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1. 发明专利

JP2005108806A Small electron gun 有权
标题翻译：小电子枪
公开(公告)号：JP2005108806A
公开(公告)日：2005-04-21
申请号：JP2004111682
申请日：2004-04-06
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： KATAGIRI SOUICHI , OSHIMA TAKU
IPC分类号： H01J37/18 , H01J7/16 , H01J7/18 , H01J37/07 , H01J37/073 , H01J41/20
CPC分类号： H01J37/18 , H01J7/16 , H01J7/18 , H01J37/07 , H01J2237/022 , H01J2237/062 , H01J2237/06316 , H01J2237/1825 , H01J2237/188
摘要： PROBLEM TO BE SOLVED: To provide a small electron gun used for an electron microscope and an electron-beam drawing apparatus and capable of keeping a high vacuum pressure .
SOLUTION: An electron gun constituted by a non-evaporative getter pump, a heater, a filament, and an electron-source positioning mechanism, is provided with an opening for rough exhausting and its automatically opening/closing valve, and a means for ionizing and decomposing an inert gas or a compound gas for the non-evaporative getter pump. It is possible to keep a high vacuum pressure of 10
-10 Torr without requiring an ion pump while emitting electrons from the electron gun by using a small electron gun having a height and a width of approximately 15 cm.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于电子显微镜和电子束拉伸装置的小型电子枪，并且能够保持高真空压力。解决方案：由非蒸发吸气泵，加热器，灯丝和电子源定位机构构成的电子枪设置有用于粗排气的开口及其自动打开/关闭阀，以及装置用于非蒸发式吸气泵的电离和分解惰性气体或复合气体。通过使用高度和宽度约为15cm的小型电子枪，可以在不需要离子泵的情况下保持10 -10 Torr的高真空压力，同时从电子枪发射电子。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2014241301A 荷電粒子線装置、及びその制御方法有权
标题翻译：充电颗粒光束装置及其控制方法
公开(公告)号：JP2014241301A
公开(公告)日：2014-12-25
申请号：JP2014200302
申请日：2014-09-30
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： KASUYA KEIGO , OSHIMA TAKU , KATAGIRI SOUICHI , KOKUBO SHIGERU , TODOKORO HIDEO
IPC分类号： H01J37/06 , H01J37/18 , H01J37/28
CPC分类号： H01J1/304 , H01J37/073 , H01J37/265 , H01J2237/022 , H01J2237/06325 , H01J2237/0653 , H01J2237/0656
摘要：【課題】高輝度でエネルギー幅が狭く、安定した電子線を得ることが出来る荷電粒子線装置を提供する。【解決手段】電界放射電子源、それに電界を印加する電極と、電界放射電子源のまわりの圧力を1?10−8Pa以下に維持する真空排気部とを備え、放射させた電子線のうち、電子線中央の放射角1?10−2str以内の電子線を用い、電子線の電流の時間に関する二階微分が負または0で、かつ電流の減少度合いが1時間当たり10%以内となる電流を用いる構成を有する。さらに、電界放射電子源の加熱部と、電子線の電流の検出部とを備え、電界放射電子源を繰り返し加熱することで、放射される電子線の電流を所定の値以上に維持する。【選択図】図3
摘要翻译：要解决的问题：提供一种能够发出稳定的电子束的带电粒子束装置，其具有高亮度和窄的能量宽度。解决方案：带电粒子束装置包括场致发射电子源，用于施加电场的电极场发射电子源和用于将场致发射电子源周围的压力保持在1×10Pa以下的真空排气单元。该装置构成为使用在发射的电子束中具有1×10str以下的电子束中心辐射角的电子束，并且使用其电流，其二阶导数相对于时间的电子束的电流为负或为零，以每小时10％以下的速度降低。带电粒子束装置还包括用于场发射电子源的加热单元和用于电子束电流的检测单元。重复加热场致发射电子源以使电子束的电流保持在规定值以上。

3. 发明专利

JP2006114225A Charged particle beam device 审中-公开
标题翻译：充电颗粒光束装置
公开(公告)号：JP2006114225A
公开(公告)日：2006-04-27
申请号：JP2004297117
申请日：2004-10-12
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OSHIMA TAKU , SATO MITSUGI , KATAGIRI SOUICHI
IPC分类号： H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/0268 , H01J2237/04756 , H01J2237/1205 , H01J2237/121 , H01J2237/188 , H01J2237/24465 , H01J2237/2611 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To solve a problem that a secondary electron detector has become an obstacle for miniaturization when columns of an SEM (scanning electron microscope) are targeted to have a high resolution and extra-small size.
