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1. 发明授权

EP1979913B1 VERFAHREN ZUM BETREIBEN EINES MESSSYSTEMS MIT EINEM RASTERSONDENMIKROSKOP UND MESSSYSTEM 有权转让
标题翻译：一种用于操作测量系统用探针显微镜和GRID测量系统
公开(公告)号：EP1979913B1
公开(公告)日：2016-07-27
申请号：EP06828723.4
申请日：2006-12-21
申请人： JPK Instruments AG
发明人： JÄHNKE, Torsten , HAGGERTY, Michael
IPC分类号： G01Q30/06 , G01Q40/00
CPC分类号： G01Q40/00 , G01Q30/06

2. 发明公开

EP2780726A4 METHOD AND APPARATUS FOR SIGNAL PATH EQUALIZATION IN A SCANNING ACOUSTIC MICROSCOPE 审中-公开
标题翻译：方法和装置SIGNALWEGENTZERRUNG在网格声显微镜
公开(公告)号：EP2780726A4
公开(公告)日：2015-07-15
申请号：EP12850596
申请日：2012-04-30
申请人： SONIX INC
发明人： GOPALAN SRIRAM , MCKEON JAMES C P
IPC分类号： G01S7/52 , B82Y35/00 , G01N29/06 , G01Q30/06 , G01S15/89
CPC分类号： G01S7/5205 , B82Y35/00 , G01N29/0681 , G01N29/44 , G01Q30/06 , G01S15/8938
摘要： A scanning acoustic microscope includes a signal processor and one or more signal paths. In operation, each signal path couples an ultrasonic transducer to the signal processor that processes signals received from the signal paths to produce an ultrasonic scan image. Each signal path has a response characteristic that includes a response characteristic of the ultrasonic transducer. In order to compensate for variations between the signal paths or variations between different transducers in the same signal path, at least one of the signal paths includes a signal path equalizer. The equalizer may be responsive to a set of equalization coefficients. The coefficients are selected such that the response characteristic of the signal path including the equalizer more closely matches a reference characteristic response. The equalizer may operate on a transmitted or received signal or be used to generate an ultrasonic pulse.

3. 发明授权

EP0847590B1 A SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT 失效
标题翻译：具有自动变化和方向探头网格探针显微镜
公开(公告)号：EP0847590B1
公开(公告)日：2009-11-18
申请号：EP96931396.4
申请日：1996-08-23
申请人： Veeco Instruments Inc.
发明人： YOUNG, James, M. , PRATER, Craig, B. , GRIGG, David, A. , MEYER, Charles, R. , HERTZOG, William, H. , GURLEY, John, A. , ELINGS, Virgil, B.
IPC分类号： H01J37/22 , G01B7/34 , G01N27/00
CPC分类号： G01Q70/02 , G01Q30/06 , Y10S977/85
摘要： A scanning probe microscope and method having automated exchange and precise alignment of probe, wherein one or more additional stored probes (4) for installation onto a probe mount (32) are stored in a storage cassette (22) or a wafer, a selected probe is aligned to a detection system (11), and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp (68) which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signal from the probe detection system or by determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

4. 发明公开

EP1662246A1 PROBE REPLACING METHOD FOR SCANNING PROBE MICROSCOPE 审中-公开
标题翻译： SONDENAUSTAUSCHVERFAHRENFÜRDAS RASTERSONDENMIKROSKOP
公开(公告)号：EP1662246A1
公开(公告)日：2006-05-31
申请号：EP04722442.3
申请日：2004-03-22
申请人： Hitachi Kenki Finetech Co., Ltd.
发明人： MURAYAMA, Ken , KENBO, Yukio , KUNITOMO, Yuuichi , HIROKI, Takenori, B101, Apurikottokandatsu , NAGANO, Yoshiyuki, A-201, Centralestate , MORIMOTO, Takafumi , KURENUMA, Toru , YANAGIMOTO, Hiroaki, 2-2-26,Inayoshihigashi , KURODA, Hiroshi, C-1401,2607-8, Shimoinayoshi , MIWA, Shigeru , FURUTANI, Takashi
IPC分类号： G01N13/16
CPC分类号： G01Q10/06 , G01Q30/06 , G01Q70/02
摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). The method has a first step for performing alignment between the cantilever mount and the cantilever cassette, selecting a cantilever from the cantilever cassette, and mounting the cantilever thus selected on the cantilever mount; and a second step for moving an optical microscope and setting the mounted cantilever in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.
摘要翻译：一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针置换方法和用于测量探针和样品之间的物理量的测量单元。扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。该方法具有第一步骤，用于在悬臂安装座和悬臂盒之间进行对准，从悬臂盒中选择悬臂，并将如此选择的悬臂安装在悬臂安装座上; 以及第二步骤，用于在将悬臂安装在扫描探针显微镜中之后，在视野中移动光学显微镜并将安装的悬臂设置在规定位置。在第二步骤中，提供了用于移动光学显微镜侧或悬臂侧并执行位置调整的步骤。

