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1. 发明专利

JP2015015201A 荷電粒子線装置および画像取得方法有权
标题翻译：充电颗粒光束装置和图像采集方法
公开(公告)号：JP2015015201A
公开(公告)日：2015-01-22
申请号：JP2013142231
申请日：2013-07-08
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： HOSHINO HAYAYUKI , TACHIBANA ICHIRO , SUZUKI NAOMASA
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28 , H01L21/66
摘要：【課題】リターディング電圧値とエネルギーフィルタに印加する電圧値との差で選別できる信号電子のエネルギーを決めることができる。しかしながら、これらの電圧値の調整に際しては可変パラメータが複数あるため、最適な電圧値に調整することが困難であった。そこで本発明は、リターディング電圧値とエネルギーフィルタに印加する電圧値等の最適なバリア条件を簡単に設定可能な荷電粒子線装置を提供することを目的とする。【解決手段】ブースター電圧とリターディング電圧との差であるフィルタ電圧を複数の条件に変化させ、各条件において試料の画像を生成し、生成された画像中の観察対象物の内部と外部のコントラスト比またはコントラスト差に基づいてフィルタ電圧の最適値を求める。【選択図】図1
摘要翻译：要解决的问题：为了解决这样一个问题，尽管可以确定可以通过延迟电压值和施加到能量滤波器的电压值之间的差异来选择信号电子的能量，但是调节到最佳电压值是困难的，因为当调节这些电压值时存在多个可变参数，并且提供带电粒子束装置，其中最佳屏障条件，例如延迟电压值和施加到能量滤波器的电压值可以是设置简单。解决方案：在多个条件下，改变滤波器电压，即升压电压和延迟电压的差异，在每个条件下生成样本的图像，然后滤波电压的最佳值基于由此产生的图像中的观察对象的内部和外部之间的对比度或对比度差来确定。

