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1. 发明授权

EP0913665B1 Scanning probe microscope with fine movement mechanism 有权
标题翻译：扫描探针显微镜以精细调节装置
公开(公告)号：EP0913665B1
公开(公告)日：2004-09-22
申请号：EP98203672.5
申请日：1998-10-30
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/04 , Y10S977/87

2. 发明授权

EP0908719B1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit 有权
标题翻译：用于定位样品和扫描探针显微镜以这样的表表单元
公开(公告)号：EP0908719B1
公开(公告)日：2007-05-30
申请号：EP98203380.5
申请日：1998-10-06
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G12B21/22 , G01B7/34
CPC分类号： G01Q10/02 , Y10S977/872

3. 发明公开

EP0913665A1 Fine movement mechanism and scanning probe microscope 有权
标题翻译： Rastersondenmikroskop mit Feinstellungsvorrichtung
公开(公告)号：EP0913665A1
公开(公告)日：1999-05-06
申请号：EP98203672.5
申请日：1998-10-30
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01B7/34 , G01N27/00
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member (11), two fixed sections (120) fixed to this supporting member, two pairs of parallel-plate flexural sections (121a) disposed between the two fixed sections, an X fine movement mechanism (12), a Y fine movement mechanism (13) and a Z fine movement mechanism (14). The X fine movement mechanism has an X moving section (122) movable in an X direction, connected to each of the two fixed sections (120) through the two pairs of parallel-plate flexural sections (121a), and two X direction piezoelectric actuators (123) causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections (131a), a Y moving section (132) movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators (133) causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section (141) movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator (142) causing the Z moving section to move.
摘要翻译：精细运动机构单元由支撑构件（11）构成，固定在该支撑构件上的两个固定部（120），设置在两个固定部之间的两对平行板弯曲部（121a），X细微移动机构（12），Y精细机构（13）和Z精细机构（14）。 X精细机构具有能够沿着X方向移动的X移动部（122），通过两对平行板弯曲部（121a）与两对平行板弯曲部（121a）连接，两个X方向压电致动器（123）使X移动部移动。设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分（131a），Y移动部分（132），其沿Y方向移动，通过另外两对连接到X移动部分平行板弯曲部分和两个Y方向压电致动器（133），使Y移动部分相对于X移动部分移动。配置于Y移动部的Z细移动机构具有能够沿与X方向和Y方向正交的Z方向移动的Z移动部（141），Z方向压电致动器（142）使Z移动部移动。

4. 发明公开

EP0935137A1 Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：EP0935137A1
公开(公告)日：1999-08-11
申请号：EP98203379.7
申请日：1998-10-06
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Ken, Murayama , Shirai, Takashi , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa , Nishigaki, Tsuyoshi
IPC分类号： G01N27/00 , G01B7/34 , H01J37/20
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q30/06 , H01J2237/20221 , Y10S977/872
摘要： The scanning probe microscope is provided with a probe tip (20) directed to a sample surface, an XYZ fine movement mechanism (18) for providing a relative positional change between the sample (16) and the probe tip, and a displacement detecting section (21) for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section (12) arranged on a standard surface of a microscope stage (11a), which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section (15) for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism (13) for moving the moving section in directions parallel to the standard surface.
摘要翻译：扫描探针显微镜具备：朝向试样表面的探针尖端（20）;用于提供试样（16）与探针针尖之间的相对位置变化的XYZ微动机构（18）;以及位移检测部（ 21）用于检测探针尖端的位移。扫描探针显微镜通过使用控制信号来测量样品的表面特性。该控制信号是在从位移检测部输出的信号上生成的，并且用于在样本和探针尖端之间产生的相互作用的状态与预定状态相同的同时，探针尖端扫描基于样本的表面关于XYZ微动机构的操作。此外，它包括设置在显微镜载物台（11a）的标准表面上的移动部分（12），该移动部分在上表面上具有样本并且基于静压导轨沿标准表面移动;高度位置控制部分（15），其用于选择性地向所述移动部分供应高压流体，以便执行所述静压引导并且控制所述移动部分到所述标准表面的高度位置;以及致动机构（13），其用于使所述移动部分在平行于标准表面的方向上。

5. 发明公开

EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit 有权
标题翻译：用于定位样品和扫描探针显微镜以这样的表表单元
公开(公告)号：EP0908719A1
公开(公告)日：1999-04-14
申请号：EP98203380.5
申请日：1998-10-06
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Shirai, Takashi , Murayama, Ken , Morimoto, Takafumi , Kuroda, Hiroshi , Onozato, Harumasa
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/02 , Y10S977/872
摘要： A stage unit used for moving a sample comprises a vertical stage (30) for moving a sample stand (13) in a vertical direction, a horizontal stage (10,20) for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table (11) and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs (36) having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.
摘要翻译：用于移动一个样品A级单元包括垂直级（30），用于在垂直方向上移动样品台上（13），用于在水平方向上移动的垂直阶段的水平阶段（10,20）。在阶段单元中，水平阶段被固定在表面表（11）和垂直级的水平滑动表面可滑动地布置在滑动面上。垂直级耦接与由板簧的装置具有在垂直方向上在水平方向上较强的刚性和弱刚性水平阶段（36）。仅由垂直级的级单元的整个刚性确定性所开采和不受所述部分的刚性的效果包括在水平阶段和驱动部的刚性，以各轴方向。台单元的刚性可以提高。仅由垂直阶段的刚性的台架单元的停顿刚性确定性开采。台单元的所有阶段都不会堆积，因此载物台部的高度可以降低尽可能低。

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