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1. 发明公开

KR1020150059993A 스퍼터율 향상을 위한 유도 결합형 플라즈마 소스 및 이를 사용하는 스퍼터링 장치 有权
标题翻译：用于改善溅射器感应的电感耦合等离子体源和使用其进行溅射的装置
公开(公告)号：KR1020150059993A
公开(公告)日：2015-06-03
申请号：KR1020130143834
申请日：2013-11-25
申请人： 성균관대학교산학협력단
发明人： 염근영 , 김경남 , 김태형 , 서진석 , 김기석
IPC分类号： C23C14/34
CPC分类号： C23C14/3471
摘要： 유도결합형플라즈마소스및 이를포함하는스퍼터링장치가개시된다. 본발명에따른유도결합형플라즈마소스는외주면에다수개의홀을가지는원통형의제1 튜브, 외주면에다수개의홀을가지며상기제1 튜브의외주면을둘러싸는원통형의제2 튜브및 상기제1 튜브에권취되는안테나를포함하며, 상기제1 튜브내부에서플라즈마를발생시키고상기제1 튜브및 제2 튜브의다수개의홀을통하여외부로방출시키는것을특징으로한다. 또한, 본발명에따른스퍼터링장치는상기유도결합형플라즈마소스, 스퍼터링타겟이놓여지는캐소드및 처리기판을포함하며, 상기유도결합형플라즈마소스에의하여플라즈마가발생하는영역과상기캐소드와처리기판사이의플라즈마가발생하는영역으로구분되는것을특징으로한다.
摘要翻译：公开了一种用于提高溅射产率的电感耦合等离子体源，以及使用该等离子体源的溅射装置。根据本发明，电感耦合等离子体源包括：圆筒形第一管，其在外圆周上具有多个孔; 圆筒状的第二管，其在外周具有多个孔，并且包围第一管的外周; 以及缠绕在第一管上的天线。从第一管的内部产生等离子体，通过第一管和第二管上的多个孔排出到外部。除此之外，溅射装置包括：电感耦合等离子体源; 放置溅射靶的阴极; 和处理基板。溅射装置被分离成通过电感耦合等离子体源产生等离子体的区域，以及阴极和处理基板之间的区域以产生等离子体。

2. 发明公开

KR1020130089455A 필름 구조물 및 이의 제조방법 有权
标题翻译：电影结构及其制造方法
公开(公告)号：KR1020130089455A
公开(公告)日：2013-08-12
申请号：KR1020120010827
申请日：2012-02-02
申请人： 주식회사 씨엔전자
发明人： 정선 , 방성만 , 김영철 , 윤철
IPC分类号： B32B15/08 , C23C14/34 , B32B27/06
CPC分类号： C08J7/06 , C23C14/08 , C23C14/10 , C23C14/14 , C23C14/34 , C23C14/3471
摘要： PURPOSE: A film structure and a manufacturing method thereof are provided to increase transmissivity of visible light without adjusting the thickness of a metal layer through interaction of a first oxide layer and a second oxide layer, thereby reducing cost of production. CONSTITUTION: A film structure (100) comprises a transparent film (110); a first oxide layer (120) including one or more kinds of material selected between silicon oxide and indium tin oxide to be deposited on the first oxide layer (120); a metal layer (130) deposited on the first oxide layer; and a second oxide layer (140) including one or more kinds of material silicon oxide and indium tin oxide to be deposited on the top of the metal layer and to be exposed to the outer air. A manufacturing method for a film structure comprises the steps of: setting the transparent film, depositing the first oxide layer by plasma sputtering, depositing the metal layer by plasma sputtering, and depositing the second oxide layer by plasma sputtering.
摘要翻译：目的：提供膜结构及其制造方法，以通过第一氧化物层和第二氧化物层的相互作用来调节可见光的透射率而不调整金属层的厚度，从而降低生产成本。构成：膜结构（100）包括透明膜（110）; 包括在氧化硅和氧化铟锡之间选择的一种或多种材料的第一氧化物层（120），以沉积在第一氧化物层（120）上; 沉积在第一氧化物层上的金属层（130）; 以及包含一种或多种材料氧化硅和氧化铟锡的第二氧化物层（140），其沉积在金属层的顶部并暴露于外部空气。一种膜结构的制造方法，包括以下步骤：设置透明膜，通过等离子体溅射沉积第一氧化物层，通过等离子体溅射沉积金属层，并通过等离子体溅射沉积第二氧化物层。

