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1. 发明公开

KR1020020029853A 인쇄회로기판 검사장치 无效
标题翻译：印刷电路板测试仪
公开(公告)号：KR1020020029853A
公开(公告)日：2002-04-20
申请号：KR1020010008184
申请日：2001-02-19
申请人： 아이티에스테크놀러지 주식회사
发明人： 유용성
IPC分类号： G01R31/304
摘要： PURPOSE: A printed circuit board tester is provided to reduce a testing time by simultaneously testing both surfaces of a printed circuit board. CONSTITUTION: A board fixture(10) fixes a printed circuit board(P) to exposure both surfaces of the printed circuit board(P). A rotating plate(20) is arranged at an upper center of a device frame(1). A clamper clamps the printed circuit board(P) at a through hole(20a) of the rotating plate(20). The through hole(20a) of the rotating plate(20) has a rectangle. A printed circuit board conveyer(50) conveys or returns the printed circuit board(P) to or from the board fixture(10), respectively. An image acquiring section acquires images which are formed at both surface of the printed circuit board(P). An image display device(200) compares the images acquired by the image acquiring section with a reference image and displays a comparison result.
摘要翻译：目的：提供印刷电路板测试仪，通过同时测试印刷电路板的两个表面来减少测试时间。构成：板夹具（10）固定印刷电路板（P）以暴露印刷电路板（P）的两个表面。旋转板（20）布置在装置框架（1）的上部中心处。夹持器将印刷电路板（P）夹在旋转板（20）的通孔（20a）上。旋转板（20）的通孔（20a）具有矩形。印刷电路板输送机（50）分别将印刷电路板（P）传送到板固定装置（10）或从板固定装置（10）返回。图像获取部获取形成在印刷电路板（P）的两面的图像。图像显示装置（200）将由图像获取部获取的图像与参考图像进行比较，并显示比较结果。

2. 发明公开

KR1020020059041A 기판 프리얼라인 장치 失效
标题翻译：基板预对准设备
公开(公告)号：KR1020020059041A
公开(公告)日：2002-07-12
申请号：KR1020000087300
申请日：2000-12-30
申请人： 아이티에스테크놀러지 주식회사
发明人： 김오환
IPC分类号： H01L21/68
摘要： PURPOSE: A substrate pre-alignment apparatus is provided to align easily a position of a substrate transferred to a working portion by using a simple sensing device. CONSTITUTION: A loading portion(1), a pre-alignment portion(2), and a working portion(3) are arranged to a longitudinal direction of an exposure portion. A substrate(S) is absorbed by the loading portion(1). A loader is used for loading the absorbed substrate(S) into the working portion(3) through the pre-alignment portion(2). The loader is shifted to the longitudinal direction, a width direction, an upper direction, a lower direction by a driving portion including an NC motor and a cylinder. The absorbed substrate(S) is aligned by a substrate alignment device. The absorbed substrate(S) is loaded on the working portion(3). The first and second alignment sensors(11,12) are arranged in the pre-alignment portion(2). A Y-axis reference point detection sensor(13) is used for detecting a Y-axis when the substrate(S) is set up in an initializing state. A position control portion controls positions of the first and second alignment sensors(11,12). A control portion controls operations of each component.
摘要翻译：目的：提供一种基板预对准装置，通过使用简单的感测装置容易地对准转印到工作部分的基板的位置。构成：在曝光部的长度方向上配置有装载部（1），预对准部（2）和工作部（3）。衬底（S）被装载部分（1）吸收。装载机用于通过预对准部分（2）将吸收的基板（S）装载到工作部分（3）中。装载机通过包括NC马达和气缸的驱动部分向纵向方向，宽度方向，上方向，下方向移动。吸收的衬底（S）通过衬底对准装置对准。被吸收的基板（S）被装载在工作部分（3）上。第一和第二对准传感器（11,12）布置在预对准部分（2）中。当基片（S）处于初始化状态时，Y轴参考点检测传感器（13）用于检测Y轴。位置控制部分控制第一和第二对准传感器（11,12）的位置。控制部控制各部件的动作。

3. 实用新型

KR200259142Y1 검사장비용 발광다이오드 조명장치 失效
标题翻译：检查发光二极管照明成本
公开(公告)号：KR200259142Y1
公开(公告)日：2001-12-29
申请号：KR2020010030579
申请日：2001-10-08
申请人： 아이티에스테크놀러지 주식회사
发明人： 박길원
IPC分类号： H01L21/66
摘要： 본 고안은 발광부와 리드로 구성되는 LED가 회로기판에 장착되는 검사용 조명장치로서, 다수의 LED가 각 발광부끼리 s의 공간을 사이에 두고 배열되어 회로기판에 장착된 제1층 LED 배열과, 상기 제1층 LED 배열의 각 LED의 발광부 사이 공간 s에 리드가 통과하여 회로기판에 장착되되, 발광부는 상기 제1층 LED의 발광부 위에 위치하도록 회로기판에 장착되는 다수의 제2층 LED 배열로 구성되는 검사장비용 발광다이오드 조명장치이다.