SOLUTION: In order to obtain the SEM with extra-small size, high sensitivity, and high resolution, an electrostatic lens is used as a principal focusing means, and a drift tube of electron beams is installed inside a column between an electron source and a testpiece, and the secondary electron detector is arranged inside this.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题为了解决当扫描电子显微镜（扫描电子显微镜）的列具有高分辨率和超小尺寸的目标时，二次电子检测器已经成为小型化的障碍的问题。
解决方案：为了获得具有超小尺寸，高灵敏度和高分辨率的SEM，使用静电透镜作为主要聚焦装置，并且电子束漂移管安装在电子之间的柱内源和测试件，并且二次电子检测器布置在其内部。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2007311117A Electron lens and charged particle beam device using it 有权
标题翻译：电子透镜和使用它的充电颗粒光束装置
公开(公告)号：JP2007311117A
公开(公告)日：2007-11-29
申请号：JP2006137815
申请日：2006-05-17
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OSHIMA TAKU , SATO MITSUGI , KANEKO YUTAKA , KATAGIRI SOUICHI , TAKEUCHI KOICHIRO
IPC分类号： H01J37/143 , H01J37/28
CPC分类号： H01J37/143 , H01J37/28 , H01J2237/1405 , H01J2237/2813 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To provide an electron lens with small size and low aberration and a charged particle beam device such as an ultra-small, high resolution SEM or the like using the same.
SOLUTION: The electron lens has an upper magnetic pole 2 and a test piece side magnetic pole 3 connected magnetically to the respective pole of a permanent magnet 1 made of a high strength magnetic material such as a rare earth cobalt system and a neodymium iron boron system and having a structure of axial symmetry with a hole in the center, and a magnetic lens is formed on the axis by installing an inner gap 100 on the center axis side. Further, the outside magnetic field is partially shielded and a semi-fixing type magnetic path 4 to adjust a magnetic resistance value is installed at the outside, and the space between the test piece side magnetic pole 3 and the magnetic path 4 forms a region with highest magnetic resistance in the region outside of the permanent magnet 1. Further, the space between the permanent magnet 1 and the upper magnetic pole 2, the test piece side magnetic pole 3, and the semi fixing type magnetic path 4 is filled with a filler of a non-magnetic material to forme an objective lens.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有小尺寸和低像差的电子透镜以及使用其的超小型，高分辨率SEM等的带电粒子束装置。解决方案：电子透镜具有上磁极2和测试片侧磁极3，其磁性地连接到由诸如稀土钴体系和钕的高强度磁性材料制成的永磁体1的各极上铁硼体系，并且具有与中心具有孔的轴向对称结构，并且通过在中心轴线侧安装内部间隙100在轴上形成磁性透镜。此外，外部磁场被部分屏蔽，并且在外部安装用于调节磁阻值的半固定型磁路4，并且测试片侧磁极3和磁路4之间的空间形成具有在永磁体1外部的区域中的最高磁阻。此外，永磁体1和上磁极2，测试片侧磁极3和半固定型磁路4之间的空间填充有填充物的非磁性材料以形成物镜。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2007157682A Charged particle beam apparatus 有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2007157682A
公开(公告)日：2007-06-21
申请号：JP2006128962
申请日：2006-05-08
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KATAGIRI SOUICHI , OSHIMA TAKU , AGEMURA TOSHIHIDE , SATO MITSUGI
IPC分类号： H01J37/18
CPC分类号： H01J37/18 , H01J37/28 , H01J2237/022 , H01J2237/1825 , H01J2237/188 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To provide a small charged particle beam apparatus using a non-evaporable getter pump which maintains a high vacuum even during the emission of an electron beam without generating foreign substances.
