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1. 发明公开

EP0111640A3 Pressure sensor with semi-conductor diaphragm 失效
标题翻译：带半导体膜片的压力传感器
公开(公告)号：EP0111640A3
公开(公告)日：1985-05-15
申请号：EP83109254
申请日：1983-09-19
申请人： HITACHI, LTD. , HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shimada, Satoshi , Murayama, Ken , Kobori, Shigeyuki , Kawakami, Kanji
IPC分类号： G01L09/06
CPC分类号： G01L9/0054 , G01L19/147 , Y10S73/04
摘要： Provided is a pressure sensor of semiconductor type. having a semiconductor diaphragm (41), wherein the diaphragm comprises at least one of thin wall parts (43) and at least one of thick wall parts (44), and defines therein recesses (42) formed in the lower surface of the diaphragm below the thin wall parts, piezoresistance elements (47, 48) are laid on the upper surface of the diaphragm near or in the thin wall parts, and a supporting member (45) is sealingly jointed to the thick wall parts (44) at the lower surface of the diaphragm, thereby the recesses (42) are sealed and confined so as to prevent high pressure fluid from blowing off when the thin wall part (43) is broken.

2. 发明授权

EP0843175B1 Scanning probe microscope and signal processing apparatus 失效
标题翻译：扫描探针显微镜和信号处理装置
公开(公告)号：EP0843175B1
公开(公告)日：2004-09-15
申请号：EP97203486.2
申请日：1997-11-10
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Morimoto, Takafumi , Murayama, Ken , Husaka, Sumio
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/06 , G01Q20/02 , G01Q30/06 , G01Q60/38 , Y10S977/851 , Y10S977/852

3. 发明公开

EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit 有权
标题翻译：用于定位样品和扫描探针显微镜以这样的表表单元
公开(公告)号：EP0908719A1
公开(公告)日：1999-04-14
申请号：EP98203380.5
申请日：1998-10-06
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/02 , Y10S977/872
摘要： A stage unit used for moving a sample comprises a vertical stage (30) for moving a sample stand (13) in a vertical direction, a horizontal stage (10,20) for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table (11) and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs (36) having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.
摘要翻译：用于移动一个样品A级单元包括垂直级（30），用于在垂直方向上移动样品台上（13），用于在水平方向上移动的垂直阶段的水平阶段（10,20）。在阶段单元中，水平阶段被固定在表面表（11）和垂直级的水平滑动表面可滑动地布置在滑动面上。垂直级耦接与由板簧的装置具有在垂直方向上在水平方向上较强的刚性和弱刚性水平阶段（36）。仅由垂直级的级单元的整个刚性确定性所开采和不受所述部分的刚性的效果包括在水平阶段和驱动部的刚性，以各轴方向。台单元的刚性可以提高。仅由垂直阶段的刚性的台架单元的停顿刚性确定性开采。台单元的所有阶段都不会堆积，因此载物台部的高度可以降低尽可能低。

4. 发明公开

EP0264147A2 Fine positioning device and displacement controller therefor 失效
标题翻译： Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen。
公开(公告)号：EP0264147A2
公开(公告)日：1988-04-20
申请号：EP87201701.7
申请日：1987-09-08
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Nagasawa, Kiyoshi , Ono, Kozo , Ogata, Kojiro , Murayama, Ken , Hoshino, Yoshihiro
IPC分类号： B23Q1/14 , G12B1/00
CPC分类号： B23Q1/36 , B23Q15/24 , B82Y35/00 , G05B19/23 , G05B2219/41133 , G05B2219/41352 , H02N2/0095 , H02N2/028 , H02N2/062 , H02N2/108
摘要： A fine positioning device is formed of a central rigid portion (15), a first set of outwardly-extending portions (16a,16b) extending symmetrically along a first axis from the central rigid portion (15), a second set of outwardly-extending portions (17a,17b) extending symmetrically from the central rigid portion (15) along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms (16F xa ,16F xb ) provided symmetrically to each other with the first set of outwardly-extending portions (16a,16b) respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms (17F ya ,17F yb ) provided symmetrically to each other with the second set of outwardly-extending portions (17a,17b) respectively to produce translational displacements along the first axis. A displacement controller for the fine positioning device is also disclosed.
摘要翻译：精细定位装置由中心刚性部分（15）形成，第一组向外延伸的部分（16a，16b）沿着第一轴线从中心刚性部分（15）对称延伸，第二组向外延伸部分沿着与第一轴垂直的第二轴对称地从中心刚性部分（15）延伸的部分（17a，17b），第一组平行的柔性梁移动机构（16Fxa，16Fxb），彼此对称设置，第一组向外延伸部分（16a，16b）分别沿着第二轴线产生平移位移，以及第二组平行的柔性梁移动机构（17Fya，17Fyb），彼此对称设置有第二组向外延伸部分分别延伸部分（17a，17b）以产生沿着第一轴线的平移位移。还公开了一种用于精细定位装置的位移控制器。

5. 发明授权

EP0913665B1 Scanning probe microscope with fine movement mechanism 有权
标题翻译：扫描探针显微镜以精细调节装置
公开(公告)号：EP0913665B1
公开(公告)日：2004-09-22
申请号：EP98203672.5
申请日：1998-10-30
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/04 , Y10S977/87

