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1. 发明授权

EP1397640B1 SCANNING INTERFEROMETER FOR ASPHERIC SURFACES AND WAVEFRONTS 有权
标题翻译：扫描非平稳表面和波形的干涉仪
公开(公告)号：EP1397640B1
公开(公告)日：2017-11-01
申请号：EP02751014.8
申请日：2002-06-12
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02 , G01B11/24 , G01M11/02
CPC分类号： G01M11/0271 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B11/2441 , G01B2290/65 , G01M11/025

2. 发明公开

EP1405030A1 SCANNING INTERFEROMETER FOR ASPHERIC SURFACES AND WAVEFRONTS 有权
标题翻译：网格干涉非球面表面和波前
公开(公告)号：EP1405030A1
公开(公告)日：2004-04-07
申请号：EP02762317.2
申请日：2002-07-03
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02 , G01B11/24 , G01M11/02
CPC分类号： G01M11/025 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B11/2441 , G01B11/255 , G01B2290/65 , G01M11/0271
摘要： Interferometric scanning methods for measuring test optics having spherical or mildly aspherical surfaces use a partial spherical wavefront generated from a known origin along a scanning axis by use of a spherical reference surface along the axis upstream of the origin. A test optic is aligned with and moved along the axis so the spherical wavefront intersects the test optic at the aspherical surface's apex and at radial positions where the spherical wavefront and the aspheric surface intersect at points of common tangency, generating interferograms containing phase information about differences in optical path between center and radial positions. The interferogram is imaged, providing a signal carrying the phase information. The axial distance, v, by which the test optic is moved, is measured and the optical path length differences calculated. The coordinates, z and h, of the aspherical surface are calculated at the radial positions in correspondence with the interferometrically measured distance v and calculated path lengths, and the aspheric surface shape determined.

3. 发明公开

EP1397640A1 SCANNING INTERFEROMETER FOR ASPHERIC SURFACES AND WAVEFRONTS 有权
标题翻译： ABTASTINTERFEROMETERFÜRASPHERISCHEOBERFLÄCHENUND WELLENFRONTEN
公开(公告)号：EP1397640A1
公开(公告)日：2004-03-17
申请号：EP02751014.8
申请日：2002-06-12
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B11/24 , G01B9/02 , G01M11/00
CPC分类号： G01M11/0271 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B11/2441 , G01B2290/65 , G01M11/025
摘要： Interferometric scanning method(s) and apparatus for measuring rotationally and non-rotationally symmetric test optics either having aspherical surfaces or that produce aspherical wavefronts by comparing known and unknown spherical and aspherical shapes. The test optic is aligned with respect the scanning axis and selectively moved along it relative to the known origin so that the spherical shape intersects the test optic at the apex of the aspherical shape and at radial positions where the spherical shape and the aspheric shape intersect at points of common tangency. An axial distance, ν, and optical path length, p, are interferometrically measured as the test optic is axially scanned by the spherical shape where ν is the distance by which the test optic is moved with respect to the origin and p is the optical path length difference between the apex of an aspherical shape associated with the test optic and the apex of the circles of curvature that intersect the aspherical shape at the common points of tangency. Coordinates of the aspherical surface are calculated wherever the circles of curvature have intersected the aspherical shape and in correspondence with the interferometrically measured distances, ν and p.
摘要翻译：用于测量旋转和非旋转对称测试光学器件的干涉扫描方法和装置，其具有非球面或通过比较已知和未知的球形和非球面形状来产生非球面波前。优选地，球面或部分球面波前或反射表面相对于沿着扫描轴的已知原点被限定。测试光学器件相对于扫描轴线对准并且相对于已知原点沿着它选择性地移动，使得球形与非球面形状的顶点处的测试光学器件相交，并且在球形和非球面形状的半径位置处共同切线点。当测试光学器件被球形轴向扫描时，轴向距离v和光程长度p被干涉测量，其中v是测试光学器件相对于原点移动的距离，p是光路与测试光学元件相关联的非球面形状的顶点与在公共相切点处与非球面形状相交的曲率圆顶点之间的长度差。计算非球面坐标，只要曲率圆与非球面形状相交，并与干涉测量距离v和p相对应。之后，计算非球面形状。在测试光学元件包括折射光学元件的情况下，已知的球面反射表面设置在折射光学器件的上游，用于沿着光轴移动，并且已知的波前被制成转移折射光学元件，从已知球面反射，再次将折射光学器件朝向已知的原点移动，之后形成干涉图。

4. 发明授权

EP1384044B1 REDUCING COHERENT ARTIFACTS IN AN INTERFEROMETER 有权
公开(公告)号：EP1384044B1
公开(公告)日：2018-06-27
申请号：EP02719995.9
申请日：2002-03-21
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02 , G01J9/02
CPC分类号： G01B9/0201 , G01B9/02022 , G01B9/02034 , G01B9/02057 , G01B9/02069 , G01B9/02072 , G01B9/02082 , G01B9/02098 , G01B2290/15 , G01B2290/30 , G01J9/02
摘要： The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

5. 发明授权

EP1405030B1 SCANNING INTERFEROMETER FOR ASPHERIC SURFACES AND WAVEFRONTS 有权
标题翻译：网格干涉非球面表面和波前
公开(公告)号：EP1405030B1
公开(公告)日：2010-05-05
申请号：EP02762317.2
申请日：2002-07-03
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02 , G01B11/24 , G01M11/02
CPC分类号： G01M11/025 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B11/2441 , G01B11/255 , G01B2290/65 , G01M11/0271
摘要： Interferometric scanning methods for measuring test optics having spherical or mildly aspherical surfaces use a partial spherical wavefront generated from a known origin along a scanning axis by use of a spherical reference surface along the axis upstream of the origin. A test optic is aligned with and moved along the axis so the spherical wavefront intersects the test optic at the aspherical surface's apex and at radial positions where the spherical wavefront and the aspheric surface intersect at points of common tangency, generating interferograms containing phase information about differences in optical path between center and radial positions. The interferogram is imaged, providing a signal carrying the phase information. The axial distance, v, by which the test optic is moved, is measured and the optical path length differences calculated. The coordinates, z and h, of the aspherical surface are calculated at the radial positions in correspondence with the interferometrically measured distance v and calculated path lengths, and the aspheric surface shape determined.

6. 发明公开

EP1384044A1 REDUCING COHERENT ARTIFACTS IN AN INTERFEROMETER 有权
标题翻译：相干文物IN A干涉还原
公开(公告)号：EP1384044A1
公开(公告)日：2004-01-28
申请号：EP02719995.9
申请日：2002-03-21
申请人： Kuechel, Michael
发明人： Kuechel, Michael
IPC分类号： G01B9/02
CPC分类号： G01B9/0201 , G01B9/02022 , G01B9/02034 , G01B9/02057 , G01B9/02069 , G01B9/02072 , G01B9/02082 , G01B9/02098 , G01B2290/15 , G01B2290/30 , G01J9/02
摘要： The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

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