2. 发明专利

JP2007220399A Scanning electron microscope and defect detector device 有权
标题翻译：扫描电子显微镜和缺陷检测器装置
公开(公告)号：JP2007220399A
公开(公告)日：2007-08-30
申请号：JP2006037660
申请日：2006-02-15
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TACHIBANA ICHIRO , SATO MITSUGI , FUKADA ATSUKO , SUZUKI NAOMASA , FUKUDA MUNEYUKI
IPC分类号： H01J37/28 , H01J37/141 , H01J37/244
CPC分类号： H01J37/28 , H01J37/09 , H01J2237/0262 , H01J2237/12 , H01J2237/24592 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of obtaining a high-resolution and high-contrast concavoconvex image of a sample surface.
SOLUTION: A positive voltage for accelerating primary electron beams is impressed, and an electric field shielding board, a magnetic field shielding board, or an electromagnetic field shielding board is arranged on a top part of an objective lens. With the use of the scanning electron microscope of such a structure, a sample image is obtained.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够获得样品表面的高分辨率和高对比度凹凸图像的扫描电子显微镜。解决方案：施加用于加速一次电子束的正电压，并且在物镜的顶部上设置电场屏蔽板，磁场屏蔽板或电磁场屏蔽板。利用这种结构的扫描电子显微镜，获得样品图像。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2008147013A Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：JP2008147013A
公开(公告)日：2008-06-26
申请号：JP2006332747
申请日：2006-12-11
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SUZUKI NAOMASA , ITO HIROYUKI , TACHIBANA ICHIRO
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/141 , H01J37/28 , H01J2237/1405 , H01J2237/141 , H01J2237/244
摘要： PROBLEM TO BE SOLVED: To prevent reduction in detection efficiency of electrons detected by a detector by preventing a leakage magnetic field from a gap of an objective lens from affecting the electrons generated from a sample.
SOLUTION: A scanning electron microscope has a magnetic pole-cum-electrode to accelerate primary electrons generated in an electron source, and a gap including the magnetic pole-cum-electrode and obtained by electrically and magnetically insulating between the magnetic pole-cum-electrode and the other magnetic pole. By arranging an auxiliary coil concentric with the objective lens at the intermediate position between the gap and a detection face of an electron detector, and a current of which the direction is reverse to that of the current flowing in an objective lens coil is made to flow in the auxiliary coil.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了防止来自物镜的间隙的泄漏磁场影响从样品产生的电子，检测器检测到的电子的检测效率降低。解决方案：扫描电子显微镜具有用于加速在电子源中产生的一次电子的磁极暨电极和包括磁极暨电极的间隙，并且通过在磁极 - 暨电极和另一个磁极。通过在间隙和电子检测器的检测面之间的中间位置设置与物镜同心的辅助线圈，并且使流过物镜线圈的电流的方向与其相反的方向流动在辅助线圈中。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2012186177A Electron beam application device 审中-公开
标题翻译：电子束应用器件
公开(公告)号：JP2012186177A
公开(公告)日：2012-09-27
申请号：JP2012136535
申请日：2012-06-18
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： FUKUDA MUNEYUKI , SHOJO TOMOYASU , SATO MITSUGU , FUKADA ATSUKO , SUZUKI NAOMASA , TACHIBANA ICHIRO
IPC分类号： H01J37/28 , H01J37/05 , H01J37/244 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide charged particle beam inspection technology capable of obtaining an image with an emphasized shadowing contrast and capable of detecting a fine foreign matter or the like of shallow irregularity with high sensitivity in inspection of a semiconductor device or the like having a circuit pattern.SOLUTION: An electromagnetic superimposed type objective lens 103 is used as objective lens of an electron optical system for high resolution observation, electron beam is stopped down narrowly by using the objective lens, and an assist electrode 106 and right and left detectors 110 and 111 are installed in the objective lens. A speed component of secondary electrons generated by irradiating a test piece 104 with the electron beam is selected, and furthermore an azimuth angle component is selected and detected.
摘要翻译：要解决的问题：为了提供能够获得具有强调阴影对比度的图像的带电粒子束检查技术，并且能够在半导体器件的检查中以高灵敏度检测浅的不规则性的微细异物等像电路图案一样。解决方案：电磁叠加型物镜103用作用于高分辨率观察的电子光学系统的物镜，通过使用物镜将电子束狭窄地停止，辅助电极106和左右检测器110 和111安装在物镜中。选择通过用电子束照射测试片104产生的二次电子的速度分量，此外选择并检测方位角分量。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2011003414A Charged particle beam device 有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2011003414A
公开(公告)日：2011-01-06
申请号：JP2009145920
申请日：2009-06-19
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TSUJI HIROSHI , ISHIGURO KOJI , TACHIBANA ICHIRO , SUZUKI NAOMASA , KONUKI KATSUNORI
IPC分类号： H01J37/16 , H01J37/18
CPC分类号： F16F9/306 , H01J37/16 , H01J2237/0216
摘要： PROBLEM TO BE SOLVED: To provide a high-resolution and high throughput charged particle beam device obtained by attenuating intrinsic vibrations of ion pumps excited by a reactive force during driving of a stage, and by preventing occurrence of a loop of a force and a loop of a current.SOLUTION: The charged particle beam device includes: a specimen chamber 4 to arrange a specimen 3 therein; a charged particle beam optical lens-barrel 1 in order to irradiate charged particle beams 10 to the specimen 3; and ion pumps 2a, 2b to evacuate air inside the charged particle beam optical lens-barrel 1. A frame 16 is fixed to the specimen chamber 4 opposed to one end of the ion pumps 2a, 2b. A vibration absorber is installed between the frame 16 and one end of the ion pumps 2a, 2b, and this vibration absorber is constituted of a laminated structure obtained by pinching visco-elastic body sheets 20a, b with metal plates 18a, 18b, 21a, 21b.
摘要翻译：要解决的问题：提供一种高分辨率和高通量的带电粒子束装置，其通过衰减在驱动阶段期间由反作用力激发的离子泵的固有振动，并且通过防止产生力和环的回路带电粒子束装置包括：样本室4，用于在其中布置样本3; 带电粒子束光学镜筒1，以便将带电粒子束10照射到样品3上; 离子泵2a，2b排出带电粒子束光学透镜镜筒1内的空气。框架16固定到与离子泵2a，2b的一端相对的样本室4。在框架16和离子泵2a，2b的一端之间安装有减震器，该振动吸收器由通过用粘合弹性体片材20a，b夹着金属板18a，18b，21a， 21B。

