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    • 10. 发明公开
    • Cooling assembly with direct cooling of active electronic components
    • KühlvorrichtungmitDirektkühlungaktiver elektronischer Komponenten
    • EP1940213A2
    • 2008-07-02
    • EP08004223.7
    • 2002-12-23
    • FormFactor, Inc.
    • Miller, Charles A.
    • H05K7/20G01R31/28
    • G01R31/2875G01R1/06733G01R1/07385G01R31/2863G01R31/2877G01R31/2886G01R31/2891H05K7/20218
    • The invention relates to a probe card assembly (300) comprising spring probe elements (305); and a package (400) coupled to the probe elements (305), wherein the package includes at least one die (430a-c) with active electronic components, the die (430a-c) electrically connected to the package by a plurality of first compliant interconnects (432a-c), wherein each of the first compliant interconnects is a structural element that is structurally distinct from each of the probe elements (305), and at least one coolant port (442, 444) that allows a coolant to enter the package (400) and directly cool the active electronic components of each die (430a-c) during a testing operation. Therein the probe elements (305) are directly connected to the package (400).
    • 本发明涉及一种包括弹簧探针元件(305)的探针卡组件(300)。 以及耦合到所述探针元件(305)的封装(400),其中所述封装包括具有有源电子部件的至少一个管芯(430a-c),所述管芯(430a-c)通过多个第一 (432a-c),其中每个第一顺应性互连是在结构上与每个探针元件(305)不同的结构元件,以及允许冷却剂进入的至少一个冷却剂端口(442,444) 所述封装(400)并且在测试操作期间直接冷却每个管芯(430a-c)的有源电子部件。 其中探针元件(305)直接连接到包装(400)。