4. 发明授权

KR100384472B1 대형기판의 처짐방지장치 失效
标题翻译： 대형기판의처짐방지장치
公开(公告)号：KR100384472B1
公开(公告)日：2003-05-22
申请号：KR1020000087299
申请日：2000-12-30
申请人： 아이티에스테크놀러지 주식회사
发明人： 조영석
IPC分类号： H05K3/00
摘要： PURPOSE: A droop prevention apparatus for large substrate is provided to achieve an improved quality of product and yield by forming each pattern in an accurate manner through the uniform exposure of the substrate. CONSTITUTION: A droop prevention apparatus comprises a substrate mounting chamber(100) having an upper base surface where a substrate(1) is mounted, a sealed section(101) formed within the substrate mounting chamber, and a vacuum adsorption path(110) formed at the top of a side wall of the chamber so as to adsorb the substrate; a pressure supply unit(120) for supplying pressure to the sealed section of the substrate mounting chamber; and a droop volume measuring unit(200) for measuring the volume of droop of the substrate. The droop prevention apparatus supports the substrate in a flat state where the substrate is prevented from being bent.
摘要翻译：目的：提供用于大型基板的下垂防止装置，以通过均匀曝光基板以精确的方式形成每个图案，从而实现改进的产品质量和产量。一种下垂防止装置，其特征在于，具有：基板安装室（100），其具有安装基板（1）的上部基座面，形成于基板安装室内的密封部（101）和形成的真空吸附路径在腔室的侧壁的顶部以吸附基板; 压力供应单元（120），用于向基板安装室的密封部分供应压力; 和用于测量基板的下垂量的下垂量测量单元（200）。下垂防止装置在防止基板弯曲的平坦状态下支撑基板。

5. 发明公开

KR1020020068906A 기판 자동검사장치 无效
标题翻译：用于自动测试基板的设备
公开(公告)号：KR1020020068906A
公开(公告)日：2002-08-28
申请号：KR1020010009289
申请日：2001-02-23
申请人： 아이티에스테크놀러지 주식회사
发明人： 류종호
IPC分类号： H01L21/66
摘要： PURPOSE: An apparatus for testing automatically a substrate is provided to improve a processing speed by using a bi-directional test device including a front and a rear substrate transfer device and two cameras. CONSTITUTION: A transferring line(11) is installed in an intermediate part of a guide rail(10). A substrate(1) is shifted on the transferring line(11). A loading portion(100) and an unloading portion(200) are installed in an inside and an outside of one side of the guide rail(10). A substrate transferring portion(20) includes the loading portion(100) and the unloading portion(200). A front transfer pusher(300) transfers the substrate(1) to a front direction by a pickup(110) of the loading portion(100) and a loading pusher(120). A rear transfer pusher(310) transfers the substrate(1) to a rear direction. A plurality of cameras and a plurality of lighting devices are installed in an upper portion and a lower portion of the transferring line(11) of the guide rail(10).
摘要翻译：目的：提供一种用于自动测试基板的设备，以通过使用包括前和后基板传送装置和两个相机的双向测试装置来提高处理速度。构成：传送线（11）安装在导轨（10）的中间部分。基板（1）在传输线（11）上移位。载物部分（100）和卸载部分（200）安装在导轨（10）一侧的内侧和外侧。基板转印部分（20）包括装载部分（100）和卸载部分（200）。前传送推动器（300）通过装载部分（100）的拾取器（110）和装载推动器（120）将基板（1）传送到正面。后转印推动器（310）将基板（1）向后方传送。多个照相机和多个照明装置安装在导轨（10）的传送线（11）的上部和下部。

