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1. 发明公开

EP2103898A1 Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer 有权
标题翻译：一种用于估计selbstnachführendenLaserinteferometer和目标，和激光干涉仪selbstnachführendes之间的距离的方法
公开(公告)号：EP2103898A1
公开(公告)日：2009-09-23
申请号：EP09002782.2
申请日：2009-02-26
申请人： Mitutoyo Corporation
发明人： Hara, Shinichi
IPC分类号： G01B9/02 , G01B11/00
CPC分类号： G01B11/002 , G01B9/02083 , G01B2290/15
摘要： In the tracking type laser interferometer including: a laser interferometer(101); an optical axis deviation detection sensor(102) for detecting a deviation of an optical axis of the laser interferometer; a two-axis turning mechanism (104) for turning the laser interferometer to any optional direction; an angle sensor 105 for detecting a turning angle of the two-axis turning mechanism; a retroreflector(107) for reflecting its reflected light to a direction parallel to the incident light; and a controller(108) for driving the two-axis turning mechanism so as to track the retroreflector based on signals of the optical axis deviation detection sensor and the angle sensor, stop of the retroreflector is detected, and a target distance is calculated from the turning center of the laser interferometer to the center of the retroreflector based on the total sum of deviation of an optical axis during movement, which is obtained by the optical axis deviation detection sensor, and a turning angle during movement, which is obtained by the angle sensor.
摘要翻译：在跟踪型激光干涉仪，包括：激光干涉仪（101）; 到光轴偏移检测传感器（102），用于检测所述激光干涉仪的光轴的偏差; 用于使激光干涉仪到任何任选的方向的两轴旋转机构（104）; 为了检测两轴转动机构的转动角度的角度传感器105的; 用于反射其反射光，以平行于入射光的方向上后向反射器（107）; 和用于驱动两轴转动机构，以便跟踪根据光轴偏移检测传感器和角度传感器的信号后向反射器，停止后向反射器的控制器（108）被检测，并且目标距离从计算转动激光干涉仪的中心到基于光学轴线的偏差的运动期间的总和后向反射器的中心，所有这是由光轴偏移检测传感器获得的，并且移动时的转向角，所有这是由角获得传感器。

2. 发明授权

EP2103898B1 Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer 有权
标题翻译：一种用于估计selbstnachführendenLaserinteferometer和目标，和激光干涉仪selbstnachführendes之间的距离的方法
公开(公告)号：EP2103898B1
公开(公告)日：2013-08-21
申请号：EP09002782.2
申请日：2009-02-26
申请人： Mitutoyo Corporation
发明人： Hara, Shinichi
IPC分类号： G01B9/02 , G01B11/00
CPC分类号： G01B11/002 , G01B9/02083 , G01B2290/15

3. 发明授权

EP1750085B1 Laser tracking interferometer 有权
标题翻译：装置，用于追踪激光干涉仪
公开(公告)号：EP1750085B1
公开(公告)日：2013-07-31
申请号：EP06013532.4
申请日：2006-06-29
申请人： Mitutoyo Corporation
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02 , G01B11/03 , G01S17/66 , G01S7/481 , G01S7/497 , G01S17/36 , G01S17/42
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66

4. 发明公开

EP1750085A3 Laser tracking interferometer 有权
标题翻译：装置，用于追踪激光干涉仪
公开(公告)号：EP1750085A3
公开(公告)日：2012-04-18
申请号：EP06013532.4
申请日：2006-06-29
申请人： Mitutoyo Corporation
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02 , G01B11/03 , G01S17/66
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
摘要： A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.