SOLUTION: This charged particle beam apparatus comprises: a charged particle source 1; a charged particle optics which focuses a charged particle beam emitted from the charged particle source on a sample and performs scanning; and an evacuation means which evacuates the charged particle optics. The evacuation means has a differential evacuation structure with two or more vacuum chambers connected through openings in series, and is constituted such that a pump 3 made of a non-evaporable getter alloy is placed in the vacuum chamber on the upstream side with a high degree of a vacuum, and the gas sucking surface of the non-evaporable getter alloy is held without contact with the other member.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用非蒸发性吸气泵的小型带电粒子束装置，即使在电子束的发射期间也能保持高真空而不产生异物。该带电粒子束装置包括：带电粒子源1; 带电粒子光学器件，其将从带电粒子源发射的带电粒子束聚焦在样品上并执行扫描; 以及排空带电粒子光学器件的抽空装置。排气装置具有差分抽空结构，其具有通过开口串联连接的两个或更多个真空室，并且构成为使得由不可蒸发的吸气剂合金制成的泵3以高度放置在上游侧的真空室中并且不蒸发的吸气剂合金的吸气表面保持不与另一个构件接触。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2015032359A 荷電粒子線装置有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2015032359A
公开(公告)日：2015-02-16
申请号：JP2013158900
申请日：2013-07-31
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： MATSUNAGA SOICHIRO , KATAGIRI SOUICHI , KAWANO HAJIME
IPC分类号： H01J37/04
CPC分类号： H01J37/28 , H01J37/06 , H01J37/09 , H01J37/147 , H01J37/3045 , H01J2237/0455 , H01J2237/06316 , H01J2237/065 , H01J2237/1501 , H01J2237/24465 , H01J2237/24535 , H01J2237/24542
摘要：【課題】走査電子顕微鏡において、電子源から放出される電子ビームの中で試料に照射するビームを選択することにより、一定量の電子ビームを試料に照射し続ける技術を提供する。【解決手段】電子源から放出される電子ビームの放出された方向に対する電流強度の分布を検出する機構を有し、その検出結果を基に電流分布を予測することで試料に照射される電流の変動を予測する機能を有し、その予測結果を基に試料に照射するビームを取得する位置を判断する機能を有し、その判断結果に基づきプローブビームを取得する位置を制御する機構を有する荷電粒子装置。【選択図】図1A
摘要翻译：要解决的问题：提供一种通过在扫描电子显微镜中从从电子源放出的电子束中选择要照射到样品的光束来继续照射具有固定量的电子束的样品的技术。解决方案：电荷粒子束装置包括以下机构：检测从电子源放出的电子束的放电方向上的电流强度的分布; 通过基于检测结果预测电流分布来预测辐射到样品的电流的波动; 基于预测结果确定辐射到样本的光束的位置; 并根据判定结果控制获取探测光束的位置。

7. 发明专利

JP2011165669A Mirror electron type sample inspection device 有权
标题翻译：镜子电子样品检测装置
公开(公告)号：JP2011165669A
公开(公告)日：2011-08-25
申请号：JP2011066960
申请日：2011-03-25
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KATAGIRI SOUICHI , OSHIMA TAKU , AGEMURA TOSHIHIDE , SATO MITSUGI , FURUKAWA TAKASHI
IPC分类号： H01J37/29 , G01N23/203 , G01N23/225 , H01J37/06 , H01J37/18 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a compact charged particle beam device capable of maintaining high vacuum even during emission of electron beams. SOLUTION: A non-evaporation getter pump is arranged at an upstream of an electron optical differential exhaust of the charged particle beam device, the minimum essential ion pump 118 is arranged downstream, and both are used in common. Furthermore, a removable coil is mounted on an electron gun part. With this, the compact charged particle beam device can be obtained capable of maintaining a vacuum degree in a column in high vacuum at a 10 -8 Pa scale such as, for example, a compact scanning electron microscope and the charged particle beam device having a plurality of columns. Furthermore, a compact SEM column to monitor a position of a probe of a prober device to directly measure electrical characteristics of a semiconductor can be easily built in. In addition, downsizing of an electron beam irradiation column of a mirror projection type electron beam inspection device for semiconductor element inspection becomes possible. