专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2007311117A Electron lens and charged particle beam device using it 有权
标题翻译：电子透镜和使用它的充电颗粒光束装置
公开(公告)号：JP2007311117A
公开(公告)日：2007-11-29
申请号：JP2006137815
申请日：2006-05-17
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OSHIMA TAKU , SATO MITSUGI , KANEKO YUTAKA , KATAGIRI SOUICHI , TAKEUCHI KOICHIRO
IPC分类号： H01J37/143 , H01J37/28
CPC分类号： H01J37/143 , H01J37/28 , H01J2237/1405 , H01J2237/2813 , H01J2237/31749
摘要： PROBLEM TO BE SOLVED: To provide an electron lens with small size and low aberration and a charged particle beam device such as an ultra-small, high resolution SEM or the like using the same.
SOLUTION: The electron lens has an upper magnetic pole 2 and a test piece side magnetic pole 3 connected magnetically to the respective pole of a permanent magnet 1 made of a high strength magnetic material such as a rare earth cobalt system and a neodymium iron boron system and having a structure of axial symmetry with a hole in the center, and a magnetic lens is formed on the axis by installing an inner gap 100 on the center axis side. Further, the outside magnetic field is partially shielded and a semi-fixing type magnetic path 4 to adjust a magnetic resistance value is installed at the outside, and the space between the test piece side magnetic pole 3 and the magnetic path 4 forms a region with highest magnetic resistance in the region outside of the permanent magnet 1. Further, the space between the permanent magnet 1 and the upper magnetic pole 2, the test piece side magnetic pole 3, and the semi fixing type magnetic path 4 is filled with a filler of a non-magnetic material to forme an objective lens.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有小尺寸和低像差的电子透镜以及使用其的超小型，高分辨率SEM等的带电粒子束装置。解决方案：电子透镜具有上磁极2和测试片侧磁极3，其磁性地连接到由诸如稀土钴体系和钕的高强度磁性材料制成的永磁体1的各极上铁硼体系，并且具有与中心具有孔的轴向对称结构，并且通过在中心轴线侧安装内部间隙100在轴上形成磁性透镜。此外，外部磁场被部分屏蔽，并且在外部安装用于调节磁阻值的半固定型磁路4，并且测试片侧磁极3和磁路4之间的空间形成具有在永磁体1外部的区域中的最高磁阻。此外，永磁体1和上磁极2，测试片侧磁极3和半固定型磁路4之间的空间填充有填充物的非磁性材料以形成物镜。版权所有（C）2008，JPO＆INPIT

IPRDB

热门服务

关于我们

友情链接

联系方式