3. 发明公开

KR1020120113290A 스퍼터링 타깃 및/또는 코일 그리고 이들의 제조 방법 有权
标题翻译： 스퍼터링타깃및/또는코일그리고이들의제조방
公开(公告)号：KR1020120113290A
公开(公告)日：2012-10-12
申请号：KR1020127024764
申请日：2011-07-27
申请人： 제이엑스금속주식회사
发明人： 나가타겐이치 , 마키노노부히토
IPC分类号： C23C14/34
CPC分类号： C23C14/34 , C21D1/74 , C21D3/06 , C22C14/00 , C22C27/02 , C22F1/00 , C22F1/18 , C22F1/183 , C23C14/3414 , C23C14/3471 , H01J37/3426 , H01J37/3464 , H01J37/3491 , H01J37/3497 , Y10T29/49865
摘要： Provided is a sputtering target and/or a coil disposed at the periphery of a plasma-generating region for confining plasma. The target and/or the coil has a surface to be eroded having a hydrogen content of 500 µL/cm 2 or less. In dealing with reduction in the hydrogen content of the surface of the target and/or the coil, the process of producing the target and/or the coil, in particular, the conditions for heating the surface of the target and/or the coil, which is thought to be cause of hydrogen occlusion, are appropriately regulated. As a result, hydrogen occlusion at the surface of the target can be reduced, and the degree of vacuum during sputtering can be improved. Thus, the present invention provides a target and/or a coil that has a uniform and fine structure, makes plasma stable, and allows a film to be formed with excellent uniformity and provides a method of producing the target and/or the coil.
摘要翻译：提供了设置在用于限制等离子体的等离子体发生区域周围的溅射靶和/或线圈。靶和/或线圈具有要被侵蚀的表面，其具有500微米/平方厘米或更小的氢含量。在处理靶和/或线圈表面的氢含量的降低时，靶和/或线圈的制造过程，特别是加热靶和/或线圈表面的条件，这被认为是氢闭塞的原因，被适当调节。结果，可以减少靶表面处的氢闭塞，并且可以改善溅射期间的真空度。因此，本发明提供具有均匀和精细结构，使等离子体稳定并且可以以优异的均匀性形成膜的靶和/或线圈，并且提供了制造靶和/或线圈的方法。

4. 发明公开

KR20090069347A Multi loop core dual plasma reactor with multi laser scanning line 有权
标题翻译：多循环核心双等离子体反应器与多激光扫描线
公开(公告)号：KR20090069347A
公开(公告)日：2009-07-01
申请号：KR20070136981
申请日：2007-12-26
申请人： NEW POWER PLASMA CO LTD
发明人： WI SOON IM
IPC分类号： H05H1/24 , H05H1/34
CPC分类号： H01J37/32899 , C23C14/3471 , H01J37/32119 , H01J37/32183 , H01J37/3244 , H01J37/32834 , H05H1/46 , H05H2001/4652 , H05H2001/4682
摘要： A multi loop core dual plasma reactor is provided to generate the plasma with a large area uniformly by including a multi laser scanning line and a multi loop core plasma generator. A first multi loop core plasma generator(10) includes a first multi loop core, a first core protective tube and a plurality of primary wire coils. The first multi loop core crosses the inside of the body of a first reactor. The first core protective tube protects the first multi loop core. The plurality of primary wire coils are wound around the first multi loop core. A second multi loop core plasma generator(15) includes a second multi loop core, a second core protective tube, and the plurality of primary wire coils. A main power supply source supplies the wireless frequency power source to the primary wire coil of the first and second multi loop core plasma generators. A laser supply source(80) comprises a multi laser scanning line consisting of a plurality of laser scanning lines inside the first and the second reactor.
摘要翻译：提供多环芯双等离子体反应器，通过包括多激光扫描线和多环芯等离子体发生器来均匀地产生具有大面积的等离子体。第一多环芯等离子体发生器（10）包括第一多环芯，第一芯保护管和多个初级线圈。第一多环芯穿过第一反应器的主体的内部。第一个核心保护管保护第一个多环芯。多个初级线圈缠绕在第一多环芯上。第二多环芯等离子体发生器（15）包括第二多环芯，第二芯保护管和多个初级线圈。主电源将无线频率电源提供给第一和第二多环芯等离子体发生器的主线圈。激光源（80）包括由第一和第二反应器内的多个激光扫描线组成的多激光扫描线。

