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    • 3. 发明公开
    • Device for testing semiconductor devices at a high temperature
    • Vorrichtung zumPrüfenvon Halbleitereinheiten bei einer hohen Temperatur。
    • EP0069592A1
    • 1983-01-12
    • EP82303546.4
    • 1982-07-06
    • FUJITSU LIMITED
    • Horiuchi, AkinoriBinnaka, ToshioMaruyama, Shigeyuki
    • G01R1/073G01R31/28
    • G01R31/2877G01R1/0458
    • A device for testing semiconductor devices (5) at high temperatures comprises a heating portion where the semiconductor device (5) to be tested is heated to a predetermined temperature; a testing station; a chuck (6) for holding the semiconductor device (5) and means for moving the chuck (6) to convey the semiconductor device (5) held by the chuck (6) to the testing station. The chuck (6) includes a heating means (2) for heating the semiconductor device (5) and a temperature sensor (3). The device also includes temperature control means for controlling the temperature of the heating means (2) in response to the output of the temperature sensor (3).
    • 用于在高温下测试半导体器件(5)的器件包括加热部分,其中待测试的半导体器件(5)被加热到预定温度; 一个测试站; 用于保持半导体器件(5)的卡盘(6)和用于移动卡盘(6)以将由卡盘(6)保持的半导体器件(5)传送到测试台的装置。 卡盘(6)包括用于加热半导体器件(5)和温度传感器(3)的加热装置(2)。 该装置还包括用于响应于温度传感器(3)的输出来控制加热装置(2)的温度的温度控制装置。
    • 4. 发明公开
    • METHOD OF CONTACTING INTEGRATED CIRCUIT COMPONENTS IN A TEST SYSTEM
    • 欧洲公民组织中的VERFAHREN ZUR KONTAKTIERUNG VON INTEGRIERTEN SCHALTKOMPONENTEN
    • EP3062117A1
    • 2016-08-31
    • EP16164874.6
    • 2013-06-14
    • Rasco GmbH
    • Croce, Karl
    • G01R31/28G01R31/319G01R1/04
    • G01R31/2881G01R1/0458G01R31/2862G01R31/2863G01R31/2874
    • The invention provides a method of contacting integrated circuit components in a test system for testing integrated circuit components comprises the steps of providing an atmosphere comprising an inert gas; and contacting tips of a contactor of the test system with respective contacting areas of an integrated circuit component to be tested, the contacting being performed in the provided atmosphere comprising the inert gas, characterized in that the inert gas has a temperature of at least 42°C; and a flow of the inert gas is directed and concentrated to the contact regions of the contact socket by means of nozzles provided in the contact socket. The invention further provides a test system for testing integrated circuit components
    • 本发明提供了一种接触用于测试集成电路部件的测试系统中的集成电路部件的方法,包括提供包括惰性气体的气氛的步骤; 以及将所述测试系统的接触器的尖端接触到待测试的集成电路部件的相应接触区域,所述接触在包括所述惰性气体的所提供的气氛中进行,其特征在于,所述惰性气体具有至少42°的温度 C; 并且通过设置在接触插座中的喷嘴将惰性气体流引导并集中到接触插座的接触区域。 本发明还提供了一种用于测试集成电路部件的测试系统
    • 6. 发明公开
    • CONDUCTIVE CONTACT HOLDER AND CONDUCTIVE CONTACT UNIT
    • 导电接触套和导电接触单元
    • EP2138852A1
    • 2009-12-30
    • EP08739875.6
    • 2008-04-04
    • NHK Spring Co., Ltd.
    • HIRONAKA, KoheiNAKAMURA, ToruKONDO, Mitsuhiro
    • G01R1/073G01R31/26
    • G01R1/0458G01R1/0466G01R1/0483G01R31/2874
    • Provided are a conductive contact holder and a conductive contact unit that enable a test to be performed in a precise temperature environment. For this objective, a construction includes a holder substrate (4) that individually receives plural conductive contacts, and a floating member (5) attached to the holder substrate (4) such that a distance from a surface of the holder substrate (4) is varied within a predetermined range by an external force. The floating member has plural hole sections into which a front end section of each of the conductive contacts (2) received in the holder substrate (4) is inserted. A gap (Sp) between the holder substrate (4) and the floating member (5) forms at least a part of a passage of fluid introduced from outside of the conductive contact holder.