6. 发明专利

JP2014002835A Charged particle beam device 有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2014002835A
公开(公告)日：2014-01-09
申请号：JP2012135297
申请日：2012-06-15
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TACHIBANA ICHIRO , SUZUKI NAOMASA
IPC分类号： H01J37/21
CPC分类号： H01J37/21 , H01J37/10 , H01J37/147 , H01J37/263 , H01J37/28 , H01J2237/04756 , H01J2237/0492 , H01J2237/063 , H01J2237/10 , H01J2237/15 , H01J2237/21 , H01J2237/244 , H01J2237/2602 , H01J2237/281
摘要： PROBLEM TO BE SOLVED: To resolve a problem that, in the case that signal electrons are detected by energy selection by performing control so as to combine retarding and boosting for the purpose of deep-hole observation and the like, although magnetic variation of an objective lens must be used for focus adjustment, throughput is reduced because of a poor responsibility of magnetic variation.SOLUTION: A charged particle beam device comprises: an electron source generating a primary electron beam; an objective lens converging the primary electron beam; a deflector deflecting the primary electron beam; a detector detecting secondary electrons generated from a sample due to the irradiation of the primary electron beam or reflected electrons; an electrode having a hole through which the primary electron beam passes; a voltage control power supply applying a negative voltage to the electrode; and a retarding voltage control power supply applying a negative voltage to the sample to generate such an electric field that decelerates the primary electron beam on the sample. Focus adjustment is performed while making constant a difference between the voltage applied to the electrode and the voltage applied to the sample.
摘要翻译：要解决的问题：为了解决在通过进行控制的能量选择来检测信号电子以便进行深孔观察等的延迟和升压的组合的情况下，尽管目标的磁性变化必须使用镜头进行焦点调整，因为磁性变化的负担很小，所以吞吐量降低。解决方案：带电粒子束装置包括：产生一次电子束的电子源; 会聚该一次电子束的物镜; 偏转器偏转一次电子束; 检测器，其检测由于一次电子束或反射电子的照射而从样品产生的二次电子; 具有一次电子束通过的孔的电极; 向所述电极施加负电压的电压控制电源; 以及向样品施加负电压的延迟电压控制电源，以产生使样品上的一次电子束减速的电场。在施加到电极的电压和施加到样品的电压之间恒定地进行聚焦调整。

7. 发明专利

JP2013145183A Charged particle beam device and method for measuring sample surface 审中-公开
标题翻译：充电颗粒光束装置和测量样品表面的方法
公开(公告)号：JP2013145183A
公开(公告)日：2013-07-25
申请号：JP2012005876
申请日：2012-01-16
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HOSHINO HAYAYUKI , AOKI KAZUO , KIZUKI HIROHIKO , TACHIBANA ICHIRO
IPC分类号： G01N23/225 , G01B15/02 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To measure the film thickness and the material quality of a thin film without using another measuring device, and breaking a thin film to be measured and degrading the quality of the film.SOLUTION: A control computer carries out sweeping processing for sweeping a deceleration voltage Vr of a retarding voltage power source from a voltage (-Va) having a reverse polarity of an acceleration voltage of a primary electron beam to a voltage V2 higher than the voltage to a sample on which a thin film having known film thickness and material quality is formed to generate first deceleration voltage-luminance characteristics data and acquires a first feature quantity, carries out the same sweeping processing to a sample to be measured on which a thin film having unknown film thickness and material quality is formed to generate first deceleration voltage-luminance characteristics data and acquires a second feature quantity, and estimates the film thickness or the material quality of the thin film formed on the sample to be measured by comparing the first feature quantity and the second feature quantity.
摘要翻译：要解决的问题：不使用其他测量装置来测量薄膜的膜厚度和材料质量，并且打破要测量的薄膜并降低膜的质量。解决方案：控制计算机执行扫描处理从具有与一次电子束的加速电压相反的极性的电压（-Va）向具有已知膜的薄膜的电压的电压V2提升延迟电压电源的减速电压Vr 形成厚度和材料质量以产生第一减速电压 - 亮度特性数据并获取第一特征量，对要形成具有未知膜厚度和材料质量的薄膜产生的待测样品执行相同的扫描处理第一减速电压 - 亮度特性数据并获取第二特征量，并估计膜厚度或材料质量通过比较第一特征量和第二特征量，在要测量的样品上形成薄膜。

