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1. 发明专利

JP2014032029A Scintillator and radiation detecting device using the same 有权
标题翻译：使用相同的扫描仪和辐射检测装置
公开(公告)号：JP2014032029A
公开(公告)日：2014-02-20
申请号：JP2012170928
申请日：2012-08-01
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： IMAMURA SHIN , NOBUKI SHUNICHIRO , OSHIMA TAKU , TSUCHIYA TOMONOBU
IPC分类号： G01T1/20 , A61B6/03 , C09K11/00 , C09K11/80 , C09K11/84 , G21K4/00
摘要： PROBLEM TO BE SOLVED: To provide a radiation detecting device having excellent characteristics which efficiently extracts light held in scintillators to increase light output of the scintillators.SOLUTION: A scintillator which emits light by radiation incidence comprises a layer of which refractive index is lower than the scintillator on a surface of light emission part of the scintillator, and the layer includes particles having predetermined particle diameters that are composed of material having the different refractive index from the layer. A radiation detecting device uses the scintillators having such structure.
摘要翻译：要解决的问题：提供一种具有优异特性的放射线检测装置，其有效地提取闪烁体中保持的光以增加闪烁体的光输出。解决方案：通过辐射入射发射光的闪烁体包括折射率低于闪烁体的发光部分的表面上的闪烁体，并且该层包括由具有与该层不同的折射率的材料构成的具有预定粒径的颗粒。辐射检测装置使用具有这种结构的闪烁体。

2. 发明专利

JP2005191017A Scanning electron microscope 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：JP2005191017A
公开(公告)日：2005-07-14
申请号：JP2005087469
申请日：2005-03-25
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： OSHIMA TAKU , TAKATO ATSUKO , HIRANUMA MASAYUKI , KANDA KIMIO , OTAKA TADASHI , IIIZUMI TAKASHI
IPC分类号： H01J37/20 , H01J37/22 , H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To enable high precision and high resolving power observation in a short time without expertise even toward an easily electrified testpiece by having a function to sense and report an electrification phenomenon causing precision deterioration or resolving power lowering and by simplifying a countermeasure against electrification.
SOLUTION: A scanning electron microscope senses the electrification phenomenon with a surface potential observing measure of an observed sphere of the testpiece or with a monitoring measure of the image change by that, and has a display measure of that effect. The countermeasure against electrification is actuated on the basis of the observed effect of the surface potential, the monitored effect of the image, or sorting items of those effects.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过具有感测和报告导致精度劣化或分解功率降低的通电现象的功能，能够在短时间内无需专门技术来实现高精度和高分辨率的观察，即使是易于带电的试样，电气化的对策。解决方案：扫描电子显微镜利用被测试物体的观察球体的表面电位观察测量值或通过图像变化的监视度量来感测通电现象，并具有该效果的显示度量。基于观察到的表面电位效应，图像的监视效果或者这些效果的排序项目来启动对抗电气的对策。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005071775A Absorption current image observation apparatus in electron microscope 有权
标题翻译：电子显微镜中的吸收电流图像观察装置
公开(公告)号：JP2005071775A
公开(公告)日：2005-03-17
申请号：JP2003299477
申请日：2003-08-25
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： OSHIMA TAKU , MAKINO HIROSHI , TOYAMA HIROSHI , SHINADA HIROYUKI
IPC分类号： G01N23/225 , G01Q30/02 , H01J37/04 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2605
摘要： PROBLEM TO BE SOLVED: To solve a problem wherein it is hard for conventional SEMs to take measurements at a high speed and take accurate measurements through an insulator because the conventional SEMs uses a continuous electron beam, and it is impossible to apply voltage to the sample during the measurement of current.
SOLUTION: In this absorption current image observation apparatus in an electron microscope, by pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, electrons absorbed in the sample can be detected at a high speed and with precision. Thereby, precise and high-speed absorption current measurements can be achieved. In addition, a high-functionality inspection apparatus can be provided.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了解决传统SEM难以高速进行测量并通过绝缘体进行精确测量的问题，因为常规SEM使用连续电子束，并且不可能施加电压在测量电流时对样品。解决方案：在该电子显微镜的吸收电流图像观察装置中，通过脉冲调制电子束并从样品中提取高频信号成分，能够以高速和精确。因此，可以实现精确和高速吸收电流测量。此外，可以提供高功能性的检查装置。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2010003450A Scanning electron microscope 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：JP2010003450A
公开(公告)日：2010-01-07
申请号：JP2008159251
申请日：2008-06-18
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TAKAHASHI TERUO , OSHIMA TAKU
IPC分类号： H01J37/28 , G01N23/203 , H01J37/073 , H01J37/244
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of performing a chirality distribution in a polymer structure of protein and an analysis of a magnetic domain structure at high resolution.
SOLUTION: Upon using a scanning electron microscope which is loaded with a spin-polarized electron source having a laser 201 and a semiconductor 202, a chirality structure and magnetized vector of polymer inside a testpiece 208 can be visualized by measuring intensity and the degree of spin-polarization of reflected electrons 209 from the testpiece 208 which is irradiated by a spin-polarized electron beam 203 by using a reflected electron detector 210.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够在蛋白质的聚合物结构中进行手性分布的扫描电子显微镜和高分辨率的磁畴结构的分析。解决方案：在使用装载有具有激光201和半导体202的自旋极化电子源的扫描电子显微镜的情况下，通过测量强度可以观察到在试件208内的聚合物的手性结构和磁化载体，通过使用反射电子检测器210由自旋极化电子束203照射的来自测试件208的反射电子209的自旋极化程度。（C）2010，JPO＆INPIT