5. 发明公开

KR1020090016260A 다중 클래딩 구조를 갖는 전기압력밥솥의 내솥 및 그 제조방법 无效
标题翻译：具有多层结构的电压稻米烤箱烤箱及其制作方法
公开(公告)号：KR1020090016260A
公开(公告)日：2009-02-13
申请号：KR1020070080765
申请日：2007-08-10
申请人： (주)부방
发明人： 이현우 , 장원용 , 신홍기 , 오용택 , 조상진 , 이상종 , 이연창 , 정이훈
IPC分类号： A47J36/02 , A47J27/00
CPC分类号： A47J27/002 , A47J27/08 , A47J36/02 , B32B1/02 , B32B15/017 , B32B2439/70 , C23C14/16 , C23C14/24 , C23C14/3471 , Y10S220/912
摘要： An inner pot of an electric pressure rice-cooker is provided to cook delicious rice by rapidly diffusing heat to an inside of the inner pot with the multi cladding structure. An inner pot having multi cladding structure of an electric pressure rice-cooker comprises a first metal layer(11) formed with Copper(Cu), a second and a third metal layer(12,13) formed with an Aluminum oxide preventing film by attaching the second and the third metal layers to both side of the first metal layer, a fourth and a fifth metal layer(14,15), made of an Aluminum roll, on the second and the third metal layer, a sixth and a seventh metal layer, made of Aluminum plate, on the fourth and fifth metal layer and an eighth and a ninth metal layers(18,19), made of the stainless steel, on the sixth and seventh metal layer.
摘要翻译：提供电压饭锅的内锅，通过用多包层结构快速地将热量扩散到内锅的内部来烹制美味的米饭。具有电压饭锅的多层结构的内锅包括由铜（Cu）形成的第一金属层（11），形成有氧化铝防止膜的第二和第三金属层（12,13）第二金属层和第三金属层，第二金属层和第三金属层，第二金属层和第三金属层，第二金属层和第三金属层，第二金属层和第三金属层，第二金属层和第三金属层，在第四金属层和第五金属层上形成由铝板制成的层，以及由不锈钢制成的第八和第九金属层（18,19），在第六和第七金属层上。

6. 发明公开

KR1020080107192A 드럼세탁기용 건조장치 하우징의 제조방법 无效
标题翻译：滚筒式洗衣机干燥装置的制造方法
公开(公告)号：KR1020080107192A
公开(公告)日：2008-12-10
申请号：KR1020070055195
申请日：2007-06-05
申请人： 삼성전자주식회사
发明人： 서승돈
IPC分类号： D06F39/04 , D06F37/04 , D06F39/00
CPC分类号： D06F37/261 , C23C14/0641 , C23C14/08 , C23C14/3471 , D06F25/00 , D06F39/04 , D06F58/26
摘要： A manufacturing method of housing for drying device of drum type washing machine is provided to express superior heat resistance and corrosion resistance while being manufactured with a cheap steel material. A manufacturing method of housing for drying device of drum type washing machine comprises a step of performing plasma oxy-nitriding(S101); a step of cooling using plasma activation(S102); a step of oxidizing(S103), and a step of cooling quickly. In the quick cooling step, cooling supplies only nitrogen and Fe2O3 is not formed on the oxide layer surface by performing a pressurized anoxic cooling.
摘要翻译：提供一种滚筒式洗衣机的干燥装置的壳体的制造方法，其特征在于，在制造廉价钢材的同时表现出优异的耐热性和耐腐蚀性。滚筒式洗衣机的干燥装置的壳体的制造方法包括进行等离子体氧氮化的工序（S101）。使用等离子体激活的冷却步骤（S102）; 氧化步骤（S103），以及快速冷却的步骤。在快速冷却步骤中，仅通过进行加压缺氧冷却，仅向氮气供给氮气，氧化物层表面上未形成Fe2O3。

7. 发明授权

KR100852266B1 실리콘막 형성장치 失效
标题翻译：硅胶成型设备
公开(公告)号：KR100852266B1
公开(公告)日：2008-08-14
申请号：KR1020067019605
申请日：2005-03-22
申请人： 닛신덴키 가부시키 가이샤
发明人： 도묘아츠시 , 다카하시에이지 , 후지와라마사키 , 고테라다카시 , 오노다마사토시
IPC分类号： C23C14/14 , C23C14/34
CPC分类号： H01J37/321 , C23C14/165 , C23C14/3471
摘要： 본 발명은 성막실(10)과, 그 실내에 설치된 실리콘 스퍼터 타깃(2)과, 상기 실내에 수소가스를 공급하는 수소가스공급회로(102 또는 102')와, 성막실(10) 내에 공급되는 수소가스에 고주파 전력을 인가하여 유도 결합 플라즈마를 발생시키는 고주파 전력 인가장치[안테나(1, 1'), 전원(PW) 등]를 구비하고, 상기 플라즈마에 의하여 타깃(2)을 케미컬 스퍼터링하여 기판(S) 위에 실리콘막을 형성하는 실리콘막 형성장치이다. 실란가스를 병용하여도 좋다. 실란가스공급회로(10)에는 가스 저장부(GR)를 설치하여도 좋다. 비교적 저온하에서 저렴하게, 또한 고속으로 원하는 실리콘막을 형성할 수 있다.