    • 提供了一种能够在精确的温度环境下进行测试的导电触点支架和导电触点单元。 为此目的,一种结构包括一个单独容纳多个导电接点的支架基板(4)和一个安装在支架基板(4)上的浮动元件(5),使得与支架基板(4)表面的距离为 通过外力在预定范围内变化。 浮动构件具有多个孔部分,容纳在保持器基板(4)中的每个导电触点(2)的前端部插入该多个孔部分中。 保持基板(4)与浮动部件(5)之间的间隙(Sp)形成从导电性触头支架的外部导入的流体的流路的至少一部分。
    • 7. 发明公开
    • Test/burn in socket assembly
    • Einbrenn-Testfassungsanordnung
    • EP1271156A2
    • 2003-01-02
    • EP02077513.6
    • 2002-06-25
    • Xpeqt AG
    • Dreesen,RafCroes,Kristof
    • G01R1/04
    • G01R31/2863G01R1/0433G01R1/0458
    • Improved socket assembly structures that reduce the thermally induced stresses on socket assemblies by a novel combination of socket frame structures, materials and methods of connecting the ceramic slabs, that receive a packaged integrated circuit, with the frame structures, where the socket assembly includes an upper slab mounted on a frame structure and where the upper slab is connected with the frame structure along only one edge of the slab, thus allowing a relative movement between the slab and the frame structure at least in a direction generally perpendicular to the one edge, the slab having a plurality of pin holes to receive the leads of an electronic package. Furthermore, certain embodiments of the present invention provide a stiffener that is attached to the underside of the circuit board to help reduce the thermally induced deflection of the circuit board during elevated temperature testing.
    • 改进的插座组件结构,其通过插座框架结构,将陶瓷板(其接收封装的集成电路)与框架结构连接的陶瓷板的新颖组合的新颖组合来减少插座组件上的热诱导应力,其中插座组件包括上部 平板安装在框架结构上,并且上板与框架结构沿着板坯的一个边缘连接,从而允许板坯和框架结构之间的至少沿大致垂直于一个边缘的方向相对移动, 板具有多个针孔以接收电子封装的引线。 此外,本发明的某些实施例提供了一个加强件,其附接到电路板的下侧,以帮助在升高的温度测试期间减少电路板的热诱导偏转。
    • 8. 发明公开
    • Integrated circuit test fixture and method
    • Fixierung und Verfahren zum Test integrierter Schaltungen。
    • EP0465017A1
    • 1992-01-08
    • EP91305227.0
    • 1991-06-11
    • DIGITAL EQUIPMENT CORPORATION
    • Hamburgen, William Riis
    • G01R31/28
    • G01R1/0458G01R31/2877
    • A test fixture (10) for integrated circuits includes a wafer chuck (12). The chuck (12) has a plurality of concentrically arranged vacuum hold down rings (14) which communicate with top (18) of the chuck (12). Between the hold down rings (14) are a plurality of concentrically arranged helium gas supply rings (20), connected to a source of helium gas (22), and also communicating with top (18) of the chuck (12). An integrated circuit wafer (24) is mounted on the top (18) of the chuck (12), held in place by the vacuum hold down rings (14). Helium has a thermal conductivity five times that of air. Flow of helium gas in the helium supply rings (20) between the wafer (24) and the chuck (12) therefore reduces the interface thermal resistance between the wafer (24) and the chuck (12) as much as five times. A coolant supply tube (32) extends through the probe card (26), terminating proximate to the wafer (24), and is connected to a source of coolant (33), to assist the cooling.
    • 用于集成电路的测试夹具(10)包括晶片卡盘(12)。 卡盘(12)具有与卡盘(12)的顶部(18)连通的多个同心布置的真空压紧环(14)。 在所述压紧环(14)之间是多个同心配置的氦气供应环(20),其连接到氦气源(22),并且还与所述卡盘(12)的顶部(18)连通。 集成电路晶片(24)安装在卡盘(12)的顶部(18)上,通过真空压紧环(14)保持就位。 氦气的导热系数是空气的五倍。 因此,晶片(24)和卡盘(12)之间的氦气供给环(20)中的氦气的流动将晶片(24)和卡盘(12)之间的界面热阻降低了五倍。 冷却剂供给管(32)延伸穿过探针卡(26),接近晶片(24)终止,并且连接到冷却剂源(33),以帮助冷却。