5. 发明授权

EP0843175B1 Scanning probe microscope and signal processing apparatus 失效
标题翻译：扫描探针显微镜和信号处理装置
公开(公告)号：EP0843175B1
公开(公告)日：2004-09-15
申请号：EP97203486.2
申请日：1997-11-10
申请人： HITACHI CONSTRUCTION MACHINERY CO., LTD.
发明人： Morimoto, Takafumi , Murayama, Ken , Husaka, Sumio
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/06 , G01Q20/02 , G01Q30/06 , G01Q60/38 , Y10S977/851 , Y10S977/852

6. 发明公开

EP0847590A4 A SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT 失效
标题翻译：具有自动变化和方向探头网格探针显微镜
公开(公告)号：EP0847590A4
公开(公告)日：2000-03-01
申请号：EP96931396
申请日：1996-08-23
申请人： DIGITAL INSTR INC
发明人： YOUNG JAMES M , PRATER CRAIG B , GRIGG DAVID A , MEYER CHARLES R , HERTZOG WILLIAM H , GURLEY JOHN A , ELINGS VIRGIL B
IPC分类号： G01Q10/02 , G01Q20/02 , G01Q30/06 , G01Q60/24 , G01Q70/02 , H01J37/22 , G01B7/34 , G01N27/00
CPC分类号： G01Q70/02 , G01Q30/06 , Y10S977/85
摘要： A scanning probe microscope and method having automated exchange and precise alignment of probe, wherein one or more additional stored probes (4) for installation onto a probe mount (32) are stored in a storage cassette (22) or a wafer, a selected probe is aligned to a detection system (11), and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp (68) which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signal from the probe detection system or by determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

7. 发明授权

EP0361932B1 Scanning tunnel-current-detecting device and method 失效
标题翻译：由隧道电流扫描的方法和检测器装置
公开(公告)号：EP0361932B1
公开(公告)日：1996-06-12
申请号：EP89309913.5
申请日：1989-09-28
申请人： CANON KABUSHIKI KAISHA
发明人： Yanagisawa, Yoshihiro , Sakai, Kunihiro , Kawade, Hisaaki
IPC分类号： G01B7/02 , G01B7/34 , G11B11/08
CPC分类号： G01Q60/16 , G01Q30/06 , G01Q70/04 , G01Q70/06 , G01Q80/00 , G11B9/1445 , Y10S977/837 , Y10S977/861 , Y10S977/873 , Y10S977/874

8. 发明公开

EP0674170A1 Inter-atomic measurement techniques 失效
标题翻译： Interatomares Messverfahren。
公开(公告)号：EP0674170A1
公开(公告)日：1995-09-27
申请号：EP95301891.8
申请日：1995-03-21
申请人： Ohara, Tetsuo
发明人： Ohara, Tetsuo
IPC分类号： G01N27/00 , G01B7/34
CPC分类号： G01Q10/06 , G01B7/003 , G01B7/34 , G01Q30/06 , Y10S977/851
摘要： A method of and apparatus for producing real-time continual nanometer scale positioning data of the location of sensing probe used with one of a scanning tunneling microscope, an atomic force microscope, or a capacitive or magnetic field-sensing system, for measuring the probe distance and the position relative to an atomic surface or other periodically undulating surface such as a grating or the like moving relatively with respect to the probe, and between which and the surface there exists a sensing field, through rapid oscillating of the probe under the control of sinusoidal voltages, and comparison of the phase and amplitude of the output sinusoidal voltages produced by current in the sensing field to provide positional signals indicative of the direction and distance off the apex of the nearest atom or undulation of the surface; and, where desired, feeding back such positional signals to control the relative movement of the probe and surface.
摘要翻译：用于生成与扫描隧道显微镜，原子力显微镜或电容或磁场感测系统中的一个一起使用的感测探头的位置的实时连续的纳米尺度定位数据的方法和装置，用于测量探针距离以及相对于原子表面或相对于探针相对移动的诸如光栅等的其它周期性起伏的表面的位置，并且在该表面和表面之间存在感测场，通过探针的控制下的快速振荡正弦电压，以及由感测场中的电流产生的输出正弦电压的相位和幅度的比较，以提供指示离表面的最近原子或起伏的顶点的方向和距离的位置信号; 并且在需要时反馈这种位置信号以控制探针和表面的相对运动。