8. 发明公开

KR1020080056566A 무기막 증착 장치 无效
标题翻译：无机层沉积物
公开(公告)号：KR1020080056566A
公开(公告)日：2008-06-23
申请号：KR1020060129623
申请日：2006-12-18
申请人： 삼성디스플레이 주식회사
发明人： 윤지미 , 김훈
IPC分类号： H05B33/10
CPC分类号： C23C14/3471 , C23C14/505 , H01L51/56
摘要： An inorganic layer deposition apparatus is provided to prevent a substrate from being damaged by performing a deposition process without reversing the substrate. An inorganic layer deposition apparatus includes a chamber(200), a chuck(210), a rotation unit(220), and a plasma generation unit(A). The chuck is located on an upper unit inside the chamber, and supports a substrate. The rotation unit rotates the chuck. The plasma generation unit is located on a lower part inside the chamber. The plasma generation unit includes a gas injection unit(240), a shower head(248), and an electrode(250). The shower head is coupled to the gas injection unit, and has one or a plurality of ejection nozzles. The electrode is located on the shower head.
摘要翻译：提供了一种无机层沉积设备，以防止基板通过执行沉积工艺而不会使基板反转而损坏。无机层沉积设备包括室（200），卡盘（210），旋转单元（220）和等离子体产生单元（A）。卡盘位于室内的上部单元上，并支撑基板。旋转单元旋转卡盘。等离子体产生单元位于室内的下部。等离子体产生单元包括气体注入单元（240），喷头（248）和电极（250）。淋浴头与气体注入单元连接，并具有一个或多个喷嘴。电极位于淋浴头上。

9. 发明授权

KR100814453B1 결정성 실리콘 박막의 형성방법 및 장치 失效
标题翻译：用于形成结晶硅薄膜的方法和设备
公开(公告)号：KR100814453B1
公开(公告)日：2008-03-17
申请号：KR1020067019603
申请日：2005-03-22
申请人： 닛신덴키 가부시키 가이샤
发明人： 도묘아츠시 , 다카하시에이지
IPC分类号： H01L21/203
CPC分类号： H01J37/34 , C23C14/14 , C23C14/3471 , H01L21/02422 , H01L21/02532 , H01L21/02631
摘要： 본 발명은 실리콘 스퍼터 타깃(2)과 피성막 기판(S)을 설치한 성막실(10) 내에 수소가스를 도입하고, 상기 가스에 고주파 전력을 인가함으로써 상기 성막실 내에 Hα/SiH
* 가 0.3 ~ 1.3인 플라즈마를 발생시키고, 상기 플라즈마로 실리콘 스퍼터 타깃(2)을 케미컬 스퍼터링하여 기판(S) 위에 결정성 실리콘 박막을 형성한다. 비교적 저온하에서 저렴하고 안전하게 양질의 결정성 실리콘 박막을 형성할 수 있다.

10. 发明授权

KR100762168B1 기능성 침 케이스 失效
标题翻译：功能针盒
公开(公告)号：KR100762168B1
公开(公告)日：2007-10-05
申请号：KR1020060062723
申请日：2006-07-04
申请人： 양원동
发明人： 양원동
IPC分类号： A61H39/08 , A61L2/00 , C23C14/34 , C23C16/513
CPC分类号： A61H39/08 , A61H39/083 , A61L2/0088 , C23C14/3471 , C23C16/513
摘要： An easy-to-detach acupuncture needle case with sterilization function is provided to keep and use acupuncture needles in a more convenient and hygienic condition. An acupuncture needle case includes a case body(10), a case cap(20), and a detachable case bedplate(60). The case body(10) is made out of a material selected from the group consisting of metal, synthetic resin, silicone, ceramic, and rubber, and formed in diverse shapes. The bedplate is coated with nano-silver powder or a nano-silver diluted solution by dry or wet coating. Each acupuncture needle case is assembled to/separated from a next acupuncture needle case through an attaching/detaching portion(40) having an attaching/detaching groove(50).
摘要翻译：提供了具有消毒功能的易于分离的针灸针头针，以保持和使用针灸针更方便卫生的状态。针刺针壳体包括壳体（10），壳盖（20）和可拆卸盒底板（60）。壳体（10）由选自金属，合成树脂，硅树脂，陶瓷和橡胶的材料制成，并形成为各种形状。床板用纳米银粉末或者通过干或湿涂层的纳米银稀释溶液涂覆。通过具有安装/拆卸槽（50）的安装/拆卸部分（40）将每个针灸针套件与下一个针灸针套件组装/分开。

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