426580B1
公开(公告)日：2004-07-05
申请号：KR1019960062368
申请日：1996-12-06
申请人： 우시오덴키 가부시키가이샤
发明人： 이가라시다츠시 , 미즈노오사무 , 나카무라가즈오 , 미야마쇼이치
IPC分类号： H01J61/00
CPC分类号： G03F7/70016 , H01J61/40
摘要： A discharge lamp in which ultraviolet radiation of short wavelengths can be advantageously cut and in which the amount of emitted light (i-line) of 365 nm wavelength can be increased is achieved according to the invention by providing a quartz glass arc tube that is coated with a plurality of coating layers which include a layer which has Ta2O5 as the main component, and at least one additional coating layer which has a refraction coefficient which differs from the refraction coefficient of the coating layer having the Ta2O5 main component. These layers act to prevent the reflection of light with a wavelength of 365 nm which is incident on the coatings on the arc tube and to cut at least 50% of the ultraviolet radiation having wavelengths of 230 nm or less. According to the invention, the coating layers can be provided on the outer side of the arc tube, on the inner side of the arc tube, or on both on the inner and outer sides of the arc tube.
摘要翻译：一种放电灯，其中可以有利地切割短波长的紫外线并且其中可以增加365nm波长的发射光量（i线）根据本发明通过提供一种石英玻璃电弧管来实现，该石英玻璃电弧管被涂覆具有多个涂层，所述涂层包括具有Ta 2 O 5作为主要成分的层和至少一个具有不同于具有Ta 2 O 5主要成分的涂层的折射系数的折射系数的附加涂层。这些层用于防止入射在电弧管上的涂层上的波长为365nm的光的反射，并且切割波长为230nm或更小的紫外线辐射的至少50％。根据本发明，涂层可以设置在电弧管的外侧上，电弧管的内侧上，或者电弧管的内侧和外侧上。＆lt;图像＆GT;

7. 发明授权

KR100389999B1 쇼트아크형수은램프및그점등방법 失效
公开(公告)号：KR100389999B1
公开(公告)日：2003-10-04
申请号：KR1019960018351
申请日：1996-05-28
申请人： 우시오덴키 가부시키가이샤
发明人： 모리모토신키치 , 나카무라기요타다 , 시마도시유키 , 이노우에오사무
IPC分类号： H01J61/02
CPC分类号： G03F7/70016 , H01J61/073 , H01J61/86
摘要： A mercury lamp of the short arc type in which a stable, long-term luminous operation can be accomplished is achieved by a cathode (20) and an anode (30) located next to one another within an arc tube (1) both ends of which are provided with hermetically sealed portions (12,13), the cathode (20) being installed on the tip of a rod-shaped component (21) which extends from a respective one of the hermetically sealed portions (12), and having a greater outer diameter than the rod-shaped component (21) on which it is installed, whereby the rear end of the cathode (20) tapers toward the respective hermetically sealed portion (12).
摘要翻译：通过在电弧管（1）的两端彼此相邻设置的阴极（20）和阳极（30）实现了可实现稳定的长期发光操作的短弧型汞灯，（12,13），阴极（20）安装在从相应的一个密封部分（12）延伸的杆状部件（21）的末端上，并且具有一个密封部分其外径大于其安装在其上的杆状部件（21）的外径，由此阴极（20）的后端朝着相应的气密密封部分（12）逐渐变细。＆lt;图像＆GT;

8. 发明公开

KR1020030058744A 노광장치 无效
标题翻译：曝光装置
公开(公告)号：KR1020030058744A
公开(公告)日：2003-07-07
申请号：KR1020010089278
申请日：2001-12-31
申请人： 아이티에스테크놀러지 주식회사
发明人： 김응원
IPC分类号： G03F7/20
CPC分类号： G03F7/70191 , G03F7/2004 , G03F7/70016 , G03F7/70075 , G03F7/702
摘要： PURPOSE: An exposure apparatus is provided, to allow the upper and under faces of the substrate for preparation of a semiconductor and a printed circuit board to be exposed uniformly. CONSTITUTION: The exposure apparatus comprises a light source(100) comprising a lamp(101) and an elliptical mirror(102) for collecting the light emitted at the lamp; a cold mirror(110) for extracting the UV light from the collected light and reflecting it; a plano convex lens(130) for converting the light reflected at the cold mirror into a parallel light; a light divider(140) for dividing the light from the plano convex lens into upper and lower parts; upper and lower mirrors(150) for changing the path of the light divided at the light divider; upper and lower fly eye lens assemblies(160) which comprise a plurality of fly eye lenses arranged vertically and horizontally and increase the illumination uniformity of the light reflected by the upper and lower mirrors; and upper and lower spherical mirrors which are installed at the upper and under parts of a substrate and irradiates the light projected at the upper and lower fly eye lens assemblies to the upper and under faces of the substrate to expose it.
摘要翻译：目的：提供曝光装置，以允许基板的上表面和下表面准备半导体和印刷电路板以均匀地曝光。构成：曝光装置包括：光源（100），包括灯（101）和椭圆镜（102），用于收集在灯处发射的光; 用于从收集的光中提取UV光并反射的冷镜（110）; 用于将在冷镜处反射的光转换成平行光的平凸透镜（130）; 用于将来自平凸透镜的光分成上部和下部的光分离器（140）; 上和下反射镜（150），用于改变在分光器处划分的光的路径; 上和下眼睛透镜组件（160），其包括垂直和水平布置的多个飞眼镜片，并且增加由上镜和下镜反射的光的照明均匀性; 以及上下球面镜，其安装在基板的上部和下部，并将投射在上下眼睛透镜组件上的光照射到基板的上下表面以使其曝光。

9. 发明授权

KR100375617B1 긴 사용 수명을 가지는 고압 방전 램프용 전극 失效
标题翻译： 긴램램극극극극극극극극
公开(公告)号：KR100375617B1
公开(公告)日：2003-03-10
申请号：KR1020007002285
申请日：1999-02-10
申请人： 파텐트-트로이한트-게젤샤프트 퓌어 엘렉트리쉐 글뤼람펜 엠베하
发明人： 제트처,카르스텐
IPC分类号： H01J61/073
CPC分类号： G03F7/70016 , H01J9/02 , H01J61/0735
摘要： In the case of an electrode (5) for a high-pressure discharge lamp, at least a part of the surface of the electrode is covered with a dendritic layer (13) made from high-melting-point metal. A substantially longer service life is achieved thereby.
摘要翻译：在用于高压放电灯的电极（5）的情况下，电极表面的至少一部分被由高熔点金属制成的树枝状层（13）覆盖。从而实现更长的使用寿命。

10. 发明公开

KR1019990078318A 노광장치와 방법, 디바이스제조방법 및 방전램프 有权
标题翻译：曝光装置和方法装置制造方法和放电灯
公开(公告)号：KR1019990078318A
公开(公告)日：1999-10-25
申请号：KR1019990010622
申请日：1999-03-26
申请人： 캐논 가부시끼가이샤
发明人： 사토미쯔야
IPC分类号： G03F7/20
CPC分类号： G03F7/70016 , G03F7/70058 , G03F7/70541
摘要： 센서는노광장치의광원으로서실장된방전램프의타입을식별하기위해설치되고, 행해진식별에의거하여광조건, 전원조건및 냉각조건중 적어도하나가설정된다. 예를들면, 광조건은방전램프의타입에의존하여조명광학계의줌렌즈를조정함으로써변화된다. 또한, 전원조건또는방전램프의냉각성능은방전램프에인가되는허용가능한전력의범위를설정함으로써변화된다.

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