9. 发明公开

EP0338083A1 Scanning tunneling microscope with means for correcting surface data 失效
标题翻译： ANALYSIERGERÄT。
公开(公告)号：EP0338083A1
公开(公告)日：1989-10-25
申请号：EP88908358.0
申请日：1988-09-22
申请人： HITACHI, LTD.
发明人： HOSAKA, Sumio , HOSOKI, Shigeyuki , TAKATA, Keiji , OHTAKE, Masatoshi , TOOYAMA, Hiroshi , KONDOU, Hitoshi
IPC分类号： G01B7/34 , G01N23/00 , H01J37/20 , H01J37/28
CPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/06 , G01Q60/16 , G11B9/1436 , G11B11/005 , G11B11/007 , Y10S977/852
摘要： A surface analyzer has a probe (1) which, while scanning the surface of a sample (2), is held close to the surface and so controlled by servo means that the current flowing between the probe (1) and the sample (2) becomes equal to a set value. Drive signals of the servo means are used to obtain information on the surface of the sample. This analyzer further includes means (11, 12) for correcting the obtained information by using the difference between the current value and the current value measured during the surface scanning with the probe (1).
ABSTRACT:
In an apparatus for measuring texture and characterization of the surface of a sample on the basis of the drive signal of a servo control means by allowing a probe-tip (1) to approach the sample (2) and subjecting the probe-tip (1) to servo control so that a current, which is generated by moving the probe-tip (1) on the sample surface and flows between the probe-tip (1) and the sample (2), becomes constant, the present invention discloses a surface metrological apparatus comprising means (11, 12) for correcting the texture and characterization of the sample by use of a current error of the measured value of the current described above from the set current value.
摘要翻译：表面分析仪具有探针（1），其在扫描样品（2）的表面时保持靠近表面。探头由伺服控制，使探头（1）和样品（2）之间流动的电流等于设定值。伺服驱动信号用于获取样品表面的信息。该分析器还包括用于校正该电话的电路（11,12）。通过使用探针（1）在表面扫描期间测量的当前值和当前值之间的差异来获得信息。

10. 发明公开

EP3111237A1 PRECISE PROBE PLACEMENT IN AUTOMATED SCANNING PROBE MICROSCOPY SYSTEMS 无效
标题翻译： PRÄZISESONDENPOSITIONIERUNG在自动化RASERSONDENMIKROSKOPIESYSTEMEN
公开(公告)号：EP3111237A1
公开(公告)日：2017-01-04
申请号：EP15752506.4
申请日：2015-02-24
申请人： Bruker Nano, Inc.
发明人： OSBORNE, Jason , MILLIGAN, Eric , LOPEZ, Andrew , WU, Robert , HAND, Sean , FONOBEROV, Vladimir
IPC分类号： G01Q10/06 , G01Q60/16 , G01Q70/02
CPC分类号： G01Q10/02 , G01Q10/065 , G01Q30/06
摘要： A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.
摘要翻译：扫描探针显微镜（SPM）系统及相关方法。所述SPM系统具有适于与样本的纳米尺度特征相互作用以及在目标区域内扫描以产生所述目标区域的三维图像的所述探针，所述系统根据所述样本维持所述样本感兴趣的多个特征的位置信息特定于样本的坐标系，其中所述SPM系统被配置为根据SPM坐标系来调整所述探针相对于所述样本的定位，所述SPM系统还被配置为管理所述样本特定坐标系和所述SPM之间的动态关系通过确定样本特定坐标系和SPM坐标系之间的一组对准误差来对坐标系进行校正，并对SPM坐标系进行校正以补偿确定的对准误差。

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