5. 发明专利

JP2005347281A Circuit pattern inspection device 有权
标题翻译：电路图案检查装置
公开(公告)号：JP2005347281A
公开(公告)日：2005-12-15
申请号：JP2005237080
申请日：2005-08-18
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TAKATO ATSUKO , MURAKOSHI HISAYA , SHINADA HIROYUKI , OSHIMA TAKU , NOZOE MARI , TOYAMA HIROSHI , IWABUCHI HIROKO , IIZUKA MASAMI
IPC分类号： H01L21/66 , H01J37/05 , H01J37/147 , H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To conduct high-precision and rapid inspection of a semiconductor in a desired contrast by efficiently and rapidly detecting secondary electrons, reflected electrons or both of them generated from a substrate, in a method for inspecting a defect, a foreign substance, a residue and the like of the same design pattern of a semiconductor device by using an electron beam.
SOLUTION: A detector for detecting electrons generated from a surface of the substrate is composed of divided detection elements, desired control according to a sample state is executed to orbits of the electrons, and a calculation process of an obtained output signal of each element is carried out.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了通过有效和快速地检测从基板产生的二次电子，反射电子或它们二者在所需对比度中进行高精度和快速检查，在用于检查缺陷的方法中，通过使用电子束的半导体器件的相同设计图案的异物，残留物等。解决方案：用于检测从衬底的表面产生的电子的检测器由分割的检测元件组成，根据样品状态的期望控制被执行到电子的轨道，并且所获得的输出信号的计算处理元素被执行。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2008218063A Transmission electron microscope 有权
标题翻译：传输电子显微镜
公开(公告)号：JP2008218063A
公开(公告)日：2008-09-18
申请号：JP2007050921
申请日：2007-03-01
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TAKAHASHI TERUO , OSHIMA TAKU , MATSUMOTO TAKAO , NISHIDA YOICHI
IPC分类号： H01J37/26
CPC分类号： H01J37/266 , H01J37/265 , H01J2237/06383 , H01J2237/1514 , H01J2237/24557 , H01J2237/2588 , H01J2237/2614
摘要： PROBLEM TO BE SOLVED: To analyze chirality distribution and magnetic domain structure in a molecular structure of a protein and the like at a high resolution of 10 nm or less.
SOLUTION: Holography observation is conducted by using a transmission electron microscope mounting a spin polarization electron source. Phase of transmitting spin polarization electron is changed by a chirality structure in a specimen and existence of magnetization and it is observed as phase shift of an interference pattern in a holography measurement.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：待解决的问题：以10nm以下的高分辨率来分析蛋白质等的分子结构中的手性分布和磁畴结构。解决方案：使用安装自旋极化电子源的透射电子显微镜进行全息术观察。透射自旋极化电子的相位通过样品中的手性结构和磁化的存在而改变，并且在全息测量中被观察为干涉图案的相移。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2005108806A Small electron gun 有权
标题翻译：小电子枪
公开(公告)号：JP2005108806A
公开(公告)日：2005-04-21
申请号：JP2004111682
申请日：2004-04-06
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： KATAGIRI SOUICHI , OSHIMA TAKU
IPC分类号： H01J37/18 , H01J7/16 , H01J7/18 , H01J37/07 , H01J37/073 , H01J41/20
CPC分类号： H01J37/18 , H01J7/16 , H01J7/18 , H01J37/07 , H01J2237/022 , H01J2237/062 , H01J2237/06316 , H01J2237/1825 , H01J2237/188
摘要： PROBLEM TO BE SOLVED: To provide a small electron gun used for an electron microscope and an electron-beam drawing apparatus and capable of keeping a high vacuum pressure .
SOLUTION: An electron gun constituted by a non-evaporative getter pump, a heater, a filament, and an electron-source positioning mechanism, is provided with an opening for rough exhausting and its automatically opening/closing valve, and a means for ionizing and decomposing an inert gas or a compound gas for the non-evaporative getter pump. It is possible to keep a high vacuum pressure of 10
-10 Torr without requiring an ion pump while emitting electrons from the electron gun by using a small electron gun having a height and a width of approximately 15 cm.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于电子显微镜和电子束拉伸装置的小型电子枪，并且能够保持高真空压力。解决方案：由非蒸发吸气泵，加热器，灯丝和电子源定位机构构成的电子枪设置有用于粗排气的开口及其自动打开/关闭阀，以及装置用于非蒸发式吸气泵的电离和分解惰性气体或复合气体。通过使用高度和宽度约为15cm的小型电子枪，可以在不需要离子泵的情况下保持10 -10 Torr的高真空压力，同时从电子枪发射电子。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2002313273A ELECTRON MICROSCOPE 失效
公开(公告)号：JP2002313273A
公开(公告)日：2002-10-25
申请号：JP2001117607
申请日：2001-04-17
申请人： HITACHI LTD
发明人： OSHIMA TAKU , TODOKORO HIDEO , SHINADA HIROYUKI , FUKUHARA SATORU , NOZOE MARI
IPC分类号： H01J37/073 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To constitute an electron microscope that has a high resolution at a low acceleration voltage, without impressing large retarding or boosting voltage. SOLUTION: A photocathode having a good monochromaticity is used as an electron source.