6. 发明公开

EP0843175A1 Scanning probe microscope and signal processing apparatus 失效
标题翻译： Rastersondenmikroskop undSignalverarbeitungsgerät
公开(公告)号：EP0843175A1
公开(公告)日：1998-05-20
申请号：EP97203486.2
申请日：1997-11-10
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Morimoto, Takafumi , Murayama, Ken , Husaka, Sumio
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/06 , G01Q20/02 , G01Q30/06 , G01Q60/38 , Y10S977/851 , Y10S977/852
摘要： This scanning probe microscope can accurately obtain information on surfaces of a sample when measuring the sample in a broad range from a slow scanning speed to 1 to a fast scanning speed. The scanning probe microscope comprises a cantilever (16) with a probe (15) at its tip, an optical lever mechanism (17,18) for measuring displacement of the cantilever (16), a mechanism for approaching/separating the cantilever against the sample, XY scanning circuit (21), and further comprises a Z axis piezoelectric element (14b) of a tripod for changing the distance between the cantilever and the sample, a control circuit (20) for controlling the distance between the cantilever and the sample to cause a displacement signal s1 obtained from the optical lever mechanism to be identical to a set value s0, and an adder (24) for adding a control signal from the control circuit and a signal based on the deviation between the displacement signal and the set value. The information on the sample surface is obtained from a signal outputted from the adder.
摘要翻译：当从慢扫描速度到1到快速扫描速度的宽范围内测量样品时，该扫描探针显微镜可以准确地获得样品表面的信息。扫描探针显微镜包括在其尖端处具有探针（15）的悬臂（16），用于测量悬臂（16）的位移的光学杆机构（17,18），用于将悬臂与样品接近/分离的机构，XY扫描电路（21），并且还包括用于改变悬臂与样品之间的距离的三脚架的Z轴压电元件（14b），用于控制悬臂与样品之间的距离的控制电路（20）使得从光学杠杆机构获得的位移信号s1与设定值s0相同，以及用于将来自控制电路的控制信号和基于位移信号与设定值之间的偏差的信号相加的加法器（24）。样本表面上的信息是从加法器输出的信号获得的。

7. 发明授权

EP0111640B1 Pressure sensor with semi-conductor diaphragm 失效
标题翻译：带半导体膜片的压力传感器
公开(公告)号：EP0111640B1
公开(公告)日：1988-06-01
申请号：EP83109254.9
申请日：1983-09-19
申请人： HITACHI, LTD. , HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shimada, Satoshi , Murayama, Ken , Kobori, Shigeyuki , Kawakami, Kanji
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L19/147 , Y10S73/04

8. 发明公开

EP0111640A2 Pressure sensor with semi-conductor diaphragm 失效
标题翻译：压力传感器与半导体膜。
公开(公告)号：EP0111640A2
公开(公告)日：1984-06-27
申请号：EP83109254.9
申请日：1983-09-19
申请人： HITACHI, LTD. , HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shimada, Satoshi , Murayama, Ken , Kobori, Shigeyuki , Kawakami, Kanji
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L19/147 , Y10S73/04
摘要： Provided is a pressure sensor of semiconductor type. having a semiconductor diaphragm (41), wherein the diaphragm comprises at least one of thin wall parts (43) and at least one of thick wall parts (44), and defines therein recesses (42) formed in the lower surface of the diaphragm below the thin wall parts, piezoresistance elements (47, 48) are laid on the upper surface of the diaphragm near or in the thin wall parts, and a supporting member (45) is sealingly jointed to the thick wall parts (44) at the lower surface of the diaphragm, thereby the recesses (42) are sealed and confined so as to prevent high pressure fluid from blowing off when the thin wall part (43) is broken.

9. 发明授权

EP0908719B1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit 有权
标题翻译：用于定位样品和扫描探针显微镜以这样的表表单元
公开(公告)号：EP0908719B1
公开(公告)日：2007-05-30
申请号：EP98203380.5
申请日：1998-10-06
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G12B21/22 , G01B7/34
CPC分类号： G01Q10/02 , Y10S977/872

10. 发明公开

EP0913665A1 Fine movement mechanism and scanning probe microscope 有权
标题翻译： Rastersondenmikroskop mit Feinstellungsvorrichtung
公开(公告)号：EP0913665A1
公开(公告)日：1999-05-06
申请号：EP98203672.5
申请日：1998-10-30
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member (11), two fixed sections (120) fixed to this supporting member, two pairs of parallel-plate flexural sections (121a) disposed between the two fixed sections, an X fine movement mechanism (12), a Y fine movement mechanism (13) and a Z fine movement mechanism (14). The X fine movement mechanism has an X moving section (122) movable in an X direction, connected to each of the two fixed sections (120) through the two pairs of parallel-plate flexural sections (121a), and two X direction piezoelectric actuators (123) causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections (131a), a Y moving section (132) movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators (133) causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section (141) movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator (142) causing the Z moving section to move.
摘要翻译：精细运动机构单元由支撑构件（11）构成，固定在该支撑构件上的两个固定部（120），设置在两个固定部之间的两对平行板弯曲部（121a），X细微移动机构（12），Y精细机构（13）和Z精细机构（14）。 X精细机构具有能够沿着X方向移动的X移动部（122），通过两对平行板弯曲部（121a）与两对平行板弯曲部（121a）连接，两个X方向压电致动器（123）使X移动部移动。设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分（131a），Y移动部分（132），其沿Y方向移动，通过另外两对连接到X移动部分平行板弯曲部分和两个Y方向压电致动器（133），使Y移动部分相对于X移动部分移动。配置于Y移动部的Z细移动机构具有能够沿与X方向和Y方向正交的Z方向移动的Z移动部（141），Z方向压电致动器（142）使Z移动部移动。

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