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1. 发明授权

EP1384044B1 REDUCING COHERENT ARTIFACTS IN AN INTERFEROMETER 有权
公开(公告)号：EP1384044B1
公开(公告)日：2018-06-27
申请号：EP02719995.9
申请日：2002-03-21
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02 , G01J9/02
CPC分类号： G01B9/0201 , G01B9/02022 , G01B9/02034 , G01B9/02057 , G01B9/02069 , G01B9/02072 , G01B9/02082 , G01B9/02098 , G01B2290/15 , G01B2290/30 , G01J9/02
摘要： The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

2. 发明授权

EP1303736B1 SYSTEM AND METHOD FOR QUANTIFYING NONLINEARITIES IN INTERFEROMETRY SYSTEMS 有权
标题翻译：在干涉测量系统中量化非线性的系统和方法
公开(公告)号：EP1303736B1
公开(公告)日：2017-08-30
申请号：EP00993117.1
申请日：2000-11-17
申请人： ZYGO CORPORATION
发明人： HILL, Henry, A.
IPC分类号： G01B9/02
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02027 , G01B9/02045 , G01B9/02059 , G01B9/02084 , G01B2290/15 , G01B2290/45 , G01B2290/70 , G01N21/45 , G03F7/70775

3. 发明授权

EP2478328B1 METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE 有权
标题翻译：法测量形式的光学表面的
公开(公告)号：EP2478328B1
公开(公告)日：2016-07-27
申请号：EP09778606.5
申请日：2009-09-18
申请人： Carl Zeiss SMT GmbH
发明人： FREIMANN, Rolf , DÖRBAND, Bernd , SCHULTE, Stefan , HOF, Albrecht , RIEPENHAUSEN, Frank , MANGER, Matthias , NEUGEBAUER, Dietmar , ISSLER, Helmut , BICH, Armin
IPC分类号： G01B9/02 , G01B11/24 , G02B26/06 , G01M11/02 , G01M11/00 , G02B3/02 , G02B5/10
CPC分类号： G01B11/2441 , G01B9/02027 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B2290/15 , G01M11/005 , G01M11/025 , G01M11/0271 , G02B3/02 , G02B5/10

4. 发明公开

EP2112464A1 Tracking type laser interferometer 有权转让
标题翻译： Selbstnachführendes激光干涉仪
公开(公告)号：EP2112464A1
公开(公告)日：2009-10-28
申请号：EP09158412.8
申请日：2009-04-22
申请人： Mitutoyo Corporation
发明人： Yamagiwa, Takashi
IPC分类号： G01B9/02 , G01S3/786
CPC分类号： G01S17/58 , G01B2290/15 , G01S17/66
摘要： There is provided a tracking type laser interferometer in which a laser beam is irradiated to a retroreflector 10, or an object to be measured, from a laser interferometer 24 mounted on a carriage 22 arranged so as to rotate around a turning center which is fixed and placed, interference of the laser beam reflected in a returning direction by the retroreflector 10 is utilized to detect a displacement of the retroreflector 10 and a tracking deviation detected as positional change of an optical axis of the laser beam is used to carry out tracking, thereby controlling the rotation of the carriage 22, and the tracking type laser interferometer is provided with a servo mechanism having means for adding a tracking deviation ΔL f to a signal obtained by multiplying a relative angular displacement Θ a of the carriage 22 by a nominal value K mn of a conversion factor K m , thereby calculating an estimated value L c * of displacement of the retroreflector 10, means for multiplying the estimated value L c * of displacement of the retroreflector 10 by a compensation gain K f which is given as 0 f f of a target speed of the carriage 22, and means for adding a compensation signal V f to a signal obtained by multiplying the tracking deviation ΔL f by a gain K p of the tracking control system to generate a target speed V ar of the carriage 22, thereby increasing a tracking speed of the tracking type laser interferometer.
摘要翻译：提供了一种跟踪型激光干涉仪，其中激光束从安装在滑架22上的激光干涉仪24照射到后向反射器10或待测物体上，该激光干涉仪24被设置为围绕固定的转动中心旋转，利用后向反射器10在返回方向上反射的激光束的干涉来检测后向反射器10的位移，并且使用由激光束的光轴的位置变化检测到的跟踪偏差进行跟踪，由此控制滑架22的旋转，并且跟踪型激光干涉仪设置有伺服机构，该伺服机构具有用于将跟踪偏差“L f添加到通过将滑架22的相对角位移-a乘以标称值而获得的信号的装置 K mn，从而计算后向反射器10的位移的估计值L c *，将估计值乘以的装置后向反射器10的位移的校正值L c *通过给定为0