5. 发明公开

EP1857772A1 Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer 有权
标题翻译：一种用于从selbstnachführendem激光干涉仪和激光干涉仪selbstnachführendes估计的绝对距离的方法
公开(公告)号：EP1857772A1
公开(公告)日：2007-11-21
申请号：EP07009632.6
申请日：2007-05-14
申请人： MITUTOYO CORPORATION
发明人： Hara, Shinichi , Taketomi, Naoyuki , Abbe, Makoto
IPC分类号： G01B9/02
CPC分类号： G01S17/74 , G01S17/42 , G01S17/66
摘要： To provide a method for estimating an absolute distance L between a tracking laser interferometer and a retroreflector 70, the tracking laser interferometer including; the retroreflector 70 for reflecting and returning incident measurement light A in an incident direction; and a two-axis rotating mechanism 40 for rotationally moving in an exit direction of the measurement light A so that optical axes of the measurement light A and return light B are collimated, which outputs a measurement value according to an increase or decrease in the distance between the interferometer and the retroreflector 70, wherein the absolute distance L between the interferometer and the retroreflector 70 is estimated by performing arithmetic operation based on an angular position variation θ 2 of the two-axis rotating mechanism 40 when a deviation amount d of the return light B from the retroreflector 70 relative to a predetermined position is given as a predetermined value d 2 . This enables an appropriate increase or decrease of the control amount of a tracking control according to a distance between the interferometer and the retroreflector without forcing an operator to perform a troublesome origin return operation and adding an expensive absolute distance sensor.
摘要翻译：一种用于跟踪激光干涉仪和后向反射器70，跟踪激光干涉仪包括估计之间的绝对距离L提供的方法; 用于反射和在入射方向在返回入射测量光甲后向反射器70; 和两轴旋转机构40旋转移动到离开测量光A的方向上所做的测量光A的光轴和返回光B被准直，这在距离输出测量值雅丁到增加或减少干涉仪和后向反射器70，worin干涉仪和所述后向反射器70之间的绝对距离L之间通过在角位置变化基于执行算术运算估计¸2的两轴旋转机构40的当返回的偏差量d 从后向反射器70相对于预定位置B的光被给定为一定值D第二这使得能够增加或减小的跟踪控制gemäß到干涉仪和后向反射器之间的距离的量的适当的控制，而不强迫操作者进行繁琐的原点返回操作和添加试验绝对距离传感器。

6. 发明授权

EP1857772B1 Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometer 有权
标题翻译：一种用于从selbstnachführendem激光干涉仪和激光干涉仪selbstnachführendes估计的绝对距离的方法
公开(公告)号：EP1857772B1
公开(公告)日：2013-10-09
申请号：EP07009632.6
申请日：2007-05-14
申请人： Mitutoyo Corporation
发明人： Hara, Shinichi , Taketomi, Naoyuki , Abbe, Makoto
IPC分类号： G01B9/02 , G01S17/42 , G01S17/66 , G01S17/74
CPC分类号： G01S17/74 , G01S17/42 , G01S17/66

7. 发明公开

EP1750085A2 Laser tracking interferometer 有权
标题翻译： Einrichtung zumNachführeneines Laserstrahl-Interferometers
公开(公告)号：EP1750085A2
公开(公告)日：2007-02-07
申请号：EP06013532.4
申请日：2006-06-29
申请人： MITUTOYO CORPORATION
发明人： Yanaka, Shinichirou , Abe, Makoto , Hara, Shinichi , Taketomi, Naoyuki
IPC分类号： G01B9/02
CPC分类号： G01S17/36 , G01B11/03 , G01S7/4812 , G01S7/497 , G01S17/42 , G01S17/66
摘要： A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.
摘要翻译：激光跟踪干涉仪将激光束引导到用作被测量对象的后向反射器，以使用与从后向反射器反射的反射的激光束的干涉来感测回射器的位移，以及使用位于所述后向反射器激光束的光轴。激光跟踪干涉仪包括：设置在固定位置处的参考球; 托架，被构造成围绕参考球的中心旋转; 用于提供对应于后向反射器的位移的位移信号的激光干涉仪，以及用于提供对应于参考球和位移计之间的相对位移的位移信号的位移计，激光干涉仪和位移计设置在运输; 数据处理装置，用于根据由位移计提供的位移信号和由激光干涉仪提供的位移信号计算回射器相对于参考球的位移; 位置敏感检测器，用于当激光束从后向反射器反射回激光干涉仪并在与其光轴正交的方向上偏离时，提供与激光束的偏离量相对应的位置信号; 以及控制器，用于基于来自位置检测器的位置信号来控制滑架的旋转，使得偏差量变为零。这使得激光跟踪干涉仪对于旋转机构的跳动是坚固的。激光跟踪干涉仪对参考球体表面的瑕疵和灰尘颗粒较不敏感，并且能够采用相对便宜的参比球。

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