8. 发明专利

JP2011108667A Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：JP2011108667A
公开(公告)日：2011-06-02
申请号：JP2011048756
申请日：2011-03-07
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TACHIBANA ICHIRO , SATO MITSUGI , FUKADA ATSUKO , SUZUKI NAOMASA , FUKUDA MUNEYUKI
IPC分类号： H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope which obtains a high-resolution and high-contrast concavo-convex image of a sample surface.
SOLUTION: A positive voltage for accelerating a primary electron beam is impressed, and an electric field shielding plate or magnetic field shielding plate or electromagnetic field shielding plate is arranged on an upper part of an objective lens. By using a scanning electron microscope having such a structure, a sample image is obtained.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种获得样品表面的高分辨率和高对比度的凹凸图像的扫描电子显微镜。解决方案：施加用于加速一次电子束的正电压，并且在物镜的上部设置电场屏蔽板或磁场屏蔽板或电磁场屏蔽板。通过使用具有这种结构的扫描电子显微镜，获得样品图像。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2009026749A Scanning electron microscope, and imaging method using scanning electron microscope 有权
标题翻译：扫描电子显微镜和使用扫描电子显微镜的成像方法
公开(公告)号：JP2009026749A
公开(公告)日：2009-02-05
申请号：JP2008157604
申请日：2008-06-17
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TACHIBANA ICHIRO , SATO MITSUGI , SUZUKI NAOMASA
IPC分类号： H01J37/21 , H01J37/04 , H01J37/28
CPC分类号： G01N23/225 , H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/21 , H01J2237/2611 , H01J2237/2814 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which an image forming position of a focusing lens can be changed in a high speed and in an excellent reproducibility in order to obtain a deep focusing depth in a low-magnification image and a high resolution image in a high-magnification image.
SOLUTION: The scanning electron microscope is provided with a testpiece holding portion for holding a testpiece, an electron beam source, a focusing lens for focusing electron beams discharged from the electron beam source, an objective lens for irradiating the focused bean on the testpiece as a micro spot, a scanning coil for scanning the electron beam on the testpiece, a detecting unit for detecting a testpiece signal generated from the testpiece by an electron beam irradiation, and a display portion for displaying as an image the testpiece signal detected by the detecting unit. In a magnetic field generated by the focusing lens, there are provided electrodes of an axial symmetry and a voltage is impressed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种扫描电子显微镜，其中聚焦透镜的图像形成位置可以以高速度和优异的再现性改变，以便在低倍率图像中获得深度聚焦深度以及高倍率图像中的高分辨率图像。解决方案：扫描电子显微镜设置有用于保持试件的试件保持部分，电子束源，用于聚焦从电子束源放出的电子束的聚焦透镜，用于将聚焦的豆照射在作为微点的试样，用于扫描试件上的电子束的扫描线圈，用于通过电子束照射检测从试件产生的试验信号的检测单元和用于将作为图像检测的试验信号作为图像显示的显示部分，检测单元。在由聚焦透镜产生的磁场中，提供轴向对称的电极并施加电压。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2008108592A Electron beam application device and test piece inspection method 有权
标题翻译：电子束应用设备和测试检验方法
公开(公告)号：JP2008108592A
公开(公告)日：2008-05-08
申请号：JP2006290772
申请日：2006-10-26
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： FUKUDA MUNEYUKI , SHOJO TOMOYASU , SATO MITSUGI , FUKADA ATSUKO , SUZUKI NAOMASA , TACHIBANA ICHIRO
IPC分类号： H01J37/244 , G01N23/225 , H01J37/22 , H01J37/28 , H01L21/66
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/221 , H01J2237/2444 , H01J2237/2448 , H01J2237/24485 , H01J2237/2449 , H01J2237/24495
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam inspection technology capable of obtaining an image with an emphasized shadowing contrast and capable of detecting a fine foreign matter or the like with shallow irregularity with a high sensitivity in the inspection of a semiconductor device or the like having a circuit pattern.
SOLUTION: An electromagnetic superimposed type objective lens 103 is used for the objective lens of an electron optical system for the purpose of a high resolution observation, and using this objective lens, electron beams are stopped down narrowly, and an assist electrode 106 and right and left detectors 110, 111 are installed in the objective lens. The electron beams are irradiated on a test piece 104 and a speed component of the secondary electrons generated is selected and furthermore, an azimuth angle component is selected and detected.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够获得具有强调的阴影对比度的图像的带电粒子束检查技术，并且能够在半导体的检查中以高灵敏度检测具有浅的不规则性的细小异物等装置等具有电路图案。解决方案：电磁叠加型物镜103用于电子光学系统的物镜，用于高分辨率观察，并且使用该物镜将电子束狭窄地停止，辅助电极106 左右检测器110,111安装在物镜上。电子束被照射在测试片104上，并且选择产生的二次电子的速度分量，此外，选择并检测方位角分量。版权所有（C）2008，JPO＆INPIT

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