5. 发明公开

EP2103898A1 Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer 有权
标题翻译：一种用于估计selbstnachführendenLaserinteferometer和目标，和激光干涉仪selbstnachführendes之间的距离的方法
公开(公告)号：EP2103898A1
公开(公告)日：2009-09-23
申请号：EP09002782.2
申请日：2009-02-26
申请人： Mitutoyo Corporation
发明人： Hara, Shinichi
IPC分类号： G01B9/02 , G01B11/00
CPC分类号： G01B11/002 , G01B9/02083 , G01B2290/15
摘要： In the tracking type laser interferometer including: a laser interferometer(101); an optical axis deviation detection sensor(102) for detecting a deviation of an optical axis of the laser interferometer; a two-axis turning mechanism (104) for turning the laser interferometer to any optional direction; an angle sensor 105 for detecting a turning angle of the two-axis turning mechanism; a retroreflector(107) for reflecting its reflected light to a direction parallel to the incident light; and a controller(108) for driving the two-axis turning mechanism so as to track the retroreflector based on signals of the optical axis deviation detection sensor and the angle sensor, stop of the retroreflector is detected, and a target distance is calculated from the turning center of the laser interferometer to the center of the retroreflector based on the total sum of deviation of an optical axis during movement, which is obtained by the optical axis deviation detection sensor, and a turning angle during movement, which is obtained by the angle sensor.
摘要翻译：在跟踪型激光干涉仪，包括：激光干涉仪（101）; 到光轴偏移检测传感器（102），用于检测所述激光干涉仪的光轴的偏差; 用于使激光干涉仪到任何任选的方向的两轴旋转机构（104）; 为了检测两轴转动机构的转动角度的角度传感器105的; 用于反射其反射光，以平行于入射光的方向上后向反射器（107）; 和用于驱动两轴转动机构，以便跟踪根据光轴偏移检测传感器和角度传感器的信号后向反射器，停止后向反射器的控制器（108）被检测，并且目标距离从计算转动激光干涉仪的中心到基于光学轴线的偏差的运动期间的总和后向反射器的中心，所有这是由光轴偏移检测传感器获得的，并且移动时的转向角，所有这是由角获得传感器。

6. 发明公开

EP1303736A4 SYSTEMS AND METHODS FOR QUANTIFYING NONLINEARITIES IN INTERFEROMETRY SYSTEMS 有权
标题翻译：西班牙语系统中的系统维多利亚电力公司
公开(公告)号：EP1303736A4
公开(公告)日：2006-10-04
申请号：EP00993117
申请日：2000-11-17
申请人： ZYGO CORP
发明人： HILL HENRY A
IPC分类号： G01B9/02 , G01J9/02 , G01J9/04 , G01N21/45 , G03F7/20 , H01L21/027
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02027 , G01B9/02045 , G01B9/02059 , G01B9/02084 , G01B2290/15 , G01B2290/45 , G01B2290/70 , G01N21/45 , G03F7/70775
摘要： The invention features interference signals for each of multiple Doppler shifts to thereby resolve nonlinearities, e.g., cyclic errors (90, 91, 92, 95), that may otherwise overlap spectrally with a dominant interference signal, and also interpolates the contributions of the nonlinearities to measurements at different doppler shifts. The time varying interference signal or the phase extracted from interference signal is Fourier transformed and at least some of the nonlinearities are associated with peaks in the square modulus of the Fourier transformed signal. The amplitude and phase of the Fourier transform at the frequency of each peak are used to quantify the nonlinearities. The quantified nonlinearities are used to correct optical pathlength measurements by the system.
摘要翻译：本发明的特征在于干涉测量系统和方法，其量化由干涉测量系统产生的干扰信号中的非线性，例如循环误差。系统和方法分析多个多普勒频移中的每一个的干扰信号，从而解析否则可能与主要干扰信号频谱重叠的非线性，以及将非线性的贡献内插到不同多普勒频移处的测量。由时变干扰信号提取的时变干扰信号或相位被傅里叶变换，并且至少一些非线性与傅立叶变换信号的平方（即功率谱）的峰值相关。在每个这样的峰值的频率处的傅里叶变换的幅度和相位用于量化相关联的非线性。量化的非线性被用于校正系统的光程长度测量。一个或多个量化非线性的大小的变化也可以用于识别干涉测量系统的分量的劣化。