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供即使在电子束的发射期间也能够保持高真空的紧凑型带电粒子束装置。解决方案：非蒸发吸气泵布置在带电粒子束装置的电子光学差分排气的上游，最下面的基本离子泵118布置在下游，并且两者共同使用。此外，可拆卸线圈安装在电子枪部分上。由此，可以获得能够在高真空度下保持真空度在10 -8 Pa等级的紧凑型带电粒子束装置，例如紧凑型扫描电子显微镜和带电粒子束装置具有多个列。此外，可以容易地构建用于监视探针装置的探针的位置以直接测量半导体的电特性的紧凑的SEM柱。此外，反射镜型电子束检查装置的电子束照射柱的尺寸小型化可以进行半导体元件检查。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2010010125A Charged particle beam apparatus 有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2010010125A
公开(公告)日：2010-01-14
申请号：JP2009103490
申请日：2009-04-22
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KATAGIRI SOUICHI , OSHIMA TAKU , TAKAMI TAKASHI , ESUMI MAKOTO , DOI TAKASHI , KASAI YUJI
IPC分类号： H01J37/18
CPC分类号： H01J37/18 , H01J2237/06341 , H01J2237/182 , H01J2237/188
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus using a non-evaporation getter pump for keeping a degree of vacuum extremely high, namely 10
-8 -10
-9 Pa, near an electron source even in the condition of releasing electron beams without being influenced by fall-off foreign matters.
SOLUTION: The charged particle beam apparatus includes a vacuum container in which a charged particle source 2 (an electron source, an ion source or the like) is arranged, and the non-evaporation getter pump 6 provided at a position of not directly facing electron beams. To avoid the movement of foreign matters falling off the non-evaporation getter pump 6 toward an electron optical system, it is constructed so that the non-evaporation getter pump 6 is turned upward in the horizontal direction to fall into the bottom of a groove 4' of an electrode 4 or it is covered with a shielding means. Otherwise, it has a means which is installed right over the face of the non-evaporation getter pump at a position of not viewing the electron beams and which has a recessed structure for trapping the fall-off foreign matters in the lower part of the non-evaporation getter pump.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供使用非蒸发吸气泵的带电粒子束装置，以保持真空度非常高，即10 -8 -10 -9 < / SP> Pa，即使在释放电子束的条件下也不受脱落异物的影响。解决方案：带电粒子束装置包括其中布置有带电粒子源2（电子源，离子源等）的真空容器，并且非蒸发吸气剂泵6设置在不是的位置直接面向电子束。为了避免从非蒸发吸气剂泵6向电子光学系统脱落的异物的移动，使得非蒸发吸气泵6在水平方向上向上转动以落入槽4的底部的电极4，或者用屏蔽装置覆盖。否则，它具有在非蒸发吸气泵的表面上安装在不观察电子束的位置的装置，并且具有凹陷结构，用于捕获非脱气吸气剂下部的脱落异物 - 蒸发吸气泵。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2009004112A Charged particle beam device and its vacuum starting method 有权
标题翻译：充电颗粒光束装置及其真空启动方法
公开(公告)号：JP2009004112A
公开(公告)日：2009-01-08
申请号：JP2007161260
申请日：2007-06-19
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KATAGIRI SOUICHI , OSHIMA TAKU
IPC分类号： H01J37/18
CPC分类号： H01J37/28 , H01J37/18 , H01J37/3056 , H01J2237/182 , H01J2237/1825
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of carrying out vacuum starting of an electron gun chamber or an ion gun chamber with a non-evaporating getter pump in a short time, and maintaining a high vacuum degree for a long time, as well as a technology of its vacuum starting method.
