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    • 10. 发明公开
    • Optical heterodyne interferometer for shape measurement
    • Optische Bildmessvorrichtung
    • EP1577637A1
    • 2005-09-21
    • EP05005271.1
    • 2005-03-10
    • Kabushiki Kaisha TOPCON
    • Chan, KinpuiAkiba, MasahiroFukuma, Yasufumi Kabushiki Kaisha TOPCONOtsuka, Hiroyuki Kabushiki Kaisha TOPCONTsukada, Hisashi Kabushiki Kaisha TOPCON
    • G01B11/24G01B9/02G01J9/04
    • G01B9/02007G01B9/02003G01B9/02041G01B9/02069G01B2290/45G01J2009/0234
    • An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.
    • 提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。 光学图像测量装置包括:光学干涉系统,其中来自光源的光束被分束器分成信号光和参考光,参考光的频率被移频器偏移,并且信号光 通过被测量物体传播并且通过分束器将反射在反射镜上的参考光相互叠加以产生干涉光; 分束器,用于将干涉光分成干涉光束; 用作强度调制单元的快门,用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分,用作计算单元,用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。