9. 发明专利

JPH08339773A ELECTRON SOURCE AND ELECTRON BEAM DEVICE 失效
公开(公告)号：JPH08339773A
公开(公告)日：1996-12-24
申请号：JP14288795
申请日：1995-06-09
申请人： HITACHI LTD
发明人： KAWANAMI YOSHIMI , OSHIMA TAKU , HOSOKI SHIGEYUKI , HAYATA YASUNARI
IPC分类号： H01J37/073
摘要： PURPOSE: To radiate stably for a long time an electron beam of small energy dispersion. CONSTITUTION: By making a thin film electrode 2, given positive potential relating to a needle-shaped electrode 1 by a gap electrode 5, approach a tip end of the needle-shaped electrode 1 by a gap drive mechanism 3, an electron (conductive electron) in the inside of the needle-shaped electrode 1 is made tunneling to the thin film electrode 2, further to emit an electron 4, having specific energy of the electron, into vacuum from the thin film electrode 2. By only applying a potential difference of several volts between the needle- shaped electrode and the thin film electrode, emission of an electron from the needle-shaped electrode can be performed without receiving an influence of ion impact, and further by tunneling the emitted electron to the thin film electrode, an electron beam can be formed by only an electron having desired energy.

10. 发明专利

JPH08222163A SCHOTTKY ELECTRON SOURCE AND ITS STABILIZING METHOD 失效
公开(公告)号：JPH08222163A
公开(公告)日：1996-08-30
申请号：JP19830195
申请日：1995-08-03
申请人： HITACHI LTD
发明人： SHINADA HIROYUKI , KURODA KATSUHIRO , OSHIMA TAKU , FUKUHARA SATORU , KIMURA SHINGO
IPC分类号： H01J9/02 , H01J1/30 , H01J1/304 , H01J37/06 , H01J37/073
摘要： PURPOSE: To provide an electron source having an energy width in the prescribed range and capable of stably emitting electrons for a long period by setting the radius of curvature of the tip of the electron source to a specific size. CONSTITUTION: This Schottky electron source is adsorbed at the tip of a needle- like crystal of zirconium and oxygen W . The radius of curvature of the flat face at the tip of a high-melting point metal monocrystal wire 1 fitted to the tip of a filament 2 is set to 1.1-2.57μm at the intersection of the curve indicating the relation between the equilibrium field intensity that the surface diffusion and electrostatic force are balanced and the radius of curvature of the tip and the curve indicating the relation between the field intensity that the extracted electron energy width becomes 0.5eV and the radius of curvature. Even when the electric field capable of maintaining a facet is applied, electrons can be emitted at a narrow energy width, and stable and high-quality electrons can be emitted for a long period.

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