SOLUTION: In the charged particle beam device equipped with a charged particle optical system having a charged particle beam emitted from a charged particle source incident on a sample, and a vacuum evacuation means for evacuating the charged particle optical system, the vacuum evacuation means includes a vacuum chamber 3 with the charged particle source arranged, a non-evaporating getter pump to be coupled through a vacuum pipe 20 and evacuating inside the vacuum chamber 3 as an auxiliary vacuum pump 2, a valve 1 provided on the vacuum pipe 20 connecting between the vacuum chamber 3 and the non-evaporating getter pump, a rough exhaust port 5 for rough-exhausting provided closer to the non-evaporating getter pump side than the valve 1, a switching valve 7 for opening and closing the rough exhaust port, and a main vacuum pump 4 provided closer to the vacuum chamber 3 side than the valve 1 and evacuating inside the vacuum chamber 3.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在短时间内用非蒸发吸气泵在电子枪室或离子枪室进行真空启动的带电粒子束装置，并保持高真空度很长时间，以及其真空启动方法的技术。解决方案：在装备有从入射到样品上的带电粒子源发射的带电粒子束的带电粒子光学系统的带电粒子束装置和用于抽空带电粒子光学系统的真空排出装置中，真空抽真空装置包括具有带电粒子源的真空室3，通过真空管20联接并在作为辅助真空泵2的真空室3内抽真空的非蒸发吸气泵，设置在真空管20上的阀1 连接在真空室3和非蒸发吸气泵之间，用于粗排气的粗排气口5设置成比阀1更靠近非蒸发吸气泵侧;切换阀7，用于打开和关闭粗排气口，以及设置在比真空室3更靠近真空室3侧并在真空室3内抽真空的主真空泵4.（C）2009，JPO＆INPIT

10. 发明专利

JP2007227116A Electron beam inspecting device and method 审中-公开
标题翻译：电子束检测装置及方法
公开(公告)号：JP2007227116A
公开(公告)日：2007-09-06
申请号：JP2006046118
申请日：2006-02-23
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MARUYAMA MOMOYO , HASEGAWA MASAKI , MURAKOSHI HISAYA , KATAGIRI SOUICHI , TODOKORO HIDEO
IPC分类号： H01J37/29
摘要： PROBLEM TO BE SOLVED: To solve the following problem: as a visual field is enlarged, the curve of the image surface of an objective lens becomes a problem, and since the position of the image surface changes so as to form a bowl shape and an image is obtained at the center and outside of the visual field under different focus conditions, the image becomes dim, thereby making it difficult to inspect a large area.
SOLUTION: The shape of the visual field is formed into a circular arc of a circle having an optical axis as its center, or a fluorescent screen is curved so as to have the same shape as the curve of the image surface, in order to detect an electron. Thereby, a means to obtain the electron in the entire surface of the visual field so as to keep the same focus condition on the fluorescent screen is provided.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决以下问题：为了解决以下问题：随着视场的扩大，物镜的图像面的曲线成为问题，由于图像的位置变化而形成碗状在不同焦点条件下在视场的中心和外部获得形状和图像，图像变暗，从而难以检查大面积。解决方案：视场的形状形成为以光轴为中心的圆弧，或者荧光屏弯曲成具有与图像表面的曲线相同的形状，在为了检测电子。因此，提供了在视野的整个表面中获得电子以便在荧光屏上保持相同对焦条件的手段。版权所有（C）2007，JPO＆INPIT

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