6. 发明公开

KR1020020067963A 간지 급지장치 失效
标题翻译：提供INTERLEAF的设备
公开(公告)号：KR1020020067963A
公开(公告)日：2002-08-24
申请号：KR1020010063425
申请日：2001-10-15
申请人： 아이티에스테크놀러지 주식회사
发明人： 이동욱 , 류종호
IPC分类号： H01L23/495
摘要： PURPOSE: An apparatus for supplying an interleaf is provided to improve work efficiency and productivity, by loading plenty of interleaves into an interleaf supplying apparatus and by rotating and moving up/down an absorbing head of an absorbing input unit so that the interleaves are automatically and precisely input to an apparatus necessary for the interleaf. CONSTITUTION: A supporting plate(110) is prepared. A plurality of supporting bars(120) are fixed in the supporting plate. A base unit(100) in which a feeding base is fixed is installed in the upper part of the supporting bar. Interleaves are stacked in an interleaf supplying unit(200) installed in the feeding base. A slope input plate(130) inputs an interleaf to the apparatus necessary for the interleaf, coupled to the intermediate part of the base unit. The absorbing input unit absorbs the interleaf stacked in the interleaf supplying unit one by one by using the absorbing head and inputs the interleaf to the slope input plate.
摘要翻译：目的：提供一种用于提供插页的装置，通过将大量的交错插入到插页提供装置中并通过旋转和移动吸收输入单元的吸收头来上下移动，从而提高工作效率和生产率，从而自动地精确地输入到插页所需的设备。构成：制备支撑板（110）。多个支撑杆（120）固定在支撑板中。在支撑杆的上部安装有固定有进给基座的基座单元（100）。交织器堆叠在安装在馈送基座中的插页提供单元（200）中。斜坡输入板（130）将插件输入到与基座单元的中间部分耦合的插件所需的设备。吸收输入单元通过使用吸收头一个接一个地吸收堆叠在插页提供单元中的插页，并将插页输入到斜面输入板。

7. 发明授权

KR100381856B1 노광기용 스캔형 광학계 失效
标题翻译： 노광기용스캔형광학계
公开(公告)号：KR100381856B1
公开(公告)日：2003-04-26
申请号：KR1020000060518
申请日：2000-10-14
申请人： 아이티에스테크놀러지 주식회사
发明人： 조영석
IPC分类号： G02B26/10
摘要： PURPOSE: A scanning type optical system for an exposure device is provided to expose a substrate to a light by linearly scanning the light using a polygon mirror and a cylindrical mirror. CONSTITUTION: Rotating polygon mirrors(103,103') reflect a light emitted from a light source. Each of the rotating polygon mirrors(103,103') has a plurality of reflecting surfaces which one-dimensionally scans a reflected light. Cylindrical mirrors(105,105') reflect and scan the light reflected and scanned by the rotating polygon mirrors(103,103') perpendicular to a surface of a substrate. A cold mirror(106) filters a light component having a special wavelength among the light emitted from the light source. A parallel optical system(109) converts the light filtered by the cold mirror(106) into a parallel light.
摘要翻译：目的：提供一种用于曝光装置的扫描型光学系统，以通过使用多角镜和柱面镜线性地扫描光来使基板曝光。组成：旋转多面镜（103,103'）反射从光源发出的光。每个旋转多面镜（103,103'）具有多个反射面，其一维扫描反射光。圆柱形反射镜（105,105'）反射并扫描由垂直于衬底表面的旋转多面镜（103,103'）反射和扫描的光。冷镜（106）对从光源发射的光中具有特定波长的光分量进行滤波。平行光学系统（109）将由冷镜（106）过滤的光转换为平行光。

8. 发明公开

KR1020020059046A 스캔형 노광장치 无效
标题翻译：扫描曝光装置
公开(公告)号：KR1020020059046A
公开(公告)日：2002-07-12
申请号：KR1020000087327
申请日：2000-12-30
申请人： 아이티에스테크놀러지 주식회사
发明人： 김응원
IPC分类号： G03F7/00
CPC分类号： G03F7/2059 , G03F7/7015 , G03F7/70225 , G03F7/70316 , G03F7/70358 , G03F7/704
摘要： PURPOSE: Provided is a scan exposure device, in which top surface/bottom surface of substrate can be completely and uniformly exposed to optical system continuously and repeatedly by scanning. CONSTITUTION: The scan exposure device comprises loading part(11) and unloading part(12) at both sides; and exposure part(15) at midsection. The exposure part(15) has frame assembly(20) having up/down frames so as to support the substrate, and to enable a mask to contact to top/bottom part, and frame transferring unit for establishing a moving area in the exposure(15) and relatively transferring the frame assembly with respect to exposed light in moving area. The exposure part(15) has optical system for irradiating to the top/bottom surface of the substrate.
摘要翻译：目的：提供一种扫描曝光装置，其中基板的顶表面/底表面可以通过扫描连续且重复地完全均匀地暴露于光学系统。构成：扫描曝光装置包括两侧装载部分（11）和卸载部分（12）; 和暴露部分（15）。曝光部分（15）具有框架组件（20），其具有上/下框架以支撑衬底，并且使掩模能够接触顶部/底部;以及框架传送单元，用于在曝光中建立移动区域并且相对于移动区域中的暴露的光相对地转移框架组件。曝光部分（15）具有用于照射到基板的顶/底表面的光学系统。

