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2. 发明专利

JP5637526B2 レーザ加工装置有权
公开(公告)号：JP5637526B2
公开(公告)日：2014-12-10
申请号：JP2010102904
申请日：2010-04-28
申请人：株式会社ブイ・テクノロジー
发明人：水村　通伸 , 通伸水村
IPC分类号： B23K26/382 , B23K26/064 , B23K26/067 , H05K3/00
CPC分类号： B23K26/38 , B23K26/0676 , B23K26/382 , B23K26/40 , B23K26/402 , B23K2203/50

5. 发明专利

JP5517308B2 A method of manufacturing a mask, mask and mask manufacturing equipment 有权
公开(公告)号：JP5517308B2
公开(公告)日：2014-06-11
申请号：JP2011255298
申请日：2011-11-22
申请人：株式会社ブイ・テクノロジー
发明人：通伸水村 , 重人杉本
IPC分类号： C23C14/04

6. 发明专利

JP5382412B2 Exposure apparatus and a photomask 有权
公开(公告)号：JP5382412B2
公开(公告)日：2014-01-08
申请号：JP2008273863
申请日：2008-10-24
申请人：株式会社ブイ・テクノロジー
发明人：通伸水村
IPC分类号： G03F7/20 , G02F1/13 , G02F1/1368 , G03F1/00 , G03F1/38 , G03F1/70 , H01L21/027
CPC分类号： G03F7/70791 , G03F1/00 , G03F1/14 , G03F1/38 , G03F1/50 , G03F7/70283

7. 发明专利

JP5294488B2 Exposure device 有权
公开(公告)号：JP5294488B2
公开(公告)日：2013-09-18
申请号：JP2009275455
申请日：2009-12-03
申请人：株式会社ブイ・テクノロジー
发明人：通伸水村 , 和重橋本 , 誠畑中
IPC分类号： G03F7/20 , H01L21/027
CPC分类号： G03F7/70275
摘要： Exposure apparatus includes photomasks on which a mask pattern having the same shape as that of an exposure pattern exposed onto a surface of a TFT substrate held on a stage is formed, lens assemblies in which unit lens groups in each of which a plurality of convex lenses are arranged in a normal direction to the photomasks so that same-size erect images of mask patterns formed on the photomasks can be formed on the surface of the TFT substrate are arranged in a plane parallel with the photomasks and the surface of the TFT substrate held on the stage, and moving device that moves the lens assemblies in a plane parallel with the masks and the surface of TFT substrate held on the stage.

8. 发明专利

JP5282979B2 Exposure device 有权
公开(公告)号：JP5282979B2
公开(公告)日：2013-09-04
申请号：JP2009290649
申请日：2009-12-22
申请人：株式会社ブイ・テクノロジー
发明人：通伸水村
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： G03F7/704
摘要： Disclosed is an exposure device provided with: a beam spot generation means (9) that receives light (L1) from a light source and generates a plurality of beam spots at prescribed intervals, in at least two staggered rows; an optical scanning means (10) that moves the plurality of beam spots back and forth a prescribed amount in the direction in which the rows of beam spots extend; a pattern generator (11); and a projection lens (12). A plurality of prism-shaped switching elements comprising an electro-optical crystal material are arranged such that the central axes thereof are aligned with the centers of the back-and-forth scan ranges of the aforementioned beam spots, and each switching element is provided with a pair of electrodes on an opposing surface parallel to the central axis of said switching element. The switching elements are wider in the scan direction of the beam spots than the beam spots are. By turning the plurality of switching elements on and off, the pattern generator (11) optically modulates the aforementioned light (L1) to generate a prescribed pattern of light and dark. The projection lens (12) projects said pattern onto a color filter substrate (5).

9. 发明专利

JP5282261B2 Ink filling apparatus 有权
公开(公告)号：JP5282261B2
公开(公告)日：2013-09-04
申请号：JP2008030503
申请日：2008-02-12
申请人：株式会社ブイ・テクノロジー
发明人：雄二齋藤 , 貴文平野 , 通伸水村
IPC分类号： B05C11/10 , B41J2/175
摘要： PROBLEM TO BE SOLVED: To enable a filling of a predetermined amount of ink to a needle tube. SOLUTION: The device is provided with a cartridge holder 1 holding detachably an ink cartridge 8 formed by assembling the needle tube 6 to a cartridge member 7, a connector part 2 arranged in the cartridge holder 1 and having a hole 10 opened at the side to/from which the cartridge member 7 is attached/detached, a back-end opening of the needle tube 6 being inserted and held in the hole 10, an ink tank 3 connected to the hole 10 of the connector part 2 by a supply tube 12 and storing ink filling the needle tube 6, and a fill adjusting part 4 introducing compressed air into the ink tank 3 and delivering the ink in the ink tank 3 by the air pressure to the hole 10 of the connector part 2 through the supply tube 12 by a predetermined amount, and is characterized in that a filling-amount reduction preventing means 5 is provided to prevent the reduction of the filling amount due to the ink descending under the ink's own weight after the needle tube 6 is filled with the ink. COPYRIGHT: (C)2009,JPO&INPIT

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