7. 发明公开

EP1192411A4 MONOLITHIC OPTICAL ASSEMBLY 有权
标题翻译：单片光学组件
公开(公告)号：EP1192411A4
公开(公告)日：2006-05-31
申请号：EP00923200
申请日：2000-04-11
申请人： PLX INC
发明人： BLEIER ZVI , VISHNA ITAI
IPC分类号： G01B9/02 , G01B11/00 , G01J3/45 , G01J3/453 , G02B5/122 , G02B7/00 , G02B27/14
CPC分类号： G01B9/02051 , G01B9/02056 , G01B9/0209 , G01B2290/15 , G01J3/453 , G02B5/122 , G02B27/14
摘要： In accordance with the invention, an improved optical assembly (200) having a monolithic structure is provided. The monolithic optical assembly (200) is useful in interferometers to achieve a fringe effect in a Fourier transform spectrometer, and comprises top (260) and bottom members (270) which are joined into a monolithic structure by first (210) and second support members (220) and a beamsplitter (130). The assembly also comprising a first reflecting assembly (140) in reflecting relation with the beamsplitter (130). An alternate embodiment of the invention has an added reflecting assembly (150) in reflecting relation with the first reflecting assembly (140) and the beamsplitter assembly (130), which allows for the use of multiple wavelength light sources to achieve a fringe effect in a Fourier transform spectrometer.

8. 发明公开

EP1384044A1 REDUCING COHERENT ARTIFACTS IN AN INTERFEROMETER 有权
标题翻译：相干文物IN A干涉还原
公开(公告)号：EP1384044A1
公开(公告)日：2004-01-28
申请号：EP02719995.9
申请日：2002-03-21
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02
CPC分类号： G01B9/0201 , G01B9/02022 , G01B9/02034 , G01B9/02057 , G01B9/02069 , G01B9/02072 , G01B9/02082 , G01B9/02098 , G01B2290/15 , G01B2290/30 , G01J9/02
摘要： The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

9. 发明授权

EP0657713B1 Combined interferometer and refractometer 失效
$Combined interferometer and refractometer$
标题翻译：结合干涉仪和折射
公开(公告)号：EP0657713B1
公开(公告)日：2001-03-07
申请号：EP94308719.7
申请日：1994-11-25
申请人： Renishaw plc
发明人： McMurtry, David Roberts
IPC分类号： G01B9/02
CPC分类号： G01B9/02027 , G01B9/02019 , G01B9/0207 , G01B2290/15 , G01B2290/45 , G01B2290/70

10. 发明公开

EP0047237A1 COORDINATE LOCATING DEVICE 失效
标题翻译：一种用于确定坐标。
公开(公告)号：EP0047237A1
公开(公告)日：1982-03-17
申请号：EP80900893.0
申请日：1980-04-07
申请人： CATERPILLAR TRACTOR CO.
发明人： COLEMAN, Harold K. , ROSSMAN, Kenneth F.
IPC分类号： G01B9 , G01B11
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02021 , G01B9/02027 , G01B11/005 , G01B2290/15 , G01B2290/45 , G01B2290/70 , Y10S33/04
摘要： Un dispositif de determination de coordonnees (8) comprend un appareil (10) ayant un premier, un second et un troisieme organes (21, 22, 23), le premier organe (21) etant mobile sur une base (14), le second organe (22) etant mobile sur le premier organe (21) et le troisieme organe (23) ayant un element positionnable (30) et etant mobile sur le second organe (22). Le dispositif (8) comprend egalement un systeme transducteur a laser (16) pour etablir les positions d'un point de depart (52) et un premier plan (54) passant par le point de depart (52) qui est associe au premier organe (21), un second plan (58) ayant un second point de reference (59) qui est associe au second organe (22), et un troisieme plan (62) ayant un troisieme point de reference (63) qui est associe au troisieme organe (23), et pour etablir la position precise tridimentionnelle de l'element positionnable (30). De preference, une pluralite de reflecteurs de rayons laser sont disposes suivant une configuration predeterminee sur chacun des premier, second et troisieme elements (21, 22, 23) pour reflechir une pluralite de rayons laser correspondants et les renvoyer vers les elements associes montes sur la base, les premier et second elements (14, 21, 22) respectivement, de sorte que les mouvements de lacet, de tangage et de roulis puissent etre mesures en plus du deplacement lineaire simple X, Y et Z entre les diverses etapes de deplacement.

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