9. 发明公开

KR1020020059045A 스캔형 노광장치 无效
标题翻译：扫描型曝光装置
公开(公告)号：KR1020020059045A
公开(公告)日：2002-07-12
申请号：KR1020000087324
申请日：2000-12-30
申请人： 아이티에스테크놀러지 주식회사
发明人： 김응원
IPC分类号： H01L21/027
摘要： PURPOSE: A scan-type exposure device is provided to enable the upper and lower faces of s substrate loaded sequentially to be exposed continuously and repeatedly by moving optical devices linearly and reciprocally, thereby improving the velocity and quality of exposure. CONSTITUTION: The scan-type exposure device comprises a support frame(100) combined in the middle exposing part of the base body(10) to be moved linearly; a light source fixed to the support frame; a spectrometer which is set in the rear support part(101) of the support frame(100) and divides the light from the light source up and down; a pair of upper and lower rotating polygonal mirror which is fixed to the upper and lower parts of the rear support part and scans the light reflected at the spectrometer; an upper and lower cylindrical reflection mirror which is combined in the upper and lower slide plates fixed to the support frame and irradiates the scanned light onto the upper and lower faces of the substrate(S) equipped with an upper and lower frames(13,14); and a frame drive means which moves the support frame.
摘要翻译：目的：提供一种扫描型曝光装置，使得顺序加载的基片的上下面能够通过线性地和往复移动光学装置连续地和反复地暴露，从而提高曝光的速度和质量。构成：扫描型曝光装置包括：组合在基体（10）的中间露出部分中的线性移动的支撑框架（100）固定在支撑框架上的光源; 设置在支撑框架（100）的后支撑部（101）中的光谱仪，并且上下分离来自光源的光; 一对上下旋转多面镜，其固定在后支撑部分的上部和下部，并扫描在光谱仪反射的光; 上下圆柱反射镜，其组合在固定到支撑框架上的上滑动板和下滑板中，并将扫描的光照射到装备有上框架和下框架的基板（S）的上表面和下表面上）; 以及移动支撑框架的框架驱动装置。

10. 发明公开

KR1020020059040A 대형기판의 처짐방지장치 失效
标题翻译：用于大型基材的预防装置
公开(公告)号：KR1020020059040A
公开(公告)日：2002-07-12
申请号：KR1020000087299
申请日：2000-12-30
申请人： 아이티에스테크놀러지 주식회사
发明人： 조영석
IPC分类号： H05K3/00
CPC分类号： H05K1/0271 , H05K2201/09136
摘要： PURPOSE: A droop prevention apparatus for large substrate is provided to achieve an improved quality of product and yield by forming each pattern in an accurate manner through the uniform exposure of the substrate. CONSTITUTION: A droop prevention apparatus comprises a substrate mounting chamber(100) having an upper base surface where a substrate(1) is mounted, a sealed section(101) formed within the substrate mounting chamber, and a vacuum adsorption path(110) formed at the top of a side wall of the chamber so as to adsorb the substrate; a pressure supply unit(120) for supplying pressure to the sealed section of the substrate mounting chamber; and a droop volume measuring unit(200) for measuring the volume of droop of the substrate. The droop prevention apparatus supports the substrate in a flat state where the substrate is prevented from being bent.
摘要翻译：目的：提供一种用于大型基材的下垂防止装置，以通过基板的均匀曝光以准确的方式形成每个图案来实现产品质量的提高和产量的提高。构成：下垂防止装置包括：基板安装室（100），其具有安装基板（1）的上基座表面;形成在基板安装室内的密封部分（101）;以及形成的真空吸附路径在室的侧壁的顶部，以便吸附基板; 用于向所述基板安装室的密封部供给压力的压力供给单元（120）以及用于测量所述基底的下垂体积的下垂体积测量单元（200）。下垂防止装置将基板支撑在防止基板弯曲的平坦状态下。

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